JP2001349787A - 赤外線検出素子および測温計 - Google Patents

赤外線検出素子および測温計

Info

Publication number
JP2001349787A
JP2001349787A JP2000169693A JP2000169693A JP2001349787A JP 2001349787 A JP2001349787 A JP 2001349787A JP 2000169693 A JP2000169693 A JP 2000169693A JP 2000169693 A JP2000169693 A JP 2000169693A JP 2001349787 A JP2001349787 A JP 2001349787A
Authority
JP
Japan
Prior art keywords
temperature
infrared
thermopile
detecting element
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000169693A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001349787A5 (https=
Inventor
Shigemi Sato
茂美 佐藤
Osamu Iwamoto
修 岩本
Yasuhiro Shiobara
康弘 塩原
Yuji Oda
裕二 織田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2000169693A priority Critical patent/JP2001349787A/ja
Priority to TW090112952A priority patent/TWI242075B/zh
Priority to DE60117929T priority patent/DE60117929T2/de
Priority to CN01120877A priority patent/CN1328251A/zh
Priority to EP01304921A priority patent/EP1162440B1/en
Priority to US09/875,343 priority patent/US6565254B2/en
Publication of JP2001349787A publication Critical patent/JP2001349787A/ja
Publication of JP2001349787A5 publication Critical patent/JP2001349787A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/021—Probe covers for thermometers, e.g. tympanic thermometers; Containers for probe covers; Disposable probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/048—Protective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/049—Casings for tympanic thermometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/05—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G01J5/14—Electrical features thereof
    • G01J5/16—Arrangements with respect to the cold junction; Compensating influence of ambient temperature or other variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/70—Passive compensation of pyrometer measurements, e.g. using ambient temperature sensing or sensing of temperature within housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
JP2000169693A 2000-06-06 2000-06-06 赤外線検出素子および測温計 Pending JP2001349787A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2000169693A JP2001349787A (ja) 2000-06-06 2000-06-06 赤外線検出素子および測温計
TW090112952A TWI242075B (en) 2000-06-06 2001-05-29 Infrared detecting element and temperature detecting means
DE60117929T DE60117929T2 (de) 2000-06-06 2001-06-05 Infrarotdetektorelement und Temperaturmessgerät
CN01120877A CN1328251A (zh) 2000-06-06 2001-06-05 红外线检测元件及温度测定装置
EP01304921A EP1162440B1 (en) 2000-06-06 2001-06-05 Infrared sensing element and temperature measuring device
US09/875,343 US6565254B2 (en) 2000-06-06 2001-06-06 Infrared sensing element and temperature measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000169693A JP2001349787A (ja) 2000-06-06 2000-06-06 赤外線検出素子および測温計

Publications (2)

Publication Number Publication Date
JP2001349787A true JP2001349787A (ja) 2001-12-21
JP2001349787A5 JP2001349787A5 (https=) 2005-02-24

Family

ID=18672516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000169693A Pending JP2001349787A (ja) 2000-06-06 2000-06-06 赤外線検出素子および測温計

Country Status (6)

Country Link
US (1) US6565254B2 (https=)
EP (1) EP1162440B1 (https=)
JP (1) JP2001349787A (https=)
CN (1) CN1328251A (https=)
DE (1) DE60117929T2 (https=)
TW (1) TWI242075B (https=)

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JP2003344156A (ja) * 2002-05-31 2003-12-03 Murata Mfg Co Ltd 赤外線センサおよびそれを用いた電子装置
JP2008528987A (ja) * 2005-01-26 2008-07-31 アナログ・デバイシズ・インコーポレーテッド センサ
JP2009189784A (ja) * 2008-02-18 2009-08-27 Fortune Semiconductor Corp 温度センサーモジュール
KR101137090B1 (ko) * 2003-09-09 2012-04-19 브라운 게엠베하 가열 가능한 적외선 센서와 이 적외선 센서를 구비하는 적외선 온도계
JP2015190833A (ja) * 2014-03-28 2015-11-02 セイコーエプソン株式会社 回路装置、温度検出装置、電子機器及び温度検出方法

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US6713669B2 (en) * 2000-10-19 2004-03-30 Murata Manufacturing Co., Ltd. Thermoelectric conversion component
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US7351974B2 (en) * 2003-09-05 2008-04-01 Authentec, Inc. Integrated circuit infrared sensor and associated methods
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JP2003344156A (ja) * 2002-05-31 2003-12-03 Murata Mfg Co Ltd 赤外線センサおよびそれを用いた電子装置
US7005642B2 (en) 2002-05-31 2006-02-28 Murata Manufacturing Co., Ltd. Infrared sensor and electronic device using the same
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JP2008528987A (ja) * 2005-01-26 2008-07-31 アナログ・デバイシズ・インコーポレーテッド センサ
JP2009189784A (ja) * 2008-02-18 2009-08-27 Fortune Semiconductor Corp 温度センサーモジュール
JP2015190833A (ja) * 2014-03-28 2015-11-02 セイコーエプソン株式会社 回路装置、温度検出装置、電子機器及び温度検出方法

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EP1162440B1 (en) 2006-03-15
DE60117929T2 (de) 2006-10-26
TWI242075B (en) 2005-10-21
DE60117929D1 (de) 2006-05-11
US20020037026A1 (en) 2002-03-28
CN1328251A (zh) 2001-12-26
EP1162440A1 (en) 2001-12-12

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