JPH10223169A5 - - Google Patents

Info

Publication number
JPH10223169A5
JPH10223169A5 JP1997020308A JP2030897A JPH10223169A5 JP H10223169 A5 JPH10223169 A5 JP H10223169A5 JP 1997020308 A JP1997020308 A JP 1997020308A JP 2030897 A JP2030897 A JP 2030897A JP H10223169 A5 JPH10223169 A5 JP H10223169A5
Authority
JP
Japan
Prior art keywords
specimen
magnetic field
scanning
electromagnetic lens
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997020308A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10223169A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9020308A priority Critical patent/JPH10223169A/ja
Priority claimed from JP9020308A external-priority patent/JPH10223169A/ja
Priority to US09/017,736 priority patent/US5981947A/en
Priority claimed from US09/017,736 external-priority patent/US5981947A/en
Publication of JPH10223169A publication Critical patent/JPH10223169A/ja
Publication of JPH10223169A5 publication Critical patent/JPH10223169A5/ja
Pending legal-status Critical Current

Links

JP9020308A 1997-02-03 1997-02-03 走査試料像表示装置，走査試料像表示方法，マーク検出方法および電子線露光装置 Pending JPH10223169A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9020308A JPH10223169A (ja) 1997-02-03 1997-02-03 走査試料像表示装置，走査試料像表示方法，マーク検出方法および電子線露光装置
US09/017,736 US5981947A (en) 1997-02-03 1998-02-03 Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9020308A JPH10223169A (ja) 1997-02-03 1997-02-03 走査試料像表示装置，走査試料像表示方法，マーク検出方法および電子線露光装置
US09/017,736 US5981947A (en) 1997-02-03 1998-02-03 Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods

Publications (2)

Publication Number Publication Date
JPH10223169A JPH10223169A (ja) 1998-08-21
JPH10223169A5 true JPH10223169A5 (enrdf_load_html_response) 2004-12-24

Family

ID=26357230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9020308A Pending JPH10223169A (ja) 1997-02-03 1997-02-03 走査試料像表示装置，走査試料像表示方法，マーク検出方法および電子線露光装置

Country Status (1)

Country Link
JP (1) JPH10223169A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6177817B2 (ja) 2015-01-30 2017-08-09 松定プレシジョン株式会社 荷電粒子線装置及び走査電子顕微鏡
JP6462729B2 (ja) * 2015-01-30 2019-01-30 松定プレシジョン株式会社 荷電粒子線装置及び走査電子顕微鏡
KR101988189B1 (ko) 2015-12-03 2019-06-11 마쯔사다 프리지션 인코포레이티드 하전 입자선 장치 및 주사 전자 현미경

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