WO2008041511A1

WO2008041511A1 - Anisotropic conductive connector, adapter device, and device for electrically inspecting circuit device

Info

Publication number: WO2008041511A1
Application number: PCT/JP2007/068372
Authority: WO
Inventors: Kiyoshi Kimura; Sugiro Shimoda; Fujio Hara
Original assignee: Jsr Corporation
Priority date: 2006-09-25
Filing date: 2007-09-21
Publication date: 2008-04-10
Also published as: TW200835060A

Abstract

Provided is an anisotropic conductive connector having a small distance between electrodes, capable of surely achieving electric connection in a state when necessary insulation is assured between the electrodes even if the electrodes have irregular height levels, and preventing accumulation of electric charges on the surface, thereby obtaining a long service life. Also provided is its application. The anisotropic conductive connector has a rigid conductor arranged in a through hole of an insulating sheet so as to protrude from both surfaces of the insulating sheet. The rigid conductor includes: a composite conductive sheet having a terminal unit formed with a greater diameter than the diameter of the through hole at both ends of the portion of the rigid conductor inserted into the through hole of the insulating sheet in such a way that the terminal unit can move in the thickness direction of the insulating sheet; and two anisotropic conductive elastomer sheets arranged on both surfaces of the composite conductive sheet. At least one of the anisotropic conductive elastomer sheets includes an electricity removal layer having a plurality of openings and formed on the surface opposite to the surface which is in contact with the composite conductive sheet. When viewed in the thickness direction, the rigid conductor is positioned in the openings of the electricity removal layer, which is grounded.

Description

Specification

Electrical inspection equipment for anisotropic conductive connectors, adapter devices and circuit devices

Technical field

[0001] The present invention relates to an anisotropic conductive connector that can be suitably used for electrical inspection of a circuit device such as a printed circuit board, an adapter device including the same, and an electric power of the circuit device including the adapter device. The present invention relates to a mechanical inspection device.

Background art

[0002] Generally, circuit boards for configuring or mounting electronic components such as package LSIs such as BGA and CSP, MCM, and other integrated circuit devices are mounted before or after assembling the electronic components. Before doing so, it is necessary to inspect the electrical characteristics of the circuit board to confirm that the wiring pattern has the expected performance.

Conventionally, as a method of performing an electrical inspection of a circuit board, an inspection electrode device in which a plurality of inspection electrodes are arranged according to the grid point positions arranged in the vertical and horizontal directions, and the inspection electrode of this inspection electrode device are inspection targets. It is known how to use it in combination with an adapter that electrically connects the electrodes to be inspected on the circuit board! The adapter used in this method is a printed wiring board called a pitch conversion board.

This adapter has a plurality of connection electrodes arranged according to a pattern corresponding to the electrode to be inspected on the circuit board to be inspected on one side, and the same pitch as the inspection electrode of the inspection electrode device on the other side Having a plurality of terminal electrodes arranged at the grid point positions of the current supply connection electrodes and voltage measurement connection electrodes arranged according to a pattern corresponding to the electrodes to be inspected on the circuit board to be inspected on one side The former has a plurality of connection electrode pairs made of electrodes, and has a plurality of terminal electrodes arranged on the other surface at lattice point positions having the same pitch as the inspection electrodes of the inspection electrode device. This adapter is used for, for example, an open / short test of each circuit on a circuit board, and the latter adapter is used for an electric resistance measurement test of each circuit on the circuit board. Therefore, in the electrical inspection of a circuit board, generally, in order to achieve a stable electrical connection between the circuit board to be inspected and the adapter, the circuit board to be inspected and the adapter are It is expected to use an anisotropic conductive elastomer sheet as a connector.

[0003] This anisotropically conductive elastomer sheet has conductivity only in the thickness direction, or a number of pressure-conductive conductive portions that show conductivity only in the thickness direction when pressed. It has something.

As such an anisotropically conductive elastomer sheet, those having various structures are conventionally known. For example, in Patent Document 1, conductive particles exhibiting magnetism are arranged in the thickness direction in an elastic polymer material. An anisotropic conductive elastomer sheet (hereinafter referred to as a “dispersion type anisotropic conductive sheet”), which is formed in such a state that the chain is formed in such a manner that the chain is formed in such a manner that the chain is dispersed in the plane direction. Patent Document 2 discloses a number of conductive path forming portions extending in the thickness direction by non-uniformly dispersing conductive particles exhibiting magnetism in an elastic polymer material, and these. An anisotropic conductive elastomer sheet (hereinafter referred to as an “unevenly anisotropic conductive sheet”) formed by insulating portions that insulate each other is disclosed. Patent Document 3 discloses a conductive path. A step between the surface of the forming portion and the insulating portion There uneven distribution type anisotropic conductive sheet is formed is disclosed! /, Ru.

These anisotropically conductive elastomer sheets are, for example, for a molding material layer in which conductive particles exhibiting magnetism are contained in a liquid polymer material-forming material that is cured to become an elastic polymer material. It is obtained by applying a magnetic field in the thickness direction or by performing a curing process after applying a magnetic field. In this anisotropic conductive elastomer sheet, conductive particles are contained in a base material made of an elastic polymer substance so that the conductive particles are aligned in the thickness direction so as to form a chain. By applying pressure, a conductive path is formed by a chain of conductive particles.

[0004] Then, comparing the dispersed anisotropic conductive sheet and the unevenly distributed anisotropic conductive sheet, the distributed anisotropic conductive sheet is manufactured at a low cost without using a special and expensive mold. This is advantageous compared to the unevenly distributed anisotropic conductive sheet in that it can be used regardless of the pattern of the electrode to be connected and has versatility. On the other hand, the unevenly-distributed anisotropic conductive sheet has an insulating portion that isolates them from each other between adjacent conductive path forming portions. Even in the case of an object, it is possible to achieve an electrical connection to each of the electrodes in a state where necessary insulation is ensured between adjacent electrodes, that is, a high resolution. This is advantageous as compared with the dispersion-type anisotropic conductive sheet.

Thus, in order to improve the resolution of the dispersed anisotropic conductive sheet, it is important to reduce the thickness of the distributed anisotropic conductive sheet.

However, the anisotropic conductive elastomer sheet having a small thickness absorbs the variation in the height level of each electrode to be connected, and can achieve electrical connection to each of the electrodes, that is, unevenness. There is a problem that absorption capacity is low. Specifically, the unevenness absorption capacity of the anisotropic conductive elastomer sheet is about 20% of the thickness of the anisotropic conductive elastomer sheet. For example, in the anisotropic conductive elastomer sheet having a thickness of 100 m, The force that can achieve a stable electrical connection even with a connection object with an electrode height level variation of about 20 m. In an anisotropic conductive elastomer sheet with a thickness of 50 m, It is difficult to achieve a stable electrical connection for connecting objects whose height level variation exceeds 10 m.

In order to solve such a problem, a tapered movable conductor adapted to the through hole is provided in the tapered through hole formed in the insulating sheet so as to be movable in the thickness direction with respect to the insulating sheet. An anisotropic conductive connector comprising a composite conductive sheet and two anisotropic conductive elastomer sheets disposed on one side and the other side of the composite conductive sheet has been proposed (for example, Patent Documents). (Refer to 4 etc.)

According to the anisotropic conductive connector having such a composite conductive sheet, since the movable electrode in the composite conductive sheet is movable in the thickness direction, when the pressure is applied in the thickness direction, the composite conductive sheet Since the two anisotropically conductive elastomer sheets placed on one side and the other side of each other are compressed and deformed in conjunction with each other, the sum of the concave and convex absorbent capacity of the two is the uneven conductive capacity of the anisotropic conductive connector. Therefore, high unevenness absorbing ability can be obtained.

In addition, the thickness required to obtain the required uneven absorption capacity is two anisotropic conductive elastomers. Since it is possible to use individual anisotropic conductive elastomer sheets having a small thickness as long as they are secured by the total thickness of one sheet, high resolution can be obtained.

[0006] However, the above anisotropic conductive connector has the following problems in practice.

In the above anisotropic conductive connector, the movable conductor of the composite conductive sheet is supported by both the insulating sheet and the anisotropic conductive elastomer sheet, and the composite conductive sheet and the anisotropic conductive elastomer When the sheet is separated, the movable conductor may fall off the insulating sheet, so it is practically difficult to handle the composite conductive sheet alone. Therefore, when a failure occurs in either the composite conductive sheet or the anisotropic conductive elastomer sheet in the anisotropic conductive connector, only the composite conductive sheet or the anisotropic conductive elastomer sheet is replaced with a new one. The entire anisotropically conductive connector must be replaced with a new one. In addition, the movable conductor of the composite conductive sheet is formed by depositing a metal by a plating process in a tapered through hole formed in the insulating sheet to form a metal body, and mechanically pressing the metal body. Thus, the metal body adhered to the inner surface of the through hole is separated. However, when manufacturing an anisotropically conductive connector having a large number of movable conductors, it is difficult to reliably separate all metal bodies formed on the insulating sheet from the inner surface of the insulating sheet. A malfunction occurs in the function of some movable conductors.

[0007] In order to solve such a problem, an insulating sheet in which a plurality of through-holes are formed, and the insulating sheet penetrates at both ends of a body portion passed through the through-holes of the insulating sheet. A rigid conductor formed with a terminal portion having a diameter larger than the diameter of the hole, and comprising a composite conductive sheet provided so that the rigid conductor is movable in the thickness direction of the insulating sheet. An anisotropic conductive connector has been proposed! /, (See Patent Document 5).

However, in this anisotropically conductive connector, when it is repeatedly used in the inspection of a circuit board, charges are accumulated due to static electricity on the surface of the anisotropically conductive elastomer sheet. As a result, failure of anisotropic conductive elastomer sheet and composite conductive sheet will result in failure to obtain a long service life. It turned out that there was a problem.

Patent Document 1: Japanese Patent Application Laid-Open No. 51-93393

Patent Document 2: Japanese Patent Laid-Open No. 53-147772

Patent Document 3: Japanese Patent Application Laid-Open No. 61-250906

Patent Document 4: Japanese Patent Laid-Open No. 2001-351702

Patent Document 5: Japanese Patent Application 2005-374809 Specification

Disclosure of the invention

[0009] The present invention has been made based on the circumstances as described above, and an object of the present invention is a connection object having a variation in height level of electrodes with a small separation distance between adjacent electrodes. However, it is possible to reliably achieve electrical connection to each of the electrodes while ensuring the necessary insulation between adjacent electrodes, and to prevent static charges from accumulating on the surface. Another object of the present invention is to provide an anisotropic conductive connector that can be suppressed and have a long service life, an adapter device including the anisotropic conductive connector, and an electrical inspection device for a circuit device.

[0010] An anisotropic conductive connector according to the present invention includes an insulating sheet in which a plurality of through-holes each extending in the thickness direction are formed, and each of the through-holes of the insulating sheet is provided on both sides of the insulating sheet. Rigid conductors arranged so as to protrude from each of them, and each force of each of the rigid conductors is connected to both ends of a body portion passed through the through-hole of the insulating sheet by a diameter of the through-hole of the insulating sheet. A composite conductive sheet formed with a terminal portion having a large diameter and movable in the thickness direction with respect to the insulating sheet, and a first difference disposed on one surface of the composite conductive sheet. An electrically conductive elastomer sheet and a second anisotropically conductive elastomer sheet disposed on the other side of the composite conductive sheet,

At least one of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a plurality of openings on a surface opposite to a surface in contact with the composite conductive sheet. Each of the rigid conductors in the composite conductive sheet is positioned within the opening of the charge removal layer when the composite conductive sheet and the charge removal layer are seen through in the thickness direction. The neutralization layer is connected to earth. In the anisotropic conductive connector of the present invention, it is preferable that the movable distance of the rigid conductor in the thickness direction of the insulating sheet of the composite conductive sheet is 3 to 150 m. Each of the first anisotropically conductive elastomer sheet and the second anisotropically conductive elastomer sheet is oriented so that the conductive particles exhibiting magnetism are aligned in the thickness direction in the elastic polymer material. It is preferable that the chain is formed in a state where the chain is formed and the chain of the conductive particles is dispersed in the plane direction.

The thickness of each of the first anisotropically conductive elastomer sheet and the second anisotropically conductive elastomer sheet is preferably 20 to 100 m.

Moreover, it is preferable that the number average particle diameter of electroconductive particle is 3-20 m.

[0012] The adapter device of the present invention includes an adapter body having a connection electrode region in which a plurality of connection electrodes are formed according to a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface;

The anisotropic conductive connector having a plurality of rigid conductors arranged according to a pattern corresponding to the connection electrode in the adapter body, disposed on the connection electrode region of the adapter body;

It is characterized by comprising.

[0013] An electrical inspection device for a circuit device according to the present invention comprises the adapter device described above.

[0014] According to the anisotropic conductive connector of the present invention, each of the rigid conductors in the composite conductive sheet is movable in the thickness direction with respect to the insulating sheet. When pressed in the direction, the first anisotropic conductive elastomer sheet disposed on one surface of the composite conductive sheet and the second anisotropic conductive elastomer disposed on the other surface of the composite conductive sheet. One sheet compresses and deforms in conjunction with each other as the rigid conductor moves in the thickness direction of the insulating sheet. Therefore, the total uneven absorption capacity of both sheets is equal to that of the anisotropic conductive connector. It is expressed as a concave / convex absorbability, and therefore a high concave / convex absorbability can be obtained.

In addition, the thickness required to obtain the required unevenness absorption capacity is ensured by the total thickness of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet. As the anisotropic conductive elastomer sheet, a sheet having a small thickness can be used, so that high resolution and high resolution can be obtained.

Therefore, even when the distance between the adjacent electrodes is small and the height level of the electrodes varies, the electrical connection to each of the electrodes is ensured with the necessary insulation between the adjacent electrodes. Connection can be reliably achieved.

Further, at least one of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a plurality of openings on a surface opposite to the surface in contact with the composite conductive sheet. Since the charge removal layer having the above is formed, the charge removal due to static electricity can be prevented or suppressed by connecting the charge removal layer to the ground. Therefore, it is possible to avoid the occurrence of failure in the anisotropic conductive elastomer sheet and the composite conductive sheet due to the discharge of the accumulated electric charge, so that a long service life can be obtained.

According to the adapter device of the present invention, since the anisotropic conductive connector is provided, the circuit device to be inspected has a small separation distance between adjacent test electrodes. Even if there are variations in the height level, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected while ensuring the necessary insulation between adjacent electrodes to be inspected. In addition, accumulation of static electricity on the surface can be prevented or suppressed, and a long service life can be obtained.

[0016] According to the electrical inspection device for a circuit device of the present invention, since the adapter device is provided, the circuit device to be inspected has a small separation distance between adjacent electrodes to be inspected. Even if there are variations in the height level of the electrodes, the required electrical inspection can be reliably performed on the circuit device. In addition, since the anisotropic conductive connector has a long service life, the frequency of replacing the anisotropic conductive connector with a new one when the anisotropic conductive connector fails is reduced, and high inspection efficiency can be obtained.

Brief Description of Drawings

1 is a cross-sectional view for explaining the structure of an example of the anisotropic conductive connector of the present invention. FIG. 2 is an explanatory view showing an enlarged main part of the anisotropic conductive connector shown in FIG. It is sectional drawing. 3] An enlarged cross-sectional view illustrating the main part of the composite conductive sheet.

4] A cross-sectional view illustrating the structure of a laminated material for producing a composite conductive sheet. [5] FIG. 5 is a cross-sectional view illustrating a state in which an opening is formed in a metal layer in the laminated material.

Yes

6] A sectional view for explanation showing a state in which a through hole is formed in an insulating sheet in a laminated material.

FIG. 7 is an explanatory cross-sectional view showing a configuration of a composite laminated material.

FIG. 8 is a cross-sectional view for explaining a state in which a resist film is formed on the composite laminated material. FIG. 9] is a cross-sectional view for explaining a state where a rigid conductor is formed in the through hole of the insulating sheet in the composite laminated material.

FIG. 10] is a cross-sectional view for explaining the state in which the composite laminated material force is also removed from the resist film. FIG. 11] A cross-sectional view for explaining the one-side molded member, the other-side molded member, and the spacer for manufacturing the first anisotropic conductive elastomer sheet.

12] A sectional view for explanation showing a state in which the material for the conductive elastomer is applied to the surface of the other side molding member.

13] A sectional view for explanation showing a state in which a conductive elastomer material layer is formed between the other side molding member and the metal film.

14] FIG. 14 is an enlarged cross-sectional view illustrating the conductive elastomer material layer shown in FIG.

FIG. 15 is an explanatory cross-sectional view showing a state in which a magnetic field is applied in the thickness direction to the material layer for conductive elastomer shown in FIG.

16] A cross-sectional view illustrating the configuration of an example of the adapter device according to the present invention. 17] FIG. 17 is a cross-sectional view illustrating the configuration of the adapter body in the adapter device illustrated in FIG.

FIG. 18 is an explanatory diagram showing a configuration of an example of an electrical inspection device for a circuit device according to the present invention. FIG. 19] is an explanatory view showing a modification of the static elimination layer.

FIG. 20 is an explanatory view showing another modification of the charge removal layer. Explanation of symbols

la Upper adapter device

lb Lower adapter device

2 Honoreda

3 Positioning pin

5 Circuit equipment

6, 7 Inspected electrode

10 Composite conductive sheet

10A composite laminate material

10B Laminate material

11 Insulating sheet

11H Through hole

12 Rigid conductor

12a torso

12b terminal

13A metal layer

13B thin metal layer

13K aperture

14 Resist film

14H pattern hole

15 Anisotropic conductive connector

16 First anisotropically conductive elastomer sheet

16A Material layer for conductive elastomer

16B Material for conductive elastomer

17 Second anisotropically conductive elastomer sheet

18, 19 Static electricity removal layer 18A metal film

18H, 19H opening

20 Adapter body

21 Connecting electrode

22 Terminal electrode

23 Internal wiring

25 Electrode area for connection

30 One side molded member

31 Other side molding

32 Spacer

32K opening

33 Pressure roll

34 Support roll

35 Pressure roll device

50a Upper inspection head

50b Lower inspection head

51 a, 51b Inspection electrode device

52a, 52b Test electrode

53a, 53b Electric wire

54a, 54b Prop

55a, 55b Anisotropic conductive elastomer sheet

56a Upper support plate

56b Lower support plate

57a, 57b connector

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described in detail.

FIG. 1 is a cross-sectional view for explaining the structure of an example of the anisotropically conductive connector of the present invention. FIG. 2 is an explanatory cross-sectional view showing an enlarged main part of the anisotropic conductive connector shown in FIG. The anisotropic conductive connector 15 includes a composite conductive sheet 10, a first anisotropic conductive elastomer sheet 16 disposed on one surface (the upper surface in FIG. 1) of the composite conductive sheet 10, and a composite conductive sheet. And a second anisotropic conductive elastomer sheet 17 disposed on the other surface of the conductive sheet 10.

As shown in FIG. 3, the composite conductive sheet 10 includes an insulating sheet 11 formed according to a pattern corresponding to a pattern of electrodes to which a plurality of through holes 11H extending in the thickness direction are to be connected, The insulating sheet 11 includes a plurality of rigid conductors 12 arranged so as to protrude from both surfaces of the insulating sheet 11 in the through holes 11H. Each of the rigid conductors 12 includes a cylindrical body portion 12a threaded through the through hole 11H of the insulating sheet 11, and an insulating sheet 1 formed integrally connected to both ends of the body portion 12a. 1 and a terminal portion 12b exposed on the surface. The length L of the body portion 12a of the rigid conductor 12 is larger than the thickness d of the insulating sheet 11, and the diameter r2 of the body portion 12a is smaller than the through hole of the insulating sheet 11; smaller than the diameter rl of 11H. Accordingly, the rigid conductor 12 can be moved in the thickness direction of the insulating sheet 11. Further, the diameter r3 of the terminal portion 12b in the rigid conductor 12 is larger than the diameter rl of the through hole 11H of the insulating sheet 11.

[0021] The material constituting the insulating sheet 11 includes resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, and polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, and glass fiber. A fiber reinforced resin material such as a reinforced polyimide resin, a composite resin material containing an inorganic material such as alumina or boron nitride as a filler in an epoxy resin, or the like can be used.

Also, when using a composite conductive sheet 10 in a high temperature environment, the insulating sheet 11, preferably from preferably be linear thermal expansion coefficient used the following 3 X 10- ⁵ / K instrument the ^{^{1 X 10- 6 ~2 Χ 10- 5}} / Κ, particularly preferably ^{1 X 10- 6 ~6 Χ 10- 6} / Κ. By using such an insulating sheet 11, it is possible to suppress the displacement of the rigid conductor 12 due to the thermal expansion of the insulating sheet 11.

The thickness d of the insulating sheet 11 is preferably 10 to 200 111, more preferably (Between 15 and 100 m.

Further, the through hole of the insulating sheet 11; the diameter rl of 11H is preferably 20 to 300 111, more preferably 30 to 150.

As the material constituting the rigid conductor 12, a metal material having rigidity can be preferably used, and in particular, a material that is less likely to be etched than a thin metal layer formed on an insulating sheet in the manufacturing method described later is used. I like it. Specific examples of such a metal material include a single metal such as nickel, cobalt, gold, and aluminum, or an alloy thereof.

The diameter r2 of the body 12a of the rigid conductor 12 is preferably 18 m or more, more preferably 25 m or more. If the diameter r2 is too small, the strength required for the rigid conductor 12 may not be obtained. Further, the difference (rl−r2) between the diameter rl of the through hole 11H of the insulating sheet 11 and the diameter r2 of the body 12a of the rigid conductor 12 is preferably 1 m or more, more preferably 2 m or more. When this difference is too small, there is a force S that makes it difficult to move the rigid conductor 12 in the thickness direction of the insulating sheet 11.

The diameter r3 of the terminal portion 12b in the rigid conductor 12 is preferably 70 to 150% of the diameter of the electrode to be connected, for example, the electrode to be inspected. Further, it is preferable that the difference (r3−rl) between the diameter r3 of the terminal portion 12b in the rigid conductor 12 and the through hole of the insulating sheet 11; the diameter rl of 11H is 5 111 or more, more preferably 10 m or more. If this difference is too small, the rigid conductor 12 may fall off the insulating sheet 11.

The thickness of the terminal portion 12b in the rigid conductor 12 is preferably 5 to 50 111, more preferably 8 to 40 μm.

The movable distance of the rigid conductor 12 in the thickness direction of the insulating sheet 11, that is, the difference (L d) between the length L of the body 12a of the rigid conductor 12 and the thickness d of the insulating sheet 1 1 is 3 to 1 50. A force of being μm S is preferable, more preferably 5 to; 100 μm, still more preferably 10 to 50 μm. If the movable distance of the rigid conductor 12 is too small, it may be difficult to obtain sufficient unevenness absorbing capability in the anisotropic conductive connector described later. On the other hand, when the movable distance of the rigid conductor 12 is excessive, the length of the body 12a of the rigid conductor 12 exposed from the through hole 11H of the insulating sheet 11 becomes large, and when used for inspection, The body 12a of the rigid conductor 12 may be buckled or damaged.

[0023] Such a composite conductive sheet 10 has a rigid conductor 12 that can move in the thickness direction in the through-hole 11H of the insulating sheet 11, and the rigid conductor 12 has both ends of its trunk 12a. As a result, the terminal portion 12b having a diameter larger than the diameter of the through hole 11H of the insulating sheet 11 is formed! /, So that the terminal portion 12b functions as a stopper, so that the rigid conductor 12 is insulative. The composite conductive sheet 10 that does not fall off the sheet 11 is easy to handle even by itself.

[0024] The composite conductive sheet 10 can be manufactured, for example, as follows.

First, as shown in FIG. 4, a laminate material 10B is prepared in which an easily-etchable metal layer 13A is integrally laminated on one surface of an insulating sheet 11, and etching is performed on the metal layer 13A in the laminate material 10B. By removing the part by performing the treatment, a plurality of openings 13K are formed according to the pattern corresponding to the pattern of the electrodes to be connected to the metal layer 13A as shown in FIG. Next, as shown in FIG. 6, through-holes 11H that extend in the thickness direction are formed in the insulating sheet 11 in the laminated material 10B and communicate with the openings 13K of the metal layer 13A. Then, as shown in FIG. 7, an easily etchable cylindrical metal thin layer 13B is formed so as to cover the inner wall surface of the through hole 11H of the insulating sheet 11 and the opening edge of the metal layer 13A. In this way, the insulating sheet 11 having a plurality of through holes 11H extending in the thickness direction and the through holes 11H of the insulating sheet 11 stacked on one surface of the insulating sheet 11 are communicated. An easily-etchable metal layer 13A having a plurality of openings 13K, and an easily-etchable thin metal layer 13B formed so as to cover the inner wall surface of the through-hole 11H of the insulating sheet 11 and the opening edge of the metal layer 13A. A composite laminate material 1 with OA is manufactured.

In the above, as a method for forming the through hole 11H of the insulating sheet 11, a laser processing method, a drill processing method, an etching processing method, or the like can be used.

Copper or the like can be used as an easily-etchable metal material constituting the metal layer 13A and the metal thin layer 13B.

In addition, the thickness of the metal layer 13A is set in consideration of the movable distance of the target rigid conductor 12, and specifically, it is preferably 3 to 75 111, more preferably 5 to 50 mm. 111 More preferably, it is 8-25111.

Further, the thickness of the thin metal layer 13B is set in consideration of the diameter of the through hole 11H of the insulating sheet 11 and the diameter of the body portion 12a in the rigid conductor 12 to be formed.

Further, as a method of forming the thin metal layer 13B, an electroless plating method or the like can be used.

[0025] Then, a rigid conductor 12 is formed in each of the through holes 11H of the insulating sheet 11 by subjecting the composite laminated material 10A to a photo plating process. More specifically, as shown in FIG. 8, the terminal portion 12b of the rigid conductor 12 to be formed on the surface of the metal layer 13A formed on one surface of the insulating sheet 11 and the other surface of the insulating sheet 11, respectively. A resist film 14 having a plurality of pattern holes 14H communicating with the through holes 11H of the insulating sheet 11 is formed according to a pattern corresponding to each pattern. Next, an electrolytic plating process is performed using the metal layer 13A as a common electrode to deposit a metal on the exposed portion of the metal layer 13A, and a metal is deposited on the surface of the metal thin layer 13B to form a through hole 11H in the insulating sheet 11 By filling the inside and the pattern hole 14H of the resist film 14 with metal, the rigid conductor 12 extending in the thickness direction of the insulating sheet 11 is formed as shown in FIG. After forming the rigid conductor 12 in this way, the resist film 14 is removed from the surface of the metal layer 13A, thereby exposing the metal layer 13A as shown in FIG. Then, the composite conductive sheet 10 shown in FIG. 3 is obtained by performing an etching process to remove the metal layer 13A and the metal thin layer 13B.

[0026] First anisotropically conductive elastomer sheet 16 and second anisotropically conductive elastomer sheet

No. 17 is a state in which the conductive particles P exhibiting magnetism are aligned so as to be aligned in the thickness direction in the insulating elastic polymer substance, and the chain is formed by the conductive particles P. It is contained in a state dispersed in the plane direction.

A polymer material having a cross-linked structure is preferred as the elastic polymer material forming the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17. Durability, moldability From the viewpoint of electrical characteristics, it is more preferable to use silicone rubber.

[0027] First anisotropically conductive elastomer sheet 16 and second anisotropically conductive elastomer sheet As the conductive particles P contained in 17, conductive particles exhibiting magnetism are used because the particles can be easily aligned in the thickness direction by a method described later. Specific examples of such conductive particles include particles of a metal having magnetism such as iron, cobalt and nickel, particles of these alloys, particles containing these metals, or particles of these particles as core particles. The surface of the core particle is made of a metal having a good conductivity such as gold, silver, palladium, rhodium, or inorganic substance particles such as non-magnetic metal particles or glass beads, or polymer particles. In addition, the surface of the core particle may be a conductive magnetic metal such as nickel or cobalt.

Yes

Of these, it is preferable to use nickel particles as core particles and the surface of which is provided with gold or silver plating with good conductivity! /.

The means for coating the surface of the core particles with the conductive metal is not particularly limited. For example, chemical plating or electrolytic plating, sputtering, vapor deposition, or the like is used.

[0028] When the conductive particle P is used in which the surface of the core particle is coated with a conductive metal, good conductivity can be obtained, so that the conductive metal coverage on the particle surface ( The ratio of the coated area of the conductive metal to the surface area of the core particles) is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.

Further, the coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particles.

[0029] The number average particle diameter of the conductive particles P is preferably 3 to 20, 1 m, and more preferably 5 to 15. When this number average particle diameter is too small, it may be difficult to orient the conductive particles P in the thickness direction in the production method described later. On the other hand, when the number average particle diameter is excessive, it may be difficult to obtain an anisotropic conductive elastomer sheet with high resolution.

Further, the particle size distribution (Dw / Dn) of the conductive particles P is preferably 1 to 10; more preferably 1.01-7, still more preferably 1.05 to 5, particularly preferably 1. ; ~ 4. In addition, the shape of the conductive particles P is not particularly limited. However, the conductive particles P can be easily dispersed in the polymer material-forming material. It is preferable that they are agglomerated secondary particles.

[0030] Such conductive particles P are preferably contained in the anisotropic conductive elastomer sheet in a volume fraction of 10 to 40%, particularly 15 to 35%. When this ratio is too small, an anisotropic conductive elastomer sheet having sufficiently high conductivity in the thickness direction may not be obtained. On the other hand, if this ratio is excessive, the anisotropically conductive elastomer sheet obtained becomes fragile and the necessary elasticity as an anisotropically conductive elastomer sheet cannot be obtained immediately. is there.

[0031] Also, the thickness of each of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 is 20 to 100 m, preferably S, more preferably 25-7 O ^ m. If this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

Yes

[0032] Each of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 has a surface opposite to the surface in contact with the composite conductive sheet 10 on the first anisotropic conductive elastomer sheet 16. Discharge layers 18 and 19 having dimensions larger than those of the anisotropically conductive elastomer sheet 16 and the second anisotropically conductive elastomer sheet 17 are formed in a body. A plurality of openings 18H are formed in the static elimination layer 18 formed in the first anisotropic conductive elastomer sheet 16 so as to be positioned immediately above each of the rigid conductors 12 in the composite conductive sheet 10. Further, a plurality of openings 19H are formed in the static elimination layer 19 formed in the second anisotropic conductive elastomer sheet 17 so as to be positioned immediately below each of the rigid conductors 12 in the composite conductive sheet 10. . Then, when the composite conductive sheet 10 and the static elimination layers 18 and 19 are seen through in the thickness direction, the force of the rigid conductor 12 in the composite conductive sheet 10 is positioned in the openings 18H and 19H of the static elimination layers 18 and 19, respectively. Has been.

As a material constituting the charge removal layers 18 and 19, a metal material or a material obtained by curing a conductive paste containing a metal powder in a curable resin can be used.

Here, examples of the metal material include metals such as iron, copper, gold, nickel, and titanium, alloys or alloy steels in which two or more of these are combined, Invar type alloys such as Invar, Elinvar type alloys such as Elinba, and Super Invar. , Kovar, alloy such as 42 alloy or Alloy steel or the like can be used.

Further, the thickness of the charge removal layers 18 and 19 is preferably 5 to 50 111, more preferably 10 to 30 111. If this thickness is too small, the neutralization layers 18 and 19 will crack and become anisotropic due to repeated compression in the thickness direction of the anisotropic conductive elastomer sheet when the anisotropic conductive connector is used for inspection. Separation of the charge removal layers 18 and 19 from the conductive elastomer sheet may occur. On the other hand, if this thickness is excessive, it may be difficult to compress the anisotropic conductive elastomer sheet in the thickness direction when the anisotropic conductive connector is used for inspection. The depth of the openings 18H and 19H formed in 18 and 19 is increased, and the electrical connection between the electrode to be inspected of the object to be inspected or the electrode for connecting the adapter body described later and the rigid conductor 12 of the composite conductive sheet 10 When using a metal material, the neutralization layers 18 and 19 are manufactured by a method using a plating process or a sputtering process, separately manufacturing a metal film having an opening, and transferring the metal film. The conductive paste can be formed by applying and curing the conductive paste.

In the illustrated example, the diameters of the openings 18H and 19H of the static elimination layers 18 and 19 are larger than the diameter of the terminal portion 12b of the rigid conductor 12 in the composite conductive sheet 10, and specifically, the terminal portion 12b It is preferable that the diameter is 1. to 15 times, more preferably 1.5 to 10 times. If the diameters 18H and 19H of the neutralization layers 18 and 19 are too small, adjacent electrodes or adjacent rigid conductors 12 may be short-circuited. On the other hand, when the diameters of the openings 18H and 19H of the static elimination layers 18 and 19 are excessive, it may be difficult to prevent or suppress charging.

The first anisotropically conductive elastomer sheet 16 can be manufactured as follows.

Yes

First, as shown in FIG. 11, each of the sheet-shaped one-surface-side molded member 30 and the other-surface-side molded member 31 and a shape that conforms to the planar shape of the target first anisotropic conductive elastomer sheet 16 are used. A frame-shaped spacer 32 having an opening 32K and a thickness corresponding to the thickness of the first anisotropic conductive elastomer sheet 16 is prepared and cured. A conductive elastomer material is prepared in which conductive particles are contained in a liquid polymer material-forming material that is an elastic polymer material.

Then, as shown in FIG. 12, a spacer 32 is disposed on the molding surface (the upper surface in FIG. 12) of the other surface side molding member 31, and the spacer 32 on the molding surface of the other surface side molding member 31 is disposed. The prepared conductive elastomer material 16B is applied to the opening 32K, and then a metal film 18A is disposed on the conductive elastomer material 16B, and the one-side molded member 30 is disposed on the metal film 18A. Place.

In the above, as the one side molding member 30 and the other side molding member 31, resin sheets made of polyimide resin, polyester resin, acrylic resin, or the like can be used. The thickness of the resin sheet constituting the one-surface-side molded member 30 and the other-surface-side molded member 31 is preferably 50 to 500 mm 111, more preferably 75 to 300 mm 111. If this thickness is less than 50 m, the strength required for molded parts may not be obtained. On the other hand, when the thickness exceeds 500 m, it may be difficult to apply a magnetic field having a required strength to the conductive elastomer material layer described later.

Next, as shown in FIG. 13, the conductive elastomer material 16B is sandwiched between the one-side molded member 30 and the other-side molded member 31 using the pressure roll device 35 including the pressure roll 33 and the support roll 34. By pressing, a conductive elastomer material layer 16A having a required thickness is formed between the other surface side molding member 31 and the metal film 18A. In the conductive elastomer material layer 16A, as shown in an enlarged view in FIG. 14, the conductive particles P are contained in a uniformly dispersed state.

After that, for example, a pair of electromagnets is arranged on the back surface of the one-surface-side molded member 30 and the back surface of the other-surface-side molded member 31, and the electromagnet is operated to be parallel to the thickness direction of the conductive elastomer material layer 16A. Apply a magnetic field. As a result, in the conductive elastomer material layer 16A, the conductive particles P dispersed in the conductive elastomer material layer 16A were dispersed in the plane direction as shown in FIG. While maintaining the state, it is oriented so as to be aligned in the thickness direction, whereby a chain of a plurality of conductive particles P each extending in the thickness direction is formed in a state dispersed in the plane direction.

In this state, the conductive elastomer material layer 16A is cured. Accordingly, the elastic polymer material contains the first different particles that are contained in a state in which the conductive particles P are aligned in the thickness direction and the chain of the conductive particles P is dispersed in the plane direction. The electrically conductive elastomer sheet 16 is manufactured in a state of being integrally bonded to the metal film 18A. Thereafter, a part of the metal film 18A is subjected to photolithography and etching to remove a part of the metal film 18A, whereby the charge removal layer 18 having the opening 18H is obtained.

In the above, the hardening process of the conductive elastomer material layer 16A can be performed after the action of the force parallel magnetic field which can be performed with the parallel magnetic field applied is stopped.

In addition, the action of the parallel magnetic field may be temporarily stopped, and then the direction of the applied magnetic field may be reversed.

The intensity of the parallel magnetic field applied to the conductive elastomer material layer 16A preferably has an average magnitude of 0.02 to 2.5 Tesla.

The curing treatment of the conductive elastomer material layer 16A is appropriately selected depending on the material to be used, but is usually performed by heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material constituting the conductive elastomer material layer 16A, the time required to move the conductive particles, and the like.

The second anisotropically conductive elastomer sheet 17 can be manufactured by the same method as that for the first anisotropically conductive elastomer sheet 16.

[0037] According to such an anisotropic conductive connector 15, each of the rigid conductors 12 in the composite conductive sheet 10 is movable in the thickness direction with respect to the insulating sheet 11! / Therefore, when pressed in the thickness direction by the electrodes to be connected, the first anisotropic conductive elastomer sheet 16 disposed on one surface of the composite conductive sheet 10 and the other surface of the composite conductive sheet 10 Since the second anisotropically conductive elastomer sheet 17 disposed in the space is compressed and deformed in conjunction with the movement of the rigid conductor 12, the total of the uneven absorption capacity of both is anisotropically conductive. This is manifested as a concave / convex absorbing capacity of the conductive connector 15, so that a high concave / convex absorbing capacity can be obtained.

In addition, the thickness required to obtain the required unevenness absorbability is determined by the total thickness of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17. Since it is possible to use an anisotropic conductive elastomer sheet that has a small thickness, it is possible to use V and force S, so that high resolution can be obtained.

In addition, each of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 has a surface on the opposite side to the surface in contact with the composite conductive sheet 10 and the composite conductive material. Since the static elimination layers 18 and 19 having a plurality of openings formed immediately above each of the rigid conductors 12 in the sheet 10 are formed, the static elimination layers 18 and 19 are connected to the ground, thereby causing static electricity. Charge accumulation can be prevented or suppressed. Therefore, it is possible to prevent the first anisotropic conductive elastomer sheet 16, the second anisotropic conductive elastomer sheet 17 and the composite conductive sheet 10 from being damaged due to the discharge of the accumulated charge. Therefore, a long service life can be obtained.

FIG. 16 is an explanatory cross-sectional view showing a configuration of an example of the adapter device according to the present invention, and FIG. 17 is an explanatory cross-sectional view showing an adapter main body in the adapter device shown in FIG. This adapter device is for inspecting a circuit device used for, for example, an open / short test of a circuit device such as a printed circuit board, and has an adapter body 20 made of a multilayer wiring board.

On the surface of the adapter body 20 (upper surface in FIGS. 16 and 17), a connection electrode region in which a plurality of connection electrodes 21 are arranged according to a specific pattern corresponding to the pattern of the electrode to be inspected of the circuit device to be inspected. 25 is formed.

A plurality of terminal electrodes 22 are arranged on the back surface of the adapter body 20 according to the grid point positions of, for example, a pitch of 0.8 mm, 0.75 mm, 1.5 mm, 1.8 mm, and 2.54 mm. Are electrically connected to the connection electrode 21 by the internal wiring portion 23. On the surface of the adapter body 20, an anisotropic conductive connector 15 having the structure shown in FIG. 1 is basically provided on the connection electrode region 25, and a second anisotropic conductive elastomer sheet 17 is an adapter. Arranged in contact with the main body 20, the adapter main body 20 has an appropriate means. (Not shown).

In this anisotropic conductive connector 15, a plurality of rigid conductors 12 are arranged on the composite conductive sheet 10 according to the same pattern as the specific pattern related to the connection electrode 21 in the adapter single body 20. The directionally conductive connector 15 is arranged such that each of the rigid conductors 12 in the composite conductive sheet 10 is positioned directly above the connection electrode 21 of the adapter body 20! /.

[0039] According to such an adapter device, since the anisotropic conductive connector 15 having the configuration shown in Fig. 1 is provided, the circuit device to be inspected has a small distance between adjacent electrodes to be inspected. Even if there are variations in the height level of the inspection electrodes, the electrical connection to each of the electrodes to be inspected can be reliably achieved with the necessary insulation between the adjacent electrodes to be inspected. Moreover, it is possible to prevent or suppress the accumulation of electric charges due to static electricity on the surface and to obtain a long service life.

FIG. 18 is an explanatory diagram showing a configuration of an example of an electrical inspection device for a circuit device according to the present invention. This electrical inspection device performs, for example, an open 'short test on a circuit device 5 such as a printed circuit board having electrodes 6 and 7 to be inspected on both sides. The holder 2 for holding is provided with a positioning pin 3 for arranging the circuit device 5 at an appropriate position in the inspection execution area E. Above the inspection execution area E, an upper side adapter device la and an upper side inspection head 50a configured as shown in FIG. 17 are arranged in this order from the bottom, and further above the upper side inspection head 50a, The upper side support plate 56a is arranged, and the upper side inspection head 50a is fixed to the upper side support plate 56a by the support 54a. On the other hand, below the inspection execution area E, the lower adapter device lb and the lower inspection head 50b configured as shown in FIG. 17 are arranged in this order from the top, and further below the lower inspection head 50b. The lower side support plate 56b is arranged, and the lower side inspection head 50b is fixed to the lower side support plate 56b by a support 54b.

The upper inspection head 50a is composed of a plate-shaped inspection electrode device 51a and an elastically conductive anisotropic elastomer sheet 55a that is fixedly disposed on the lower surface of the inspection electrode device 51a. It is configured. The inspection electrode device 51a has a plurality of pin-shaped inspection electrodes 52a arranged at lattice point positions at the same pitch as the terminal electrodes 22 of the upper-side adapter device la on its lower surface, and each of these inspection electrodes 52a. Is electrically connected to a connector 57a provided on the upper support plate 56a by an electric wire 53a, and further electrically connected to a test circuit (not shown) of the tester via this connector 57a! /

The lower side inspection head 50b is composed of a plate-like inspection electrode device 51b and an anisotropically conductive elastomer sheet 55b having elasticity and fixed to the upper surface of the inspection electrode device 51b. The inspection electrode device 51b has a plurality of pin-shaped inspection electrodes 52b arranged on the upper surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the lower side adapter device lb, and each of these inspection electrodes 52b. Is electrically connected to the connector 57b provided on the lower support plate 56b by the electric wire 53b, and further electrically connected to the test circuit of the tester (not shown) via the connector 57b! /

And the static elimination layers 18 and 19 of the anisotropic conductive connector 15 in each of the upper side adapter device la and the lower side adapter device lb are respectively connected to the ground.

In the above, each of the anisotropic conductive elastomer sheets 55a and 55b in the upper inspection head 50a and the lower inspection head 50b is formed with a conductive path forming portion that forms a conductive path only in the thickness direction. It will be. As such anisotropic conductive elastomer sheets 55a and 55b, each conductive path forming portion is formed so as to protrude in the thickness direction on at least one surface. Preferable in terms of demonstrating!

Yes

In such an electrical inspection device for a circuit device, the circuit device 5 to be inspected is held in the inspection execution region E by the holder 2, and in this state, the upper side support plate 56a and the lower side support As each of the plates 56b moves in a direction approaching the circuit device 5, the circuit device 5 is clamped by the upper adapter device la and the lower adapter device lb.

In this state, the electrode 6 to be inspected on the upper surface of the circuit device 5 is electrically connected to the connection electrode 21 in the upper-side adapter device la via the anisotropic conductive connector 10, and this upper-side adapter is connected. The terminal electrode 22 of the device la is an anisotropic conductive elastomer. It is electrically connected to the inspection electrode 52a of the inspection electrode device 51a through one sheet 55a. On the other hand, the electrode 7 to be inspected on the lower surface of the circuit device 5 is electrically connected to the connection electrode 21 in the lower-side adapter device lb via the anisotropic conductive connector 10, and this lower-side adapter device. The terminal electrode 22 of lb is electrically connected to the inspection electrode 52b of the inspection electrode device 51b via an anisotropic conductive elastomer sheet 55b.

[0043] In this way, each force of the electrodes 6 and 7 to be inspected on both the upper surface and the lower surface of the circuit device 5 is inspected in the inspection electrode 52a of the inspection electrode device 51a and the lower inspection head 50b in the upper inspection head 50a. By being electrically connected to each of the inspection electrodes 52b of the electrode device 51b, a state of being electrically connected to the inspection circuit of the tester is achieved, and a required electrical inspection is performed in this state.

[0044] According to the electrical inspection device for a circuit device described above, since the upper side adapter device la and the lower side adapter device lb are configured as shown in FIG. Even if there is a variation in the height level of the electrodes 6 and 7 to be inspected, the distance between the electrodes 6 and 7 adjacent to each other is small, the required electrical inspection of the circuit device 5 is reliably performed. can do. In addition, since the anisotropic conductive connector 15 has a long service life, when the anisotropic conductive connector 15 breaks down, the frequency of replacement with a new one is reduced, so that high inspection efficiency is achieved. can get.

[0045] The present invention is not limited to the above-described embodiment, and various modifications as described below can be added.

The neutralization layer may be configured to be formed on only one of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17.

In the composite conductive sheet 10, the material constituting the rigid conductor 12 is not limited to a metal material as long as it is a rigid conductor.For example, a rigid resin contains conductive powder such as metal. Can be used.

In the method for manufacturing the composite conductive sheet 10, the laminated material and the composite laminated material may be formed by forming metal layers on both sides of the insulating sheet.

In the anisotropically conductive connector 15, the unevenly anisotropic anisotropic conductor is used as one or both of the first anisotropically conductive elastomer sheet and the second anisotropically conductive elastomer sheet. An electrically conductive elastomer sheet can be used.

Further, it is not essential that the openings 18H and 19H of the charge removal layers 18 and 19 are formed corresponding to the rigid conductor 12 in the composite conductive sheet 10. For example, as shown in FIG. When the charge removal layer 18 is seen through in the thickness direction, the plurality of rigid conductors 12 may be formed in one opening 18H. Further, as shown in FIG. 20, when the composite conductive sheet 10 and the charge removal layer 18 are seen through in the thickness direction, an opening 18H may be formed in addition to the region where the rigid conductor 12 is located.

In the electrical inspection apparatus, the circuit device to be inspected is not limited to a printed circuit board, but may be a package, a semiconductor integrated circuit device such as an MCM, or a wafer on which an integrated circuit is formed.

Claims

The scope of the claims

[1] An insulating sheet in which a plurality of through holes each extending in the thickness direction are formed, and a rigid conductor arranged so that each of the both sides of the insulating sheet protrudes into each of the through holes of the insulating sheet. Each of the rigid conductors is formed with terminal portions having a diameter larger than the diameter of the through hole of the insulating sheet at both ends of the body portion passed through the through hole of the insulating sheet. A composite conductive sheet that is movable in the thickness direction relative to the insulating sheet, a first anisotropic conductive elastomer sheet disposed on one surface of the composite conductive sheet, and the composite conductive sheet. A second anisotropic conductive elastomer sheet disposed on the other surface of the conductive sheet,

At least one of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a plurality of openings on a surface opposite to a surface in contact with the composite conductive sheet. Each of the rigid conductors in the composite conductive sheet is positioned within the opening of the charge removal layer when the composite conductive sheet and the charge removal layer are seen through in the thickness direction. An anisotropic conductive connector, characterized in that the static elimination layer is connected to ground.

[2] The anisotropic conductive connector according to claim 1, wherein the movable conductor has a movable distance in the thickness direction of the insulating sheet of the composite conductive sheet.

[3] Each of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet is oriented so that the conductive particles exhibiting magnetism are arranged in the thickness direction in the elastic polymer substance. The anisotropic conductive material according to claim 1 or 2, wherein the chain is formed in a state where a chain is formed and the chain of conductive particles is dispersed in a plane direction. connector.

[4] The anisotropic conductive material according to claim 3, wherein each of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a thickness of 20 to 100 m. Sex connector.

[5] The anisotropic conductive connector according to claim 3 or 4, wherein the number average particle diameter of the conductive particles is 3 to 20 am.

[6] Duplicate according to the pattern corresponding to the electrode under test in the circuit device to be inspected on the surface An adapter body having a connection electrode region in which a number of connection electrodes are formed;

6. The apparatus according to claim 1, further comprising a plurality of rigid conductors arranged on the connection electrode region of the adapter body and arranged according to a pattern corresponding to the connection electrode in the adapter body. An adapter device comprising an anisotropic conductive connector.

[7] An electrical inspection device for a circuit device comprising the adapter device according to [6].