JP2001320074A - 起電力型赤外線検知セル - Google Patents
起電力型赤外線検知セルInfo
- Publication number
- JP2001320074A JP2001320074A JP80000195A JP80000195A JP2001320074A JP 2001320074 A JP2001320074 A JP 2001320074A JP 80000195 A JP80000195 A JP 80000195A JP 80000195 A JP80000195 A JP 80000195A JP 2001320074 A JP2001320074 A JP 2001320074A
- Authority
- JP
- Japan
- Prior art keywords
- segment
- photovoltaic
- segments
- wavelength
- sensing cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000001514 detection method Methods 0.000 title claims description 15
- 230000005855 radiation Effects 0.000 claims abstract description 35
- 239000004020 conductor Substances 0.000 claims abstract description 34
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims 5
- 230000000737 periodic effect Effects 0.000 claims 4
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 239000004593 Epoxy Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910004613 CdTe Inorganic materials 0.000 description 4
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 4
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 description 4
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 229910004262 HgTe Inorganic materials 0.000 description 2
- 206010065042 Immune reconstitution inflammatory syndrome Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- VTGARNNDLOTBET-UHFFFAOYSA-N gallium antimonide Chemical compound [Sb]#[Ga] VTGARNNDLOTBET-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 229910004611 CdZnTe Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- CCEKXLJXSBYSEB-UHFFFAOYSA-N ethane-1,2-diol;hydrobromide Chemical compound Br.OCCO CCEKXLJXSBYSEB-UHFFFAOYSA-N 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
- H10F77/1237—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe having at least three elements, e.g. HgCdTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
- H10F77/146—Superlattices; Multiple quantum well structures
Landscapes
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Biophysics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Light Receiving Elements (AREA)
- Radiation Pyrometers (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/218472 | 1994-03-15 | ||
| US08/218,472 US6133570A (en) | 1994-03-15 | 1994-03-15 | Semiconductor photovoltaic diffractive resonant optical cavity infrared detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001320074A true JP2001320074A (ja) | 2001-11-16 |
Family
ID=22815256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP80000195A Abandoned JP2001320074A (ja) | 1994-03-15 | 1995-03-15 | 起電力型赤外線検知セル |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6133570A (enExample) |
| JP (1) | JP2001320074A (enExample) |
| CA (1) | CA2141966A1 (enExample) |
| DE (1) | DE19509358B4 (enExample) |
| FR (1) | FR2803949A1 (enExample) |
| GB (1) | GB2366665B (enExample) |
| NL (1) | NL194815C (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012154762A (ja) * | 2011-01-26 | 2012-08-16 | Mitsubishi Electric Corp | 赤外線センサおよび赤外線センサアレイ |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6690014B1 (en) | 2000-04-25 | 2004-02-10 | Raytheon Company | Microbolometer and method for forming |
| US7026602B2 (en) * | 2001-04-13 | 2006-04-11 | Research Triangle Institute | Electromagnetic radiation detectors having a microelectromechanical shutter device |
| US6777681B1 (en) | 2001-04-25 | 2004-08-17 | Raytheon Company | Infrared detector with amorphous silicon detector elements, and a method of making it |
| DE102004045105A1 (de) * | 2004-03-19 | 2005-10-13 | Daimlerchrysler Ag | Verwendung eines Photovoltaik-Elementes als Sensor zur Funktionskontrolle von Sendern im infraroten Bereich |
| US7459686B2 (en) * | 2006-01-26 | 2008-12-02 | L-3 Communications Corporation | Systems and methods for integrating focal plane arrays |
| US7655909B2 (en) * | 2006-01-26 | 2010-02-02 | L-3 Communications Corporation | Infrared detector elements and methods of forming same |
| US7462831B2 (en) * | 2006-01-26 | 2008-12-09 | L-3 Communications Corporation | Systems and methods for bonding |
| US7718965B1 (en) | 2006-08-03 | 2010-05-18 | L-3 Communications Corporation | Microbolometer infrared detector elements and methods for forming same |
| US8153980B1 (en) | 2006-11-30 | 2012-04-10 | L-3 Communications Corp. | Color correction for radiation detectors |
| DE102008032555B3 (de) * | 2008-07-10 | 2010-01-21 | Innolas Systems Gmbh | Strukturierungsvorrichtung für die Strukturierung von plattenförmigen Elementen, insbesondere von Dünnschicht-Solarmodulen, entsprechendes Strukturierungsverfahren sowie Verwendung derselben |
| FR2938973B1 (fr) * | 2008-11-27 | 2011-03-04 | Sagem Defense Securite | Cellules matricielles photosensibles dans l'infrarouge a base d'antimoniure sur substrat optiquement transparent et procede de fabrication associe |
| US9214583B2 (en) * | 2010-03-19 | 2015-12-15 | Hirak Mitra | Method to build transparent polarizing solar cell |
| US8765514B1 (en) | 2010-11-12 | 2014-07-01 | L-3 Communications Corp. | Transitioned film growth for conductive semiconductor materials |
| CN108565310B (zh) * | 2017-12-14 | 2020-03-31 | 上海集成电路研发中心有限公司 | 一种红外探测器及其制造方法 |
| US10516216B2 (en) | 2018-01-12 | 2019-12-24 | Eagle Technology, Llc | Deployable reflector antenna system |
| US10707552B2 (en) | 2018-08-21 | 2020-07-07 | Eagle Technology, Llc | Folded rib truss structure for reflector antenna with zero over stretch |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4620364A (en) * | 1984-06-11 | 1986-11-04 | Spire Corporation | Method of making a cross-grooved solar cell |
| US4639756A (en) * | 1986-05-05 | 1987-01-27 | Santa Barbara Research Center | Graded gap inversion layer photodiode array |
| US4731640A (en) * | 1986-05-20 | 1988-03-15 | Westinghouse Electric Corp. | High resistance photoconductor structure for multi-element infrared detector arrays |
| JPH0766981B2 (ja) * | 1987-03-26 | 1995-07-19 | 日本電気株式会社 | 赤外線センサ |
| US4970567A (en) * | 1987-11-23 | 1990-11-13 | Santa Barbara Research Center | Method and apparatus for detecting infrared radiation |
| US5179283A (en) * | 1989-08-07 | 1993-01-12 | Santa Barbara Research Center | Infrared detector focal plane |
| US5075749A (en) * | 1989-12-29 | 1991-12-24 | At&T Bell Laboratories | Optical device including a grating |
| US5047622A (en) * | 1990-06-18 | 1991-09-10 | The United States Of America As Represented By The Secretary Of The Navy | Long wavelength infrared detector with heterojunction |
| SE468188B (sv) * | 1991-04-08 | 1992-11-16 | Stiftelsen Inst Foer Mikroelek | Metod foer inkoppling av straalning i en infraroeddetektor, jaemte anordning |
-
1994
- 1994-03-15 US US08/218,472 patent/US6133570A/en not_active Expired - Lifetime
-
1995
- 1995-02-13 CA CA002141966A patent/CA2141966A1/en not_active Abandoned
- 1995-03-03 GB GB9504243A patent/GB2366665B/en not_active Expired - Fee Related
- 1995-03-14 NL NL9500502A patent/NL194815C/nl not_active IP Right Cessation
- 1995-03-15 FR FR9503016A patent/FR2803949A1/fr active Pending
- 1995-03-15 JP JP80000195A patent/JP2001320074A/ja not_active Abandoned
- 1995-03-15 DE DE19509358A patent/DE19509358B4/de not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012154762A (ja) * | 2011-01-26 | 2012-08-16 | Mitsubishi Electric Corp | 赤外線センサおよび赤外線センサアレイ |
Also Published As
| Publication number | Publication date |
|---|---|
| NL194815B (nl) | 2002-11-01 |
| FR2803949A1 (fr) | 2001-07-20 |
| CA2141966A1 (en) | 2002-07-10 |
| US6133570A (en) | 2000-10-17 |
| GB9504243D0 (en) | 2001-11-28 |
| NL9500502A (enExample) | 2001-06-01 |
| GB2366665B (en) | 2002-06-26 |
| DE19509358A1 (de) | 2003-07-10 |
| NL194815C (nl) | 2003-03-04 |
| DE19509358B4 (de) | 2005-06-16 |
| GB2366665A (en) | 2002-03-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A762 | Written abandonment of application |
Free format text: JAPANESE INTERMEDIATE CODE: A762 Effective date: 20040422 |