JP2001338889A5 - - Google Patents

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Publication number
JP2001338889A5
JP2001338889A5 JP2000157939A JP2000157939A JP2001338889A5 JP 2001338889 A5 JP2001338889 A5 JP 2001338889A5 JP 2000157939 A JP2000157939 A JP 2000157939A JP 2000157939 A JP2000157939 A JP 2000157939A JP 2001338889 A5 JP2001338889 A5 JP 2001338889A5
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JP
Japan
Prior art keywords
boat
substrate
time
processing chamber
processing
Prior art date
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Application number
JP2000157939A
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English (en)
Japanese (ja)
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JP4456727B2 (ja
JP2001338889A (ja
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Priority to JP2000157939A priority Critical patent/JP4456727B2/ja
Priority claimed from JP2000157939A external-priority patent/JP4456727B2/ja
Publication of JP2001338889A publication Critical patent/JP2001338889A/ja
Publication of JP2001338889A5 publication Critical patent/JP2001338889A5/ja
Application granted granted Critical
Publication of JP4456727B2 publication Critical patent/JP4456727B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000157939A 2000-05-29 2000-05-29 半導体装置の製造方法および基板処理装置 Expired - Lifetime JP4456727B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000157939A JP4456727B2 (ja) 2000-05-29 2000-05-29 半導体装置の製造方法および基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000157939A JP4456727B2 (ja) 2000-05-29 2000-05-29 半導体装置の製造方法および基板処理装置

Publications (3)

Publication Number Publication Date
JP2001338889A JP2001338889A (ja) 2001-12-07
JP2001338889A5 true JP2001338889A5 (https=) 2007-07-12
JP4456727B2 JP4456727B2 (ja) 2010-04-28

Family

ID=18662484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000157939A Expired - Lifetime JP4456727B2 (ja) 2000-05-29 2000-05-29 半導体装置の製造方法および基板処理装置

Country Status (1)

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JP (1) JP4456727B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5027430B2 (ja) * 2006-03-07 2012-09-19 株式会社日立国際電気 基板処理装置
JP4880408B2 (ja) * 2006-09-22 2012-02-22 株式会社日立国際電気 基板処理装置、基板処理方法、半導体装置の製造方法、メインコントローラおよびプログラム
JP2024102748A (ja) * 2023-01-19 2024-07-31 株式会社Kokusai Electric 基板処理装置、基板処理方法、半導体装置の製造方法及びプログラム

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