JP2002106826A5 - - Google Patents

Download PDF

Info

Publication number
JP2002106826A5
JP2002106826A5 JP2000294632A JP2000294632A JP2002106826A5 JP 2002106826 A5 JP2002106826 A5 JP 2002106826A5 JP 2000294632 A JP2000294632 A JP 2000294632A JP 2000294632 A JP2000294632 A JP 2000294632A JP 2002106826 A5 JP2002106826 A5 JP 2002106826A5
Authority
JP
Japan
Prior art keywords
combustion
flame
exhaust gas
gas
burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000294632A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002106826A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000294632A priority Critical patent/JP2002106826A/ja
Priority claimed from JP2000294632A external-priority patent/JP2002106826A/ja
Priority to DE60025933T priority patent/DE60025933T2/de
Priority to US10/111,382 priority patent/US6736635B1/en
Priority to EP00971718A priority patent/EP1227275B1/en
Priority to PCT/JP2000/007691 priority patent/WO2001033141A1/ja
Priority to KR1020027005611A priority patent/KR100729253B1/ko
Priority to TW090120453A priority patent/TW542886B/zh
Priority to EP01956985A priority patent/EP1312860A4/en
Priority to KR10-2003-7002463A priority patent/KR20030024892A/ko
Priority to PCT/JP2001/007136 priority patent/WO2002016830A1/ja
Priority to US10/362,172 priority patent/US20040028590A1/en
Publication of JP2002106826A publication Critical patent/JP2002106826A/ja
Priority to US10/821,980 priority patent/US7112060B2/en
Publication of JP2002106826A5 publication Critical patent/JP2002106826A5/ja
Pending legal-status Critical Current

Links

JP2000294632A 1999-11-02 2000-09-27 燃焼式排ガス処理装置 Pending JP2002106826A (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP2000294632A JP2002106826A (ja) 2000-09-27 2000-09-27 燃焼式排ガス処理装置
DE60025933T DE60025933T2 (de) 1999-11-02 2000-11-01 Brennvorrichtung zur behandlung von abgas
US10/111,382 US6736635B1 (en) 1999-11-02 2000-11-01 Combustor for exhaust gas treatment
EP00971718A EP1227275B1 (en) 1999-11-02 2000-11-01 Combustor for exhaust gas treatment
PCT/JP2000/007691 WO2001033141A1 (fr) 1999-11-02 2000-11-01 Appareil de combustion pour le traitement de gaz d'emission
KR1020027005611A KR100729253B1 (ko) 1999-11-02 2000-11-01 배기가스처리용 연소기
US10/362,172 US20040028590A1 (en) 2000-08-22 2001-08-21 Method and device for combustion type exhaust gas treatment
TW090120453A TW542886B (en) 2000-08-22 2001-08-21 Method and device for combustion type exhaust gas treatment
EP01956985A EP1312860A4 (en) 2000-08-22 2001-08-21 METHOD AND DEVICE FOR COMBUSTION TREATMENT OF EXHAUST GASES
KR10-2003-7002463A KR20030024892A (ko) 2000-08-22 2001-08-21 연소식 배기가스처리방법 및 장치
PCT/JP2001/007136 WO2002016830A1 (fr) 2000-08-22 2001-08-21 Procede et dispositif de traitement par combustion des gaz d'echappement
US10/821,980 US7112060B2 (en) 1999-11-02 2004-04-12 Burner for treating waste gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000294632A JP2002106826A (ja) 2000-09-27 2000-09-27 燃焼式排ガス処理装置

Publications (2)

Publication Number Publication Date
JP2002106826A JP2002106826A (ja) 2002-04-10
JP2002106826A5 true JP2002106826A5 (ko) 2005-02-24

Family

ID=18777194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000294632A Pending JP2002106826A (ja) 1999-11-02 2000-09-27 燃焼式排ガス処理装置

Country Status (1)

Country Link
JP (1) JP2002106826A (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
JP4619798B2 (ja) * 2005-01-14 2011-01-26 日本パイオニクス株式会社 有害ガスの浄化装置
JP4522895B2 (ja) * 2005-03-16 2010-08-11 日鉱金属株式会社 排ガス洗浄冷却塔
KR20110048557A (ko) * 2006-09-26 2011-05-11 가부시키가이샤 신코간교오솔루션 가스화 용해로의 슬러그 염기도의 조정방법 및 그에 대한 장치
CN102257324B (zh) * 2009-12-30 2013-03-06 航天长征化学工程股份有限公司 火焰检测装置
JP6151945B2 (ja) * 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ
US9023303B2 (en) * 2013-04-15 2015-05-05 Airgard, Inc. Extended or multiple reaction zones in scrubbing apparatus
JP6659461B2 (ja) * 2016-05-23 2020-03-04 株式会社荏原製作所 排ガス処理装置
KR102020497B1 (ko) * 2017-11-07 2019-09-10 주식회사 포스코 자외선 감지기

Similar Documents

Publication Publication Date Title
EP1227275B1 (en) Combustor for exhaust gas treatment
EP1193443B1 (en) Combustion type waste gas treatment system
EP1312860A1 (en) Method and device for combustion type exhaust gas treatment
TWI442007B (zh) 有害物質之燃燒破壞
KR100500787B1 (ko) 연소식유해물질제거장치
JP6153754B2 (ja) 除害機能付真空ポンプ
JPH0642722A (ja) 高温腐食性環境の低ＮＯｘでの酸素燃料加熱方法及び装置
US4481889A (en) Method and apparatus for afterburning flue gases
JP2002106826A5 (ko)
JP2002106826A (ja) 燃焼式排ガス処理装置
JPS62134414A (ja) 半導体製造排ガスの燃焼方法及び同燃焼装置
JP2001082723A (ja) 燃焼式除害装置及び燃焼式除害装置用バーナー
KR101385126B1 (ko) 히터 방식 공정 폐가스용 연소기
KR101594209B1 (ko) 파일럿
KR101371074B1 (ko) 공정 폐가스용 연소기
JP2002061821A (ja) 燃焼式排ガス処理方法及び装置
KR200263463Y1 (ko) 브라운가스 연소용 버너
JP3638170B2 (ja) 高温炉用酸素ガスバーナ
KR20030035718A (ko) 브라운가스 연소용 버너
JP2002106825A5 (ko)
JPH0921516A (ja) 半導体製造工程からの排ガスの除害装置
JP2001349521A (ja) 燃焼式除害装置及びその運転方法
KR200337058Y1 (ko) 화염통로를 갖는 반도체 폐가스 처리장치
JP2008032310A (ja) 燃焼除害装置
JP2004077010A (ja) 管状火炎バーナを設置した炉