JP2002144211A - ワイヤソー加工装置 - Google Patents

ワイヤソー加工装置

Info

Publication number
JP2002144211A
JP2002144211A JP2000373530A JP2000373530A JP2002144211A JP 2002144211 A JP2002144211 A JP 2002144211A JP 2000373530 A JP2000373530 A JP 2000373530A JP 2000373530 A JP2000373530 A JP 2000373530A JP 2002144211 A JP2002144211 A JP 2002144211A
Authority
JP
Japan
Prior art keywords
wire
slurry
cutting
wire guide
wire saw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000373530A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002144211A5 (enExample
Inventor
Takaya Watanabe
隆彌 渡邉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2000373530A priority Critical patent/JP2002144211A/ja
Publication of JP2002144211A publication Critical patent/JP2002144211A/ja
Publication of JP2002144211A5 publication Critical patent/JP2002144211A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2000373530A 2000-11-02 2000-11-02 ワイヤソー加工装置 Pending JP2002144211A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000373530A JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000373530A JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Publications (2)

Publication Number Publication Date
JP2002144211A true JP2002144211A (ja) 2002-05-21
JP2002144211A5 JP2002144211A5 (enExample) 2005-11-04

Family

ID=18842899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000373530A Pending JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Country Status (1)

Country Link
JP (1) JP2002144211A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102079113A (zh) * 2010-11-25 2011-06-01 保定天威英利新能源有限公司 解决硅锭破方质量问题的设备和方法
EP2347845A1 (de) * 2010-01-26 2011-07-27 Schott Solar AG Drahtführungsrolle zur Verwendung in Drahtsägen
JP2012101310A (ja) * 2010-11-09 2012-05-31 Yasunaga Corp ワイヤソー装置及びこれを用いたウエハの製造方法
JP2023538494A (ja) * 2020-07-21 2023-09-08 ジルトロニック アクチエンゲゼルシャフト ワークピースから複数のスライスを同時にスライスするための方法および装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2347845A1 (de) * 2010-01-26 2011-07-27 Schott Solar AG Drahtführungsrolle zur Verwendung in Drahtsägen
JP2012101310A (ja) * 2010-11-09 2012-05-31 Yasunaga Corp ワイヤソー装置及びこれを用いたウエハの製造方法
CN102079113A (zh) * 2010-11-25 2011-06-01 保定天威英利新能源有限公司 解决硅锭破方质量问题的设备和方法
JP2023538494A (ja) * 2020-07-21 2023-09-08 ジルトロニック アクチエンゲゼルシャフト ワークピースから複数のスライスを同時にスライスするための方法および装置
US12311577B2 (en) 2020-07-21 2025-05-27 Siltronic Ag Method and apparatus for simultaneously slicing a multiplicity of slices from a workpiece
JP7753336B2 (ja) 2020-07-21 2025-10-14 ジルトロニック アクチエンゲゼルシャフト ワークピースから複数のスライスを同時にスライスするための方法および装置

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