JP2002043329A5 - - Google Patents
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- JP2002043329A5 JP2002043329A5 JP2001135770A JP2001135770A JP2002043329A5 JP 2002043329 A5 JP2002043329 A5 JP 2002043329A5 JP 2001135770 A JP2001135770 A JP 2001135770A JP 2001135770 A JP2001135770 A JP 2001135770A JP 2002043329 A5 JP2002043329 A5 JP 2002043329A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001135770A JP4583654B2 (ja) | 2000-05-13 | 2001-05-07 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000180550 | 2000-05-13 | ||
| JP2000-180550 | 2000-05-13 | ||
| JP2001135770A JP4583654B2 (ja) | 2000-05-13 | 2001-05-07 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002043329A JP2002043329A (ja) | 2002-02-08 |
| JP2002043329A5 true JP2002043329A5 (enExample) | 2008-05-29 |
| JP4583654B2 JP4583654B2 (ja) | 2010-11-17 |
Family
ID=26594039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001135770A Expired - Fee Related JP4583654B2 (ja) | 2000-05-13 | 2001-05-07 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4583654B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4402396B2 (ja) * | 2003-08-07 | 2010-01-20 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP4537029B2 (ja) * | 2003-09-30 | 2010-09-01 | シャープ株式会社 | 薄膜トランジスタ装置及びその製造方法、並びにそれを備えた薄膜トランジスタ基板及び表示装置 |
| JP2014241363A (ja) | 2013-06-12 | 2014-12-25 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| KR102835255B1 (ko) * | 2020-10-12 | 2025-07-16 | 엘지디스플레이 주식회사 | 박막 트랜지스터, 박막 트랜지스터의 제조방법 및 이를 포함하는 표시장치 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3086579B2 (ja) * | 1993-12-28 | 2000-09-11 | シャープ株式会社 | 薄膜トランジスタの製造方法 |
| JP3398453B2 (ja) * | 1994-02-24 | 2003-04-21 | 株式会社東芝 | 薄膜トランジスタの製造方法 |
| JPH08274336A (ja) * | 1995-03-30 | 1996-10-18 | Toshiba Corp | 多結晶半導体薄膜トランジスタ及びその製造方法 |
| JPH0955508A (ja) * | 1995-08-10 | 1997-02-25 | Sanyo Electric Co Ltd | 薄膜トランジスタ及びその製造方法 |
| JPH11145112A (ja) * | 1997-11-07 | 1999-05-28 | Nec Corp | パターニング方法 |
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2001
- 2001-05-07 JP JP2001135770A patent/JP4583654B2/ja not_active Expired - Fee Related