JP2001248964A - ガス精製装置およびガス精製方法 - Google Patents
ガス精製装置およびガス精製方法Info
- Publication number
- JP2001248964A JP2001248964A JP2000062999A JP2000062999A JP2001248964A JP 2001248964 A JP2001248964 A JP 2001248964A JP 2000062999 A JP2000062999 A JP 2000062999A JP 2000062999 A JP2000062999 A JP 2000062999A JP 2001248964 A JP2001248964 A JP 2001248964A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cooling
- impurity
- refrigerator
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000007670 refining Methods 0.000 title claims abstract description 6
- 239000012535 impurity Substances 0.000 claims abstract description 94
- 238000001816 cooling Methods 0.000 claims description 43
- 238000000746 purification Methods 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 30
- 238000001914 filtration Methods 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 abstract description 167
- 239000001307 helium Substances 0.000 abstract description 48
- 229910052734 helium Inorganic materials 0.000 abstract description 48
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 48
- 239000003463 adsorbent Substances 0.000 abstract description 7
- 238000007710 freezing Methods 0.000 abstract description 4
- 230000008014 freezing Effects 0.000 abstract description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000112 cooling gas Substances 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 61
- 229910052757 nitrogen Inorganic materials 0.000 description 31
- 238000001179 sorption measurement Methods 0.000 description 20
- 239000002994 raw material Substances 0.000 description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 230000008929 regeneration Effects 0.000 description 8
- 238000011069 regeneration method Methods 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000009835 boiling Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/02—Processes or apparatus using other separation and/or other processing means using simple phase separation in a vessel or drum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/20—Processes or apparatus using other separation and/or other processing means using solidification of components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/60—Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/10—Hydrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/30—Helium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2270/00—Refrigeration techniques used
- F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
- F25J2270/908—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by regenerative chillers, i.e. oscillating or dynamic systems, e.g. Stirling refrigerator, thermoelectric ("Peltier") or magnetic refrigeration
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000062999A JP2001248964A (ja) | 2000-03-08 | 2000-03-08 | ガス精製装置およびガス精製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000062999A JP2001248964A (ja) | 2000-03-08 | 2000-03-08 | ガス精製装置およびガス精製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001248964A true JP2001248964A (ja) | 2001-09-14 |
| JP2001248964A5 JP2001248964A5 (enExample) | 2007-03-01 |
Family
ID=18582932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000062999A Pending JP2001248964A (ja) | 2000-03-08 | 2000-03-08 | ガス精製装置およびガス精製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001248964A (enExample) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004070296A1 (ja) * | 2003-02-03 | 2004-08-19 | Japan Science And Technology Agency | 汚染物質排出機能を備えた循環式液体ヘリウム再液化装置、その装置からの汚染物質排出方法、その装置に使用する精製器およびトランスファーチューブ |
| WO2015005944A1 (en) * | 2013-07-08 | 2015-01-15 | Quantum Design International, Inc. | Cryocooler-based gas scrubber |
| JP2015508882A (ja) * | 2012-02-10 | 2015-03-23 | 中船重工鵬力(南京)超低温技術有限公司Csic Pride (Nanjing) Cryogenic Technology Co., Ltd. | 小型低温冷凍装置に基づく、ガスの分離および精製のための低温装置 |
| CN104771968A (zh) * | 2015-03-19 | 2015-07-15 | 中国科学院等离子体物理研究所 | 氦低温系统透平膨胀机用可拆卸高精度深低温过滤器 |
| CN104944393A (zh) * | 2015-06-16 | 2015-09-30 | 上海正帆科技有限公司 | 一种提浓纯化高纯氦气的装置和方法 |
| EP3001129A1 (en) * | 2014-09-25 | 2016-03-30 | Quantum Design International, Inc. | Apparatus and method for purifying gases and method of regenerating the same |
| CN110608581A (zh) * | 2019-08-22 | 2019-12-24 | 北京中科富海低温科技有限公司 | 一种内纯化器和氦液化器 |
| CN111298596A (zh) * | 2020-04-14 | 2020-06-19 | 中船重工鹏力(南京)超低温技术有限公司 | 一种基于低温冷源的稀有气体纯化装置 |
| CN113384992A (zh) * | 2021-07-09 | 2021-09-14 | 深圳市福田区南科大量子技术与工程研究院 | 一种氦三气体提纯装置 |
| WO2021204422A1 (de) * | 2020-04-07 | 2021-10-14 | Linde Kryotechnik Ag | Verfahren und vorrichtung zum abtrennen unerwünschter komponenten aus einem helium-strom |
| JP2022166371A (ja) * | 2021-04-21 | 2022-11-02 | 大陽日酸株式会社 | ガス精製装置 |
| US20230271105A1 (en) * | 2012-11-21 | 2023-08-31 | 1372934 B.C. Ltd. | Systems and methods for cryogenic refrigeration |
-
2000
- 2000-03-08 JP JP2000062999A patent/JP2001248964A/ja active Pending
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7565809B2 (en) | 2003-02-03 | 2009-07-28 | Japan Science And Technology Agency | Circulation-type liquid helium reliquefaction apparatus with contaminant discharge function, method of discharging contaminant from the apparatus, and refiner and transfer tube both of which are used for the apparatus |
| EP1600713A4 (en) * | 2003-02-03 | 2009-11-18 | Japan Science & Tech Agency | DEVICE FOR ROTATING THE LIQUID LIQUID HELIUM WITH DIRT MATERIAL FUNCTION, METHOD FOR PURGING REMOVAL FROM THE DEVICE AND CLEANING AND TRANSPORTING HOSE USED BY THE EQUIPMENT |
| EP2253911A3 (en) * | 2003-02-03 | 2013-05-22 | Japan Science And Technology Agency | Refiner for a circulation type liquid helium recondensation device with a contaminant purging function |
| WO2004070296A1 (ja) * | 2003-02-03 | 2004-08-19 | Japan Science And Technology Agency | 汚染物質排出機能を備えた循環式液体ヘリウム再液化装置、その装置からの汚染物質排出方法、その装置に使用する精製器およびトランスファーチューブ |
| US10113793B2 (en) | 2012-02-08 | 2018-10-30 | Quantum Design International, Inc. | Cryocooler-based gas scrubber |
| EP2829830A4 (en) * | 2012-02-10 | 2016-03-16 | Csic Pride Nanjing Cryogenic Tech Co Ltd | LOW TEMPERATURE DEVICE FOR SEPARATING AND CLEANING GAS BASED ON A SMALL LOW TEMPERATURE COOLING MACHINE |
| JP2015508882A (ja) * | 2012-02-10 | 2015-03-23 | 中船重工鵬力(南京)超低温技術有限公司Csic Pride (Nanjing) Cryogenic Technology Co., Ltd. | 小型低温冷凍装置に基づく、ガスの分離および精製のための低温装置 |
| US20230271105A1 (en) * | 2012-11-21 | 2023-08-31 | 1372934 B.C. Ltd. | Systems and methods for cryogenic refrigeration |
| WO2015005944A1 (en) * | 2013-07-08 | 2015-01-15 | Quantum Design International, Inc. | Cryocooler-based gas scrubber |
| US10352617B2 (en) | 2014-09-25 | 2019-07-16 | University Of Zaragoza | Apparatus and method for purifying gases and method of regenerating the same |
| EP3001129A1 (en) * | 2014-09-25 | 2016-03-30 | Quantum Design International, Inc. | Apparatus and method for purifying gases and method of regenerating the same |
| US20160091245A1 (en) * | 2014-09-25 | 2016-03-31 | Quantum Design International, Inc. | Apparatus and method for purifying gases and method of regenerating the same |
| JP2016070647A (ja) * | 2014-09-25 | 2016-05-09 | クアンタム デザイン インターナショナル インコーポレイテッドQuantum Design International,Inc. | ガスを精製するための装置及び方法並びに同装置を再生するための方法 |
| CN105983293B (zh) * | 2014-09-25 | 2019-07-05 | 量子设计国际股份有限公司 | 用于净化气体的设备和方法及再生该气体的方法 |
| CN105983293A (zh) * | 2014-09-25 | 2016-10-05 | 量子设计国际股份有限公司 | 用于净化气体的设备和方法及再生该气体的方法 |
| CN104771968B (zh) * | 2015-03-19 | 2016-08-24 | 中国科学院等离子体物理研究所 | 氦低温系统透平膨胀机用可拆卸高精度深低温过滤器 |
| CN104771968A (zh) * | 2015-03-19 | 2015-07-15 | 中国科学院等离子体物理研究所 | 氦低温系统透平膨胀机用可拆卸高精度深低温过滤器 |
| CN104944393A (zh) * | 2015-06-16 | 2015-09-30 | 上海正帆科技有限公司 | 一种提浓纯化高纯氦气的装置和方法 |
| CN110608581A (zh) * | 2019-08-22 | 2019-12-24 | 北京中科富海低温科技有限公司 | 一种内纯化器和氦液化器 |
| CN110608581B (zh) * | 2019-08-22 | 2021-05-14 | 北京中科富海低温科技有限公司 | 一种内纯化器和氦液化器 |
| WO2021204422A1 (de) * | 2020-04-07 | 2021-10-14 | Linde Kryotechnik Ag | Verfahren und vorrichtung zum abtrennen unerwünschter komponenten aus einem helium-strom |
| CN111298596A (zh) * | 2020-04-14 | 2020-06-19 | 中船重工鹏力(南京)超低温技术有限公司 | 一种基于低温冷源的稀有气体纯化装置 |
| JP2022166371A (ja) * | 2021-04-21 | 2022-11-02 | 大陽日酸株式会社 | ガス精製装置 |
| JP7330225B2 (ja) | 2021-04-21 | 2023-08-21 | 大陽日酸株式会社 | ガス精製装置 |
| CN113384992A (zh) * | 2021-07-09 | 2021-09-14 | 深圳市福田区南科大量子技术与工程研究院 | 一种氦三气体提纯装置 |
| CN113384992B (zh) * | 2021-07-09 | 2025-08-05 | 深圳市福田区南科大量子技术与工程研究院 | 一种氦三气体提纯装置 |
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