JP2001222946A - Method of forming rib of plasma display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to pattern ribs, while protecting parts not subject to grinding, without regard to the efficiency of sand-blast processing. SOLUTION: In patterning ribs of a plasma display panel by a sand-blast method, the sand-blast processing is performed after previously disposing a shielding member to cover parts that should not be damaged by the blast. Therefore, the ribs can be patterned preventing damages on terminal parts of electrodes or glass surfaces by grinding material without regard to the efficiency of the sand-blast processing. As the shielding member, a cover fig 13, which can be engaged with/disengaged from a circuit board G, may be used, or a shielding board to be disposed over the circuit board may be used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process for manufacturing a plasma display panel (hereinafter, referred to as PDP), and more particularly, to a method for forming a rib for defining a discharge space of a PDP.

[0002]

2. Description of the Related Art In general, a PDP has a structure in which a pair of electrodes arranged regularly on two opposing glass substrates are provided, and a gas mainly composed of Ne, Xe or the like is sealed between the electrodes. Then, a voltage is applied between these electrodes,
By generating a discharge in a minute cell around the electrode, each cell emits light to perform display. In order to display information, regularly arranged cells are selectively caused to emit light. There are two types of PDPs, a direct current type (DC type) in which the electrodes are exposed to the discharge space, and an alternating current type (AC type) in which the electrodes are covered with an insulating layer. And a refresh driving method and a memory driving method.

FIG. 1 shows a configuration example of an AC type PDP. This figure shows the front plate and the back plate separated from each other. As shown in the figure, two glass substrates 1 and 2 are arranged in parallel and opposed to each other, and both become the back plate. The ribs 3 provided on the glass substrate 2 in parallel with each other are held at regular intervals. On the back side of the glass substrate 1 serving as a front plate, composite electrodes composed of a sustain electrode 4 which is a transparent electrode and a bus electrode 5 which is a metal electrode are formed in parallel with each other, and a dielectric layer 6 is covered thereover. The protective layer 7 (MgO layer) is further formed thereon. On the front side of the glass substrate 2 serving as the back plate, address electrodes 8 are formed between the ribs 3 so as to be orthogonal to the composite electrodes and are formed in parallel with each other. Are formed, and a phosphor 10 is provided so as to cover the wall surface of the rib 3 and the cell bottom surface. This AC type PDP is of a surface discharge type, and has a structure in which an AC voltage is applied between composite electrodes on the front panel to discharge. Then, the phosphor 10 emits light by the ultraviolet light generated by the discharge, so that an observer can visually recognize the light transmitted through the front plate.

[0004] As a method of forming the ribs on the back plate of the PDP as described above, it has been general that the glass paste is overprinted by screen printing and then patterned and then baked. Since good line width accuracy cannot be obtained despite its complexity, recently, a glass paste is applied to a substrate at a predetermined thickness and dried, and a mask with sand blast resistance is patterned on it. Then, the glass paste is ground by applying sand blasting through this mask to pattern a rib having a desired shape, followed by firing. In the sand blasting process, glass beads having a particle size of about 2 to 50 μm are used as abrasives.
Inorganic fine particles such as iC, SiO ₂ , Al ₂ O ₃ , and ZrO ₂ are used.

[0005]

When the ribs of a PDP are patterned by the above sandblasting, it is important that the abrasive used is capable of cutting the rib-forming material layer quickly, is hard to break, and has a long life as the abrasive. It is. It is also important that the glass substrate, the dielectric layer, and the electrode under the rib-forming material layer are not affected as much as possible. In particular, roughening of the glass surface and disconnection of the electrode must be prevented. However, no abrasives satisfying these two points have been found, and the abrasives actually used mentioned above are no exception.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method of patterning a rib in a state where a portion that cannot be ground is protected, regardless of the cutting efficiency of sandblasting. PDP that can do
To provide a rib forming method.

[0007]

In order to achieve the above object, the present invention provides a method for forming a rib forming material layer on a substrate, forming a mask for sand blasting in a pattern thereon, and then forming the mask on the mask. Patterning the rib-forming material layer by sand blasting through, then removing the anti-sand blasting mask, and forming a rib having a desired pattern through a firing step. This is performed after a shielding member is arranged in advance so as to cover a portion that should not be damaged by blasting.

[0008] As the above-mentioned shielding member, a cover jig which can be fitted to and removed from the substrate may be used, or a shielding plate arranged above the substrate may be used. In the latter case, the shielding plate to be used is fixed to the blast device, and is installed so as to be located between the substrate and the spray nozzle.
And it is preferable to attach a hanging curtain made of a flexible material to the side surface of the shielding plate.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS PDP by sandblasting
An ordinary method is used to pattern the ribs. First, a rib-forming material layer is formed by applying and drying a rib-forming paste on a glass substrate on which electrodes and a dielectric layer are formed, and a photosensitive resin composition layer having sandblast resistance is formed thereon. After the formation, a mask pattern for sandblasting is formed by selectively irradiating an actinic ray through a photomask and subsequently performing development. The substrate on which the mask up to the sandblasting mask has been formed is cut by a sandblasting machine as a workpiece.

FIG. 2 is a schematic view showing the inside of the substrate processing chamber of the sandblasting apparatus. In FIG. 1, reference numeral 11 denotes a substrate processing chamber, and a substrate G as a workpiece is transported in the substrate processing chamber 11 at a predetermined speed by a transport roller. Numeral 12 denotes spray nozzles for spraying the abrasive toward the substrate G in the substrate processing chamber 11, and eight nozzles are arranged so as to reciprocate in a direction orthogonal to the substrate transfer direction A.

As shown in FIG. 3, a cover jig 13 as a shielding member is attached to the substrate G transferred in the substrate processing chamber 11 along both sides thereof in advance. This cover jig 13 has a U-shaped cross section,
It has substantially the same length as the substrate G. In consideration of ease of attachment, it is desirable that the U-shaped mouth is elastic and easily opened, and a resin-made material is preferably used so as not to damage the electrode terminal portion. Thus, the cover jig 13
The cross section may be a U-shape and the length may be substantially the same as that of the glass substrate. However, the lower portion does not need to be in the entire length direction, and as shown in FIG. It may be formed.

The timing of attaching the cover jig 13 to the substrate G is not limited as long as it is before blasting, but is desirably after the dielectric layer 14 is formed and before the rib forming paste is applied. Since the cover jigs 13 are attached in advance along both sides of the substrate G as described above, the electrode terminals and the glass covered with the cover jigs 13 are covered during the blast when the abrasive is ejected from the injection nozzle 12. The surface is protected from the abrasive. After finishing the blasting, the cover jig 13 is removed before the sandblasting mask is peeled off.

FIG. 5 is a schematic view showing the inside of a substrate processing chamber of another sandblasting apparatus, where (A) is a top view and (B)
Is a side view. In the figure, reference numeral 21 denotes a substrate processing chamber,
A substrate G, which is a workpiece, is transported by a transport roller 22 in the substrate processing chamber 21 at a predetermined speed. Numeral 23 denotes injection nozzles for injecting the abrasive toward the substrate G in the substrate processing chamber 21, and four injection nozzles are arranged so as to reciprocate in a direction orthogonal to the substrate transfer direction A.

In the substrate processing chamber 21, a shielding plate 24 as a shielding member is disposed above the substrate G and at a position covering both sides of the substrate G. In the illustrated example, the shielding plate 24 is attached by mounting both ends of the rail 21 a protruding from the wall surface of the substrate processing chamber 21. It is desirable that the shielding plate 24 be scraped off during blasting to produce metallic dust and not adhere to the substrate. Typically, a shielding plate that is formed by attaching rubber to an aluminum plate is preferable.

Since the mounting position of the shielding plate 24 is different at a portion to be protected, it is preferable that the shielding plate 24 can be arbitrarily moved and fixed. For example, a structure that can be moved with a ball screw so as to slide on a rail may be adopted. Alternatively, a pin hole may be provided in the shielding plate 24, a plurality of pins may be protruded from the rail, and the positions may be changed and fitted. In addition, the shielding plate 24
If it is not installed close to the substrate G, the abrasive material
And the effect is lost because it goes around between the substrate and the substrate G. further,
If the thickness of the shielding plate 24 is not reduced, the rib material may remain without being ground due to the shadow of the portion of the nozzle reciprocating at the shielding plate 24.

As described above, in the embodiment shown in FIG.
The shield plate 24 is disposed above the space through which the glass G passes and at a position covering both sides of the substrate G. Therefore, when the abrasive is blasted from the injection nozzle 23, the electrode terminals and the glass surface covered with the shield plate 24 are blasted. Is protected from abrasive.

The shielding plate 24 described with reference to FIG. 5 needs to be installed close to the substrate G in order to prevent the abrasive material from wrapping around. However, if it is too close, it may damage the substrate G being transported. Become. Therefore, as shown in FIG. 6, a curtain 25 made of a flexible material such as rubber is provided on the side surface of the shielding plate 24.
Is preferably attached. This banner 25 is a shielding plate 2
4 is a length that covers the entire side surface, and has a size that hardly causes a gap with the substrate G. By attaching such a hanging curtain 25, the abrasive material ejected together with the air from the spray nozzle 23 is prevented from wrapping around the end of the substrate G, and the hanging curtain 25 is transported while the substrate G is being transported.
Even if the lower end of the substrate comes in contact with the substrate G, there is no damage.

[0018]

As described above, according to the present invention,
When patterning the ribs of the PDP by the sandblasting method, the sandblasting process was performed after disposing the shielding member in advance so as to cover the portion that should not be damaged by the blasting, regardless of the cutting efficiency of the sandblasting process. The rib patterning can be performed while preventing the electrode terminals and the glass surface from being damaged by the abrasive.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a plasma display panel in which a front plate and a back plate are separated from each other.

FIG. 2 is a schematic view showing the inside of a substrate processing chamber of the sandblasting apparatus.

FIG. 3 is an enlarged cross-sectional view showing a part of a substrate transferred in the substrate processing chamber of FIG. 2;

FIG. 4 is a partially cutaway perspective view showing a modified example of a cover jig as a shielding member.

FIGS. 5A and 5B are schematic views showing the inside of a substrate processing chamber of another sandblasting apparatus, wherein FIG. 5A is a top view and FIG. 5B is a side view.

FIG. 6 is an explanatory diagram showing a relationship between a shield plate with a hanging curtain and a substrate.

[Explanation of symbols]

 1, glass substrate 3 rib 4 sustain electrode 5 bus electrode 6 dielectric layer 7 protective layer 8 address electrode 9 dielectric layer 10 phosphor 11 substrate processing chamber 12 injection nozzle 13 cover jig 13a protrusion 14 dielectric layer 21 substrate processing Chamber 21a Rail 22 Conveying roller 23 Injection nozzle 24 Shielding plate 25 Hanging curtain G Substrate

Claims (4)

[Claims] 1. A method for forming a rib-forming material layer on a substrate, forming an anti-sandblast-resistant mask on the substrate in a pattern, and patterning the rib-forming material layer by sandblasting through the mask. Next, in a method for forming a rib of a plasma display panel including a step of forming a rib having a desired pattern through a baking step, the sandblasting is performed so as to cover a portion that should not be damaged by blasting. A method for forming a rib of a plasma display panel, wherein the method is performed after a shielding member is arranged in advance. 2. The method according to claim 1, wherein a cover jig that can be fitted to and removed from the substrate is used as the shielding member. 3. The method according to claim 1, wherein a shielding plate disposed above the substrate is used as the shielding member. 4. The method for forming a rib of a plasma display panel according to claim 3, wherein a curtain made of a flexible material is attached to a side surface of the shielding plate.