JP2002039718A5 - - Google Patents
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- Publication number
- JP2002039718A5 JP2002039718A5 JP2000219305A JP2000219305A JP2002039718A5 JP 2002039718 A5 JP2002039718 A5 JP 2002039718A5 JP 2000219305 A JP2000219305 A JP 2000219305A JP 2000219305 A JP2000219305 A JP 2000219305A JP 2002039718 A5 JP2002039718 A5 JP 2002039718A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000219305A JP2002039718A (ja) | 2000-07-19 | 2000-07-19 | 薄膜の合否判定方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000219305A JP2002039718A (ja) | 2000-07-19 | 2000-07-19 | 薄膜の合否判定方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002039718A JP2002039718A (ja) | 2002-02-06 |
| JP2002039718A5 true JP2002039718A5 (ru) | 2007-08-02 |
Family
ID=18714109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000219305A Pending JP2002039718A (ja) | 2000-07-19 | 2000-07-19 | 薄膜の合否判定方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002039718A (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010117161A (ja) * | 2008-11-11 | 2010-05-27 | Nikon Corp | 検査装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3789515B2 (ja) * | 1994-12-02 | 2006-06-28 | 株式会社キーエンス | 膜厚測定機能付光学顕微鏡 |
| JPH08210972A (ja) * | 1995-02-03 | 1996-08-20 | Hitachi Ltd | 偏光解析装置 |
| JP4460659B2 (ja) * | 1997-10-22 | 2010-05-12 | 株式会社ルネサステクノロジ | 薄膜の膜厚計測方法及びその装置並びにそれを用いた薄膜デバイスの製造方法及びその製造装置 |
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2000
- 2000-07-19 JP JP2000219305A patent/JP2002039718A/ja active Pending