JP2001239143A - 排気速度調整機能付き防着バッフル搭載真空装置 - Google Patents

排気速度調整機能付き防着バッフル搭載真空装置

Info

Publication number
JP2001239143A
JP2001239143A JP2000052666A JP2000052666A JP2001239143A JP 2001239143 A JP2001239143 A JP 2001239143A JP 2000052666 A JP2000052666 A JP 2000052666A JP 2000052666 A JP2000052666 A JP 2000052666A JP 2001239143 A JP2001239143 A JP 2001239143A
Authority
JP
Japan
Prior art keywords
chamber
angle
baffle
vacuum
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000052666A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001239143A5 (enExample
Inventor
Tatsushi Ishigami
達士 石上
Katsuyoshi Toda
勝善 戸田
Tokuichi Yamamoto
篤一 山本
Shigeru Otani
茂 大谷
Kiyoshi Hosokawa
清 細川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Shinku Co Ltd
Original Assignee
Showa Shinku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Shinku Co Ltd filed Critical Showa Shinku Co Ltd
Priority to JP2000052666A priority Critical patent/JP2001239143A/ja
Publication of JP2001239143A publication Critical patent/JP2001239143A/ja
Publication of JP2001239143A5 publication Critical patent/JP2001239143A5/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP2000052666A 2000-02-29 2000-02-29 排気速度調整機能付き防着バッフル搭載真空装置 Pending JP2001239143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000052666A JP2001239143A (ja) 2000-02-29 2000-02-29 排気速度調整機能付き防着バッフル搭載真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000052666A JP2001239143A (ja) 2000-02-29 2000-02-29 排気速度調整機能付き防着バッフル搭載真空装置

Publications (2)

Publication Number Publication Date
JP2001239143A true JP2001239143A (ja) 2001-09-04
JP2001239143A5 JP2001239143A5 (enExample) 2006-11-09

Family

ID=18574147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000052666A Pending JP2001239143A (ja) 2000-02-29 2000-02-29 排気速度調整機能付き防着バッフル搭載真空装置

Country Status (1)

Country Link
JP (1) JP2001239143A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005108637A1 (ja) * 2004-05-10 2005-11-17 Showa Shinku Co., Ltd. 真空槽の変形防止補強構造
JP2009209439A (ja) * 2008-03-06 2009-09-17 Tsukishima Kikai Co Ltd 真空成膜装置
JP2016505711A (ja) * 2012-11-30 2016-02-25 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 処理チャンバガス流装置、システム、及び方法
JP2018152577A (ja) * 2013-07-03 2018-09-27 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ コンダクタンス制御を有する化学蒸着装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043774U (ja) * 1983-09-02 1985-03-27 日電アネルバ株式会社 可変コンダクタンス装置
JPS62174367A (ja) * 1986-01-29 1987-07-31 Toray Ind Inc 高真空装置
JPH1096074A (ja) * 1996-09-19 1998-04-14 Nissin Electric Co Ltd 基板処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043774U (ja) * 1983-09-02 1985-03-27 日電アネルバ株式会社 可変コンダクタンス装置
JPS62174367A (ja) * 1986-01-29 1987-07-31 Toray Ind Inc 高真空装置
JPH1096074A (ja) * 1996-09-19 1998-04-14 Nissin Electric Co Ltd 基板処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005108637A1 (ja) * 2004-05-10 2005-11-17 Showa Shinku Co., Ltd. 真空槽の変形防止補強構造
JP2009209439A (ja) * 2008-03-06 2009-09-17 Tsukishima Kikai Co Ltd 真空成膜装置
JP2016505711A (ja) * 2012-11-30 2016-02-25 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 処理チャンバガス流装置、システム、及び方法
JP2018152577A (ja) * 2013-07-03 2018-09-27 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ コンダクタンス制御を有する化学蒸着装置

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