FR2803949A1 - Detecteur a infrarouges a cavite optique resonante a diffraction photovoltaique a semi-conducteur - Google Patents
Detecteur a infrarouges a cavite optique resonante a diffraction photovoltaique a semi-conducteur Download PDFInfo
- Publication number
- FR2803949A1 FR2803949A1 FR9503016A FR9503016A FR2803949A1 FR 2803949 A1 FR2803949 A1 FR 2803949A1 FR 9503016 A FR9503016 A FR 9503016A FR 9503016 A FR9503016 A FR 9503016A FR 2803949 A1 FR2803949 A1 FR 2803949A1
- Authority
- FR
- France
- Prior art keywords
- segments
- photovoltaic
- detector cell
- conductive
- portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 21
- 239000004065 semiconductor Substances 0.000 title description 2
- 230000005855 radiation Effects 0.000 claims abstract description 33
- 239000004020 conductor Substances 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims description 14
- 238000002161 passivation Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 230000004044 response Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims 4
- 125000006850 spacer group Chemical group 0.000 claims 4
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 claims 1
- 238000012550 audit Methods 0.000 claims 1
- 239000004568 cement Substances 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 7
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 4
- 229910004613 CdTe Inorganic materials 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 229910000673 Indium arsenide Inorganic materials 0.000 description 3
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 3
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000005554 pickling Methods 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910004262 HgTe Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000006862 quantum yield reaction Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910004611 CdZnTe Inorganic materials 0.000 description 1
- 206010065042 Immune reconstitution inflammatory syndrome Diseases 0.000 description 1
- KSJUMUWSWKGACK-UHFFFAOYSA-N [Br].OCCO Chemical compound [Br].OCCO KSJUMUWSWKGACK-UHFFFAOYSA-N 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- VTGARNNDLOTBET-UHFFFAOYSA-N gallium antimonide Chemical compound [Sb]#[Ga] VTGARNNDLOTBET-UHFFFAOYSA-N 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WCYWZMWISLQXQU-UHFFFAOYSA-N methyl Chemical compound [CH3] WCYWZMWISLQXQU-UHFFFAOYSA-N 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
- H10F77/1237—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe having at least three elements, e.g. HgCdTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
- H10F77/146—Superlattices; Multiple quantum well structures
Landscapes
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Biophysics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Light Receiving Elements (AREA)
- Radiation Pyrometers (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/218,472 US6133570A (en) | 1994-03-15 | 1994-03-15 | Semiconductor photovoltaic diffractive resonant optical cavity infrared detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2803949A1 true FR2803949A1 (fr) | 2001-07-20 |
Family
ID=22815256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9503016A Pending FR2803949A1 (fr) | 1994-03-15 | 1995-03-15 | Detecteur a infrarouges a cavite optique resonante a diffraction photovoltaique a semi-conducteur |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6133570A (enExample) |
| JP (1) | JP2001320074A (enExample) |
| CA (1) | CA2141966A1 (enExample) |
| DE (1) | DE19509358B4 (enExample) |
| FR (1) | FR2803949A1 (enExample) |
| GB (1) | GB2366665B (enExample) |
| NL (1) | NL194815C (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6690014B1 (en) | 2000-04-25 | 2004-02-10 | Raytheon Company | Microbolometer and method for forming |
| US7026602B2 (en) * | 2001-04-13 | 2006-04-11 | Research Triangle Institute | Electromagnetic radiation detectors having a microelectromechanical shutter device |
| US6777681B1 (en) | 2001-04-25 | 2004-08-17 | Raytheon Company | Infrared detector with amorphous silicon detector elements, and a method of making it |
| DE102004045105A1 (de) * | 2004-03-19 | 2005-10-13 | Daimlerchrysler Ag | Verwendung eines Photovoltaik-Elementes als Sensor zur Funktionskontrolle von Sendern im infraroten Bereich |
| US7459686B2 (en) * | 2006-01-26 | 2008-12-02 | L-3 Communications Corporation | Systems and methods for integrating focal plane arrays |
| US7655909B2 (en) * | 2006-01-26 | 2010-02-02 | L-3 Communications Corporation | Infrared detector elements and methods of forming same |
| US7462831B2 (en) * | 2006-01-26 | 2008-12-09 | L-3 Communications Corporation | Systems and methods for bonding |
| US7718965B1 (en) | 2006-08-03 | 2010-05-18 | L-3 Communications Corporation | Microbolometer infrared detector elements and methods for forming same |
| US8153980B1 (en) | 2006-11-30 | 2012-04-10 | L-3 Communications Corp. | Color correction for radiation detectors |
| DE102008032555B3 (de) * | 2008-07-10 | 2010-01-21 | Innolas Systems Gmbh | Strukturierungsvorrichtung für die Strukturierung von plattenförmigen Elementen, insbesondere von Dünnschicht-Solarmodulen, entsprechendes Strukturierungsverfahren sowie Verwendung derselben |
| FR2938973B1 (fr) * | 2008-11-27 | 2011-03-04 | Sagem Defense Securite | Cellules matricielles photosensibles dans l'infrarouge a base d'antimoniure sur substrat optiquement transparent et procede de fabrication associe |
| US9214583B2 (en) * | 2010-03-19 | 2015-12-15 | Hirak Mitra | Method to build transparent polarizing solar cell |
| US8765514B1 (en) | 2010-11-12 | 2014-07-01 | L-3 Communications Corp. | Transitioned film growth for conductive semiconductor materials |
| JP5706174B2 (ja) * | 2011-01-26 | 2015-04-22 | 三菱電機株式会社 | 赤外線センサおよび赤外線センサアレイ |
| CN108565310B (zh) * | 2017-12-14 | 2020-03-31 | 上海集成电路研发中心有限公司 | 一种红外探测器及其制造方法 |
| US10516216B2 (en) | 2018-01-12 | 2019-12-24 | Eagle Technology, Llc | Deployable reflector antenna system |
| US10707552B2 (en) | 2018-08-21 | 2020-07-07 | Eagle Technology, Llc | Folded rib truss structure for reflector antenna with zero over stretch |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0508970A1 (en) * | 1991-04-08 | 1992-10-14 | Im Institutet För Mikroelektronik | Detector for infrared radiation |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4620364A (en) * | 1984-06-11 | 1986-11-04 | Spire Corporation | Method of making a cross-grooved solar cell |
| US4639756A (en) * | 1986-05-05 | 1987-01-27 | Santa Barbara Research Center | Graded gap inversion layer photodiode array |
| US4731640A (en) * | 1986-05-20 | 1988-03-15 | Westinghouse Electric Corp. | High resistance photoconductor structure for multi-element infrared detector arrays |
| JPH0766981B2 (ja) * | 1987-03-26 | 1995-07-19 | 日本電気株式会社 | 赤外線センサ |
| US4970567A (en) * | 1987-11-23 | 1990-11-13 | Santa Barbara Research Center | Method and apparatus for detecting infrared radiation |
| US5179283A (en) * | 1989-08-07 | 1993-01-12 | Santa Barbara Research Center | Infrared detector focal plane |
| US5075749A (en) * | 1989-12-29 | 1991-12-24 | At&T Bell Laboratories | Optical device including a grating |
| US5047622A (en) * | 1990-06-18 | 1991-09-10 | The United States Of America As Represented By The Secretary Of The Navy | Long wavelength infrared detector with heterojunction |
-
1994
- 1994-03-15 US US08/218,472 patent/US6133570A/en not_active Expired - Lifetime
-
1995
- 1995-02-13 CA CA002141966A patent/CA2141966A1/en not_active Abandoned
- 1995-03-03 GB GB9504243A patent/GB2366665B/en not_active Expired - Fee Related
- 1995-03-14 NL NL9500502A patent/NL194815C/nl not_active IP Right Cessation
- 1995-03-15 FR FR9503016A patent/FR2803949A1/fr active Pending
- 1995-03-15 JP JP80000195A patent/JP2001320074A/ja not_active Abandoned
- 1995-03-15 DE DE19509358A patent/DE19509358B4/de not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0508970A1 (en) * | 1991-04-08 | 1992-10-14 | Im Institutet För Mikroelektronik | Detector for infrared radiation |
Non-Patent Citations (3)
| Title |
|---|
| ANDERSSON J Y ET AL: "GRATING-COUPLED QUANTUM-WELL INFRARED DETECTORS: THEORY AND PERFORMANCE", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 71, no. 7, 1 April 1992 (1992-04-01), pages 3600 - 3610, XP002937735, ISSN: 0021-8979 * |
| ANDERSSON J Y ET AL: "NEAR-UNITY QUANTUM EFFICIENCY OF ALGAAS/GAAS QUANTUM WELL INFRARED DETECTORS USING A WAVEGUIDE WITH A DOUBLY PERIODIC GRATING COUPLER", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 59, no. 7, 12 August 1991 (1991-08-12), pages 857 - 859, XP000233772, ISSN: 0003-6951 * |
| LUNDQVIST L ET AL: "EFFICIENCY OF GRATING COUPLED ALGAAS/GAAS QUANTUM WELL INFRARED DETECTORS", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 63, no. 24, 13 December 1993 (1993-12-13), pages 3361 - 3363, XP000416543, ISSN: 0003-6951 * |
Also Published As
| Publication number | Publication date |
|---|---|
| NL194815B (nl) | 2002-11-01 |
| CA2141966A1 (en) | 2002-07-10 |
| US6133570A (en) | 2000-10-17 |
| GB9504243D0 (en) | 2001-11-28 |
| JP2001320074A (ja) | 2001-11-16 |
| NL9500502A (enExample) | 2001-06-01 |
| GB2366665B (en) | 2002-06-26 |
| DE19509358A1 (de) | 2003-07-10 |
| NL194815C (nl) | 2003-03-04 |
| DE19509358B4 (de) | 2005-06-16 |
| GB2366665A (en) | 2002-03-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CD | Change of name or company name | ||
| TP | Transmission of property |