JP2002039718A - 薄膜の合否判定方法および装置 - Google Patents

薄膜の合否判定方法および装置

Info

Publication number
JP2002039718A
JP2002039718A JP2000219305A JP2000219305A JP2002039718A JP 2002039718 A JP2002039718 A JP 2002039718A JP 2000219305 A JP2000219305 A JP 2000219305A JP 2000219305 A JP2000219305 A JP 2000219305A JP 2002039718 A JP2002039718 A JP 2002039718A
Authority
JP
Japan
Prior art keywords
thin film
sample
pass
change
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000219305A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002039718A5 (ru
Inventor
Hirohisa Fujimoto
洋久 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2000219305A priority Critical patent/JP2002039718A/ja
Publication of JP2002039718A publication Critical patent/JP2002039718A/ja
Publication of JP2002039718A5 publication Critical patent/JP2002039718A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP2000219305A 2000-07-19 2000-07-19 薄膜の合否判定方法および装置 Pending JP2002039718A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000219305A JP2002039718A (ja) 2000-07-19 2000-07-19 薄膜の合否判定方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000219305A JP2002039718A (ja) 2000-07-19 2000-07-19 薄膜の合否判定方法および装置

Publications (2)

Publication Number Publication Date
JP2002039718A true JP2002039718A (ja) 2002-02-06
JP2002039718A5 JP2002039718A5 (ru) 2007-08-02

Family

ID=18714109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000219305A Pending JP2002039718A (ja) 2000-07-19 2000-07-19 薄膜の合否判定方法および装置

Country Status (1)

Country Link
JP (1) JP2002039718A (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010117161A (ja) * 2008-11-11 2010-05-27 Nikon Corp 検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08210972A (ja) * 1995-02-03 1996-08-20 Hitachi Ltd 偏光解析装置
JPH08210818A (ja) * 1994-12-02 1996-08-20 Keyence Corp 膜厚測定機能付光学顕微鏡
JP2000009437A (ja) * 1997-10-22 2000-01-14 Hitachi Ltd 薄膜の膜厚計測方法及びその装置並びにそれを用いた薄膜デバイスの製造方法及びその製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08210818A (ja) * 1994-12-02 1996-08-20 Keyence Corp 膜厚測定機能付光学顕微鏡
JPH08210972A (ja) * 1995-02-03 1996-08-20 Hitachi Ltd 偏光解析装置
JP2000009437A (ja) * 1997-10-22 2000-01-14 Hitachi Ltd 薄膜の膜厚計測方法及びその装置並びにそれを用いた薄膜デバイスの製造方法及びその製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010117161A (ja) * 2008-11-11 2010-05-27 Nikon Corp 検査装置

Similar Documents

Publication Publication Date Title
JP3258385B2 (ja) 光学式基板検査装置
US6172349B1 (en) Autofocusing apparatus and method for high resolution microscope system
TWI413823B (zh) 影像檢查裝置
US10455137B2 (en) Auto-focus system
CN102818528B (zh) 用于在增强景深的情形下检查物体的装置和方法
US10120163B2 (en) Auto-focus method for a coordinate-measuring apparatus
US20080144006A1 (en) Method for Measuring Topographic Structures on Devices
JPH03267745A (ja) 表面性状検出方法
US7247825B2 (en) Method and apparatus for scanning a specimen using an optical imaging system
CN111239164B (zh) 一种缺陷检测装置及其方法
US7474393B2 (en) Method and apparatus for determining a vertical intensity profile along an illuminating beam
CN113281343A (zh) 一种对多层透明材料进行缺陷检测的系统及方法
JP2006510031A (ja) 弱い光及び蛍光の光の用途において信号対ノイズ比、解像度、又は合焦品質を犠牲にすることなく検査速度を最適化するための方法
JP4603177B2 (ja) 走査型レーザ顕微鏡
US6545765B1 (en) Method and apparatus for measuring thickness of transparent films
CN113767277A (zh) 用于对样品表面进行检查的正入射相移偏转测量传感器、系统和方法
JP2002323659A (ja) 共焦点光学系及びこれを用いた走査型共焦点顕微鏡
JP2007071716A (ja) 共焦点走査型顕微鏡
JP2002039718A (ja) 薄膜の合否判定方法および装置
JP2002039721A (ja) 膜厚測定装置、膜厚測定方法および膜厚測定のためのプログラムを記憶した記録媒体
JP2911283B2 (ja) 非接触段差測定方法及びその装置
JP3141470B2 (ja) ３次元形状検出方法および装置
JP2002039722A (ja) 膜厚測定におけるデータ取得装置、方法およびデータ取得のためのプログラムを記憶した記録媒体
JP2007286147A (ja) 赤外顕微鏡
JP2004101428A (ja) レーザ顕微鏡装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070614

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070614

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090814

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090825

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100105