JP2002119908A - Paste applicator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a paste applicator that can draw a desired paste pattern by raising accuracy in positioning a substrate and a nozzle head. SOLUTION: The paste applicator is adapted so that it may draw a desirably shaped pattern on a substrate by mounting the substrate on a table so that it may be opposite to the lower plate of a nozzle head having a row of a plurality of nozzle holes at a specified pitch so as to cover the entire width of the substrate and varying the relative position between the nozzle head and the substrate while applying the paste held in a paste holder from the nozzle holes into grooves formed between ribs on the substrate. The inclination of the direction in which the nozzle holes opposite to the extension of the grooves is adjusted on the basis of an alignment mark of the substrate in the position calculated from the nozzle hole position that is the representative from the nozzle holes at least before coating with a coating fluid, the center of the groove situated substantially in the middle of the direction in which the grooves of the substrate are arranged is allowed to coincide with the center of the nozzle hole situated in the center of the arrangement of the nozzle holes, and the coating is thereafter started.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating liquid coating apparatus for coating a coating liquid, such as a paste, on a substrate, such as glass, in which a coating position is predetermined by a groove or the like, and more particularly to a light emitting device for a plasma display. The present invention relates to a paste coating device that enables high precision and low cost of a substrate.

[0002]

2. Description of the Related Art Conventionally, when applying paste to a groove formed in a stripe shape on the surface of a substrate, the center position of the nozzle hole of the nozzle head and the center position of the groove are aligned, and then the substrate and the nozzle are aligned. The head is relatively moved so that the paste is applied to the grooves.

[0003] In the above-described alignment, usually, a displacement between a nozzle hole and a groove is detected based on an alignment mark formed at an end of the substrate, and the displacement is corrected by moving the substrate and / or the nozzle head. This is done by doing.

Note that a slight shift occurs between the actual application position defined by the groove and the application position calculated based on the alignment mark. Also, a slight shift occurs in the arrangement position of the nozzle holes of the nozzle head. However, if these deviations fall within a predetermined allowable value range, positioning by the alignment mark is established.

[0005]

However, in recent years,
In a situation where the size of the substrate is becoming larger and the width of the groove is being narrowed, the above-mentioned allowable value range is becoming smaller and smaller, and there is a possibility that desired positioning accuracy cannot be obtained by positioning using only the alignment marks.

SUMMARY OF THE INVENTION An object of the present invention is to provide a paste coating apparatus capable of manufacturing a high quality light emitting substrate for a plasma display and the like by accurately drawing and forming a desired paste pattern by improving the positioning accuracy of a substrate and a nozzle head. It is in.

[0007]

In order to solve the above-mentioned problems, a paste coating apparatus according to the present invention comprises a lower surface plate of a nozzle head in which a plurality of nozzle holes are formed in a line at a predetermined pitch over the entire width of a substrate. The substrate is placed on the table so as to face the nozzle, and the paste stored in the paste storage unit is applied to the groove formed between the nozzle hole and the rib on the substrate while the relative position between the nozzle head and the substrate is maintained. In a paste application device that draws and forms a paste pattern of a desired shape on the substrate by changing the relationship, at least before the application of the coating liquid, a position calculated from a position of a representative nozzle hole in the nozzle holes After adjusting the inclination of the arrangement direction of the nozzle holes with respect to the extending direction of the groove based on the alignment mark of the substrate, the center of the groove substantially located at the center in the arrangement direction of the groove of the substrate is further adjusted. It is aligned with the center of the nozzle hole located in the center of the arrangement direction of the nozzle holes, consisting of those characterized by starting the application.

[0008] Further, the paste coating apparatus according to the present invention comprises:
While applying the paste, the center of the groove located at the center in the groove arrangement direction can be aligned with the center of the nozzle hole located at the center in the nozzle arrangement direction. If the above-described positioning is performed while applying the paste, the paste can be surely applied only to predetermined grooves.

The paste application apparatus according to the present invention can be widely applied to fields such as a light emitting substrate for a plasma display and an optical filter printed circuit board, but is particularly suitable as an apparatus for applying a paste to a light emitting substrate for a plasma display. It is.

In the paste application apparatus according to the present invention, the inclination of the arrangement direction of the nozzle holes of the nozzle head with respect to the extending direction of the grooves is corrected before applying the paste to at least the grooves of the substrate. The nozzle head can be accurately positioned so that the arrangement direction of the nozzle holes is orthogonal to the setting direction, that is, the paste application direction. Further, since the center of the groove located at the center in the arrangement direction of the grooves of the substrate and the center of the nozzle hole located at the center in the arrangement direction of the corresponding nozzle holes are aligned, the alignment in the groove arrangement direction is performed. The displacement between the center of the groove at the end and the center of the nozzle hole at the end in the arrangement direction of the nozzle holes can be minimized. Therefore, the desired positional relationship between the substrate and the nozzle head can be set, so that the paste can be reliably applied only to predetermined grooves.

The effect of the present invention can be further improved by applying the paste while aligning the center of the groove located at the center and the center of the nozzle hole.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a paste coating apparatus according to the present invention will be described below with reference to the drawings. FIG. 1 shows a paste application apparatus according to one embodiment of the present invention. In the figure, reference numeral 1 denotes a substrate (in this embodiment, a light emitting substrate for a plasma display). The coating device has X slide rails 3a and 3b extending on the machine base 2 in the X-axis direction. An X slide table 4 is provided on the X slide rails 3a and 3b so as to slide in the X axis direction. A drive shaft 5 for sliding the table 4 in the X-axis direction is engaged with the X slide table 4. X slide table 4
Is slid in the X-axis direction by the X-axis motor 6. The substrate 1 is positioned on the X slide table 4 and is detachably supported by suction.

Above the machine base 2, a gate-shaped supporting machine base 7 is provided so as to straddle the machine base 2. The supporting machine base 7 has a Y slide rail 8 extending in the Y-axis direction on a front side surface 7a.
a and 8b. A Y slide table 9 is provided on the Y slide rails 8a and 8b so as to be slidable in the Y axis direction. A drive shaft 10 for sliding the table 9 in the Y-axis direction is provided on the Y slide table 9.
Are engaged. The Y slide table 9 is slid in the Y axis direction by a Y axis motor 11. The X slide table 4, the Y slide table 9, and the like constitute a first moving unit 29a.

On the Y slide table 9, Z slide rails 12a and 12b extending in the Z axis direction are provided. A Z slide table 13 is provided on the Z slide rails 12a and 12b so as to be slidable in the Z axis direction. A drive shaft 14 for sliding the table 13 in the Z-axis direction is engaged with the Z slide table 13. The Z slide table 13 is slid by the Z axis motor 15 in the Z axis direction, that is, the direction in which the nozzle head 18 approaches and separates from the substrate 1. Thus, the second moving means 29b is configured.

A nozzle head 18 is mounted on the Z slide table 13. A position sensor 17 for detecting the position of the nozzle head 18 in the Y-axis direction is attached to the Y slide table 9. Position sensor 1
Reference numeral 7 is movably supported on a sensor support shaft 16 provided on the upper surface of the support machine base 7 in the Y-axis direction. The Y-axis motor 11 is connected to Y-axis direction speed control means 20 for changing the moving speed of the Y slide table 9.

The nozzle head 18 is moved in the Y-axis direction in FIG. 1, and a plurality of nozzle holes 2 provided at predetermined intervals on the lower surface plate 32 of the coating head 18 over the entire width of the substrate.
The paste is discharged from the substrate 8 to form a plurality of rows of coating stripes 19 on the substrate 1.

The Z slide table 13 is provided with a CCD camera 22a. On the other hand, a CCD camera 22b is attached to the X slide table 4.
The nozzle head 18 is configured to be rotatable around a θ axis 41 perpendicular to the surface of the substrate 1 as shown in FIGS. That is, two alignment marks 42 on the substrate 1 are detected by the camera 22a, the substrate coordinates and the substrate inclination angle are calculated, and the head 18 is rotated around the θ-axis 41 in accordance with the coordinates, thereby forming the grooves 21. The nozzle head 1 is arranged such that the extending direction is orthogonal to the arrangement direction of the nozzle holes 28.
8 is positioned. This positioning is performed by setting the representative nozzle hole 28 (the central nozzle hole 28a in the nozzle hole arrangement direction in the present embodiment) of the nozzle holes 28 and the origin (preferably the center) of the CCD camera 22a.
This is performed by associating each position with b.

The CCD camera 22a mounted on the Z slide table 13 captures an image of the central groove 21 in the substrate 1. The image from the camera 22a is processed by the image processing unit 23, and then sent to the X-axis position control unit 24 as data. The X-axis position control unit 24 moves the X slide table 4 based on the relationship between the camera 22a and the nozzle hole 28a, and the center of the center groove 21 and the center of the center nozzle hole 28a corresponding to the center groove 21 substantially match. (FIG. 8). That is, as shown in FIG. 5, the difference ΔX between the image of the groove 21 at the center of the substrate 1 and the center of the cursor 50 for image processing is corrected by moving the X slide table 4 in the X-axis direction. .

FIG. 6 is a schematic longitudinal sectional view of a control device for supplying a coating liquid to the nozzle head 18 of the coating device shown in FIG. In FIG. 6, the nozzle head 18 is composed of a housing 31, and a plurality of nozzle holes 28 for discharging a plurality of coating liquids are formed in the lower surface plate 32 of the housing 31 at predetermined intervals in a line over the entire width of the substrate. Has been established. The space 33 inside the housing 31 is formed by a coating liquid storage section 34 in which the coating liquid 30 (phosphor paste 27) is stored, and a gas space 35 located above the coating liquid storage section 34. A gas pressure passage 37 is provided in the upper surface plate 36 of the housing 31, and one end of a gas pressure passage 38 formed of a pipe is connected to the gas pressure passage 37.
The other end of the gas pressure passage 38 is opened to a gas pressure source 40 having a pressure maintained at a set pressure. Opening / closing means 39 including a direction switching valve is provided in the gas pressure conducting path 38, and the gas space 3 is opened and closed by switching the opening / closing means 39.
5 and the gas pressure source 40 are communicated and shut off. The opening / closing means 39 detects the position of the nozzle hole 28 of each nozzle head 18 and the relative position of the substrate 1, and the opening / closing timing is controlled by a position detection / discharge control means (not shown) for controlling the timing of the opening / closing means 39. It has become.

FIG. 7 shows the details of the groove 21 formed on the substrate 1 as viewed from above. The groove 21 has a phosphor paste 27
And the grooves 21 formed at a predetermined pitch between the partition walls (ribs) 25 are interrupted at the end of the display unit and the non-display unit 2
No. 6 is not formed. In the present embodiment, FIG.
As shown in FIG. 5, the coating liquid of the same color can be applied to every third groove 21. Therefore, the pitch of the nozzle holes 28 is three times the pitch of the partition walls 25.

Next, an example of a coating method using the coating apparatus according to the present invention will be described. FIG. 9 shows time on the horizontal axis, state A of the set pressure of the gas pressure source 40, state B of the opening and closing of the opening and closing means 39, state C of the moving speed of the nozzle head 18 in the Y-axis direction, and A coating apparatus showing a state D of movement of the nozzle head 18 in the Z-axis direction (a method in which the head 18 approaches and separates from the substrate 1), and a state E of movement of the X slide table 4 in the X-axis direction (array direction of grooves). 6 is a chart showing a control state of the control system. In FIG. 9, the process sequentially shifts from left to right. First, the inclination of the nozzle holes 28 in the arrangement direction with respect to the extending direction of the grooves 21 is corrected by rotating the head 18 in advance. Further, the center of the central groove 21 and the center of the corresponding central nozzle hole 28a are matched. Thereafter, the movement of the nozzle head 18 in the Y-axis direction is started (movement start time point 60), and when the nozzle 21 reaches the application start end of the groove 21, the opening / closing means 39 is opened (opening / closing means opening time point 61), and the head 18 is moved to Y position. The velocity V in the axial direction, that is, in the direction in which the groove 21 extends.
_The paste is applied while moving at ₀ . And
The opening / closing means 39 is closed shortly before the coating end of the groove 21 (opening / closing means closing point 62). Next, the movement of the nozzle head 18 is stopped (stop moving point 63), further, the coating head 18 Z ₀ is moved to the Z ₁ position from the position the head 18 from the substrate 1 are separated in the Z-axis direction (movement start point 64).

Further, in the paste applying apparatus according to the present invention, even when the nozzle head 18 is moved in the Y-axis direction to apply the paste 27, the center of the central nozzle hole 28a is occasionally based on the image of the camera 22a. And the center of the center groove 21 is aligned.

In the paste applying apparatus according to the present invention, before the paste 27 is applied to the groove 21 of the substrate 1, the inclination of the nozzle head 18 with respect to the arrangement direction of the nozzle holes 28 and the extending direction of the groove 21 is corrected. Therefore, the nozzle head 18 can be accurately positioned in the direction in which the grooves 21 extend, that is, in the direction in which the arrangement direction of the nozzle holes 28 is orthogonal to the paste application direction. Further, the center of the groove 21 located at the center in the arrangement direction of the grooves 21 of the substrate 1 and the nozzle hole 28 located at the center of the corresponding nozzle hole 28 in the arrangement direction.
Since the alignment with the center of “a” is performed, the displacement between the center of the groove 21 at the end in the arrangement direction of the groove and the center of the nozzle hole 28 at the end in the arrangement direction of the nozzle hole 28 is minimized. can do. Therefore, a desired positional relationship between the substrate 1 and the nozzle head 18 can be set, so that the paste 27 can be surely applied only to the predetermined groove 21.

The center of the groove 21 located at the center and the center of the nozzle hole 28a are aligned with the paste 2
7, the paste 27 can be applied to only the predetermined groove 21 reliably even when the groove 21 on the substrate 1 has some undulations, for example.

[0025]

As described above, when using the paste coating apparatus of the present invention, the inclination of the nozzle head is corrected so that the extending direction of the groove of the substrate and the extending direction of the nozzle hole of the nozzle head are orthogonal to each other. Furthermore, since the center of the central groove in the arrangement direction of the grooves and the center of the central nozzle hole in the arrangement direction of the nozzle holes are aligned, the center of the grooves and the center of the nozzle holes at both ends in the arrangement direction are aligned. Can be minimized. Therefore, the desired positional relationship between the substrate and the nozzle head can be constantly maintained while improving the positioning accuracy between the substrate and the nozzle head, so that a desired paste pattern can be accurately drawn and formed on the substrate.

[Brief description of the drawings]

FIG. 1 is a perspective view of a paste application device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a positional relationship between a substrate and a nozzle head of the apparatus shown in FIG.

FIG. 3 is a plan view showing a positional relationship between a groove of a substrate and a nozzle head of the apparatus of FIG.

FIG. 4 is a schematic configuration diagram of the vicinity of a nozzle head of the apparatus of FIG. 1 as viewed from the X-axis direction.

FIG. 5 is a schematic diagram showing an image of a groove and a cursor for image processing.

FIG. 6 is a schematic vertical sectional view of a control device for supplying a coating liquid to a nozzle head of the apparatus of FIG. 1;

FIG. 7 is a schematic view of a groove on a substrate as viewed from above.

FIG. 8 is a schematic diagram showing a positional relationship between a nozzle hole and a groove.

FIG. 9 is a chart illustrating an example of a control state of the apparatus of FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate to be coated 2 Machine stand 3a, 3b X slide rail 4 X slide table 5 Drive shaft 6 X axis motor 7 Supporting machine base 7a Side surface 8a, 8b Y slide rail 9 Y slide table 10 Drive shaft 11 Y axis motor 12a, 12b Z slide rail 13, 13 'Z slide table 14, 14' Drive shaft 15, 15 'Z axis motor 16 Sensor support shaft 17 Position sensor 18 Nozzle head 19 Coating stripe 20 Y axis direction speed control means 21 Groove 22a, 22b CCD camera 23 Image position processing unit 24 X-axis position control unit 25 Partition (rib) 26 Non-display unit 27 Phosphor paste 28 Nozzle hole 28a Representative nozzle hole 29a First moving means 29b Second moving means 30 Coating liquid 31 housing 32 bottom plate 33 space 34 coating liquid storage section 35 gas space 36 Face plate 37 Gas pressure conducting hole 38 Gas pressure conducting path 39 Opening / closing means 40 Gas pressure source 41 θ axis 42 Alignment mark 50 Cursor 55 Wiping head 56 Spring 60 Application head Y axis movement start time 61 Opening / closing means opening time 62 Opening / closing means closing time 63 Dispensing head movement stop point 64 Dispensing head separation start point

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasuki Shimizu 1-1-1, Sonoyama, Otsu-shi, Shiga F-term in Shiga Plant of Toray Co., Ltd. (Reference) 4F041 AA05 AA16 AB01 BA05 BA13 BA23 BA56 4F042 AA06 BA08 BA10 CB03

Claims (3)

[Claims] A plurality of nozzle holes extending over the entire width of the substrate;
The substrate is placed on the table so as to face the lower surface plate of the nozzle head that is bored in a line at a predetermined pitch, and the paste stored in the paste storage section is formed between the nozzle holes and the ribs on the substrate. In a paste coating apparatus that draws and forms a paste pattern of a desired shape on the substrate by changing the relative positional relationship between the nozzle head and the substrate while coating the groove, the nozzle hole is formed at least before the application of the coating liquid. After adjusting the inclination of the arrangement direction of the nozzle holes with respect to the extending direction of the groove based on the alignment mark of the substrate at the position calculated from the position of the representative nozzle hole in, further,
The coating is started by substantially aligning the center of the groove located at the center in the arrangement direction of the grooves of the substrate with the center of the nozzle hole located at the center in the arrangement direction of the nozzle holes. Liquid coating device. 2. A paste coating apparatus for aligning a center of a groove substantially located at a center in a direction in which grooves of a substrate are arranged and a center of a nozzle hole positioned in a center of a direction in which nozzle holes are arranged during coating. . 3. The paste coating apparatus according to claim 1, wherein said substrate is a light emitting substrate for a plasma display.