JP2001266125A5 - - Google Patents
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- JP2001266125A5 JP2001266125A5 JP2000072848A JP2000072848A JP2001266125A5 JP 2001266125 A5 JP2001266125 A5 JP 2001266125A5 JP 2000072848 A JP2000072848 A JP 2000072848A JP 2000072848 A JP2000072848 A JP 2000072848A JP 2001266125 A5 JP2001266125 A5 JP 2001266125A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000072848A JP4744665B2 (ja) | 2000-03-15 | 2000-03-15 | 基板検査装置及び基板検査システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000072848A JP4744665B2 (ja) | 2000-03-15 | 2000-03-15 | 基板検査装置及び基板検査システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001266125A JP2001266125A (ja) | 2001-09-28 |
| JP2001266125A5 true JP2001266125A5 (fr) | 2007-05-10 |
| JP4744665B2 JP4744665B2 (ja) | 2011-08-10 |
Family
ID=18591190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000072848A Expired - Fee Related JP4744665B2 (ja) | 2000-03-15 | 2000-03-15 | 基板検査装置及び基板検査システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4744665B2 (fr) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100689694B1 (ko) * | 2001-12-27 | 2007-03-08 | 삼성전자주식회사 | 웨이퍼상에 발생된 결함을 검출하는 방법 및 장치 |
| JP4088448B2 (ja) * | 2002-01-21 | 2008-05-21 | 日本総合住生活株式会社 | 外壁検査装置および外壁検査方法並びに外壁検査診断システム |
| JP2006220644A (ja) * | 2005-01-14 | 2006-08-24 | Hitachi High-Technologies Corp | パターン検査方法及びその装置 |
| JP2009014617A (ja) * | 2007-07-06 | 2009-01-22 | Olympus Corp | 基板外観検査装置 |
| JP2014066628A (ja) * | 2012-09-26 | 2014-04-17 | Ricoh Co Ltd | 画像検査装置、画像検査システム及び画像検査方法 |
| KR102008474B1 (ko) * | 2012-11-27 | 2019-08-08 | 엘지디스플레이 주식회사 | 디스플레이 장치의 검사 시스템 및 검사 방법 |
| KR101478790B1 (ko) | 2013-10-14 | 2015-01-06 | (주)에이티테크놀러지 | 인쇄회로기판의 테스트 장치 |
| KR102290488B1 (ko) * | 2016-08-12 | 2021-08-18 | 에스케이하이닉스 주식회사 | 반도체 패턴 계측을 위한 이미지 분석 장치 및 방법과, 이를 이용한 이미지 분석 시스템 |
| JP6953712B2 (ja) * | 2016-12-26 | 2021-10-27 | 住友ゴム工業株式会社 | タイヤの外観検査装置 |
| CN110033724A (zh) * | 2019-04-19 | 2019-07-19 | 陈波 | 一种广告液晶显示屏缺陷自动检测系统 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2974899A (en) * | 1998-02-25 | 1999-09-15 | Steven M. Shepard | Data integration and registration method and apparatus for non-destructive evaluation of materials |
| JP4105809B2 (ja) * | 1998-09-08 | 2008-06-25 | 株式会社ルネサステクノロジ | 外観検査方法および外観検査装置 |
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2000
- 2000-03-15 JP JP2000072848A patent/JP4744665B2/ja not_active Expired - Fee Related