JP2001234929A - 磁気軸受及び循環ファン装置 - Google Patents

磁気軸受及び循環ファン装置

Info

Publication number
JP2001234929A
JP2001234929A JP2000042592A JP2000042592A JP2001234929A JP 2001234929 A JP2001234929 A JP 2001234929A JP 2000042592 A JP2000042592 A JP 2000042592A JP 2000042592 A JP2000042592 A JP 2000042592A JP 2001234929 A JP2001234929 A JP 2001234929A
Authority
JP
Japan
Prior art keywords
electromagnet
magnetic
displacement sensor
magnetic bearing
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000042592A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001234929A5 (https=
Inventor
Shinichi Sekiguchi
信一 関口
Hiroyuki Shinozaki
弘行 篠崎
Shiyunichi Aiyoshizawa
俊一 相吉澤
Toshimitsu Ibarada
敏光 茨田
Atsushi Oyama
敦 大山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Densan Ltd
Original Assignee
Ebara Corp
Ebara Densan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Densan Ltd filed Critical Ebara Corp
Priority to JP2000042592A priority Critical patent/JP2001234929A/ja
Priority to TW090103774A priority patent/TW568984B/zh
Priority to US09/785,304 priority patent/US6519273B2/en
Priority to DE60115972T priority patent/DE60115972T2/de
Priority to EP01104190A priority patent/EP1128079B1/en
Priority to KR1020010008760A priority patent/KR20010083232A/ko
Publication of JP2001234929A publication Critical patent/JP2001234929A/ja
Publication of JP2001234929A5 publication Critical patent/JP2001234929A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
    • F16C32/0465—Details of the magnetic circuit of stationary parts of the magnetic circuit with permanent magnets provided in the magnetic circuit of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0468—Details of the magnetic circuit of moving parts of the magnetic circuit, e.g. of the rotor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/42—Application independent of particular apparatuses related to environment, i.e. operating conditions corrosive, i.e. with aggressive media or harsh conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Lasers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2000042592A 2000-02-21 2000-02-21 磁気軸受及び循環ファン装置 Pending JP2001234929A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2000042592A JP2001234929A (ja) 2000-02-21 2000-02-21 磁気軸受及び循環ファン装置
TW090103774A TW568984B (en) 2000-02-21 2001-02-20 Magnetic bearing and circulation fan apparatus
US09/785,304 US6519273B2 (en) 2000-02-21 2001-02-20 Magnetic bearing and circulation fan apparatus
DE60115972T DE60115972T2 (de) 2000-02-21 2001-02-21 Magnetlager und Lüftereinheit
EP01104190A EP1128079B1 (en) 2000-02-21 2001-02-21 Magnetic bearing and circulation fan apparatus
KR1020010008760A KR20010083232A (ko) 2000-02-21 2001-02-21 자기 베어링 및 순환 팬 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000042592A JP2001234929A (ja) 2000-02-21 2000-02-21 磁気軸受及び循環ファン装置

Publications (2)

Publication Number Publication Date
JP2001234929A true JP2001234929A (ja) 2001-08-31
JP2001234929A5 JP2001234929A5 (https=) 2004-12-02

Family

ID=18565648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000042592A Pending JP2001234929A (ja) 2000-02-21 2000-02-21 磁気軸受及び循環ファン装置

Country Status (6)

Country Link
US (1) US6519273B2 (https=)
EP (1) EP1128079B1 (https=)
JP (1) JP2001234929A (https=)
KR (1) KR20010083232A (https=)
DE (1) DE60115972T2 (https=)
TW (1) TW568984B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003106333A (ja) * 2001-09-28 2003-04-09 Ntn Corp 磁気軸受装置

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6463311B1 (en) * 1998-12-30 2002-10-08 Masimo Corporation Plethysmograph pulse recognition processor
JP2001111138A (ja) * 1999-10-04 2001-04-20 Ebara Corp エキシマレーザ装置
EP1188932A3 (en) * 2000-09-19 2003-05-02 Ntn Corporation Bearing structure for laser fan
US20070262668A1 (en) * 2006-05-11 2007-11-15 General Electric Company Magnetic Bearings, Armatures for Magnetic Bearings, and Methods for Assembling the Same
JP2008196548A (ja) * 2007-02-09 2008-08-28 Ihi Corp 磁気軸受装置
KR20110014590A (ko) * 2008-04-17 2011-02-11 신크로니, 아이엔씨. 저-손실 금속 회전자를 구비한 고속 영구자석 모터 및 발전기
CA2721818A1 (en) 2008-04-18 2009-11-19 Synchrony, Inc. Magnetic thrust bearing with integrated electronics
US8513826B2 (en) * 2008-06-26 2013-08-20 Ed Mazur Wind turbine
DE102008034552A1 (de) * 2008-07-24 2010-02-04 Siemens Aktiengesellschaft Magnetlagerelement
US9583991B2 (en) * 2009-06-24 2017-02-28 Synchrony, Inc. Systems, devices, and/or methods for managing magnetic bearings
DE102010001538A1 (de) * 2010-02-03 2011-08-04 Trumpf Maschinen Ag Gaslaser mit Radial- und Axialgaslager
US8987959B2 (en) 2010-06-23 2015-03-24 Dresser-Rand Company Split magnetic thrust bearing
CN101907130B (zh) * 2010-07-09 2011-12-28 北京奇峰聚能科技有限公司 一种两气隙永磁偏置内转子径向磁轴承
DE102010064067A1 (de) 2010-12-23 2012-06-28 Siemens Aktiengesellschaft Radialmagnetlager zur magnetischen Lagerung eines Rotors
EP2918845B2 (en) 2014-03-11 2022-01-12 Skf Magnetic Mechatronics Rotary machine and method for manufacturing a rotary machine
CN105317839A (zh) * 2015-12-14 2016-02-10 珠海格力节能环保制冷技术研究中心有限公司 磁悬浮轴承定子组件及制作方法
CN108006069A (zh) * 2017-12-28 2018-05-08 苏州麦格奈迪磁悬浮技术有限公司 一种磁悬浮轴承转子以及磁悬浮转子系统
CN111431327B (zh) * 2020-03-13 2022-02-08 江苏理工学院 一种自动夹持保护轴承装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173259A (ja) * 1996-12-06 1998-06-26 Komatsu Ltd エキシマレーザ装置
JPH1198729A (ja) * 1997-09-18 1999-04-09 Fanuc Ltd 同期電動機のロータ構造
JPH11303793A (ja) * 1998-02-18 1999-11-02 Ebara Corp 循環ファン装置及び循環ファン駆動用モータ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1165704A (en) * 1965-08-27 1969-10-01 Nat Res Dev Elektromagnetic Control Apparatus
FR2377550A1 (fr) * 1977-01-12 1978-08-11 Europ Propulsion Palier electromagnetique axial
US4385251A (en) * 1981-09-28 1983-05-24 General Electric Company Flux shield for an inductor-alternator machine
US4786834A (en) * 1987-07-06 1988-11-22 Rem Technologies, Inc. Stator assembly for dynamoelectric machine
US5980193A (en) * 1996-09-18 1999-11-09 Magnetic Bearing Technologies, Inc. Magnetically levitated robot and method of increasing levitation force
US6020665A (en) * 1998-02-25 2000-02-01 Electric Boat Corporation Permanent magnet synchronous machine with integrated magnetic bearings
JP2000138404A (ja) * 1998-10-29 2000-05-16 Komatsu Ltd エキシマレーザ装置用の貫流ファン
JP2000259252A (ja) * 1999-03-09 2000-09-22 Ebara Corp 磁気浮上装置の制御装置
JP3766230B2 (ja) * 1999-04-21 2006-04-12 株式会社荏原製作所 エキシマレーザ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173259A (ja) * 1996-12-06 1998-06-26 Komatsu Ltd エキシマレーザ装置
JPH1198729A (ja) * 1997-09-18 1999-04-09 Fanuc Ltd 同期電動機のロータ構造
JPH11303793A (ja) * 1998-02-18 1999-11-02 Ebara Corp 循環ファン装置及び循環ファン駆動用モータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003106333A (ja) * 2001-09-28 2003-04-09 Ntn Corp 磁気軸受装置

Also Published As

Publication number Publication date
TW568984B (en) 2004-01-01
DE60115972T2 (de) 2006-09-07
DE60115972D1 (de) 2006-01-26
US20010017877A1 (en) 2001-08-30
EP1128079B1 (en) 2005-12-21
EP1128079A3 (en) 2003-12-17
US6519273B2 (en) 2003-02-11
KR20010083232A (ko) 2001-08-31
EP1128079A2 (en) 2001-08-29

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