JP2001312069A5 - - Google Patents

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Publication number
JP2001312069A5
JP2001312069A5 JP2000128714A JP2000128714A JP2001312069A5 JP 2001312069 A5 JP2001312069 A5 JP 2001312069A5 JP 2000128714 A JP2000128714 A JP 2000128714A JP 2000128714 A JP2000128714 A JP 2000128714A JP 2001312069 A5 JP2001312069 A5 JP 2001312069A5
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JP
Japan
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JP2000128714A
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Japanese (ja)
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JP2001312069A (ja
JP4508354B2 (ja
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Priority claimed from JP2000128714A external-priority patent/JP4508354B2/ja
Publication of JP2001312069A publication Critical patent/JP2001312069A/ja
Publication of JP2001312069A5 publication Critical patent/JP2001312069A5/ja
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Publication of JP4508354B2 publication Critical patent/JP4508354B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2000128714A 2000-04-28 2000-04-28 走査露光装置および走査露光方法 Expired - Fee Related JP4508354B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000128714A JP4508354B2 (ja) 2000-04-28 2000-04-28 走査露光装置および走査露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000128714A JP4508354B2 (ja) 2000-04-28 2000-04-28 走査露光装置および走査露光方法

Publications (3)

Publication Number Publication Date
JP2001312069A JP2001312069A (ja) 2001-11-09
JP2001312069A5 true JP2001312069A5 (enrdf_load_stackoverflow) 2007-06-21
JP4508354B2 JP4508354B2 (ja) 2010-07-21

Family

ID=18638114

Family Applications (1)

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JP2000128714A Expired - Fee Related JP4508354B2 (ja) 2000-04-28 2000-04-28 走査露光装置および走査露光方法

Country Status (1)

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JP (1) JP4508354B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100997968B1 (ko) 2003-10-13 2010-12-02 삼성전자주식회사 박막 트랜지스터 표시판의 제조 방법
JP4401834B2 (ja) 2004-03-23 2010-01-20 株式会社アドテックエンジニアリング 露光装置及び位置合わせ方法
JP5133239B2 (ja) * 2006-04-05 2013-01-30 シャープ株式会社 露光方法および露光装置
WO2012073810A1 (ja) * 2010-12-03 2012-06-07 シャープ株式会社 表示パネル用基板及び基板露光方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919318A (ja) * 1982-07-23 1984-01-31 Hitachi Ltd 転写パタ−ンの位置ずれ検査方法および転写パタ−ンマスク
JPS61201427A (ja) * 1985-03-04 1986-09-06 Nippon Kogaku Kk <Nikon> 位置ずれ検出方法
JPS61226924A (ja) * 1985-04-01 1986-10-08 Canon Inc 露光装置
JPS61242021A (ja) * 1985-04-19 1986-10-28 Canon Inc 露光装置
JPH03180017A (ja) * 1989-12-08 1991-08-06 Fujitsu Ltd 半導体装置の製造方法
JP2741114B2 (ja) * 1991-05-08 1998-04-15 日立電子エンジニアリング株式会社 カラー用液晶基板の位置合わせ方法
JPH05265027A (ja) * 1992-03-24 1993-10-15 Toshiba Corp 位置決め方法及びその装置
JP3198310B2 (ja) * 1993-01-06 2001-08-13 株式会社ニコン 露光方法及び装置
JP3259409B2 (ja) * 1993-02-16 2002-02-25 株式会社ニコン 露光装置
JPH07297106A (ja) * 1994-04-25 1995-11-10 Dainippon Screen Mfg Co Ltd 拡大投影型露光装置における投影像のアライメント方法
JP3379238B2 (ja) * 1994-09-08 2003-02-24 株式会社ニコン 走査型露光装置
JPH08293453A (ja) * 1995-04-25 1996-11-05 Canon Inc 走査型露光装置及び該装置を用いた露光方法
JPH09115820A (ja) * 1995-10-13 1997-05-02 Nikon Corp 走査型露光装置及び露光方法
AU2549899A (en) * 1998-03-02 1999-09-20 Nikon Corporation Method and apparatus for exposure, method of manufacture of exposure tool, device, and method of manufacture of device
JP2001296667A (ja) * 2000-04-14 2001-10-26 Nikon Corp 走査露光方法および走査型露光装置並びにマスク

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