JP2001308064A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JP2001308064A
JP2001308064A JP2000127502A JP2000127502A JP2001308064A JP 2001308064 A JP2001308064 A JP 2001308064A JP 2000127502 A JP2000127502 A JP 2000127502A JP 2000127502 A JP2000127502 A JP 2000127502A JP 2001308064 A JP2001308064 A JP 2001308064A
Authority
JP
Japan
Prior art keywords
film
wafer
polycrystalline silicon
sio
silicon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000127502A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001308064A5 (enExample
Inventor
Makoto Hirata
誠 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2000127502A priority Critical patent/JP2001308064A/ja
Publication of JP2001308064A publication Critical patent/JP2001308064A/ja
Publication of JP2001308064A5 publication Critical patent/JP2001308064A5/ja
Pending legal-status Critical Current

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  • Weting (AREA)
  • Semiconductor Memories (AREA)
JP2000127502A 2000-04-27 2000-04-27 半導体装置の製造方法 Pending JP2001308064A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000127502A JP2001308064A (ja) 2000-04-27 2000-04-27 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000127502A JP2001308064A (ja) 2000-04-27 2000-04-27 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2001308064A true JP2001308064A (ja) 2001-11-02
JP2001308064A5 JP2001308064A5 (enExample) 2007-01-18

Family

ID=18637088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000127502A Pending JP2001308064A (ja) 2000-04-27 2000-04-27 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP2001308064A (enExample)

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