200835060 九、發明說明 【發明所屬之技術領域】 本發明是關於可適合於使用在例如印刷電路基板等的 電路裝置的電性檢查的向異導電性連接器，及具備它的轉 接裝置及具有該轉接裝置的電路裝置的電性檢查裝置。 【先前技術】 φ —般，針對於用以構成或是用以裝載BGA或CSP等 的封裝LSI，MCM，其他積體電路裝置等的電子零件的電 路基板，在裝配電子零件之前或是裝載電子零件之前，爲 了確認當該電路基板的配線圖案具有所期望的性能而必須 檢查其電性特性。 以往，作爲實行電路基板的電性檢查的方法，眾知有 組合隨著縱橫地排列的格子點位置配置有複數檢查電極所 成的檢查電極裝置，及將檢查對象的電路基板的被檢查電 φ 極電性地連接於該檢查電極裝置的檢查電極的轉接器而加 以使用的方法等。在該方法所使用的轉接器是被稱爲節距 轉換板的印刷配線板所成者。 作爲轉接器眾知有：在一面具有隨著對應於檢查對象 的電路基板的被檢查電極的圖案所配置的複數連接用電極 ，而在另一面具有配置於與檢查電極裝置的檢查電極同一 節距的格子點位置的複數端子電極者，或是在一面具有隨 著對應於檢查對象的電路基板的被檢查電極的圖案所配置 的電流供應用連接用電極及電壓測定用連接用電極所構成 -5- 200835060 的複數連接用電極組，而在另一面具有配置於與檢查電極 裝置的檢查電極同一節距的格子點位置的複數端子電極者 等，前者的轉接器是例如被使用在電路基板的各電路的開 槽試驗等，而後者的轉接器是被使用在電路基板的各電路 的電阻試驗。 而且，在電路基板的電性檢查片，一般，爲了達成檢 查對象的電路基板與轉接器的穩定電性連接，進行著作爲 I 連接器，將向異導電性彈性體片介裝於檢查對象的電路基 板與轉接器之間。 該向異導電性彈性體片是具有僅在厚度方向表示導電 性者，或是在被加壓時僅在厚度方向表示導電性的多數加 壓導電性導電部者。 作爲此種向異導電性彈性體片，以往眾知有各種構造 者，例如在專利文獻1，揭示著在彈性高分子物質中表示 磁性的導電性粒子朝厚度方向排列般地配向而形成連鎖的 Φ 狀態且依當該導電性粒子的連鎖朝面方向分散的狀態下含 有所成的向異導電性彈性體片（以下，將此稱爲「分散型 向異導電性片」。），在專利文獻2，揭示著形成有藉由 將在彈性高分子物質中表示磁性的導電性粒子不均勻地分 散，朝厚度方向延伸的多數導電路形成部，及互相地絕緣 此些的絕緣部所成的向異導電性彈性體片（以下，將此稱 爲「偏在型向異導電性片」。），而在專利文獻3揭示著 在導電路形成部的表面與絕緣部之間形成有階段差的偏在 型向異導電性片。 -6- 200835060 此些向異導電性彈性體片是例如在被硬化成爲彈性高 分子物質的液狀高分子物質形成材料中對於含有表示磁性 的導電性粒子所成的成形材料層，藉由一面在其厚度方向 作用磁場或是作用磁場之後，一面進行硬化處理所得到者 。在該向異導電性彈性體片中，導電性粒子朝厚度方向排 列般地配向而在連鎖所形成的狀態含有於彈性高分子物質 所成的基材中，藉由朝厚度被加壓，形成有依導電性粒子 Φ 的連鎖所產生的導電路。 又，比較分散型向異導電性片及偏在型向異導電性片 ，則分散型向異導電性彈性體片是不使用特殊又高價格的 金屬模而以低成本就可製造之點上，無關於須連接的電極 的圖案都可使用，具有通用性之點上，與偏在型向異導電 性彈性體片比較較有利。 一方面，偏在型向異導電性彈性體片是在鄰接的導電 路形成部間形成有互相地絕緣此些的絕緣部之故，因而針 φ 對於鄰接的電極開的隔開距離小的連接對象體，在確保鄰 接的電極間所必需的絕緣性的狀態下，也可達成對於當該 電極的各個的電性連接的性能，亦即分解能高者之點上， 與分散型向異導電性片比較較有利。 又，在分解型向異導電性片中，爲了提昇分解能，減 小當該分散型向異導電性片的厚度爲最重要。 然而，在厚度小的向異導電性彈性體片，有吸收須連 接的各個電極的高度位準的參差不齊而可達成對於各個當 該電極的電性連接的性能，亦即有凹凸吸收能低的問題。 -7- 200835060 具體地，向異導電性彈性體片的凹凸吸收能，是當該向異 導電性彈性體片的厚度的大約20%，例如在厚度爲100 μπι 的向異導電性彈性體片中，對於電極的高度位準的參差不 齊爲大約20 μπι的連接對象體也可達成穩定的電性連接， 惟在厚度爲50 μπι的向異導電性彈性體片中，對於電極的 高度位準的參差不齊爲超過10 μπι的連接對象體，成爲很 難達成穩定的電性連接。 φ 爲了解決此種問題，提案在形成於絕緣性片的推拔狀 貫通孔內，適合於當該貫通孔的推拔狀可動導體對於絕緣 性片設置成朝厚度方向可移動的複合導電性片，及分別配 置於該複合導電性片的一面與另一面的兩片向異導電性彈 性體片所成的向異導電性連接器（例如參照專利文獻4 ) 〇 依照具有此種複合導電性片的向異導電性連接器，複 合導電性片的可動電極作成朝厚度方向可移動之故，因而 φ 朝厚度方向被加壓時，則分別配置於複合導電性片的一面 及另一面的兩片向異導電性彈性體片互相地連動而進行壓 縮變形之故，因而具有兩者的凹凸吸收能的合計顯出作爲 向異導電性連接器的凹凸吸收能，因此可得到高凹凸吸收 能。 又，爲了得到所需要的凹凸吸收能，所必需的厚度， 是藉由兩片向異導電性連接器的合計厚度來確保就可以， 作爲各個向異導電性連接器，可使用厚度薄者之故，因而 可得到筒分解能。 200835060 然而，在上述的向異導電性連接器中’實用上’有如 下的問題。 在上述的向異導電性連接器中’複合導電性片的可動 導體是被支撐於絕緣性片及向異導電性彈性體片的雙方’ 而在分離複合導電性片與向異導電性彈性體片時’則可動 導體有從絕緣性片脫落之虞之故’因而要單獨處理複合導 電性片實際上很困難。因此’在向異導電性連接器的複合 導電性片及向異導電性彈性體片的任一方產生故障時’無 法僅將當該複合導電性片或當該向異導電性彈性體片更換 成全新者，而必須將整體向異導電性連接器更換成全新者 〇 又，複合導電性片的可動體，是藉由電鍍處理被形成 在絕緣性片的推拔狀貫通孔內來堆積金屬而形成金屬體， 藉由機械式地推壓該金屬體，將接著於貫通孔內面的金屬 體藉由分離所得到。然而，欲製造具有多數可動導體的向 異導電性連接器時，則很難從當該絕緣性片內面確實地分 離被形成在絕緣性片的所有金屬體之故，因而在一部分可 動導體的功能上產生不方便。 爲了解決此些問題，提案具有形成有複數貫通孔的絕 緣性片，及在被插通於該絕緣性片的貫通孔的胴部兩端， 形成具有比當該絕緣性片的貫通孔的直徑還大直徑的端子 部所成的剛性導體所形成，而剛性導體具備設置成朝絕緣 性片的厚度方向可移動的複合導電性片所成的向異導電性 連接器（參照專利文獻5 )。 -9 - 200835060 然而，在該向異導電性連接器中，在電路基板的檢查 中重複地使用時，則依靜電的電荷被積蓄在向異導電性連 接器的表面，而大量地被積蓄此之後，藉由放電，會在向 異導電性彈性體片或複合導電性片產生故障之故’因而判 * 明了有無法得到較久的使用壽命的問題。 ' 專利文獻1 :日本特開昭5 1 -93 3 93號公報 專利文獻2 :日本特開昭53- 1 47772號公報 φ 專利文獻3 :曰本特開昭6 1 -250906號公報 專利文獻4 :日本特開2001 -35 1 702號公報 專利文獻5:日本特願2005-3 74 809號說明書 【發明內容】 本發明是依據如以上的情形而創作者，其目的是在於 提供針對於鄰接於電極間的隔開距離小，在電極的高度位 準上有參差不齊的連接對象體，也在確保鄰接的電極間所 φ 必需的絕緣性的狀態下可確實地達成對於各個當該電極的 電性連接，而且防止或抑制在表面積蓄有依靜電所產生的 電荷的情形而可得到較久的使用壽命的向異導電性連接器 ，具備該向異導電性連接器的轉接裝置及電路裝置的電性 檢查裝置。 本發明的向異導電性連接器，其特徵爲： 具有：形成有分別朝厚度方向延伸的複數貫通孔的絕 緣性片，及在該絕緣性片的各個貫通孔，以從當該絕緣性 片的兩面分別突出的方式配置剛性導體，上述各個剛性導 -10- 200835060 體是在被插通於上述絕緣性片的貫通孔的胴部兩端，形成 具有比當該絕緣性片的貫通孔的直徑還大直徑的端子部所 成，具有：對於當該絕緣性片作成朝其厚度方向可移動的 複合導電性片，及配置於該複合導電性片的一面的第一向 異導電性彈性體片，及配置於當該複合導電性片的另一面 的第二向異導電性彈性體片， 在上述第一向異導電性彈性體片及上述第二向異導電 性彈性體片的至少任何一方，具有複數開口的除電層形成 於與上述複合導電性片接觸的面相反的面，而朝厚度方向 透視上述複合導電性片及上述除電層時，當該複合導電性 片的各剛性導體位於上述除電層的開口內，令當該除電層 連接於接地。 在本發明的向異導電性連接器中，複合導電性片的絕 緣性片的厚度方向的剛性導體的可移動距離爲 3至 1 50 μηι較佳。 又’第一向異導電性彈性體片及第二向異導電性彈性 體片的各個，是表示磁性的導電性粒子爲以朝厚度方向排 列的方式配向而形成連鎖的狀態下，且依當該導電性粒子 所產生的連鎖朝面方向分散的狀態下含有於彈性高分子物 質中所成者較佳。 又’第一向異導電性彈性體片及第二向異導電性彈性 體片的各個厚度爲20至100 μιη較佳。 又’導電性粒子的數平均粒子徑爲3至20 μηι較佳。 本發明的轉接裝置，其特徵爲：具備： -11 - 200835060 在表面具有隨著對應於須檢查的電路裝置的被檢查電 極的圖案形成有複數連接用電極的連接用電極領域的轉接 本體，及 具有隨著對應於配置在該轉接本體的連接用電極領域 上的當該轉接本體的連接用電極的圖案所配置的複數剛性 導體的上述的向異導電性連接器。 本發明的電路裝置的電性檢查裝置，其特徵爲：具備 Φ 上述的轉接裝置所成。 依照本發明的向異導電性連接器、複合導電性片的各 個剛性導體是對於絕緣性片作成朝其厚度方向可移動之故 ，因而藉由須連接的電極朝厚度方向被加壓時，則配置於 複合導電性片的一面的第一向異導電性彈性體片及配置於 當該複合導電性片的另一面的第二向異導電性彈性體片， 是藉由剛性導體朝絕緣性片的厚度方向移動而互相地連動 以進行壓縮變形之故，因而具有兩者的凹凸吸收能的合計 Φ 顯出作爲向異導電性連接器的凹凸吸收能，因此，可得到 高凹凸吸收能。 又，爲了得到所需要的凹凸吸能所必需的厚度，是藉 由第一向異導電性彈性體片及第二向異導電性彈性體片的 合計厚度加以確保就可以，而作爲各個向異導電性彈性體 片，可使用厚度較薄者之故，因而可得到高分解能。 因此，針對於鄰接的電極間的隔開距離小，而在電極 位準上有參差不齊的連接對象物，在鄰接的電極間確保必 需的絕緣性的狀態下，也可確實地達成對於各個當該電極 -12- 200835060 的電性連接。 又，第一向異導電性彈性體片及上述第二向異導電性 彈性體片的至少任何一方，具有複數開口的除電層形成於 與上述複合導電性片接觸的面相反的面之故’因而藉由當 該除電層被連接於接地，可防止或抑制依靜電所產生的電 荷被積蓄的情形。因此’可避免藉由所積蓄的電荷的放電 在向異導電性彈性體片及複合導電性片上產生故障的情形 之故，因而可得到較久的使用壽命。 依照本發明的轉接裝置，具有上述向異導電性連接器 之故，因而檢查對象的電路裝置，即使爲鄰接的被檢查電 極之間的隔開距離小，被檢查電極的高度位準上有參差不 齊者，在鄰接的被檢查電辯間確保所必要的絕緣性的狀態 下，也可確實地達成對於各個當該被檢查電極的電性連接 ，而且防止或抑制靜電所產生的電荷被積蓄的情形’而可 得到較久的使用壽命。 依照本發明的電路裝置的電性檢查裝置，具有上述的 轉接裝置之故，因而檢查對象的電路裝置，即使爲鄰接的 被檢查電極之間的隔開距離小，被檢查電極的高度位準上 有參差不齊者，針對於當該電路裝置也可確實地實行所必 要的電性檢查。而且，在向異導電性連接器，可得到較久 的使用壽命之故，因而當該向異導電性連接器有故障時更 換成新者的作業的頻度變低之故，‘因而可得到高的檢查效 率。 -13- 200835060 【實施方式】 以下，針對於本發明的實施形態詳細地說明。 〈向異導電性連接器〉 第1圖是表示本發明的向異導電性連接器的一例的構 成的說明用斷面圖。第2圖是擴大表示圖示於第1圖的向 異導電性連接器的主要部分的說明用斷面圖。該向異導電 性連接器15是藉由複合導電性片1〇，及配置於該複合導 φ 電性片10的一面（在第1圖爲上面）的第一向異導電性 彈性體片16，及配置於複合導電性片10的另一面的第二 向異導電性彈性體片1 7所構成。 如第3圖所示地，複合導電性片1 0是藉由依照對應 於分別朝厚度方向延伸的複數貫通孔Π Η須連接的電極的 圖案所形成的絕緣性片1 1，及從當該絕緣性片1 1的兩面 分別突出般地配置於該絕緣性1 1的各貫通孔1 1 Η的複數 剛性導體1 2所構成。 φ 各個剛性導體1 2是藉由被插通於絕緣性片1 1的貫通 孔1 1 Η的圓柱狀胴部1 2a，及露出於分別一體地連結於該 胴部1 2a的兩端所形成的絕緣性片1 1的表面的端子部1 2b 所構成。剛性導體12的胴部12a的長度L是比絕緣性片 11的厚度d還大，又，當該胴部12a的直徑，是作爲 比絕緣性片1 1的貫通孔ΠΗ的直徑rl還小者，藉由此， 當該剛性導體1 2，是作成可朝絕緣性片1 1的厚度方向移 動。又，剛性導體12的端子部12b的直徑r3，是作爲比 絕緣性片1 1的貫通孔1 1 Η的直徑r 1還大者。 -14 - 200835060 作爲構成絕緣性片1 i的材料，可使 聚醯亞胺樹脂，聚酯樹脂’聚芳族聚醯胺 脂等的樹脂材料，玻璃纖維補強型環氧樹 強型聚酯樹脂，玻璃纖維補強型聚醯亞胺 強型樹脂材料，將氧化鋁，氮化硼等無機 有於環氧樹脂等的複合樹脂材料等。 又，在高溫環境下使用複合導電性片 馨 緣注11 ’使用線熱膨脹係數爲3χ1(Κ5/Κ 佳爲1\106〜2\10-5/尺，最佳爲1><1〇-6〜6> 此種絕緣性片1 1，可抑制依當該絕緣性片 產生的剛性導體1 2的偏位。 又’絕緣性片1 1的厚度d是1 〇〜2 0 0 爲 1 5 〜1 0 0 μ m。 又，絕緣性片1 1的貫通孔11 Η的直名 μπι較佳，更佳爲30〜150 μηι。 φ 作爲構成剛性導體12的材料，可適 性的金屬材料，尤其是使用比在下述的製 絕緣性片的金屬薄層更不容易被蝕刻者較 屬材料的具體例，可列舉鎳，鈷，金，鋁 此些的合金等。 剛性導體12的胴部12a的直徑r2，； 佳，更佳爲25 μπι以上。該直徑r2過小 性導體1 2有無法得到必需的強度的情形 1 1的貫通孔1 1 Η的直徑rl與剛性導體1 2 用液晶聚合物， 樹脂，聚醯胺樹 脂，玻璃纖維補 樹脂等的纖維補 材料作爲塡料含 1 〇時，作爲絕 以下者較佳，更 (10_6/κ。藉使用 11的熱膨脹所 μπι較佳，更佳 g rl，是 20〜300 當地使用具有剛 造方法中形成於 佳。作爲此種金 等的單體金屬或 是18 μηι以上較 時，則在當該剛 。又，絕緣性片 的胴部1 2 a的直 -15- 200835060 徑r 2的相差（r 1 _ r 2 )，是1 μm以上較佳，更佳爲2 μm 以上。在該相差過小時，則對於絕緣性片1 1的厚度方向 有很難移動剛性導體1 2的情形。 剛性導體12的端子部12b的直徑r3，是須連接的電 極例如被檢查電極的直徑的70〜1 50%較佳。又，剛性導體 12的端子部12b的直徑r3與絕緣性片11的貫通孔11H 的直徑r 1的相差（r 3 - r 1 )，是5 μ m以上較佳，更佳爲 φ 1 〇 μ m以上。在該相差過小時，則有剛性導體1 2從絕緣 性片1 1脫落之虞。 剛性導體12的端子部12b的厚度是5〜50 μπι較佳， 更佳爲8〜40 μπι。 絕緣性片1 1的厚度方向的剛性導體1 2的可移動距離 ，亦即剛性導體1 2的胴部1 2a的長度L與絕緣性片1 1的 厚度d的相差（L-d)，是3〜150 μπι較佳，更佳爲5〜100 μπι，最佳爲10〜5 0 μπι。在剛性導體12的可移動距離過小 φ 時，則在下述的向異導電性連接器中，有很難得到充分的 凹凸吸收能的情形。一方面，剛性導體1 2的可移動距離 過大時，則從絕緣.、性片1 1的貫通孔1 1 Η所露出的剛性導 體1 2的胴部1 2 a的長度變大’而被使用於檢查時’有剛 性導體1 2的胴部1 2a有壓曲或損傷之虞。 此種複合導電性片1 0是在絕緣性片1 1的貫通孔1 1 H ，具有朝其厚度方向可移動的剛性導體1 2，該剛性導體 1 2是在其胴部1 2 a的兩端形成具有比絕緣性片1 1的貫通 孔11H的直徑還大直徑的端子部之故’因而當該端子 -16- 200835060 部1 2b功能作爲止動件的結果，剛性導體1 2不會從絕緣 性片1 1脫落的情形，而當該複合導電性片1 0單獨也容易 處理者。 上述複合導電性片1 0，是例如如以下地可加以製造。 首先，如第4圖所示地，準備另飩刻性的金屬層1 3 a 體地被積層於絕緣性片11的一面所成的積層材料10B， 對於該積層材料10B的金屬層13A施以蝕刻處理而藉由除 φ 去其一部分，如第5圖所示地，隨著對應於須連接於金屬 層1 3 A的電極的圖案的圖案形成複數開口 1 3 K。之，如第 6圖所示地，在積層材料1 0B的絕緣性片1 1，形成分別連 通於金屬層13A的開口 13K而朝厚度方向延伸的貫通孔 1 1 Η。然後，如第7圖所示地，覆蓋著絕緣性片1 1的貫通 孔1 1Η的內壁面及金屬層1 3 Α的開口緣般地，形成易鈾 刻性的筒狀金屬薄層1 3 B。如此地製造出具有形成有分別 朝厚度方向延伸的複數貫通孔1 1 Η的絕緣性片1 1，及被 φ 積層於該絕緣性片1 1的一面而具有分別連通於絕緣性片 U的貫通孔1 1 Η的複數開口 1 3 Κ的易触刻性的金屬層 1 3 A，及覆蓋著絕緣性片丨1的貫通孔1 1 η的內壁面及金 屬層13Α的開口緣般地所形成的易蝕刻性的金屬薄層13Β 所成的複合積層材料10Α。 在以上中，作爲形成絕緣性片1 1的貫通孔1 1 Η的方 法，可利用雷射加工法，鑽孔加工法，鈾刻加工法等。 作爲構成金屬層13Α及金屬薄層13Β的易蝕刻性的金 屬材料，可使用銅等。 -17- 200835060 又，金屬層1 3 A的厚度是考慮作爲目的的剛性導體 12的可移動距離等而被設定’具體爲3〜75 μιη較佳，更 佳爲5〜5 0 μ m，最佳爲8〜2 5 μ m。 又，金屬薄層1 3B的厚度，是考慮絕緣性片1 1的貫 通孔11H的直徑與須形成的剛性導體12的胴部12a的直 徑所決定。 又，作爲形成金屬薄層13B的方法，可利用無電解鍍 φ 法。 如此，藉由對於該複合積層材料1 ο A施以光鍍處理， 在絕緣性片1 1的各個貫通孔1 1 Η形成剛性導體1 2。具體 地加以說明，如第8圖所示地，在被形成於絕緣性片 Π 的一面的金屬層13Α的表面及絕緣性片11的另一面的各 個，形成隨著對應於須形成的剛性導體1 2的端子部1 2b 的圖案的圖案，分別形成有連通於絕緣性片1 1的貫通孔 11H的複數圖案孔14H的光阻膜14。之後，將金屬層13A φ 作爲共通電極，施以電解鍍處理而在當該金屬層1 3 A的露 出部分堆積金屬之同時，在金屬薄層13B的表面堆積金屬 而藉由在絕緣性片11的貫通孔11H內及光阻膜14的圖案 孔14H內塡充金屬，如第9圖所示地，形成朝絕緣性片 1 1的厚度方向延伸的剛性導體1 2。 如此地形成剛性導體1 2之後，藉由從金屬層的1 3 A 的表面除去光阻膜14，如第 10圖所示地，露出金屬層 13A。之後，施以蝕劑處理而藉由除去金屬層13A及金屬 薄層1 3 B，得到表示於第3圖的複合導電性片1 0。 -18- 200835060 第一向異導電性彈性體片1 6及第二向異導電性彈性 體片17，都是表示磁性的導電性粒子P在朝厚度方向排 列地配向而形成有連鎖的狀態，且依當該導電性粒子P所 產生的連鎖朝面方向分散的狀態下含有於絕緣性的彈性 高分子物質中所成者。 作爲形成第一向異導電性彈性體片1 6及第二向異導 電性彈性體片1 7的彈性高分子物質，具有橋接構造的高 φ 分子物質較佳，而由耐久性，成形加工性及電性特性的觀 點，使用聚矽氧橡膠更佳。 作爲含有於第一向異導電性彈性體片1 6及第二向異 導電性彈性體片1 7的導電性粒子P，藉由下述的方法就 可將當該粒子容易地朝厚度方向排列地配向之故，因而使 用表示磁性的導電性粒子。作爲此種導電性粒子的具體例 ，列舉具有鐵，鈷，鎳等的磁性的金屬的粒子或是此些的 合金的粒子或是含有此些金屬的粒子，或將此些粒子作爲 φ 芯粒子，在當該芯粒子的表面施以金，銀，鈀，铑等的導 電性優異的金屬電鍍者，或是將非磁性金屬粒子或玻璃釉 粒等的無機物質粒子或聚合物粒子作爲芯粒子，而在當該 芯粒子的表面施以導電性磁性金屬的電鍍者等。 在此些之中，使用以鎳粒子作爲芯粒子’而在其表面 施以導電性優異的金或銀的電鍍者較佳。 作爲將導電性金被覆在芯粒子的表面的手段，並未特 別加以限定者，惟使用例如化學鍍或電解鍍法’濺鍍法， 蒸鑛法等。 -19 - 200835060 作爲導電性粒子P，在使用導電性金屬被覆於芯粒子 的表面所成者的情形，可得到優異的導電性之故，因而粒 子表面的導電性金屬的被覆率（對於芯粒子的表面積的導 電性金屬的被覆面積的比率）爲40%以上較佳，更佳爲 45%以上，最佳爲47〜95%。 又，導電性金屬的被覆量，是芯粒子的0.5〜50質量％ 較佳。 φ 又，導電性粒子P的數平均粒子徑是3〜20 μιη較佳， 更佳爲5〜15 μιη。在該數平均粒子徑過小時，在下述的製 造方法中，有很難朝厚度方向配向導電性粒子Ρ的情形。 一方面，在該數平均粒子徑過大時，則有很難得到高分解 能的向異導電性彈性體片的情形。 又，導電性粒子Ρ的粒子徑分布（Dw/Dn)，是1〜10 較佳，更佳爲1.01〜7，最佳爲 1.05〜5，而特別優異爲 1 .1〜4 〇 • 又，導電性粒子P的形狀，並未特別加以限定者，惟 可容易地分散於高分子物質形成材料中，而以球狀者，或 星形狀者或是凝集此些的二次粒子較佳。 此種導電性粒子P是在向異導電性彈性體片中以體積 分率含有1 0〜4 0 %，尤其是以成爲1 5〜3 5 %的比率含有的情 形較佳。在該比率過小時，則有無法得到在厚度方向具有 充分高的導電性的向異導電性彈性體片的情形。一方面， 在該比率過大時，則所得到的向異導電性彈性體片是容易 成爲脆弱者，而作爲向異導電性彈性體片有無法得到必需 -20- 200835060 的彈性的情形。 又，第一向異導電性彈性體片1 6及第二向異導電性 彈性體片17的各個厚度，是20〜100 μιη較佳，更佳爲 25〜7 0 μιη。在該厚度過小時，則有無法得到充分的凹凸吸 收能的情形。一方面，在該厚度過大時，則有無法得到高 分解能的情形。 在各個第一向異導電性彈性體片16及第二向異導電 φ 性彈性體片1 7 ’比當該第一向異導電性彈性體片丨6及當 該第二向異導電性彈性體片17還大尺寸的除電層18、19 一體地形成於與複合導電性片1 〇接觸的面的相反面。在 形成於第一向異導電性彈性體片1 6的除電層1 8，位於複 合導電性片1 0的各個剛性導體1 2的正上方位置般地形成 有複數開口 1 8 Η。又，在形成於第二向異導電性彈性體片 1 7的除電層1 9，位於複合導電性片1 〇的各個剛性導體} 2 的正下方位置般地形成有複數開口 19h。又，朝厚度方向 Φ 透視複合導電性片1 〇及除電層1 8、1 9時，則當該複合導 電性片1 0的各個剛性導體1 2，位於除電層1 8、i 9的開口 18H、19H 內。 作爲構成除電層18、19的材料，可使用將在金屬材 料’硬化性樹脂中含有金屬粉末所成的導電性膏予以硬化 所成者。 在此，作爲金屬材料，可使用鐵，銅，金，鎳，鈦等 的金屬或組合兩種以上此些的合金或是合金鋼，恆範鋼等 的恆範鋼型合金，彈性不變鋼等彈性不變鋼型合金，超級 -21 - 200835060 恆範鋼，科瓦鐵鎳’鈷合金，4 2合金等的合金或合金鋼等 〇 又，除電層18、19的厚度，是5〜50 μιη較佳，更佳 爲10〜30 μιη。在該厚度過小時，則藉由使用於檢查向異 導電性連接器之際所進行的向異導電性彈性體片的厚度方 向的壓縮重複，會產生除電層18、19的出現裂痕或來自 向異導電性彈性體片的除電層1 8、1 9的剝離。一方面， φ 在該厚度過大時，則有使用於檢查向異導電性連接器之際 所進行的向異導電性彈性體片的厚度方向的壓縮成爲困難 ，又形於除電層18、19的開口 18Η、19Η的深度變大， 而有被檢查物的被檢查電極或是下述的轉接本體的連接用 電極，及複合導電性片1 0的剛性導體1 2的電性連接成爲 困難。 除電層18、19是在使用金屬材料時，依鍍處理或濺 鍍處理的方法，另外製造具有開口的金屬膜，藉由轉印當 φ 該金屬膜使之一體化的方法等可形成，在使用導電性膏時 ，藉由塗佈當該導電性膏使之硬化就可形成。 又，在圖不之例子，除電層18、19的開口 18Η、19Η 的直徑，是作成比複合導電性片1 0的剛性導體1 2的端子 部12b的直徑還大者，具體上，端子部121>的直徑的 1 . 1〜1 5倍較佳，更佳爲1.5〜10倍。在除電層18、19的開 口 1 8H、1 9H的直徑過小時，則鄰接的電極彼此間或是鄰 接的剛性導體12彼此間有短路之虞。一方面，在除電層 18、19的開口 18H、19H的直徑過大時，則帶電的防止或 -22- 200835060 抑制成爲困難。 第一向異導電性彈性體片1 6是如以下地可製造。 首先，如第1 1圖所示地，分別準備片狀的一面側成 形構件30及另一面側成形構件3 1，具有適合於作爲目的 的第一向異導電性彈性體片1 6的平面形狀的形狀的開口 32K，而且具有對應於當該第一向異導電性彈性體片！ 6的 厚度的厚度的框狀間隙壁32，且調配在被硬化而成爲彈性 φ 高分子物質的液狀高分子物質形成材料中含有導電性粒子 所成導電性彈性體用材料。 然後，如第12圖所示地，在另一面側成形構件31的 成形面（在第12圖爲上面）上配置間隙壁3 2，而在另一 面側成形構件3 1的成形面上的間隙壁3 2的開口 3 2K內， 塗佈經調配的導電性彈性體用材料1 6B，之後，在該導電 性彈性體用材料16B上，配置金屬膜18A，而在該金屬膜 18A上配置一面側成形構件30。 # 在以上，作爲一面側成形構件3 0及另一側成形構件 3 1，可使用聚醯亞胺樹脂，聚酯樹脂，丙烯樹脂等所構成 的樹脂片。 又，構成一面側成形構件3 0及另一側成形構件3 1的 樹脂片的厚度，是50〜500 μπι較佳，更佳爲75〜3 00 μιη。 在該厚度爲不足5 0 μιη時，則作爲成形構件有無法得到必 需強度的情形。一方面，在該厚度超過5 0 0 μπι時，則在 下述的導電性彈性體用材料層成爲很難作用著所需要強度 的磁場。 -23· 200835060 然後’如第13圖所示地，使用加壓輥33及支撐輥34 所成的加壓輥裝置3 5，藉由一面側成形構件3 0及另一面 側成形構件3 1來夾壓導電性彈性體用材料1 6B，在另一 面側成形構件31與金膜18A之間形成所需要厚度的導電 性彈性體用材料層1 6 A。如擴大表示於第1 4圖，在該導 電性彈性體用材料層1 6 A中，以均勻地分散的狀態下含有 導電性粒子P。 之後’在一面側成形構件30的背面及另一面側成形 構件3 1的背面，藉由將當該電磁鐵施以動作，俾朝導電 性彈性體用材料層1 6 A的厚度方向作用著平行磁場。結果 ，在導電性彈性體用材料層1 6 A中，被分散於當該導電性 彈性體用材料層1 6 A中的導電性粒子P，如第1 5圖所示 地，一面維持朝面方向被分散的狀態一面朝厚度方向排列 般地配向，藉由此，以朝面方向分散的狀態下形成有依分 別朝厚度方向延伸的複數導電性粒子P所產生的連鎖。 然後，在該狀態下，藉由硬化處理導電性彈性體用材 料層1 6 A，導電性粒子P在朝厚度方向排列般地配向的狀 態，且在依當該導電性粒子p所產生的連鎖朝面方向分散 的狀態下含有於彈性高分子物質中所成的第一向異導電性 彈性體片16，以一體地被接著於金屬膜18A的狀態下被 製造。之後，對於金屬膜1 8 A施以微影成像術及蝕刻處理 進行除去其一部分，藉此得到形成有開口 1 8H除電層1 8 〇 在以上中，導電性彈性體用材料層1 6 A的硬化處理， -24- 200835060 是仍作用著平行磁場的狀態下也可進行，惟在停止平行磁 場的作用之後也可進行。 又，一旦停止平行磁場的作用，之後，反轉所作用的 磁場方向也可以。 作用於導電性彈性體用材料層1 6 A的平行磁場的強度 ’是平均作成0.02〜2.5泰斯拉（tesla; T)的大小較佳。 導電性彈性體用材料層1 6 A的硬化處理，是藉由所使 φ 用的材料被適當選定，惟一般藉由加熱處理所進行。具體 性的加熱溫度及加熱時間，是考慮構成導電性彈性體用材 料層1 6 A的高分子物質用材料等的種類，導電性粒子P的 移動所需要的時間等被適當選定。 又，第二向異導電性彈性體片17是由與第一向異導 電性彈性體片1 6同樣的方法可加以製造。 依照此種向異導電性連接器1 5，複合導電性片1 〇的 各個剛性導體1 2，是對於絕緣性片11作成朝其厚度方向 # 可移動之故，因而藉由須連接的電極朝厚度方向被加壓時 ，則配置於複合導電性片1 0的一面的第一向異導電性彈 性體片1 6及配置於當該複合導電性片1 0的另一面的第二 向異導電性彈性體片1 7，是藉由剛性導體1 2進行移動而 互相地連動會壓縮變形之故，因而具有兩者的凹凸吸收能 的合計顯出作爲向異導電性連接器1 5的凹凸吸收能’因 此可得到高凹凸吸收能。 又，爲了得到所需要的凹凸吸收能所必需的厚度’是 藉由第一向異導電性彈性體片1 6及第二向異導電性彈性 -25- 200835060 體片17的合計厚度來確保就可以，而作爲各個向異導電 性彈性體片，可使用厚度較薄者之故，因而可得到高分解 能。 因此，針對於鄰接的電極間的隔開距離小，而在電極 位準上有參差不齊的連接對象物，在鄰接的電極間確保必 需的絕緣性的狀態下，也可確實地達成對於各個當該電極 的電性連接。 φ 又，在第一向異導電性彈性體片1 6及第二向異導電 性彈性體片1 7的各個，具有形成於當該複合導電性片1 〇 的各個剛性導體1 2的正上方位置的複數開口的除電層1 8 、1 9形成於與複合導電性片1 0接觸的面相反的面之故， 因而藉由當該除電層18、19被連接於接地，可防止或抑 制依靜電所產生的電荷被積蓄的情形。因此，可避免藉由 所積蓄的電荷的放電在第一向異導電性彈性體片16，第二 向異導電性彈性體片1 7及複合導電性片1 〇產生故障的情 φ 形之故，因而可得到較久的使用壽命。 〈轉接裝置〉 第1 6圖是表示本發明的轉接裝置的一例的構成的說 明斷面圖，第17圖是表示圖示於第16圖的轉接裝置的轉 接本體的說明斷面圖。該轉接裝置是針對於例如印刷電路 基板等的電路裝置，例如被使用於進行例如開槽試驗的電 路裝置檢查用者，具有多層配線板所成的轉接本體20。 在轉接本體20的表面（在第16圖及第17圖爲上面 -26- 200835060 )，隨著對應於檢查對象的電路裝置的被檢查電極的圖案 的特定圖案，形成有配置複數連接用電極21的連接用電 極領域2 5。 在轉接本體2 0的背面，依照例如節距爲〇. 8 m m， 0.75mm，1.5mm，1.8mm，2.54mm的格子點位置配置有複 數端子電極22，而各個端子.電極22是藉由內部配線部23 被電性地連接於連接用電極2 1。 φ 在該轉接本體20的表面，其第二向異導電性彈性體 片17接觸於轉接本體20般地配置於其連接用電極領域25 上，基本上表示於第1圖的構成的向異導電性連接器15, 藉由適當手段（省略圖示）被固定在當該轉接本體20。 在該向異導電性連接器1 5中，在複合導電性片1 〇， 隨著與轉接本體20的連接用電極21的特定圖案相同的圖 案配置有複數剛性導體】2，當該向異導電性連接器1 5是 複合導電性片1 0的各個剛性導體1 2配置成位於轉接本體 φ 20的連接用電極21的正上方位置。 依照此種轉接裝置，具有示於第1圖的構成的向異導 電性連接器1 5之故，因而檢查對象的電路裝置，即使爲 鄰接的被檢查電極之間的隔開距離小，被檢查電極的高度 位準上有參差木齊者，在鄰接的被檢查電極間確保所必要 的絕緣性的狀態下，也可確實地達成對於各個當該被檢查 電極的電性連接，而且防止或抑制靜電所產生的電荷被積 蓄的情形，而可得到較久的使用壽命。 -27- 200835060 〈電路裝置的電性檢查裝置〉 第18圖是表示本發明的電路裝置的電性檢查裝置的 一例的構成的說明圖。該電性檢查裝置是針對於在兩面形 成有被檢查電極6、7的印刷電路基板等的電路裝置5中 ，例如進行開槽試驗者，具有用以將電路裝置5保持在檢 查實行領域E的支撐件2,在該支撐件2設有用以將電路 裝置5配置於檢查實行領域E的適當位置的定位銷3。在 φ 檢查實行領域E的上方，由下方依次地配置有如第17圖 所示的構成的上部側轉接裝置1 a及上部側檢查頭50a，又 ，在上部側檢查頭50a的上方，配置有上部側支撐板56a ，而上部側檢查頭5 0a是藉由支柱5 4a被固定在上部側支 撐板56a。一方面，在檢查實行領域E的下方，由上方依 次地配置有如第1 7圖所示的構成的下部側轉接裝置1 b及 下部側檢查頭50b，又，在下部側檢查頭50b的下方，配 置有下部側支撐板56b，而下部側檢查頭50b是藉由支柱 φ 54七被固定在下部側支撐板56b。 上部側檢查頭50a，是由板狀的檢查電極51a，及被 固定配置於該檢查電極裝置51a的下面的具有彈性的向異 導電性彈性體片55a所構成。檢查電極裝置51a，是在其 下面具有配列於與上部側轉接裝置1 a的端子電極2 2相同 節距的格子點位置的複數銷狀的檢查電極52a，此些名^個I 檢查電極5 2 a，是藉由電線5 3 a，電性地連接於設在上部 側支撐板5 6 a的連接器5 7 a，又，經由該連接器5 7 a電性 地連接於測試器的檢查電路（省略圖示）。 -28- 200835060 下部側檢查頭50b，是由板狀的檢查電極51b，及被 固定配置於該檢查電極裝置5 1b的上面的具有彈性的向異 導電性彈性體片55b所構成。檢查電極裝置51b，是在其 上面具有配列於與下部側轉接裝置lb的端子電極22相同 節距的格子點位置的複數銷狀的檢查電極52b，此些各個 檢查電極52b，是藉由電線53b，電性地連接於設在下部 側支撐板56b的連接器57b，又，經由該連接器57b電性 • 地連接於測試器的檢查電路（省略圖示）。 又，上部側轉接裝置1 a及下部側轉接裝置1 b的各個 向異導電性連接器1 5的除電層1 8、1 9，是分別被連接於 接地。 在以上中，上部側檢查頭50a及下部側檢查頭50b的 向異導電性彈性體片55a、55b，都是形成有僅其厚度方向 形成導電路的導電形成部所成者。作爲此種向異導電性彈 性體片55a、55b，各導電路形成部在至少一面朝厚度方向 • 突出般地形成者，發揮高電性穩定性之處較佳。 在此種電路裝置的電性檢查裝置中，檢查對象的電路 裝置5藉由支撐件2被保持在檢查實行領域E，在該狀態 ，上部支撐板5 6a及下部側支撐板5 6b藉由分別朝接近於 電路裝置5的方向移動，使得當該電路裝置5藉由上部側 轉接裝置1 a及下部側轉接裝置1 b被夾壓。 在該狀態下’電路裝置5的上面的被檢查電極6，是 經由當該向異導電性連接器1 〇電性地連接於上部側轉接 裝置1 a的連接用電極2 1，而該上部側轉接裝置1 &的端子 -29- 200835060 電極22，是經由向異導電性彈性體片55a電性地連接於檢 查電極裝置51a的檢查電極52a。一方面，電路裝置5的 下面的被檢查電極7，是經由當該向異導電性連接器1 〇電 性地連接於下部側轉接裝置lb的連接用電極21，而該下 部側轉接裝置1 b的端子電極22，是經由向異導電性彈性 體片55b電性地連接於檢查電極裝置51b的檢查電極52b 〇 φ 如此地，電路裝置5的上面及下面雙方的被檢查電極 6、7的各個，藉由電性地連接於上部側檢查頭5 〇 a的檢查 電極裝置51a的檢查電極52a及下部側檢查頭50 b的檢查 電極裝置51b的檢查電極52b的各個，達成電性地連接於 測試器的檢查電路的狀態，而在該狀態進行所需要的電性 檢查。 依照上述的電路裝置的電性檢查裝置，具有如第16 圖所示的構成的上部側轉接裝置1 a及下部側轉接裝置1 b # 之故，因而檢查對象的電路裝置5，即使爲鄰接的被檢查 電極6、7之間的隔開距離小，被檢查電極6、7的高度位 準上有參差不齊者，針對於當該電路裝置5也可確實地實 行所必要的電性檢查。而且，在向異導電性連接器1 5，可 得到較久的使用壽命之故，因而當該向異導電性連接器1 5 有故障時更換成新者的作業的頻度變低之故，因而可得到 高的檢查效率。 在本發明中，並不被限定於上述的實施形態，可做如 下的各種變更。 -30 - 200835060 除電層是僅形成在第一向異導電性彈性體片1 6及第 二向異導電性彈性體片1 7的任一方的構成也可以。 在複合導電性片1 〇中，作爲構成剛性導體1 2的材料 ，若是剛性的導體，並不被限定於金屬材料者，例如可使 用在剛性樹脂中含有金屬等的導電性粉末所成者等。 在複合導電性片10的製造方法中，積層材料及複合 積層材料，是金屬層形成於絕緣性片的兩面所成者也可以 • 〇 在向異導電性連接器1 5中，作爲第一向異導電性彈 性體片及第二向異導電性彈性體片的任一方或雙方，可使 用偏在型向異導電性彈性體片。 又，除電層18、19的開口 18H、19H是並不必對應於 複合導電性片1 〇的剛性導體1 2所形成，例如第19圖所 示地，朝厚度方向透視複合導電性片1 0及除電層1 8時， 形成複數剛性導體12位於一個開口 18H內也可以。又， φ 如第20圖所示地，朝厚度方向透視複合導電性片1 0及除 電層1 8時除了剛性導體1 2所位置的領域之外，形成有開 口 18H也可以。 又，在電性檢查裝置中，檢查對象的電路裝置，是並 不被限定於印刷電路基板，形成封裝1C，MCM等的半導 體積體電路裝置或積體電路的晶圓也可以。 【圖式簡單說明】 第1圖是表示構成本發明的向異導電性連接器的一例 -31 - 200835060 子的構成的說明用斷面圖。 第2圖是擴大表示圖示於第1圖的向異導電性連接器 的主要部分的說明用斷面圖。 第3圖是擴大表示複合導電性片的主要部分的說明用 斷面圖。 第4圖是表示用以製造複合導電性片的積層材料的構 成的說明用斷面圖。 φ 第5圖是表示在積層材料的金屬層形成有開口的狀態 的說明用斷面圖。 第6圖是表示在積層材料的絕緣性片形成有貫通孔的 狀態的說明用斷面圖。 第7圖是表示複合積層材料的構成的說明用斷面圖。 第8圖是表示在複合積層材料形成有光阻膜的狀態的 說明用斷面圖。 第9圖是表示在複合積層材料的絕緣性片的貫通孔形 φ 成有剛性導體的狀態的說明用斷面圖。 第10圖是表示從複合積層材料除去光阻膜的狀態的 說明用斷面圖。 第11圖是表示用以製造第一向異導電性彈性體片的 一面側成形構件，另一面側成形構件及間隙壁的說明用斷 面圖。 第1 2圖是表示在另一面側成形構件的表面塗佈有導 電性彈性體用材料的狀態的說明圖。 第1 3圖是表示在另一面側成形構件與金屬膜之間形 -32- 200835060 成有導電性彈性體用材料層的狀態的說明用斷面圖。 第14圖是擴大表示圖示於第13圖的導電性彈性體用 材料層的說明用斷面圖。 第1 5圖是表示對於圖示於第1 3圖的導電性彈性體用 材料層朝厚度方向作用磁場的狀態的說明用斷面圖。 第16圖是表示本發明的轉接裝置的一例子的構成的 說明用斷面圖。 第17圖是表示圖示於第16圖的轉接裝置的轉接本體 的構成的說明用斷面圖。 第18圖是表示本發明的電路裝置的電性檢查裝置的 一例子的構成的說明圖。 第1 9圖是表示除電層的變形例的說明圖。 第20圖是表示除電層的另一變形例的說明圖。 【主要元件符號說明] la.上部側轉接裝置 1 b :下部側轉接裝置 2 :支撐件 3 :定位銷 5 :電路裝置 6、7 :被撿查電極 1 〇 :複合導電性片 1 〇 A :複合積層材料 1 0 B :積層材料 -33 - 200835060 11 :絕緣性片 1 1 Η :貫通孔 1 2 :剛性導體 1 2 a ·洞部 12b :端子部 13A :金屬層 13B :金屬薄層 1 3 K :開□ 1 4 :光阻膜 14H :圖案孔 1 5 :向異導電性連接器 1 6 :第一向異導電性彈性體片 16A :導電性彈性體用材料層 16B :導電性彈性體用材料 1 7 :第二向異導電性彈性體片 1 8、1 9 :除電層 1 8 A :金屬膜 18H、19H :開口 2 0 :轉接本體 2 1 :連接用電極 22 :端子電極 23 :內部配線部 25 :連接用電極領域 30 : —面側成形構件 -34- 200835060 3 1 :另一面側成形構件 3 2 :間隙壁 32K :開口 3 3 :加壓輥 34 :支撐輥 3 5 :加工輥裝置 5 0a :上部側檢查頭 5〇b :下部側檢查頭 51a、51b:檢查電極裝置 5 2a、5 2b :檢查電極 5 3 a、5 3 b :電線 5 4a、54b ：支柱 55a、55b :向異導電性彈性體片 56a :上部側支撐板 5 6b :下部側支撐板 57a、57b :連接器 -35-[Technical Field] The present invention relates to a transmissive connector that can be suitably used for electrical inspection of a circuit device such as a printed circuit board, and an adapter device having the same and having An electrical inspection device for the circuit device of the switching device. [Prior Art] φ is a circuit board for electronic components such as package LSIs, MCMs, and other integrated circuit devices for constituting or mounting BGA or CSP, etc., or before loading electronic components. Before the part, in order to confirm that the wiring pattern of the circuit substrate has a desired performance, it is necessary to check its electrical characteristics. In the past, as a method of performing electrical inspection of a circuit board, it is known that an inspection electrode device in which a plurality of inspection electrodes are arranged in a lattice dot position arranged in a vertical and horizontal direction, and an inspected electric circuit of a circuit board to be inspected are known. A method of using an adapter that is electrically connected to the inspection electrode of the inspection electrode device, and the like. The adapter used in this method is a printed wiring board called a pitch conversion board. It is known that the adapter has a plurality of connection electrodes disposed on one surface with a pattern of the electrode to be inspected corresponding to the circuit substrate to be inspected, and has the same section disposed on the other surface of the inspection electrode of the inspection electrode device. The plurality of terminal electrodes at the position of the lattice point are formed of a current supply connection electrode and a voltage measurement connection electrode which are arranged on the one side of the pattern of the electrode to be inspected corresponding to the circuit board to be inspected - 5-200835060 The plurality of connection electrode groups, and the other surface has a plurality of terminal electrodes disposed at the lattice point position of the same pitch as the inspection electrode of the inspection electrode device, and the former adapter is used, for example, on a circuit substrate. The slotting test of each circuit is the same, and the latter adapter is a resistance test of each circuit used in the circuit board. In addition, in order to achieve a stable electrical connection between the circuit board to be inspected and the adapter, the electrical inspection piece of the circuit board is generally an I connector, and the isoconductive elastic sheet is interposed to the inspection object. Between the circuit substrate and the adapter. The isotropic conductive elastomer sheet has a plurality of pressure-sensitive conductive conductive members which exhibit conductivity only in the thickness direction or which exhibit conductivity only in the thickness direction when pressurized. In the case of such a dissimilar electroconductive elastomer sheet, various types of structures have been conventionally known. For example, Patent Document 1 discloses that the conductive particles indicating magnetic properties in the elastic polymer material are aligned in the thickness direction to form a chain. In the Φ state, the conductive conductive sheet is formed in a state in which the conductive particles are dispersed in the direction of the in-line direction (hereinafter referred to as "dispersion-oriented conductive sheet"). Document 2 discloses that a plurality of conductive circuit forming portions that are unevenly dispersed in the elastic polymer material and that extend in the thickness direction are formed, and the insulating portions are insulated from each other. The isotropic conductive elastic sheet (hereinafter referred to as "biased isotropic conductive sheet"), and Patent Document 3 discloses that a step difference is formed between the surface of the conductive path forming portion and the insulating portion. Partially oriented conductive sheet. -6- 200835060 These isotropic conductive elastomer sheets are, for example, a layer of a molding material containing a conductive particle indicating magnetic properties in a liquid polymer material forming material which is cured into an elastic polymer material. After the magnetic field or the magnetic field is applied in the thickness direction, the hardening treatment is performed. In the conductively-conductive elastomer sheet, the conductive particles are aligned in the thickness direction, and are contained in a matrix formed by the elastic polymer material in a state of being interlocked, and are formed by being pressed toward the thickness. There is a conduction circuit generated by the interlocking of the conductive particles Φ. Further, in the case of the dispersion-oriented electrically conductive sheet and the partial-oriented electrically conductive sheet, the dispersion-oriented electrically conductive elastomer sheet can be produced at a low cost without using a special high-priced metal mold. It is advantageous to use a pattern of electrodes to be connected, which is versatile, and is more advantageous than a biased type of isoconductive elastomer sheet. On the other hand, the bias-type electrically conductive elastomer sheet is formed such that the insulating portions are insulated from each other between the adjacent conductive circuit forming portions, and thus the needle φ is connected to the adjacent electrode with a small separation distance. In the state in which the insulation required between the adjacent electrodes is ensured, the performance of the electrical connection of the electrodes, that is, the high decomposition energy, and the dispersion-type isoconductive sheet can be achieved. More favorable. Further, in the decomposable isoconductive sheet, in order to enhance the decomposition energy, it is most important to reduce the thickness of the dispersion-type isoconductive sheet. However, in a small-diameter conductive sheet having a small thickness, there is a variation in the height level of each electrode to be connected, and the performance of electrical connection to the electrode, that is, the absorption energy of the bump, can be achieved. Low problem. -7- 200835060 Specifically, the concave-convex absorption energy to the different-conductivity elastomer sheet is about 20% of the thickness of the isotropic conductive elastomer sheet, for example, a isotropic conductive elastomer sheet having a thickness of 100 μm. In the case where the height of the electrode is uneven, the connected object having a pitch of about 20 μm can also achieve a stable electrical connection, but in the case of a 50 μm thick isotropic conductive elastomer sheet, the height of the electrode is The quasi-parallel is a connection object of more than 10 μm, and it becomes difficult to achieve a stable electrical connection. In order to solve such a problem, it is proposed to provide a composite conductive sheet in which the push-pull movable conductor of the through-hole is provided to the insulating sheet so as to be movable in the thickness direction in the push-through through hole formed in the insulating sheet. And a pair of electrically conductive connectors disposed on one surface and the other surface of the composite conductive sheet, respectively, to a different conductivity conductive sheet (see, for example, Patent Document 4), and having such a composite conductive sheet In the variable-conductivity connector, the movable electrode of the composite conductive sheet is movable in the thickness direction. Therefore, when φ is pressed in the thickness direction, the movable electrode is placed on one surface and the other surface of the composite conductive sheet. Since the heteroconductive elastic sheets are compressed and deformed in conjunction with each other, the total unevenness absorbing energy of both of them exhibits the uneven absorbing energy to the heteroconductive connector, so that high uneven absorption energy can be obtained. Further, in order to obtain the required unevenness absorbing energy, the thickness necessary for securing the total thickness of the two-way conductive connectors can be ensured, and as the different conductive connectors, thinner thicknesses can be used. Therefore, the decomposition energy of the cylinder can be obtained. 200835060 However, there is a problem in the 'practical' of the above-described paraconductive connector. In the above-described paraconductive connector, the movable conductor of the composite conductive sheet is supported on both the insulating sheet and the opposite-conducting elastic sheet, and the composite conductive sheet and the isotropic conductive elastomer are separated. In the case of a sheet, the movable conductor has a tendency to fall off from the insulating sheet. Therefore, it is actually difficult to separately treat the composite conductive sheet. Therefore, when a failure occurs in either the composite conductive sheet of the opposite-conductivity connector or the one of the different-conductivity elastic sheets, it is impossible to replace only the composite conductive sheet or the opposite-conductive elastic sheet. In the new one, it is necessary to replace the entire conductive switch with a new one. The movable body of the composite conductive sheet is formed by plating in a push-through through hole of the insulating sheet to deposit metal. The metal body is formed, and the metal body is mechanically pressed, and the metal body following the inner surface of the through hole is obtained by separation. However, when a transversal conductive connector having a plurality of movable conductors is to be manufactured, it is difficult to reliably separate all the metal bodies formed on the insulating sheet from the inner surface of the insulating sheet, and thus a part of the movable conductor Functional inconvenience. In order to solve such problems, it is proposed to have an insulating sheet having a plurality of through holes formed therein, and a diameter of a through hole which is larger than that of the insulating sheet, is formed at both ends of the flange portion of the through hole inserted through the insulating sheet. Further, a rigid conductor formed of a large-diameter terminal portion is formed, and the rigid conductor includes a cross-conductive connector formed of a composite conductive sheet that is movable in the thickness direction of the insulating sheet (see Patent Document 5). -9 - 200835060 However, in the case where the conductive substrate is repeatedly used in the inspection of the circuit board, the charge according to the static electricity is accumulated on the surface of the differential conductive connector, and a large amount is accumulated. After that, the discharge causes a failure to the isoconductive elastic sheet or the composite conductive sheet, and thus it is judged that there is a problem that a long service life cannot be obtained. Patent Document 1: Japanese Laid-Open Patent Publication No. JP-A No. Hei. No. Hei. No. Hei. No. Hei. JP-A-2001-35 No. 702 Patent Document 5: Japanese Patent Application No. 2005-3 74 809 [Description of the Invention] The present invention is based on the creator as above, and the object thereof is to provide a contiguous The distance between the electrodes is small, and there is a jagged connection target body at the height level of the electrodes, and it is possible to surely achieve for each of the electrodes while ensuring the insulation necessary for the adjacent electrodes φ. An electrically conductive connector which prevents electrical connection and which can prevent a charge generated by static electricity from being stored on a surface area, and which has a long service life, and a switching device and circuit having the same conductive connector Electrical inspection device for the device. The isotropic conductive connector of the present invention is characterized in that: an insulating sheet having a plurality of through holes extending in a thickness direction, and each through hole in the insulating sheet is used as the insulating sheet The rigid conductors are disposed on both sides of the insulating guide, and each of the rigid guides -10- 200835060 is formed at both ends of the dam portion through which the through holes of the insulating sheets are inserted, and is formed to have a through hole than the insulating sheet. A terminal portion having a large diameter and a diameter, the composite conductive sheet which is movable in the thickness direction of the insulating sheet, and the first-oriented electrically conductive elastomer disposed on one surface of the composite conductive sheet a sheet, and a second-direction electrically-conductive elastomer sheet disposed on the other surface of the composite conductive sheet, at least any of the first-direction heteroconductive elastomer sheet and the second-direction different-conductive elastomer sheet One of the composite layers having a plurality of openings is formed on a surface opposite to the surface in contact with the composite conductive sheet, and when the composite conductive sheet and the static eliminating layer are seen in a thickness direction, the composite is Each of the rigid conductors of the conductive sheet is located in the opening of the above-mentioned static eliminating layer so that the static eliminating layer is connected to the ground. In the isotropic conductive connector of the present invention, the movable distance of the rigid conductor in the thickness direction of the insulating sheet of the composite conductive sheet is preferably from 3 to 150 μm. Further, each of the first-order electrically conductive elastic sheet and the second-direction electrically conductive elastic sheet is in a state in which the magnetic conductive particles are aligned so as to be aligned in the thickness direction, and are in a state of being interlocked. It is preferable that the conductive particles are contained in an elastic polymer material in a state in which the chain of the conductive particles is dispersed in the surface direction. Further, each of the first off-conductivity elastomer sheet and the second-direction isoconductive elastomer sheet has a thickness of 20 to 100 μm. Further, the number average particle diameter of the conductive particles is preferably from 3 to 20 μη. The adapter device of the present invention is characterized in that: -11 - 200835060 has a transfer body in the field of connection electrodes in which a plurality of connection electrodes are formed in a pattern corresponding to the electrode to be inspected to be inspected by the circuit device to be inspected And the above-described isotropic conductive connector having a plurality of rigid conductors arranged in a pattern corresponding to the connection electrode of the adapter body in the field of the connection electrode disposed in the adapter body. An electrical inspection device for a circuit device according to the present invention is characterized in that it has a Φ switching device as described above. Each of the rigid conductors of the cross-conductive connector and the composite conductive sheet according to the present invention is made to be movable in the thickness direction of the insulating sheet, and therefore, when the electrode to be connected is pressed in the thickness direction, The first-oriented electrically conductive elastic sheet disposed on one surface of the composite conductive sheet and the second-oriented electrically conductive elastic sheet disposed on the other surface of the composite conductive sheet are formed by a rigid conductor toward the insulating sheet Since the thickness direction moves and interlocks with each other to perform compression deformation, the total Φ of the uneven absorption energy of both of them exhibits the uneven absorption energy to the heteroconductive connector, so that high uneven absorption energy can be obtained. Further, the thickness necessary for obtaining the required energy for embossing is ensured by the total thickness of the first-oriented electrically conductive elastic sheet and the second-oriented different-conductive elastic sheet. The conductive elastomer sheet can be used in a relatively small thickness, so that high decomposition energy can be obtained. Therefore, in the state in which the distance between the adjacent electrodes is small, and the electrode-level has a jagged connection object, and the necessary insulation property is ensured between the adjacent electrodes, it is possible to surely achieve each When the electrode -12- 200835060 is electrically connected. Further, at least one of the first off-conductivity elastomer sheet and the second counter-conductive elastomer sheet has a plurality of openings, and the charge removing layer is formed on a surface opposite to the surface in contact with the composite conductive sheet. Therefore, by the fact that the charge removing layer is connected to the ground, it is possible to prevent or suppress the accumulation of charges generated by the static electricity. Therefore, it is possible to avoid the occurrence of a failure in the discharge to the different-conductivity elastic sheet and the composite conductive sheet by the discharge of the accumulated electric charge, thereby obtaining a long service life. The switching device according to the present invention has the above-described different-conductivity connector, and thus the circuit device of the inspection object has a height level of the electrode to be inspected even if the distance between the adjacent inspected electrodes is small. In the case of the unevenness, it is possible to surely achieve the electrical connection for each of the electrodes to be inspected and prevent or suppress the generation of the electric charge by the static insulation in the state of ensuring the necessary insulation between the adjacent inspected electrical systems. The situation of savings can be used for a longer service life. The electrical inspection device of the circuit device according to the present invention has the above-described switching device, and thus the circuit device to be inspected has a height level of the electrode to be inspected even if the distance between the adjacent inspected electrodes is small. There is a staggered one, and the necessary electrical inspection is also performed for the circuit device. Moreover, in the case of a different conductivity, a longer life can be obtained, so that the frequency of replacement of a new one into the new conductive connector becomes lower, so that it can be obtained high. Check efficiency. -13-200835060 [Embodiment] Hereinafter, embodiments of the present invention will be described in detail. <Differential Conductive Connector> Fig. 1 is a cross-sectional view for explaining the configuration of an example of the isotropic conductive connector of the present invention. Fig. 2 is an explanatory cross-sectional view showing an enlarged main portion of the polarization conductive connector shown in Fig. 1. The isotropic conductive connector 15 is a first conductive dissimilar elastic sheet 16 which is disposed on one surface (upper side in Fig. 1) of the composite conductive sheet 10 and the composite conductive sheet 1 And a second-direction electrically conductive elastomer sheet 17 disposed on the other surface of the composite conductive sheet 10. As shown in Fig. 3, the composite conductive sheet 10 is an insulating sheet 1 formed by a pattern corresponding to electrodes which are connected to the plurality of through holes 分别 which are respectively extended in the thickness direction, and Both surfaces of the insulating sheet 1 are formed so as to protrude from the plurality of rigid conductors 1 1 of the insulating through holes 1 1 Η. φ Each of the rigid conductors 12 is formed by a cylindrical flange portion 1 2a inserted through the through hole 1 1 Η of the insulating sheet 1 1 and exposed to both ends of the flange portion 1 2a integrally connected to the flange portion 1 2a. The terminal portion 1 2b on the surface of the insulating sheet 1 is formed. The length L of the crotch portion 12a of the rigid conductor 12 is larger than the thickness d of the insulating sheet 11, and the diameter of the crotch portion 12a is smaller than the diameter rl of the through hole 绝缘 of the insulating sheet 11. Thereby, the rigid conductor 12 is formed to be movable in the thickness direction of the insulating sheet 11. Further, the diameter r3 of the terminal portion 12b of the rigid conductor 12 is larger than the diameter r 1 of the through hole 1 1 Η of the insulating sheet 1 1 . -14 - 200835060 As a material constituting the insulating sheet 1 i, a resin material such as a polyimide resin, a polyester resin, a polyaromatic polyurethane, or a glass fiber reinforced epoxy resin type polyester resin can be used. A glass fiber reinforced polyimine-based strong resin material, such as alumina or boron nitride, or a composite resin material such as an epoxy resin. In addition, in the high-temperature environment, the composite conductive film is used. The thermal expansion coefficient is 3χ1 (Κ5/Κ preferably 1\106~2\10-5/foot, preferably 1). <1〇-6~6> Such an insulating sheet 1 1 can suppress the deviation of the rigid conductor 1 2 which is caused by the insulating sheet. Further, the thickness d of the insulating sheet 1 1 is 1 〇 to 2 0 0 is 1 5 to 1 0 0 μ m. Further, the diameter of the through hole 11 Η of the insulating sheet 1 is preferably μπι, more preferably 30 to 150 μm. φ As a material constituting the rigid conductor 12, a suitable metal material, in particular, a material which is less likely to be etched than a metal thin layer made of the insulating sheet described below, may be exemplified by nickel, cobalt, gold. , aluminum and other alloys. The diameter r2 of the crotch portion 12a of the rigid conductor 12 is preferably more than 25 μπι. In the case where the diameter r2 is too small, the conductor 1 2 does not have the necessary strength. The diameter rl of the through hole 1 1 Η and the rigid conductor 1 2 are liquid crystal polymer, resin, polyamide resin, glass fiber resin, etc. When the fiber-filled material contains 1 〇 as the tanning material, it is preferably as the best one, and more (10_6/κ. By using the thermal expansion of 11 μπι is better, more preferably g rl, is 20 to 300. The local use has a rigid method. It is formed as a single metal such as gold or 18 μηι or more, and this is the same as the diameter of the straight -15-200835060 diameter r 2 of the crotch portion 1 2 a of the insulating sheet ( r 1 _ r 2 ) is preferably 1 μm or more, more preferably 2 μm or more. When the phase difference is too small, it is difficult to move the rigid conductor 1 2 in the thickness direction of the insulating sheet 1 1 . The diameter r3 of the terminal portion 12b of the 12 is preferably 70 to 150% of the diameter of the electrode to be inspected, for example, the diameter r3 of the terminal portion 12b of the rigid conductor 12 and the through hole 11H of the insulating sheet 11. The phase difference (r 3 - r 1 ) of the diameter r 1 is preferably 5 μ m or more, more preferably φ 1 〇 μ m or more. When the phase difference is too small, the rigid conductor 12 is detached from the insulating sheet 11. The thickness of the terminal portion 12b of the rigid conductor 12 is preferably 5 to 50 μm, more preferably 8 〜40 μπι The movable distance of the rigid conductor 1 2 in the thickness direction of the insulating sheet 1 1 , that is, the difference between the length L of the crotch portion 1 2 a of the rigid conductor 12 and the thickness d of the insulating sheet 11 (Ld) Preferably, it is 3 to 150 μπι, more preferably 5 to 100 μπι, and most preferably 10 to 5 0 μπι. When the movable distance of the rigid conductor 12 is too small φ, in the following non-conductive connector, It is difficult to obtain sufficient uneven absorption energy. On the other hand, when the movable distance of the rigid conductor 12 is too large, the ridge of the rigid conductor 1 2 exposed from the through hole 1 1 绝缘 of the insulating sheet 1 1 When the length of the portion 1 2 a is increased to be used for inspection, the crotch portion 1 2a of the rigid conductor 1 2 has buckling or damage. The composite conductive sheet 10 is in the insulating sheet 11 The through hole 1 1 H has a rigid conductor 12 movable in the thickness direction thereof, and the rigid conductor 12 is at both ends of the crotch portion 1 2 a The terminal portion having a larger diameter than the diameter of the through hole 11H of the insulating sheet 11 is formed. Thus, the rigid conductor 12 is not insulated as a result of the function of the terminal-16-200835060 portion 1 2b as a stopper. The composite sheet 11 is detached, and the composite conductive sheet 10 is also easily handled by itself. The composite conductive sheet 10 can be produced, for example, as follows. First, as shown in Fig. 4, a build-up material 10B formed by laminating a metal layer 1 3 a body on one surface of the insulating sheet 11 is prepared, and the metal layer 13A of the build-up material 10B is applied. The etching process is performed by removing a part thereof by φ, and as shown in Fig. 5, a plurality of openings 1 3 K are formed in accordance with the pattern corresponding to the pattern of the electrode to be connected to the metal layer 13 A. As shown in Fig. 6, in the insulating sheet 1 1 of the laminated material 10B, through holes 1 1 连 which are respectively connected to the opening 13K of the metal layer 13A and extend in the thickness direction are formed. Then, as shown in Fig. 7, the inner wall surface of the through hole 1 1Η of the insulating sheet 1 1 and the opening edge of the metal layer 13 3 are formed to form a thin cylindrical metal layer 13 which is easy to be uranium-engraved. B. In this manner, the insulating sheet 1 1 having the plurality of through holes 1 1 Η extending in the thickness direction is formed, and the layer φ is laminated on one surface of the insulating sheet 1 1 and is connected to the insulating sheet U. The metal layer 1 3 A of the plurality of openings 1 3 Η of the hole 1 1 Η and the inner wall surface of the through hole 1 1 η covering the insulating sheet 1 and the opening edge of the metal layer 13Α are formed. The etchable metal thin layer 13Β is made of a composite laminate material 10Α. In the above, as the method of forming the through hole 1 1 Η of the insulating sheet 1 1 , a laser processing method, a drilling method, an uranium engraving method, or the like can be used. As the metal material constituting the etchable property of the metal layer 13A and the metal thin layer 13A, copper or the like can be used. -17- 200835060 Further, the thickness of the metal layer 13 3 A is set in consideration of the movable distance of the rigid conductor 12 as a purpose, etc., and is preferably 3 to 75 μm, more preferably 5 to 50 μm, most Good for 8~2 5 μ m. Further, the thickness of the thin metal layer 13B is determined by considering the diameter of the through hole 11H of the insulating sheet 1 1 and the diameter of the flange portion 12a of the rigid conductor 12 to be formed. Further, as a method of forming the thin metal layer 13B, an electroless plating φ method can be used. In this manner, the composite conductor material 1 ο A is subjected to a photo-plating treatment to form the rigid conductor 12 in each of the through holes 1 1 Η of the insulating sheet 1 . Specifically, as shown in Fig. 8, each of the surface of the metal layer 13A formed on one surface of the insulating sheet and the other surface of the insulating sheet 11 is formed to correspond to a rigid conductor to be formed. The pattern of the pattern of the terminal portions 1 2b of 1 2 is formed with a photoresist film 14 that communicates with the plurality of pattern holes 14H of the through holes 11H of the insulating sheet 1 1 . Thereafter, the metal layer 13A φ is used as a common electrode, and electrolytic plating is applied to deposit metal on the surface of the metal thin layer 13B while the metal is deposited on the exposed portion of the metal layer 13 3 by the insulating sheet 11 The inside of the through hole 11H and the pattern hole 14H of the photoresist film 14 are filled with metal, and as shown in Fig. 9, a rigid conductor 12 extending in the thickness direction of the insulating sheet 1 is formed. After the rigid conductor 1 2 is thus formed, the photoresist layer 14 is removed from the surface of the metal layer of 1 3 A, and as shown in Fig. 10, the metal layer 13A is exposed. Thereafter, the metal layer 13A and the thin metal layer 1 3 B are removed by an etching treatment to obtain the composite conductive sheet 10 shown in Fig. 3. -18-200835060 The first-oriented electrically conductive elastomer sheet 16 and the second-direction electrically conductive elastic sheet 17 are in a state in which the magnetic conductive particles P are aligned in the thickness direction and are interlocked. Further, it is included in the insulating elastic polymer material in a state in which the chain of the conductive particles P is dispersed in the direction of the surface. As the elastic polymer material forming the first-direction isoconductive elastic sheet 16 and the second-direction isoconductive elastic sheet 17 , a high φ molecular substance having a bridging structure is preferable, and durability and formability are obtained. From the viewpoint of electrical properties, it is more preferable to use polyoxymethylene rubber. The conductive particles P contained in the first-direction isoconductive elastic sheet 16 and the second-direction different-conductive elastic sheet 17 can be easily arranged in the thickness direction by the following method. Since the ground is aligned, conductive particles indicating magnetic properties are used. Specific examples of such conductive particles include particles of a magnetic metal such as iron, cobalt, or nickel, or particles of such alloys or particles containing such metals, or these particles are used as φ core particles. A metal plating agent having excellent conductivity such as gold, silver, palladium or rhodium is applied to the surface of the core particle, or inorganic substance particles or polymer particles such as non-magnetic metal particles or glass enamel particles are used as core particles. An electroplater or the like that applies a conductive magnetic metal to the surface of the core particle. Among these, electroplating using nickel particles as the core particles ' and gold or silver having excellent conductivity on the surface thereof is preferred. The means for coating the conductive gold on the surface of the core particle is not particularly limited, and for example, electroless plating or electrolytic plating, sputtering, steaming, or the like is used. -19 - 200835060 When the conductive particles P are coated on the surface of the core particles using a conductive metal, excellent conductivity can be obtained, and the coverage of the conductive metal on the surface of the particles (for the core particles) The ratio of the coverage area of the conductive metal of the surface area is preferably 40% or more, more preferably 45% or more, and most preferably 47 to 95%. Further, the amount of the conductive metal to be coated is preferably 0.5 to 50% by mass based on the core particles. φ Further, the number average particle diameter of the conductive particles P is preferably 3 to 20 μm, more preferably 5 to 15 μm. When the number average particle diameter is too small, it is difficult to align the conductive particles in the thickness direction in the following production method. On the other hand, when the number average particle diameter is too large, it is difficult to obtain a highly-decomposable orthotropic conductive elastomer sheet. Further, the particle diameter distribution (Dw/Dn) of the conductive particles Ρ is preferably from 1 to 10, more preferably from 1.01 to 7, most preferably from 1.05 to 5, and particularly preferably from 1.1 to 4 〇. The shape of the conductive particles P is not particularly limited, but may be easily dispersed in the polymer material forming material, and it is preferable to use a spherical shape, a star shape, or a secondary particle in which such agglomerates are aggregated. Such a conductive particle P is preferably contained in a ratio of 10 to 40% by volume to the isoconductive elastomer sheet, and particularly contained in a ratio of 15 to 35%. When the ratio is too small, there is a case where a highly conductive elastomer sheet having sufficiently high conductivity in the thickness direction cannot be obtained. On the other hand, when the ratio is too large, the obtained isotropic conductive elastomer sheet is likely to be weak, and the conductive sheet of the isoconductive elastomer may not have the elasticity of -20-200835060. Further, the thickness of each of the first off-conductivity elastomer sheet 16 and the second-direction isoconductive elastomer sheet 17 is preferably 20 to 100 μm, more preferably 25 to 70 μm. When the thickness is too small, sufficient uneven energy absorption cannot be obtained. On the other hand, when the thickness is too large, there is a case where high decomposition energy cannot be obtained. In each of the first off-conductivity elastomer sheet 16 and the second-direction isoconductive φ-type elastomer sheet 17 7 ′ than the first-direction isoconductive elastomer sheet 及 6 and when the second-direction isoconductive elasticity The body sheet 17 is also integrally formed on the opposite side of the surface in contact with the composite conductive sheet 1A. A plurality of openings 18 8 are formed in the charge removing layer 18 formed on the first isotropic conductive elastic sheet 16 at a position directly above the respective rigid conductors 1 2 of the composite conductive sheet 10. Further, a plurality of openings 19h are formed in the position of the charge removing layer 19 formed on the second conductive dissimilar elastic sheet 17 at a position directly below the respective rigid conductors 2 of the composite conductive sheet 1 . Further, when the composite conductive sheet 1 〇 and the charge removing layers 18 and 19 are seen in the thickness direction Φ, the respective rigid conductors 1 2 of the composite conductive sheet 10 are located at the opening 18H of the neutralizing layers 18 and i9. , within 19H. As the material constituting the static eliminators 18 and 19, a conductive paste obtained by containing a metal powder in a metal material 'curable resin can be used. Here, as the metal material, a metal such as iron, copper, gold, nickel, or titanium or a combination of two or more of these alloys or an alloy steel, a constant-van steel type such as Hengfan steel, and an elastic constant steel may be used. Elastically invariant steel type alloy, Super-21 - 200835060 Hengfan steel, Kova iron nickel 'cobalt alloy, alloy such as alloy or alloy of 4 2 alloy, etc., and the thickness of the static elimination layer 18, 19 is 5~50 Preferably, μιη is more preferably 10 to 30 μηη. When the thickness is too small, the occurrence of cracks or the like of the static eliminators 18, 19 may occur by the compression repeat in the thickness direction of the isotropic conductive elastic sheet which is used for inspection of the opposite-conductivity connector. Peeling of the static eliminator layers 18, 19 of the isoconductive elastomer sheet. On the other hand, when φ is excessively large, it is difficult to perform compression in the thickness direction of the cross-conductive elastic sheet when inspecting the opposite-conductivity connector, and it is also formed in the static-eliminating layers 18 and 19. The depths of the openings 18A and 19'' are increased, and it is difficult to electrically connect the electrode to be inspected or the connection electrode of the adapter body described below and the rigid conductor 12 of the composite conductive sheet 10. The charge removing layers 18 and 19 are formed by a plating method or a sputtering method in the case of using a metal material, and a metal film having an opening is formed by a method of transferring the metal film by φ, or the like. When a conductive paste is used, it can be formed by coating the conductive paste to harden it. Further, in the example of the figure, the diameters of the openings 18A and 19'' of the static eliminators 18 and 19 are larger than the diameter of the terminal portion 12b of the rigid conductor 1 2 of the composite conductive sheet 10, specifically, the terminal portion. The diameter of 121> is preferably 1 to 1 5 times, more preferably 1.5 to 10 times. When the diameters of the openings 18H, 19H of the static eliminators 18, 19 are too small, the adjacent electrodes or the adjacent rigid conductors 12 are short-circuited with each other. On the other hand, when the diameters of the openings 18H, 19H of the static eliminators 18, 19 are excessively large, the prevention of charging or the suppression of -22-200835060 becomes difficult. The first off-conductivity elastomer sheet 16 can be produced as follows. First, as shown in Fig. 1, each of the sheet-like one-side molding member 30 and the other-side molding member 31 is prepared to have a planar shape suitable for the purpose of the first-direction different-conductivity elastic sheet 16. The shape of the opening 32K, and has a corresponding piece when the first direction of the conductive elastomer! The frame-shaped spacer 32 having a thickness of 6 is contained in a liquid polymer material forming material which is hardened to become an elastic φ polymer material, and contains conductive particles as a material for a conductive elastomer. Then, as shown in Fig. 12, the gap 3 2 is disposed on the forming surface (the upper surface in Fig. 12) of the other side side molding member 31, and the gap is formed on the forming surface of the other side side forming member 31. In the opening 3 2K of the wall 3 2, the material 1 6B for the conductive elastic elastomer is applied, and then the metal film 18A is placed on the conductive elastic material 16B, and one side is placed on the metal film 18A. Side forming member 30. In the above, as the one-side side molding member 30 and the other side molding member 3 1, a resin sheet composed of a polyimide resin, a polyester resin, an acrylic resin or the like can be used. Further, the thickness of the resin sheet constituting the one side molding member 30 and the other side molding member 31 is preferably 50 to 500 μm, more preferably 75 to 300 μm. When the thickness is less than 50 μm, the molded member may not have a required strength. On the other hand, when the thickness exceeds 50,000 μm, the material layer for the conductive elastomer described below becomes a magnetic field which hardly acts on the required strength. -23· 200835060 Then, as shown in Fig. 13, the pressure roller device 35 formed by the pressure roller 33 and the backup roller 34 is used by the one-side molding member 30 and the other-side molding member 31. The conductive elastic material layer 16A is sandwiched between the other surface side molding member 31 and the gold film 18A to form a conductive elastic material layer 16A having a desired thickness. As shown in Fig. 14, the conductive elastic material P is contained in the conductive elastic material layer 16A in a state of being uniformly dispersed. Then, the back surface of the one-side molding member 30 and the back surface of the other-side molding member 31 are actuated in parallel in the thickness direction of the conductive elastic material layer 16A by the operation of the electromagnet. magnetic field. As a result, in the conductive elastic material layer 1 6 A, the conductive particles P dispersed in the conductive elastic material layer 16A are maintained as shown in FIG. The state in which the directions are dispersed is aligned in the thickness direction, whereby the interlocking of the plurality of conductive particles P extending in the thickness direction is formed in a state of being dispersed in the surface direction. Then, in this state, the conductive elastic material layer 1 6 A is cured, and the conductive particles P are aligned in the thickness direction, and the chain is generated in accordance with the conductive particles p. The first-oriented electrically-conductive elastomer sheet 16 which is contained in the elastic polymer material in a state of being dispersed in the surface direction is integrally produced in the state of being attached to the metal film 18A. Thereafter, the metal film 18 A is subjected to lithography and etching treatment to remove a part thereof, thereby obtaining an opening 1 8H static eliminating layer 18 〇 in the above, the conductive elastic material layer 1 6 A The hardening treatment, -24-200835060, can also be carried out while still operating a parallel magnetic field, but it can also be carried out after stopping the action of the parallel magnetic field. Further, once the action of the parallel magnetic field is stopped, the direction of the applied magnetic field may be reversed. The strength ' of the parallel magnetic field acting on the material layer for conductive elastomer 1 6 A is preferably 0.02 to 2.5 tesla (T). The hardening treatment of the conductive elastic material layer 16 A is appropriately selected by the material for φ, but is generally carried out by heat treatment. The specific heating temperature and heating time are considered as the type of the material for the polymer material constituting the conductive elastic material layer 16A, and the time required for the movement of the conductive particles P is appropriately selected. Further, the second-oriented electrically conductive elastic sheet 17 can be produced by the same method as the first-oriented electrically conductive elastic sheet 16. According to the transmissive conductive connector 15, the rigid conductors 1 2 of the composite conductive sheet 1 are formed such that the insulating sheet 11 is movable toward the thickness direction #, so that the electrodes to be connected are When the thickness direction is pressurized, the first-direction electrically conductive elastomer sheet 16 disposed on one surface of the composite conductive sheet 10 and the second-direction different conductive layer disposed on the other surface of the composite conductive sheet 10 The elastic elastic sheets 17 are compressed and deformed in conjunction with each other by the movement of the rigid conductors 12. Therefore, the total absorption energy of both of them is exhibited as a concave-convex absorption to the heteroconductive connector 15. Can't get high bump absorption energy. Moreover, the thickness "required for obtaining the required uneven absorption energy" is ensured by the total thickness of the first-direction heteroconductive elastic sheet 16 and the second-direction heteroconductive elastic-25-200835060 body sheet 17 However, as the individual conductive elastomer sheets, those having a small thickness can be used, and thus high decomposition energy can be obtained. Therefore, in the state in which the distance between the adjacent electrodes is small, and the electrode-level has a jagged connection object, and the necessary insulation property is ensured between the adjacent electrodes, it is possible to surely achieve each When the electrode is electrically connected. Further, each of the first-direction different-conductive elastic sheet 16 and the second-direction different-conductive elastic sheet 17 is formed directly above each of the rigid conductors 1 2 of the composite conductive sheet 1 . The plurality of electrostatic discharge layers 18 and 19 at the position are formed on the opposite surface of the surface in contact with the composite conductive sheet 10, so that the discharge layers 18 and 19 can be prevented or suppressed by being connected to the ground. The case where the electric charge generated by static electricity is accumulated. Therefore, it is possible to avoid the occurrence of a failure in the first-direction isoconductive elastic sheet 16, the second-direction different-conductive elastic sheet 17 and the composite conductive sheet 1 by the discharge of the accumulated electric charge. Therefore, a longer service life can be obtained. <Switching device> Fig. 16 is an explanatory sectional view showing a configuration of an example of the switching device of the present invention, and Fig. 17 is a cross-sectional view showing the adapter body of the switching device shown in Fig. 16. Figure. The switching device is for a circuit device such as a printed circuit board. For example, it is used for a circuit device inspection for performing a slotting test, and has a transfer body 20 formed of a multilayer wiring board. On the surface of the adapter body 20 (above -26-200835060 in FIGS. 16 and 17), a plurality of electrodes for connection are formed along with a specific pattern of the pattern of the electrode to be inspected corresponding to the circuit device to be inspected. 21 connection electrode area 2 5. On the back side of the transfer body 20, a plurality of terminal electrodes 22 are disposed in accordance with, for example, pitches of 8 mm, 0.75 mm, 1.5 mm, 1.8 mm, and 2.54 mm, and the respective terminals. The internal wiring portion 23 is electrically connected to the connection electrode 21. φ On the surface of the adapter body 20, the second-direction electrically conductive elastic sheet 17 is placed on the connection electrode region 25 in contact with the adapter body 20, and basically shows the orientation of the configuration of FIG. The different conductivity connector 15 is fixed to the adapter body 20 by an appropriate means (not shown). In the cross-conductive connector 15 , a plurality of rigid conductors are disposed in the same pattern as the specific pattern of the connection electrodes 21 of the adapter body 20 in the composite conductive sheet 1 . Each of the conductive conductors 15 of the composite conductive sheet 10 is disposed so as to be located directly above the connection electrode 21 of the adapter body φ 20 . According to the above-described switching device, since the para-conducting connector 15 having the configuration shown in Fig. 1 is provided, the circuit device to be inspected is even if the distance between the adjacent inspected electrodes is small. In the state where the height level of the inspection electrode is uneven, and the necessary insulation between the adjacent inspection electrodes is ensured, the electrical connection to each of the inspection electrodes can be surely achieved, and the prevention or It is possible to suppress the charge generated by static electricity from being accumulated, and a longer service life can be obtained. -27-200835060 <Electrical inspection device for circuit device> Fig. 18 is an explanatory view showing a configuration of an example of an electrical inspection device of the circuit device of the present invention. In the circuit device 5 such as a printed circuit board on which the inspected electrodes 6 and 7 are formed on both sides, for example, a slot test is performed, and the circuit device 5 is held in the inspection execution field E. The support 2 is provided with a positioning pin 3 for arranging the circuit device 5 at an appropriate position in the inspection execution area E. The upper side switching device 1a and the upper side inspection head 50a having the configuration shown in Fig. 17 are arranged in order from the lower side of the φ inspection execution area E, and the upper inspection head 50a is disposed above the upper inspection head 50a. The upper side support plate 56a and the upper side inspection head 50a are fixed to the upper side support plate 56a by the stays 51a. On the other hand, below the inspection execution area E, the lower side switching device 1b and the lower side inspection head 50b having the configuration shown in Fig. 7 are arranged in order from the top, and below the lower side inspection head 50b. The lower side support plate 56b is disposed, and the lower side inspection head 50b is fixed to the lower side support plate 56b by the support φ 54 VII. The upper inspection head 50a is composed of a plate-shaped inspection electrode 51a and an elastic, electrically conductive elastic sheet 55a that is fixedly disposed on the lower surface of the inspection electrode device 51a. The inspection electrode device 51a is a plurality of pin-shaped inspection electrodes 52a having a lattice dot position arranged at the same pitch as the terminal electrode 2 of the upper-side adapter device 1a, and the number of the inspection electrodes 5a. 2 a is electrically connected to the connector 57 7 a provided on the upper side support plate 5 6 a by the wire 5 3 a, and is electrically connected to the tester via the connector 57 7 a. Circuit (not shown). -28-200835060 The lower inspection head 50b is composed of a plate-shaped inspection electrode 51b and an elastic, electrically conductive elastic sheet 55b which is fixedly disposed on the upper surface of the inspection electrode device 5 1b. The inspection electrode device 51b has a plurality of pin-shaped inspection electrodes 52b disposed on the upper surface thereof at the lattice point positions of the same pitch as the terminal electrodes 22 of the lower-side adapter device 1b, and the respective inspection electrodes 52b are by wires. 53b is electrically connected to the connector 57b provided on the lower side support plate 56b, and is electrically connected to the inspection circuit (not shown) of the tester via the connector 57b. Further, the static eliminators 18 and 19 of the respective opposite-conductivity connectors 15 of the upper-side adapter 1a and the lower-side adapter 1b are connected to the ground. In the above, the electrically conductive elastic sheets 55a and 55b of the upper inspection head 50a and the lower inspection head 50b are each formed of a conductive formation portion in which only a conductive circuit is formed in the thickness direction. In the above-described conductively-conductive elastic sheets 55a and 55b, each of the conductive circuit forming portions is formed so as to protrude at least in one direction in the thickness direction, and it is preferable to exhibit high electrical stability. In the electrical inspection device of the circuit device, the circuit device 5 to be inspected is held in the inspection execution area E by the support member 2, in which the upper support plate 56a and the lower side support plate 56b are respectively Moving in a direction close to the circuit device 5, when the circuit device 5 is pinched by the upper side switching device 1a and the lower side switching device 1b. In this state, the inspected electrode 6 on the upper surface of the circuit device 5 is connected to the connection electrode 2 1 electrically connected to the upper-side switching device 1 a via the opposite-conductive connector 1 The terminal -29-200835060 of the side switching device 1 & the electrode 22 is electrically connected to the inspection electrode device 51a via the inspection electrode device 51a via the heteroconductive elastic sheet 55a. On the one hand, the underlying inspection electrode 7 of the circuit device 5 is via the connection electrode 21 electrically connected to the lower-side adapter device 1b, and the lower-side adapter device The terminal electrode 22 of 1 b is electrically connected to the inspection electrode 52b of the inspection electrode device 51b via the counter conductive elastic sheet 55b. Thus, the inspected electrodes 6 and 7 on both the upper surface and the lower surface of the circuit device 5 are provided. Each of the inspection electrodes 52a electrically connected to the inspection electrode device 51a of the upper inspection head 5a and the inspection electrode 52b of the inspection electrode device 51b of the lower inspection head 50b is electrically connected. The state of the test circuit is checked by the tester, and the required electrical check is performed in this state. According to the electrical inspection device of the above-described circuit device, since the upper-side switching device 1a and the lower-side switching device 1b are configured as shown in Fig. 16, the circuit device 5 to be inspected is even The distance between the adjacent inspected electrodes 6 and 7 is small, and the height of the inspected electrodes 6 and 7 is uneven, and the necessary electrical properties can be reliably implemented for the circuit device 5. an examination. Further, since the long-term service life can be obtained in the opposite-conductivity connector 15, the frequency of the work of replacing the new-type conductive connector 15 with a new one becomes low, and thus High inspection efficiency is obtained. The present invention is not limited to the above-described embodiments, and various modifications can be made as follows. -30 - 200835060 The static eliminator layer may be formed only in one of the first-direction isoconductive elastic sheet 16 and the second-direction different-conductive elastic sheet 17 . In the composite conductive sheet 1 ,, the material constituting the rigid conductor 1 2 is not limited to a metal material, and for example, a conductive powder containing a metal or the like in a rigid resin can be used. . In the method of manufacturing the composite conductive sheet 10, the laminated material and the composite laminated material may be formed by forming the metal layer on both surfaces of the insulating sheet, or may be used as the first direction in the conductive conductive connector 15. The one or both of the differentifiable elastic sheet and the second isotropic electroconductive sheet may be a biased isotropic conductive sheet. Further, the openings 18H and 19H of the static eliminators 18 and 19 are not necessarily formed by the rigid conductors 1 2 of the composite conductive sheet 1 ,. For example, as shown in Fig. 19, the composite conductive sheets 10 are fluorinated in the thickness direction. When the dielectric layer 18 is removed, it is also possible to form the plurality of rigid conductors 12 in one opening 18H. Further, as shown in Fig. 20, when the composite conductive sheet 10 and the static eliminating layer 18 are seen in the thickness direction, the opening 18H may be formed in addition to the region where the rigid conductor 12 is located. Further, in the electrical inspection device, the circuit device to be inspected is not limited to the printed circuit board, and a semiconductor of a semiconductor package such as a package 1C, MCM or the like may be formed. [Brief Description of the Drawings] Fig. 1 is a cross-sectional view for explaining the configuration of a parallax-conductive connector of the present invention -31 - 200835060. Fig. 2 is an explanatory cross-sectional view showing an enlarged main portion of the isotropic conductive connector shown in Fig. 1. Fig. 3 is a cross-sectional view for explaining the main part of the composite conductive sheet. Fig. 4 is a cross-sectional explanatory view showing the constitution of a laminated material for producing a composite conductive sheet. φ Fig. 5 is a cross-sectional view for explaining a state in which an opening is formed in a metal layer of a laminated material. Fig. 6 is a cross-sectional explanatory view showing a state in which a through hole is formed in an insulating sheet of a laminated material. Fig. 7 is a cross-sectional view for explaining the structure of the composite laminated material. Fig. 8 is a cross-sectional view for explaining a state in which a photoresist film is formed on a composite laminate material. Fig. 9 is a cross-sectional explanatory view showing a state in which a through-hole shape φ of an insulating sheet of a composite laminated material is formed into a rigid conductor. Fig. 10 is a cross-sectional view for explaining the state in which the photoresist film is removed from the composite laminate material. Fig. 11 is a cross-sectional explanatory view showing the one-side side molding member for manufacturing the first-direction isoconductive elastic sheet, and the other side-side molding member and the partition. Fig. 1 is an explanatory view showing a state in which a material for a conductive elastic body is applied to the surface of the other surface side molding member. Fig. 1 is a cross-sectional view for explaining a state in which a material layer for a conductive elastic body is formed between -32-200835060 between the other surface side forming member and the metal film. Fig. 14 is a cross-sectional view for explaining the material layer for a conductive elastic body shown in Fig. 13 in an enlarged manner. Fig. 15 is a cross-sectional explanatory view showing a state in which a magnetic field is applied to the material layer for a conductive elastic body shown in Fig. 3 in the thickness direction. Figure 16 is a cross-sectional view for explaining the configuration of an example of the adapter device of the present invention. Fig. 17 is a cross-sectional explanatory view showing the configuration of the adapter body of the adapter device shown in Fig. 16. Figure 18 is an explanatory view showing a configuration of an example of an electrical inspection device for a circuit device according to the present invention. Fig. 19 is an explanatory view showing a modification of the static eliminator layer. Fig. 20 is an explanatory view showing another modification of the static eliminator layer. [Main component symbol description] la. Upper side switching device 1 b : Lower side switching device 2 : Support member 3 : Locating pin 5 : Circuit device 6 , 7 : Checked electrode 1 〇 : Composite conductive sheet 1 〇 A: composite laminated material 10B: laminated material-33 - 200835060 11 : insulating sheet 1 1 Η : through hole 1 2 : rigid conductor 1 2 a · hole portion 12b: terminal portion 13A: metal layer 13B: thin metal layer 1 3 K : Opening □ 1 4 : Photo resist film 14H : Pattern hole 1 5 : Directional conductive connector 16 : First-direction isoconductive elastic sheet 16A : Conductive elastomer material layer 16B : Conductivity Elastomer material 1 7 : Second-direction electroconductive elastomer sheet 18, 19: De-ioning layer 18 A: Metal film 18H, 19H: Opening 2 0: Adapter body 2 1 : Connecting electrode 22: Terminal Electrode 23: Internal wiring portion 25: Connection electrode field 30: - Face side molding member - 34 - 200835060 3 1 : Another surface side molding member 3 2 : Clearance wall 32K: Opening 3 3 : Pressure roller 34: Support roller 3 5: Processing roll device 50a: upper side inspection head 5〇b: lower side inspection heads 51a, 51b: inspection electrode unit 5 2a, 5 2b : inspection electrode 5 3 a, 5 3 b : electric wires 5 4a, 54b: struts 55a, 55b: directional conductive elastic sheets 56a: upper side support plates 5 6b: lower side support plates 57a, 57b: connectors -35-