JP2001512375A5 - - Google Patents

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Publication number
JP2001512375A5
JP2001512375A5 JP1998538511A JP53851198A JP2001512375A5 JP 2001512375 A5 JP2001512375 A5 JP 2001512375A5 JP 1998538511 A JP1998538511 A JP 1998538511A JP 53851198 A JP53851198 A JP 53851198A JP 2001512375 A5 JP2001512375 A5 JP 2001512375A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998538511A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001512375A (ja
Filing date
Publication date
Priority claimed from US08/813,878 external-priority patent/US5910471A/en
Priority claimed from US08/813,228 external-priority patent/US5888119A/en
Application filed filed Critical
Priority claimed from PCT/US1998/001558 external-priority patent/WO1998039142A1/fr
Publication of JP2001512375A publication Critical patent/JP2001512375A/ja
Publication of JP2001512375A5 publication Critical patent/JP2001512375A5/ja
Pending legal-status Critical Current

Links

JP53851198A 1997-03-07 1998-01-28 ガラス上の透明な表面仕上げを提供するための研磨物品 Pending JP2001512375A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US08/813,228 1997-03-07
US08/813,878 US5910471A (en) 1997-03-07 1997-03-07 Abrasive article for providing a clear surface finish on glass
US08/813,228 US5888119A (en) 1997-03-07 1997-03-07 Method for providing a clear surface finish on glass
US08/813,878 1997-03-07
PCT/US1998/001558 WO1998039142A1 (fr) 1997-03-07 1998-01-28 Article abrasif d'obtention d'un polis de surface transparent sur du verre

Publications (2)

Publication Number Publication Date
JP2001512375A JP2001512375A (ja) 2001-08-21
JP2001512375A5 true JP2001512375A5 (fr) 2005-10-06

Family

ID=27123709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53851198A Pending JP2001512375A (ja) 1997-03-07 1998-01-28 ガラス上の透明な表面仕上げを提供するための研磨物品

Country Status (10)

Country Link
EP (1) EP0964772A1 (fr)
JP (1) JP2001512375A (fr)
KR (1) KR100494605B1 (fr)
CN (1) CN1188252C (fr)
AU (1) AU727191B2 (fr)
BR (1) BR9808152A (fr)
CA (1) CA2281921A1 (fr)
MY (1) MY129538A (fr)
TW (1) TW411303B (fr)
WO (1) WO1998039142A1 (fr)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6231629B1 (en) * 1997-03-07 2001-05-15 3M Innovative Properties Company Abrasive article for providing a clear surface finish on glass
JP3373797B2 (ja) * 1998-10-28 2003-02-04 株式会社ノリタケカンパニーリミテド 樹脂含浸補強ビトリファイド砥石およびその製造方法
US6634929B1 (en) 1999-04-23 2003-10-21 3M Innovative Properties Company Method for grinding glass
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
EP1052062A1 (fr) * 1999-05-03 2000-11-15 Applied Materials, Inc. Préconditionnement d'un article abrasif fixé
US6616513B1 (en) 2000-04-07 2003-09-09 Applied Materials, Inc. Grid relief in CMP polishing pad to accurately measure pad wear, pad profile and pad wear profile
CN101092024A (zh) * 2000-04-28 2007-12-26 3M创新有限公司 研磨制品以及研磨玻璃的方法
US20020090901A1 (en) * 2000-11-03 2002-07-11 3M Innovative Properties Company Flexible abrasive product and method of making and using the same
US20020072296A1 (en) 2000-11-29 2002-06-13 Muilenburg Michael J. Abrasive article having a window system for polishing wafers, and methods
US20030017797A1 (en) 2001-03-28 2003-01-23 Kendall Philip E. Dual cured abrasive articles
US7169029B2 (en) * 2004-12-16 2007-01-30 3M Innovative Properties Company Resilient structured sanding article
JP5274021B2 (ja) * 2005-01-28 2013-08-28 サンーゴバン アブレイシブズ,インコーポレイティド 研磨用品及びその製造方法
US7344574B2 (en) 2005-06-27 2008-03-18 3M Innovative Properties Company Coated abrasive article, and method of making and using the same
EP1919665A1 (fr) * 2005-07-22 2008-05-14 TDY Industries, Inc. Materiaux composites
KR101334012B1 (ko) * 2005-07-25 2013-12-02 호야 가부시키가이샤 마스크 블랭크용 기판의 제조방법, 마스크 블랭크의제조방법 및 마스크의 제조방법
US20070243798A1 (en) * 2006-04-18 2007-10-18 3M Innovative Properties Company Embossed structured abrasive article and method of making and using the same
CN101214637B (zh) * 2008-01-16 2010-09-29 郑州安华磨具有限公司 玻璃磨边轮
KR20130040808A (ko) * 2010-04-08 2013-04-24 아사히 가라스 가부시키가이샤 유리판의 제조 방법 및 제조 장치
JP5851124B2 (ja) * 2011-06-13 2016-02-03 スリーエム イノベイティブ プロパティズ カンパニー 研磨用構造体
CN103465155B (zh) * 2013-09-06 2016-05-11 蓝思科技股份有限公司 一种环氧树脂型金刚石研磨垫及其制备方法
JP6611414B2 (ja) * 2014-05-27 2019-11-27 スリーエム イノベイティブ プロパティズ カンパニー 塗装表面の仕上げ方法及び研磨材料
JPWO2015194278A1 (ja) * 2014-06-17 2017-04-20 バンドー化学株式会社 研磨パッド及び研磨パッドの製造方法
CN104128880B (zh) * 2014-07-21 2017-01-11 蓝思科技股份有限公司 一种改性环氧树脂型陶瓷专用研磨垫及其制备方法
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
JP6091704B2 (ja) 2014-10-28 2017-03-08 バンドー化学株式会社 研磨材及び研磨材の製造方法
CN104987708A (zh) * 2015-08-03 2015-10-21 金宝丽科技(苏州)有限公司 一种纤维增强尼龙复合材料及其制备方法
WO2017074773A1 (fr) 2015-10-30 2017-05-04 Applied Materials, Inc. Appareil et procédé de formation d'article de polissage ayant un potentiel zêta souhaité
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) * 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
WO2018031355A1 (fr) 2016-08-12 2018-02-15 3M Innovative Properties Company Constructions de films de granules tronqués et leurs procédés de fabrication
CN106271959A (zh) * 2016-08-15 2017-01-04 安徽省银锐玻璃机械有限公司 玻璃手工磨边的方法
KR20180072243A (ko) * 2016-12-21 2018-06-29 엠.씨.케이 (주) 연마체 수지 조성물 및 이에 의해 제조된 패드
GB201622441D0 (en) * 2016-12-30 2017-02-15 3M Innovative Properties Co Abrasive article and method of use
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (fr) 2017-08-07 2019-02-14 Applied Materials, Inc. Tampons à polir à distribution abrasive et leurs procédés de fabrication
SG11202004429VA (en) * 2017-11-30 2020-06-29 Saint Gobain Abrasives Inc Abrasive articles and methods of forming same
KR102053651B1 (ko) * 2018-05-30 2019-12-09 이화다이아몬드공업 주식회사 사파이어, 실리콘카바이드, 유리 및 실리콘 웨이퍼 폴리싱을 위한 고정지립 패드 및 그 패드의 제조방법
CN108747876B (zh) * 2018-06-11 2021-03-19 河北思瑞恩新材料科技有限公司 一种漆面研磨砂碟的制备方法
CN109048698B (zh) * 2018-06-22 2020-08-28 广东伟艺研磨技术开发有限公司 一种聚氨酯抛磨轮及其制备方法
CN112654655A (zh) 2018-09-04 2021-04-13 应用材料公司 先进抛光垫配方
EP3666461A1 (fr) * 2018-12-12 2020-06-17 3M Innovative Properties Company Article abrasif
CN110922096A (zh) * 2019-12-16 2020-03-27 韶关大唐研磨材料有限公司 一种金刚石垫片及其制备方法
JP2021098250A (ja) * 2019-12-20 2021-07-01 スリーエム イノベイティブ プロパティズ カンパニー 研磨シート及び研磨方法
CN112428165B (zh) * 2020-10-22 2021-10-22 德阳展源新材料科技有限公司 一种阻尼布抛光垫的制备方法
CN113211336B (zh) * 2021-03-31 2022-03-08 安徽禾臣新材料有限公司 一种电子显示屏边角抛光用抛光垫及其生产方法
CN114605922B (zh) * 2022-03-18 2023-05-09 北京通美晶体技术股份有限公司 一种快速抛光的化学抛光液及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2094824B (en) * 1981-03-12 1985-07-17 Interface Developments Ltd Abrasive member
JPS63196363A (ja) * 1987-02-10 1988-08-15 Asahi Glass Co Ltd 乱反射面を有する陰極線管の製造方法
JPS63283857A (ja) * 1987-05-15 1988-11-21 Asahi Chem Ind Co Ltd 研磨布
US5011513A (en) * 1989-05-31 1991-04-30 Norton Company Single step, radiation curable ophthalmic fining pad
JPH04201181A (ja) * 1990-11-30 1992-07-22 Ichikawa Woolen Textile Co Ltd 研磨用フェルト
JPH0768469A (ja) * 1993-09-03 1995-03-14 Asahi Glass Co Ltd ガラス板用研削加工シート

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