JP2001194526A5 - - Google Patents

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Publication number
JP2001194526A5
JP2001194526A5 JP2000269863A JP2000269863A JP2001194526A5 JP 2001194526 A5 JP2001194526 A5 JP 2001194526A5 JP 2000269863 A JP2000269863 A JP 2000269863A JP 2000269863 A JP2000269863 A JP 2000269863A JP 2001194526 A5 JP2001194526 A5 JP 2001194526A5
Authority
JP
Japan
Prior art keywords
film
refractive index
laminated
reflection mirror
high refractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000269863A
Other languages
English (en)
Japanese (ja)
Other versions
JP4118008B2 (ja
JP2001194526A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000269863A priority Critical patent/JP4118008B2/ja
Priority claimed from JP2000269863A external-priority patent/JP4118008B2/ja
Publication of JP2001194526A publication Critical patent/JP2001194526A/ja
Publication of JP2001194526A5 publication Critical patent/JP2001194526A5/ja
Application granted granted Critical
Publication of JP4118008B2 publication Critical patent/JP4118008B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000269863A 1999-10-29 2000-09-01 多層膜反射ミラー Expired - Fee Related JP4118008B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000269863A JP4118008B2 (ja) 1999-10-29 2000-09-01 多層膜反射ミラー

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-309542 1999-10-29
JP30954299 1999-10-29
JP2000269863A JP4118008B2 (ja) 1999-10-29 2000-09-01 多層膜反射ミラー

Publications (3)

Publication Number Publication Date
JP2001194526A JP2001194526A (ja) 2001-07-19
JP2001194526A5 true JP2001194526A5 (enrdf_load_stackoverflow) 2005-05-12
JP4118008B2 JP4118008B2 (ja) 2008-07-16

Family

ID=26565990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000269863A Expired - Fee Related JP4118008B2 (ja) 1999-10-29 2000-09-01 多層膜反射ミラー

Country Status (1)

Country Link
JP (1) JP4118008B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1965229A3 (en) * 2007-02-28 2008-12-10 Corning Incorporated Engineered fluoride-coated elements for laser systems
JP5543357B2 (ja) * 2007-11-30 2014-07-09 コーニング インコーポレイテッド Duv素子のための緻密で均質なフッ化物膜及びその作製方法
DE102010017106A1 (de) * 2010-05-27 2011-12-01 Carl Zeiss Laser Optics Gmbh Spiegel mit dielektrischer Beschichtung
WO2014188831A1 (ja) * 2013-05-22 2014-11-27 コニカミノルタ株式会社 紫外線遮蔽フィルム
US9696467B2 (en) * 2014-01-31 2017-07-04 Corning Incorporated UV and DUV expanded cold mirrors

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