JP2001188071A - Connector device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a connector device with an anisotropic conductive sheet capable of preventing or suppressing the charged state of the surface of the anisotropic conductive sheet. SOLUTION: The connector device comprises both the anisotropic conductive sheet in which a conductive supporting member is integrally fixed to its circumferential edge part and conductive pins for positioning inserted into through holes formed in the conductive supporting member of the anisotropic conductive sheet and connected to a ground. The connector device is provided with a substrate in a state laminated on the lower-surface side of the anisotropic conductive sheet in which a plurality of conduction paths for connection extending in the direction of thickness are arranged, and the conductive pins for positioning are raised in the substrate. It is preferable that the upper surface of the substrate comprises electrodes for connection to be electrically connected to the conduction paths for connection of the anisotropic conductive sheet.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connector device suitably used for electrical connection between circuit devices such as electronic components and inspection of circuit devices such as printed circuit boards and semiconductor integrated circuits.

[0002]

2. Description of the Related Art An anisotropic conductive elastomer sheet has conductivity only in a thickness direction, or a pressurized conductive connection conductive path having conductivity only in a thickness direction when pressed in a thickness direction. It is possible to achieve a compact electrical connection without using means such as soldering or mechanical fitting, and it is possible to absorb mechanical shocks and strains and make soft connections Therefore, in such fields as electronic calculators, electronic digital watches, electronic cameras, computer keyboards, and the like, circuit devices such as printed circuit boards and leadless chips are used. carrier,
It is widely used as a connector for achieving electrical connection with a liquid crystal panel or the like.

In the electrical inspection of a circuit device such as a printed circuit board or a semiconductor integrated circuit, a circuit device to be inspected (hereinafter, also referred to as a “circuit device to be inspected”) is formed on at least one surface thereof. In order to achieve electrical connection between the test electrode and the connection electrode formed on the surface of the test circuit board, the test electrode area of the circuit device to be tested and the connection electrode area of the test circuit board are connected. An anisotropic conductive elastomer sheet is interposed between them.

Conventionally, as such an anisotropic conductive elastomer sheet, those having various structures are known. For example, JP-A-51-93393 discloses a sheet in which metal particles are uniformly dispersed in an elastomer. Anisotropically conductive elastomer sheets obtained by the above method are disclosed.
No. 772 discloses an anisotropic conductive material in which a large number of conductive paths extending in a thickness direction and insulating portions that insulate them are formed by distributing conductive magnetic particles unevenly in an elastomer. An elastomeric sheet is disclosed,
Furthermore, Japanese Patent Application Laid-Open No. 61-250906 discloses an anisotropic conductive elastomer sheet in which a step is formed between the surface of a conductive path and an insulating portion.

[0005]

However, although the anisotropic conductive sheet has conductivity in the thickness direction, it is made of an insulating elastomer. The surface of the anisotropic conductive sheet is charged by the generation of static electricity, causing various problems. For example, when an anisotropic conductive sheet is used for electrical inspection of a circuit device, an anisotropic conductive sheet is interposed between a circuit device to be inspected and a circuit board for inspection, and the anisotropic conductive sheet is added. By applying pressure, an electrical connection is established between the circuit device under test and the circuit board for inspection, and an electrical inspection is performed.However, static electricity is generated by the pressurizing operation and the peeling operation, and the electrical inspection of the circuit device under inspection is performed. By being repeatedly performed, charging is performed in a high potential state. Then, when the static electricity is discharged, a discharge current flows to the connection electrode, and not only the inspection circuit board and the anisotropic conductive sheet,
The circuit device under test may be adversely affected, and as a result, the circuit board for inspection may be damaged or the circuit device under test may be destroyed.

Therefore, it has been proposed to dispose an ionizer for ionizing air around the anisotropic conductive sheet. This ionizer removes a certain amount of static electricity generated on the surface of the anisotropic conductive sheet, but has a low reliability, and has a problem that the ionizer is difficult to maintain and has a short service life.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an anisotropic conductive sheet having a charged surface. It is an object of the present invention to provide a connector device capable of preventing or suppressing the problem.

[0008]

A connector device according to the present invention is formed on an anisotropic conductive sheet having a conductive support member integrally fixed at a peripheral portion, and a conductive support member of the anisotropic conductive sheet. And a conductive pin for positioning that is inserted into the through hole and electrically connected to the ground.

In the connector device according to the present invention, it is preferable that the anisotropic conductive sheet has a plurality of conductive paths extending in a thickness direction thereof arranged in a state in which they are insulated from each other by an insulating portion.

[0010] In the connector device of the present invention, a conductive layer for static elimination is formed on at least one surface of the anisotropic conductive sheet, and the conductive layer for static elimination is electrically connected to the conductive pin for positioning. Is preferred.

Further, in the connector device according to the present invention, the substrate on which the positioning conductive pins are erected is formed by connecting a plurality of connection conductive paths extending in the thickness direction to the lower surface side of the anisotropic conductive sheet. It is preferable that the substrate has a connection electrode electrically connected to the connection conductive path of the anisotropic conductive sheet on an upper surface thereof.

Still further, in the connector device according to the present invention, the anisotropic conductive sheet includes a plurality of conductive paths for static elimination extending in a thickness direction thereof, each of which is insulated by an insulating portion. Is electrically connected to the conductive path for static elimination of the anisotropic conductive sheet on its upper surface,
It is preferable to have a neutralizing electrode electrically connected to the ground.

[0013]

According to the above arrangement, the conductive pin for positioning is electrically connected to the ground, so that the surface of the anisotropic conductive sheet can be prevented or suppressed from being charged. . When the conductive layer for static elimination is provided on at least one surface of the anisotropic conductive sheet, the conductive layer for static elimination is electrically connected to the conductive pins for positioning, so that the surface of the anisotropic conductive sheet is Can be prevented or suppressed from being charged. Further, when the conductive path for static elimination is arranged on the anisotropic conductive sheet, the conductive path for static elimination is electrically connected to the static elimination electrode of the substrate electrically connected to the ground, The charging of the surface of the anisotropic conductive sheet can be reliably prevented or suppressed.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a case where the present invention is used for electrical inspection of a circuit device such as a printed circuit board and a semiconductor integrated circuit will be described in detail. FIG. 1 is an explanatory sectional view showing a configuration of a connector device according to a first embodiment of the present invention. In this figure, 1 is a circuit device to be inspected,
Reference numeral 2 denotes an electrode to be inspected that protrudes from, for example, the lower surface of the circuit device 1 to be inspected.

The connector device 11 of the present embodiment includes a substrate 20
And an anisotropic conductive sheet 30 located between the substrate 20 and the circuit device 1 to be inspected.

The positioning pins 21 need only be conductive, and are usually made of metal. The positioning pin 21 is brought to a ground potential state by electrically connecting a base end (lower end in FIG. 1) of the positioning pin 21 to ground (not shown).

The substrate 20 is provided with connection electrodes 22 protruding from the upper surface thereof.
It is arranged at a position corresponding to the electrode under test 2 of the circuit device under test 1. The connection electrode 22 is electrically connected to an external electric circuit, for example, a tester (not shown).

The anisotropic conductive sheet 30 includes an anisotropic conductive sheet main body 31 exhibiting conductivity in the thickness direction and a conductive support member 32 for supporting a peripheral portion of the anisotropic conductive sheet main body 31.
It is composed of

As the anisotropic conductive sheet main body 31 constituting the anisotropic conductive sheet 30, any structure can be used as long as it is anisotropically conductive having conductivity in the thickness direction. In the illustrated example, the conductive polymer particles are contained in a base material made of an elastic polymer material in a state where they are aligned so as to be aligned in the thickness direction of the anisotropic conductive sheet main body 31. A plurality of connecting conductive paths 33 extending in the thickness direction, which are densely filled with conductive particles over the entire substrate made of a substance, are insulated from each other by an insulating portion 34 having no or almost no conductive particles. It is formed. The upper surface of each of the connection conductive paths 33 is formed so as to protrude from the upper surface of the insulating portion 34, and the lower surface of each of the connection conductive paths 33 is formed so as to protrude from the lower surface of the insulating portion 34. Have been. The connection conductive path 33 electrically connects the inspection target electrode 2 and the corresponding connection electrode 22.

As the elastic polymer material constituting the base material of the anisotropic conductive sheet main body 31, a polymer material having a crosslinked structure is preferable. Various materials can be used as the curable polymer substance forming material that can be used to obtain the crosslinked polymer substance, and specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, and styrene- Conjugated diene rubbers such as butadiene copolymer rubber and acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, and block copolymers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer Rubber and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-
And diene copolymer rubber. In the above,
When weather resistance is required for the obtained anisotropic conductive sheet main body 31, it is preferable to use a material other than the conjugated diene-based rubber, and in particular, use silicone rubber from the viewpoint of moldability and electrical characteristics. Is preferred.

As the silicone rubber, those obtained by crosslinking or condensing a liquid silicone rubber are preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of condensation type, addition type, and those containing a vinyl group or a hydroxyl group. Good. Specifically, dimethylsilicone raw rubber, methylvinylsilicone raw rubber, methylphenylvinylsilicone raw rubber and the like can be mentioned.

An appropriate curing catalyst can be used to cure the polymer-forming material. As such a curing catalyst, an organic peroxide, a fatty acid azo compound, a hydrosilylation catalyst, or the like can be used. Specific examples of the organic peroxide used as the curing catalyst include benzoyl peroxide, bisdicyclobenzoyl peroxide, dicumyl peroxide, and ditertiary butyl peroxide.
Specific examples of the fatty acid azo compound used as a curing catalyst include azobisisobutyronitrile. Specific examples of the catalyst which can be used as a catalyst for the hydrosilylation reaction include chloroplatinic acid and salts thereof, a siloxane complex containing a platinum-unsaturated group, a complex of vinylsiloxane and platinum, and platinum and 1,3-divinyltetramethyldisiloxane. And a complex of triorganophosphine or phosphite with platinum, acetylacetate platinum chelate, and a complex of cyclic diene and platinum.

The base material of the anisotropic conductive sheet main body 31 may contain an inorganic filler such as ordinary silica powder, colloidal silica, airgel silica, alumina or the like, if necessary. By including such an inorganic filler, the thixotropy of the molding material for obtaining the anisotropic conductive sheet main body 31 is ensured, the viscosity is increased, and the dispersion stability of the conductive particles is improved. At the same time, the anisotropic conductive sheet main body 31 having high strength is obtained. The use amount of such an inorganic filler is not particularly limited, but using a large amount is not preferable because the orientation of the conductive particles cannot be sufficiently achieved by the magnetic field.

The conductive particles contained in the base material of the anisotropic conductive sheet main body 31 can be easily oriented so as to be arranged in the thickness direction of the anisotropic conductive sheet main body 31 by applying a magnetic field. From the viewpoint, it is preferable to use conductive particles exhibiting magnetism. Specific examples of such conductive particles include nickel, iron, particles of a metal exhibiting magnetism such as cobalt, or particles of an alloy thereof, or particles containing these metals, or these particles as core particles. Core particles with gold, silver, palladium, rhodium and other conductive metals plated thereon,
Alternatively, inorganic particles or polymer particles such as non-magnetic metal particles or glass beads are used as core particles, and the surface of the core particles is plated with a conductive magnetic material such as nickel or cobalt. One coated with both a conductive magnetic material and a metal having good conductivity. Among them, it is preferable to use nickel particles as core particles, the surfaces of which are plated with a metal having good conductivity such as gold. Means for coating the surface of the core particles with a conductive metal is not particularly limited, but may be, for example, chemical plating or electrolytic plating.

When the conductive particles are formed by coating the surface of a core particle with a conductive metal, from the viewpoint of obtaining good conductivity, the coverage of the conductive metal on the particle surface (core particle) Is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%. Further, the coating amount of the conductive metal is 0.5 to
It is preferably 50% by mass, more preferably 1 to 50% by mass.
It is 30% by mass, more preferably 3 to 25% by mass, particularly preferably 4 to 20% by mass. When the conductive metal to be coated is gold, the coating amount is from 2.5 to 2.5
The content is preferably 30% by mass, more preferably 3 to
It is 20% by mass, more preferably 3.5 to 15% by mass, particularly preferably 4 to 10% by mass. When the conductive metal to be coated is silver, the coating amount is preferably 3 to 50% by mass of the core particles, more preferably 4 to 40% by mass, and further preferably 5 to 30% by mass. mass%,
Particularly preferably, the content is 6 to 20% by mass.

The conductive particles have a particle size of 1 to 100.
0 μm, more preferably 2 to 50 μm.
0 μm, more preferably 5 to 300 μm, particularly preferably 10 to 200 μm. Further, the particle size distribution (Dw / Dn) of the conductive particles is preferably 1 to 10, more preferably 1.01 to 7, further preferably 1.05 to 5, and particularly preferably 1.1 to 1. 4. By using conductive particles that satisfy such conditions,
The resulting anisotropic conductive sheet main body 31 is easily deformed under pressure, and sufficient electric contact is obtained between the conductive particles. In addition, the shape of the conductive particles is not particularly limited. However, since the conductive particles can be easily dispersed in the polymer substance-forming material, the conductive particles have a spherical shape, a star shape, or a secondary shape in which these are aggregated. It is preferably a lump formed by particles.

The water content of the conductive particles is preferably at most 5%, more preferably at most 3%, further preferably at most 2%, particularly preferably at most 1%.
By using the conductive particles satisfying such conditions, it is possible to prevent or suppress the generation of bubbles during the curing treatment of the polymer substance forming material.

As the conductive particles, those whose surfaces have been treated with a coupling agent such as a silane coupling agent can be appropriately used. When the surface of the conductive particles is treated with the coupling agent, the adhesion between the conductive particles and the elastic polymer material is increased, and as a result, the obtained anisotropic conductive sheet body 31 is used repeatedly. , The durability is high. The amount of the coupling agent used is appropriately selected within a range that does not affect the conductivity of the conductive particles. However, the coverage of the coupling agent on the surface of the conductive particles (the ratio of the coupling agent to the surface area of the conductive core particles). Is preferably 5% or more, more preferably 7 to 100%, more preferably 10 to 100%, and particularly preferably 20 to 100%.
It is an amount that becomes 100%.

The conductive support member 32 constituting the anisotropic conductive sheet 30 is made of, for example, a rectangular frame-shaped metal plate, and has an opening (shown in the figure) in the central area where the anisotropic conductive sheet main body 31 is arranged. The peripheral edge of the anisotropic conductive sheet main body 31 is fixed to the inner peripheral edge of the main body. The conductive support member 32 is formed with a positioning through hole 36 extending in the thickness direction and adapted to the outer diameter of the positioning pin 21.

As a material for forming the conductive support member 32, various materials having conductivity can be used.
For example, metals such as iron, copper, nickel, chromium, cobalt, magnesium, manganese, molybdenum, indium, lead, palladium, titanium, tungsten, aluminum, gold, platinum, silver, and alloys or alloy steels combining two or more of these metals And the like. Further, the conductive support member 32 may be formed by coating a metal on the surface of a plate-like body made of resin.

In the connector device 11, the conductive support member 32 and the positioning pin 21 are inserted into the conductive support member 32 by inserting the positioning pin 21 into the positioning through hole 36 of the conductive support member 32. 21 are electrically connected to each other, and are placed on the substrate 20 in this state, thereby forming an electrostatic discharge mechanism. That is, the conductive support member 32 is at the ground potential state via the positioning pin 21, and the lower surface of each of the connection conductive paths 33 is electrically connected to the corresponding connection electrode 22. Further, the tip (the upper end in FIG. 1) of the positioning pin 21 is inserted into the positioning plate 5.

In the connector device 11, the circuit device 1 to be inspected to be electrically connected to a tester (not shown) is positioned on the upper surface of the anisotropic conductive sheet 30 in a state where the circuit device 1 is positioned by the positioning plate 5. The electrode under test 2 is arranged so as to be positioned on the corresponding connection conductive path 33, and the circuit under test 1 is connected to the connector device 11 while maintaining that state.
Is pressed downward against the conductive path 3 for connection.
3 is electrically connected to the electrode 2 to be inspected. As a result, electrical connection between the electrode under test 2 and the connection electrode 22 is achieved via the connection conductive path 33 of the anisotropic conductive sheet 30, and in this state, the circuit under test 1 is The required electrical inspection is performed.

According to the connector device 11 having the above-described configuration, the conductive support member 32 of the anisotropic conductive sheet 30 is electrically connected to the ground via the positioning pin 21, thereby providing an anisotropic conductive sheet. The surface of the anisotropic conductive sheet main body 31 of the conductive sheet 30 can be prevented or suppressed from being charged. As a result, it is possible to prevent the circuit device under test 1 from being broken or the tester from being damaged.

FIG. 2 is an explanatory sectional view showing the configuration of the second embodiment of the connector device of the present invention. Note that components having the same functions as those of the connector device 11 according to the first embodiment of the present invention shown in FIG. 1 are denoted by the same reference numerals, and redundant description will be omitted. In the connector device 12 of this example, the upper surface side static elimination conductive layer 40 is provided on the upper surface of the anisotropic conductive sheet main body 31, and the lower surface side static elimination conductive layer 41 is provided on the lower surface thereof. The upper surface side static elimination conductive layer 40 and the lower surface side static elimination conductive layer 41 have through holes 42 and 43 extending in the thickness direction near their respective peripheral edges, and the positioning pins 2 are formed in the through holes 42 and 43.
1 is electrically connected to the positioning pin 21 by being inserted. The conductive layer 40 for static elimination on the upper surface side
Is provided on the upper surface of the anisotropic conductive sheet main body 31 in an insulating region other than where the connection conductive path 33 protrudes, and is electrically insulated from the connection conductive path 33. In addition, the lower surface-side conductive layer for static elimination 41 is provided on the lower surface of the anisotropic conductive sheet main body 31 in an insulating region other than where the connecting conductive path 33 protrudes, and is electrically connected to the connecting conductive path 33. Insulated.

Here, the material forming the upper surface side charge removing conductive layer 40 and the lower surface side charge removing conductive layer 41 is generally a substance exhibiting conductivity by metal bonding, or a charge transfer due to the movement of surplus electrons. Occurs, the movement of electric charge occurs due to the movement of vacancies, the generation of ions, and the transfer of electric charge by the ions.The substance that has π bonds along the main chain and exhibits conductivity due to its interaction. It can be used by selecting from substances that cause charge transfer by the interaction of groups in the chain. Specifically, platinum, gold, silver, copper,
Metal particles containing nickel, cobalt, iron, aluminum, manganese, zinc, tin, lead, indium, molybdenum, niobium, tantalum, chromium, etc .; copper dioxide, zinc oxide,
Conductive metal oxides such as tin oxide; whiskers such as potassium titanate; semiconductive materials such as germanium, silicon, indium phosphorus, and zinc sulfide; carbon-based materials such as carbon black and graphite; quaternary ammonium salts; Substances that generate cations such as amine compounds; salts such as aliphatic sulfonates, higher alcohol sulfates, higher alcohol ethylene oxide addition sulfates, higher alcohol phosphates, and higher alcohol ethylene oxide addition phosphates; Substances that generate ions; substances that generate both cations and anions such as betaine; polyacetylene-based polymers, acrylic polymers, polyphenylene-based polymers, heterocyclic polymers,
A conductive polymer substance such as a ladder polymer, a network polymer, and an ionic polymer can be used. In the above, substances that generate ions may be collectively referred to as surfactants. Further, in a polymer such as a polyacetylene-based polymer, an acrylic-based polymer, a polyphenylene-based polymer, a ladder polymer, and a network polymer, the conductivity can be controlled by doping a metal ion or the like.
The upper surface side static elimination conductive layer 40 may be a layer in which a metal foil is provided on the upper surface of a layer made of, for example, a polyimide resin,
Further, the lower-surface-side conductive layer for static elimination 41 may be, for example, a layer in which a metal foil is provided on the lower surface of a layer made of a polyimide resin. In this case, the metal foil is electrically connected to the positioning pins 21.

According to the connector device 12 configured as described above, the anisotropic conductive sheet main body 31 is provided with the upper surface side static elimination conductive layer 40 in the insulating region on the upper surface and the lower surface in the insulating region on the lower surface. Since the conductive layer 41 for neutralization on the side is provided, the conductive layer 40 for neutralization on the upper surface side and the conductive layer 41 for lower surface side are brought to the ground potential state via the positioning pins 21, whereby anisotropic conductive property is obtained. The static electricity generated on the upper and lower surfaces of the sheet main body 31 can be eliminated, and as a result, the surface of the anisotropic conductive sheet main body 31 can be prevented or suppressed from being charged.

FIG. 3 is an explanatory sectional view showing the configuration of the third embodiment of the connector device of the present invention. Note that components having the same functions as those of the connector device 11 according to the first embodiment of the present invention shown in FIG. 1 are denoted by the same reference numerals, and redundant description will be omitted. In the connector device 13 of this example, the substrate 20a is provided with a neutralizing electrode 23 projecting from the upper surface thereof, and the neutralizing electrode 23 is provided in a region not corresponding to the electrode 2 to be inspected of the circuit device 1 to be inspected. That is, it is arranged in a region other than the region where the connection electrode 22 is provided. In addition, the static elimination electrode 23 is electrically connected to the ground separately from the positioning pin 21 so that
Alternatively, it is electrically connected to the positioning pin 21 and electrically connected to the ground, thereby being brought to the ground potential state. In addition, an anisotropic conductive sheet 30a in which a conductive support member 32 supports an anisotropic conductive sheet main body 31a is disposed on the upper surface of the substrate 20a, that is, between the substrate 20a and the circuit device under test 1. Have been.

In the anisotropic conductive sheet body 31a constituting the anisotropic conductive sheet 30a, a plurality of connecting conductive paths 33 and a plurality of static eliminating conductive paths 35 extending in the thickness direction are insulated by insulating portions 34, respectively. It is arranged in the state where it was done. The upper surface of each of the static elimination conductive paths 35 is insulated by the insulating portion 34 similarly to the upper surface of the connection conductive path 33.
The lower surface of each of the static elimination conductive paths 35 is also formed so as to protrude from the lower surface of the insulating portion 34. The static elimination conductive path 35 is electrically connected to the static elimination electrode 23 formed on the substrate 20a.

Here, the charge removing conductive path 35 has an electric resistance value of, for example, 10 MΩ or less, preferably 1 MΩ or less.
Ω or less, more preferably 100 kΩ or less. As a material constituting the conductive path for static elimination 35,
The materials constituting the upper surface side static elimination conductive layer 40 and the lower surface side static elimination conductive layer 41 described above can be used.

According to the connector device 13 configured as described above, the charge eliminating conductive path 35 formed in the anisotropic conductive sheet main body 31a of the anisotropic conductive sheet 30a is connected to the charge eliminating electrode 2
3, the static electricity generated on the surface of the anisotropic conductive sheet main body 31a can be eliminated not only by the positioning pins 21 but also by the static elimination conductive path 35. As a result, Anisotropic conductive sheet body 31
It is possible to reliably prevent or suppress the surface of a from being charged.

FIG. 4 is an explanatory sectional view showing the configuration of the fourth embodiment of the connector device of the present invention. The first to third embodiments of the present invention shown in FIG. 1 to FIG.
The components having the same functions as those of the connector devices 11 to 13 according to the embodiments are denoted by the same reference numerals, and the duplicate description will be omitted. The connector device 14 of this example is the same as the connector device 13 shown in FIG.
The upper surface and the lower surface of the connector device 12 are provided with the upper surface side static elimination conductive layer 40 and the lower surface side static elimination conductive layer 41 of the connector device 12 having the configuration shown in FIG. Either the upper surface side static elimination conductive layer 40 or the lower surface side static elimination conductive layer 4 on one of the upper surface and the lower surface of the anisotropic conductive sheet 30a.
1 may be provided. More specifically, the upper surface side static elimination conductive layer 40 is provided on the upper surface of the anisotropic conductive sheet main body 31a of the anisotropic conductive sheet 30a, and the lower surface side static elimination conductive layer 41 is provided on the lower surface thereof. . The upper surface side static elimination conductive layer 40 is electrically connected to the upper protruding portion of the static elimination conductive path 35 and the positioning pins 21.
The lower conductive layer 41 is electrically connected to the lower protruding portion of the conductive path 35 and electrically connected to the positioning pin 21. I have. The upper conductive layer 40 on the upper surface side is formed on the upper surface of the anisotropic conductive sheet main body 31a by the conductive paths 33 for connection.
In addition, it is provided in an insulating region other than where the conductive path for static removal 35 projects or in a region other than where the conductive path for connection 33 projects, and is electrically insulated from the conductive path for connection 33. In addition, the lower surface side conductive layer for static elimination 41 is located on the lower surface of the sheet body 31 except for an insulating area other than the place where the conductive path for connection 33 and the conductive path for static elimination 35 project or a place where the conductive path for connection 33 protrudes. And is electrically insulated from the connection conductive path 33.

According to the connector device 14 having the above-described configuration, the upper-side conductive layer for static elimination 40 and the lower-side conductive layer for static elimination 41 are brought to the ground potential state via the positioning pins 21 and are also connected to the ground potential. Since the ground potential is established through the conductive path 35, static electricity generated on the upper and lower surfaces of the anisotropic conductive sheet main body 31a can be efficiently eliminated, and as a result, the surface of the anisotropic conductive sheet main body 31a can be removed. Can be prevented or suppressed from being charged.

The connector device of the present invention is not limited to the above-described first to fourth embodiments, and various modifications can be made. For example, in the first embodiment described above, the anisotropic conductive sheet main body 31 of the anisotropic conductive sheet 30 is arranged in a state where the connecting conductive paths 33 extending in the thickness direction thereof are insulated from each other by the insulating portion 34. In the present invention, the anisotropic conductive sheet body contains conductive particles over the entire substrate made of an elastic polymer material, which is a so-called non-uniform type. May be used. In addition, the second
In the fourth and fourth embodiments, the conductive layer for static elimination may be provided on one of the upper surface and the lower surface of the anisotropic conductive sheet main body. Further, the conductive layer for static elimination may be electrically connected to the positioning pin via a conductive support member. Further, in the above-described first to fourth embodiments, the upper and lower surfaces of the connection conductive path in the anisotropic conductive sheet main body are in a state protruding from the upper and lower surfaces of the insulating portion, respectively. In the present invention, the upper surface and the lower surface of the connection conductive path may be located at the same level as the upper surface and the lower surface of the insulating portion, respectively. In addition, the positioning pin or the static elimination electrode may be electrically connected to the ground via an electric resistance of, for example, 100 to 400 kΩ. In this case, even when electrostatic discharge occurs, the discharge current can be reduced, so that damage to a tester or the like can be prevented. Further, the first to fourth embodiments described above are the connector devices used for electrical inspection of the circuit device to be inspected. However, in the present invention, the use of the connector device is limited to this. Instead, it can be used for various applications.

[0044]

As described above, according to the connector device of the present invention, since the conductive pins for positioning are electrically connected to the ground, the surface of the anisotropic conductive sheet is charged. Can be prevented or suppressed. Therefore, when the connector device of the present invention is used for electrical inspection of a circuit device under test, destruction of the circuit device under test or damage to the tester can be prevented. When the conductive layer for static elimination is provided on at least one surface of the anisotropic conductive sheet, the conductive layer for static elimination is electrically connected to the conductive pins for positioning, so that the surface of the anisotropic conductive sheet is Can be prevented or suppressed from being charged. Furthermore, when the conductive path for static elimination is arranged on the conductive sheet for static elimination, the conductive path for static elimination is electrically connected to the static elimination electrode electrically connected to the ground, so that the anisotropic conductive sheet is anisotropically conductive. It is possible to reliably prevent or suppress the surface of the conductive sheet from being charged.

[Brief description of the drawings]

FIG. 1 is an explanatory sectional view showing a configuration according to a first embodiment of the present invention.

FIG. 2 is an explanatory sectional view showing a configuration according to a second embodiment of the present invention.

FIG. 3 is an explanatory sectional view showing a configuration according to a third embodiment of the present invention.

FIG. 4 is an explanatory sectional view showing a configuration according to a fourth embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 circuit device to be inspected 2 electrode to be inspected 5 positioning plate 11, 12, 13, 14 connector device 20, 20 a substrate 21 positioning pin 22 connection electrode 23 static elimination electrode 30, 30 a anisotropic conductive sheet 31, 31 a anisotropic Conductive sheet main body 32 Conductive support member 33 Connecting conductive path 34 Insulating part 35 Static elimination conductive path 36 Positioning through hole 40 Upper surface side static elimination conductive layer 41 Lower surface side static elimination conductive layer 42, 43 Through hole

Claims (5)

[Claims] 1. An anisotropic conductive sheet having a conductive support member integrally fixed to a peripheral portion thereof, and a through hole formed in the conductive support member of the anisotropic conductive sheet, and electrically grounded. And a conductive pin for positioning connected to the connector device. 2. The connector device according to claim 1, wherein the anisotropic conductive sheet has a plurality of conductive paths extending in a thickness direction of the anisotropic conductive sheet in a state in which they are insulated from each other by an insulating portion. 3. A conductive layer for static elimination is formed on at least one surface of the anisotropic conductive sheet, and the conductive layer for static elimination is electrically connected to a conductive pin for positioning. Or the connector device according to claim 2. 4. A substrate on which said positioning conductive pins are erected, stacked in a state of being stacked on a lower surface side of an anisotropic conductive sheet provided with a plurality of connection conductive paths extending in a thickness direction. The substrate according to any one of claims 1 to 3, wherein the substrate has, on an upper surface thereof, a connection electrode electrically connected to the connection conductive path of the anisotropic conductive sheet. Connector device. 5. The anisotropic conductive sheet includes a plurality of conductive paths for static elimination extending in a thickness direction thereof, each of which is insulated by an insulating portion. The connector device according to claim 4, further comprising a charge removing electrode electrically connected to a charge removing conductive path of the conductive sheet and electrically connected to ground.