JP2002118158A5 - - Google Patents
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- Publication number
- JP2002118158A5 JP2002118158A5 JP2001210150A JP2001210150A JP2002118158A5 JP 2002118158 A5 JP2002118158 A5 JP 2002118158A5 JP 2001210150 A JP2001210150 A JP 2001210150A JP 2001210150 A JP2001210150 A JP 2001210150A JP 2002118158 A5 JP2002118158 A5 JP 2002118158A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- defect inspection
- circuit pattern
- negative potential
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000007547 defect Effects 0.000 claims 13
- 238000007689 inspection Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 8
- 238000010894 electron beam technology Methods 0.000 claims 7
- 239000002245 particle Substances 0.000 claims 7
- 230000005684 electric field Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001210150A JP2002118158A (ja) | 1996-03-05 | 2001-07-11 | 回路パターンの検査方法及び検査装置 |
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7524396 | 1996-03-05 | ||
| JP8-141341 | 1996-06-04 | ||
| JP14134196 | 1996-06-04 | ||
| JP31037896 | 1996-11-21 | ||
| JP8-310378 | 1996-11-21 | ||
| JP3347697 | 1997-02-18 | ||
| JP9-33476 | 1997-02-18 | ||
| JP8-75243 | 1997-02-18 | ||
| JP2001210150A JP2002118158A (ja) | 1996-03-05 | 2001-07-11 | 回路パターンの検査方法及び検査装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04523497A Division JP3791095B2 (ja) | 1996-03-05 | 1997-02-28 | 回路パターンの検査方法及び検査装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007000916A Division JP4274247B2 (ja) | 1996-03-05 | 2007-01-09 | 回路パターンの検査方法及び検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002118158A JP2002118158A (ja) | 2002-04-19 |
| JP2002118158A5 true JP2002118158A5 (enrdf_load_html_response) | 2005-02-03 |
Family
ID=27521527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001210150A Withdrawn JP2002118158A (ja) | 1996-03-05 | 2001-07-11 | 回路パターンの検査方法及び検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002118158A (enrdf_load_html_response) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4515020B2 (ja) * | 2002-09-20 | 2010-07-28 | 大日本印刷株式会社 | 擬似ｓｅｍ画像データの生成方法およびフォトマスクの欠陥検査方法 |
| JP2006127903A (ja) * | 2004-10-28 | 2006-05-18 | Applied Materials Inc | 走査型電子顕微鏡及び試料観察方法 |
| JP4320308B2 (ja) * | 2005-03-15 | 2009-08-26 | 株式会社ルネサステクノロジ | 欠陥検査方法 |
| JP4790324B2 (ja) * | 2005-06-15 | 2011-10-12 | 株式会社日立ハイテクノロジーズ | パターン欠陥検査方法および装置 |
| JP2007110087A (ja) | 2005-09-13 | 2007-04-26 | Hitachi High-Technologies Corp | 電子線装置及び電子線照射パターン生成方法 |
| JP2007109490A (ja) * | 2005-10-13 | 2007-04-26 | Jeol Ltd | 荷電粒子線装置 |
| JP5058489B2 (ja) * | 2006-01-25 | 2012-10-24 | 株式会社荏原製作所 | 試料表面検査装置及び検査方法 |
| TWI397096B (zh) | 2006-01-25 | 2013-05-21 | Ebara Corp | 試料表面檢查方法及檢查裝置 |
| JP2007212288A (ja) * | 2006-02-09 | 2007-08-23 | Toshiba Corp | パターン検査方法、パターン検査装置およびプログラム |
| WO2008149461A1 (ja) | 2007-06-08 | 2008-12-11 | Advantest Corporation | 荷電粒子線検査装置及び荷電粒子線検査方法 |
| JP2009099540A (ja) * | 2007-09-27 | 2009-05-07 | Hitachi High-Technologies Corp | 試料の検査，測定方法、及び走査電子顕微鏡 |
| JP5228080B2 (ja) * | 2011-05-11 | 2013-07-03 | 株式会社日立ハイテクノロジーズ | パターン欠陥検査方法および装置 |
| KR102632283B1 (ko) * | 2018-11-30 | 2024-02-02 | 주식회사 히타치하이테크 | 하전 입자선 장치 |
| JP6954963B2 (ja) * | 2019-09-09 | 2021-10-27 | 日本電子株式会社 | ３次元積層造形方法及び３次元積層造形装置 |
| CN117637417A (zh) * | 2024-01-24 | 2024-03-01 | 电子科技大学 | 一种使用光阑结构进行辅助聚焦的微焦点电子枪 |
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2001
- 2001-07-11 JP JP2001210150A patent/JP2002118158A/ja not_active Withdrawn