JP2001319909A5 - - Google Patents

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Publication number
JP2001319909A5
JP2001319909A5 JP2000135222A JP2000135222A JP2001319909A5 JP 2001319909 A5 JP2001319909 A5 JP 2001319909A5 JP 2000135222 A JP2000135222 A JP 2000135222A JP 2000135222 A JP2000135222 A JP 2000135222A JP 2001319909 A5 JP2001319909 A5 JP 2001319909A5
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JP
Japan
Prior art keywords
processing
liquid
supply
area
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000135222A
Other languages
English (en)
Japanese (ja)
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JP2001319909A (ja
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Publication date
Application filed filed Critical
Priority to JP2000135222A priority Critical patent/JP2001319909A/ja
Priority claimed from JP2000135222A external-priority patent/JP2001319909A/ja
Priority to US09/849,880 priority patent/US6827814B2/en
Priority to TW090110840A priority patent/TWI263259B/zh
Priority to KR1020010024792A priority patent/KR100787067B1/ko
Publication of JP2001319909A publication Critical patent/JP2001319909A/ja
Publication of JP2001319909A5 publication Critical patent/JP2001319909A5/ja
Pending legal-status Critical Current

Links

JP2000135222A 2000-05-08 2000-05-08 液処理装置及び液処理方法 Pending JP2001319909A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000135222A JP2001319909A (ja) 2000-05-08 2000-05-08 液処理装置及び液処理方法
US09/849,880 US6827814B2 (en) 2000-05-08 2001-05-04 Processing apparatus, processing system and processing method
TW090110840A TWI263259B (en) 2000-05-08 2001-05-07 Processing apparatus, processing system and processing method
KR1020010024792A KR100787067B1 (ko) 2000-05-08 2001-05-08 처리 장치, 처리 시스템 및 처리 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000135222A JP2001319909A (ja) 2000-05-08 2000-05-08 液処理装置及び液処理方法

Publications (2)

Publication Number Publication Date
JP2001319909A JP2001319909A (ja) 2001-11-16
JP2001319909A5 true JP2001319909A5 (enrdf_load_stackoverflow) 2007-06-21

Family

ID=18643339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000135222A Pending JP2001319909A (ja) 2000-05-08 2000-05-08 液処理装置及び液処理方法

Country Status (1)

Country Link
JP (1) JP2001319909A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006004955A (ja) * 2003-05-30 2006-01-05 Ebara Corp 基板処理装置及び基板処理方法
TWI373804B (en) * 2007-07-13 2012-10-01 Lam Res Ag Apparatus and method for wet treatment of disc-like articles
US9748120B2 (en) 2013-07-01 2017-08-29 Lam Research Ag Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
JP6618334B2 (ja) 2015-06-03 2019-12-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、膜形成ユニット、基板処理方法および膜形成方法
KR20230010693A (ko) 2020-05-15 2023-01-19 가부시키가이샤 에바라 세이사꾸쇼 세정 장치 및 세정 방법

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