JP2001221230A - 静圧軸受装置 - Google Patents

静圧軸受装置

Info

Publication number
JP2001221230A
JP2001221230A JP2000026710A JP2000026710A JP2001221230A JP 2001221230 A JP2001221230 A JP 2001221230A JP 2000026710 A JP2000026710 A JP 2000026710A JP 2000026710 A JP2000026710 A JP 2000026710A JP 2001221230 A JP2001221230 A JP 2001221230A
Authority
JP
Japan
Prior art keywords
bearing
porous material
porous
hydrostatic
bearing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000026710A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001221230A5 (enExample
Inventor
Choshoku Sai
長植 崔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2000026710A priority Critical patent/JP2001221230A/ja
Publication of JP2001221230A publication Critical patent/JP2001221230A/ja
Publication of JP2001221230A5 publication Critical patent/JP2001221230A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Units (AREA)
JP2000026710A 2000-02-03 2000-02-03 静圧軸受装置 Pending JP2001221230A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000026710A JP2001221230A (ja) 2000-02-03 2000-02-03 静圧軸受装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000026710A JP2001221230A (ja) 2000-02-03 2000-02-03 静圧軸受装置

Publications (2)

Publication Number Publication Date
JP2001221230A true JP2001221230A (ja) 2001-08-17
JP2001221230A5 JP2001221230A5 (enExample) 2007-03-15

Family

ID=18552406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000026710A Pending JP2001221230A (ja) 2000-02-03 2000-02-03 静圧軸受装置

Country Status (1)

Country Link
JP (1) JP2001221230A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103195811A (zh) * 2013-04-28 2013-07-10 昆明学院 新型中空轴式节能静压轴承
EP2977486A1 (en) * 2009-07-30 2016-01-27 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Apparatus and method for atomic layer deposition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2977486A1 (en) * 2009-07-30 2016-01-27 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Apparatus and method for atomic layer deposition
CN103195811A (zh) * 2013-04-28 2013-07-10 昆明学院 新型中空轴式节能静压轴承

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