JP2000150619A5 - - Google Patents

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Publication number
JP2000150619A5
JP2000150619A5 JP1999367782A JP36778299A JP2000150619A5 JP 2000150619 A5 JP2000150619 A5 JP 2000150619A5 JP 1999367782 A JP1999367782 A JP 1999367782A JP 36778299 A JP36778299 A JP 36778299A JP 2000150619 A5 JP2000150619 A5 JP 2000150619A5
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JP
Japan
Prior art keywords
transfer
substrate
main frame
processing
slot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999367782A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000150619A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP36778299A priority Critical patent/JP2000150619A/ja
Priority claimed from JP36778299A external-priority patent/JP2000150619A/ja
Publication of JP2000150619A publication Critical patent/JP2000150619A/ja
Publication of JP2000150619A5 publication Critical patent/JP2000150619A5/ja
Pending legal-status Critical Current

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JP36778299A 1999-01-01 1999-12-24 基板処理装置 Pending JP2000150619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36778299A JP2000150619A (ja) 1999-01-01 1999-12-24 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36778299A JP2000150619A (ja) 1999-01-01 1999-12-24 基板処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP21033298A Division JP3193904B2 (ja) 1997-08-01 1998-07-09 基板搬送制御方法及び基板製品の製造方法

Publications (2)

Publication Number Publication Date
JP2000150619A JP2000150619A (ja) 2000-05-30
JP2000150619A5 true JP2000150619A5 (https=) 2005-05-19

Family

ID=18490184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36778299A Pending JP2000150619A (ja) 1999-01-01 1999-12-24 基板処理装置

Country Status (1)

Country Link
JP (1) JP2000150619A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4353903B2 (ja) 2005-01-07 2009-10-28 東京エレクトロン株式会社 クラスタツールの処理システム
TW200908363A (en) * 2007-07-24 2009-02-16 Applied Materials Inc Apparatuses and methods of substrate temperature control during thin film solar manufacturing
US8731706B2 (en) * 2008-09-12 2014-05-20 Hitachi High-Technologies Corporation Vacuum processing apparatus
KR101005882B1 (ko) 2008-10-14 2011-01-06 세메스 주식회사 반도체 제조 설비 및 이의 제어 방법
JP6792098B1 (ja) * 2019-02-07 2020-11-25 株式会社日立ハイテク 真空処理装置の運転方法
JP7324811B2 (ja) * 2021-09-22 2023-08-10 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、及びプログラム
JP7794543B2 (ja) * 2022-12-21 2026-01-06 東京エレクトロン株式会社 基板処理システム、制御装置および基板搬送処理方法

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