JP2001221345A5 - - Google Patents

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Publication number
JP2001221345A5
JP2001221345A5 JP2000050132A JP2000050132A JP2001221345A5 JP 2001221345 A5 JP2001221345 A5 JP 2001221345A5 JP 2000050132 A JP2000050132 A JP 2000050132A JP 2000050132 A JP2000050132 A JP 2000050132A JP 2001221345 A5 JP2001221345 A5 JP 2001221345A5
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JP
Japan
Prior art keywords
bearing
gas bearing
elastic member
gas
axial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000050132A
Other languages
English (en)
Japanese (ja)
Other versions
JP4069435B2 (ja
JP2001221345A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000050132A priority Critical patent/JP4069435B2/ja
Priority claimed from JP2000050132A external-priority patent/JP4069435B2/ja
Publication of JP2001221345A publication Critical patent/JP2001221345A/ja
Publication of JP2001221345A5 publication Critical patent/JP2001221345A5/ja
Application granted granted Critical
Publication of JP4069435B2 publication Critical patent/JP4069435B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000050132A 1999-11-30 2000-02-25 スピンドルシール装置 Expired - Fee Related JP4069435B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000050132A JP4069435B2 (ja) 1999-11-30 2000-02-25 スピンドルシール装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-340814 1999-11-30
JP34081499 1999-11-30
JP2000050132A JP4069435B2 (ja) 1999-11-30 2000-02-25 スピンドルシール装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006296691A Division JP2007113786A (ja) 1999-11-30 2006-10-31 スピンドルシール装置

Publications (3)

Publication Number Publication Date
JP2001221345A JP2001221345A (ja) 2001-08-17
JP2001221345A5 true JP2001221345A5 (enrdf_load_stackoverflow) 2005-08-11
JP4069435B2 JP4069435B2 (ja) 2008-04-02

Family

ID=26576803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000050132A Expired - Fee Related JP4069435B2 (ja) 1999-11-30 2000-02-25 スピンドルシール装置

Country Status (1)

Country Link
JP (1) JP4069435B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4831809B2 (ja) * 2005-11-16 2011-12-07 三菱重工業株式会社 濁水用回転装置の軸シール構造
KR100705118B1 (ko) * 2005-12-07 2007-04-09 현대자동차주식회사 기어박스의 절삭유 유입방지장치
JP5402002B2 (ja) * 2009-01-13 2014-01-29 株式会社ジェイテクト 回転軸のシール装置およびシール方法
JP5796645B2 (ja) * 2013-11-20 2015-10-21 日本精工株式会社 回転機構、工作機械及び半導体製造装置
CN105814347A (zh) 2014-01-14 2016-07-27 日本精工株式会社 旋转机构、机床以及半导体制造装置

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