JP2001093338A - Anisotropic conductive sheet and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet prevented or restrained from being charged, if subjected to static electricity on the surface, and to provide its manufacturing method. SOLUTION: An anisotropic conductive sheet comprises an anisotropic conductive sheet body having conductivity in the direction of its thickness and a static elimination layer integrally provided on at least one face of the sheet body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anisotropic conductive material which is preferably used as an electrical connection between circuit devices such as electronic parts and a connector in an inspection device for circuit devices such as printed circuit boards and semiconductor integrated circuits. The present invention relates to a sheet and a method for manufacturing the sheet.

[0002]

2. Description of the Related Art An anisotropic conductive elastomer sheet has conductivity only in the thickness direction, or has a pressurized conductive portion which has conductivity only in the thickness direction when pressed in the thickness direction. And it is possible to achieve a compact electrical connection without using means such as soldering or mechanical fitting, and it is possible to absorb mechanical shocks and strains and make a soft connection Because of these features, using such features, for example, computers,
In the fields of electronic digital watches, electronic cameras, computer keyboards, etc., it is widely used as a connector for achieving an electrical connection between circuit devices, for example, a printed circuit board and a leadless chip carrier, a liquid crystal panel, etc. ing.

In the electrical inspection of a circuit device such as a printed circuit board or a semiconductor integrated circuit, an electrode to be inspected formed on at least one surface of a circuit device to be inspected and an electrode formed on the surface of the circuit board for inspection. In order to achieve electrical connection with the test electrodes, an anisotropic conductive elastomer sheet is interposed between the test electrode area of the circuit device and the test electrode area of the test circuit board. ing.

Conventionally, as such an anisotropic conductive elastomer sheet, those having various structures are known. For example, Japanese Patent Application Laid-Open No. Sho 51-93393 discloses that metal particles are uniformly dispersed in an elastomer. Anisotropically conductive elastomer sheet obtained by the above method is disclosed.
No. 7772 and the like disclose the conductive magnetic particles in the elastomer in a non-uniform manner, thereby forming a large number of conductive path forming portions extending in the thickness direction and an insulating portion for insulating these from each other. An anisotropic conductive elastomer sheet is disclosed. Further, JP-A-61-250906 discloses an anisotropic conductive elastomer sheet in which a step is formed between the surface of a conductive path forming portion and an insulating portion. Have been.

[0005]

However, the anisotropic conductive sheet has conductivity in the thickness direction, but has insulating properties in the plane direction.
Depending on the use method and use environment, static electricity is generated and charged on the surface of the anisotropic conductive sheet, and various problems occur. For example, when an anisotropic conductive sheet is used for electrical inspection of a circuit device, when static electricity is generated and charged on the surface of the anisotropic conductive sheet, the attraction due to the static electricity causes the anisotropic conductive sheet to be inspected. Since a certain circuit device is stuck, it is difficult to perform the inspection work smoothly. In addition, if static electricity of a high voltage is accumulated on the surface of the anisotropic conductive sheet, it is inconvenient in terms of ensuring worker safety.
When extremely high voltage static electricity is accumulated, the static electricity is discharged, which may cause a failure in the inspection device, the anisotropic conductive sheet, or the circuit device to be inspected. For this reason, in the electrical inspection of the circuit device, the inspection work is interrupted periodically or as necessary when the generation of static electricity is observed on the surface of the anisotropic conductive sheet, and a neutralizing brush or the like is used. It is necessary to perform the charge removal operation of the anisotropic conductive sheet by using the method, and therefore, there is a problem that the inspection efficiency is reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and a first object of the present invention is to provide an anisotropic conductive material capable of preventing or suppressing the generation of static electricity on the surface. To provide a seat. A second object of the present invention is to provide a method capable of manufacturing an anisotropic conductive sheet capable of preventing or suppressing generation of static electricity on a surface and electrification.

[0007]

The anisotropically conductive sheet of the present invention comprises an anisotropically conductive sheet having conductivity in a thickness direction and a charge eliminating layer integrally provided on at least one surface of the sheet. It is characterized by comprising.

[0008] The anisotropic conductive sheet of the present invention comprises: an anisotropic conductive sheet in which a plurality of conductive portions extending in a thickness direction are arranged in a state insulated from each other by an insulating portion;
And a charge eliminating layer provided on at least one surface of the sheet member. In such an anisotropic conductive sheet, it is preferable that the charge eliminating layer is provided on an insulating portion of the sheet body. Further, a recess may be formed on at least one surface of the insulating portion of the sheet member, and a static elimination layer may be provided in the recess.

In the anisotropic conductive sheet of the present invention, it is preferable that the sheet body has conductive particles contained in a state of being aligned in the thickness direction.

In the anisotropic conductive sheet of the present invention, the charge eliminating layer may be a sheet containing a conductive organic substance. Further, as the charge removing layer, a material containing an amine-based organic conductive material can be used. Further, as the charge removing layer, a material containing a metal can be used. Further, as the charge removing layer, a material containing carbon black can be used. Further, as the charge removing layer, a layer formed of a metal layer can be used. Further, as the charge removing layer, a material in which a conductive substance is contained in a binder composed of an organic substance can be used. Further, as the charge removing layer, a material in which a conductive organic substance is contained in a thermoplastic resin can be used. In addition, a layer made of a conductive polymer can be used as the charge removing layer.

[0011] The method for producing an anisotropic conductive sheet of the present invention comprises:
Prepare a fluid static elimination layer forming composition containing a conductive substance, apply the static elimination layer forming composition to a sheet to form a coating film, and then fix the coating film. The method is characterized by including a step of forming a charge eliminating layer by performing a treatment.

[0012] The method for producing an anisotropic conductive sheet of the present invention comprises preparing a flowable composition for forming a static elimination layer comprising a conductive substance and a binder or a curable material serving as a binder. The composition for forming a static elimination layer is formed by applying the composition for forming a static elimination layer to a sheet to form a coating film, and then performing a drying treatment and / or a curing treatment on the coating film. Features.

Further, the method for producing an anisotropic conductive sheet of the present invention comprises producing a film for a static elimination layer to be a static elimination layer, and bonding the film for a static elimination layer to a sheet body.
A step of forming a charge eliminating layer.

Further, according to the method for producing an anisotropic conductive sheet of the present invention, the sheet is plated with metal.
A step of forming a charge eliminating layer made of a metal layer.

Further, according to the method for producing an anisotropic conductive sheet of the present invention, a layer to be a charge removing layer is formed on a molding surface of a mold for molding a sheet body, and then a cured layer is formed in the mold. Forming a molding material layer by injecting a sheet molding material containing conductive particles into a polymer forming material which is to be an elastic polymer material, and curing the molding material layer. Features. In such a manufacturing method, it is preferable that the molding material layer is cured while applying a magnetic field or after applying the magnetic field to the molding material layer formed in the mold.

[0016]

According to the above arrangement, since the charge eliminating layer is provided on one surface of the anisotropically conductive sheet, grounding the charge eliminating layer generates static electricity on one surface of the anisotropically conductive sheet. Charging can be prevented or suppressed.

[0017]

Embodiments of the present invention will be described below in detail. <Anisotropic conductive sheet> The anisotropic conductive sheet of the present invention comprises an anisotropic conductive sheet having conductivity in the thickness direction, and a charge eliminating layer provided on at least one surface of the sheet. Things. This static elimination layer may be formed over the entire surface of the sheet member, or may be formed in a partial region on one surface of the sheet member.

<< Sheet Body >> As the sheet body, various structures can be used as long as the sheet body is anisotropically conductive having conductivity in the thickness direction. It is possible to suitably use a material in which conductive particles are contained in a state of being oriented so as to be arranged in the thickness direction of the sheet body.

As the elastic polymer material constituting the base material of the sheet, a polymer material having a crosslinked structure is preferable. Various materials can be used as the curable polymer substance forming material that can be used to obtain the crosslinked polymer substance, and specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, and styrene- Butadiene copolymer rubber, conjugated diene rubbers such as acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof,
Styrene-butadiene-diene block copolymer rubber,
Block copolymer rubbers such as styrene-isoprene block copolymers and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer And polymer rubber. In the above, when weather resistance is required for the obtained anisotropic conductive sheet, it is preferable to use a material other than the conjugated diene rubber, and particularly, from the viewpoint of moldability and electrical characteristics, use of silicone rubber Is preferred.

The silicone rubber is preferably one obtained by crosslinking or condensing a liquid silicone rubber. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of condensation type, addition type, and those containing a vinyl group or a hydroxyl group. Good. Specifically, dimethylsilicone raw rubber, methylvinylsilicone raw rubber, methylphenylvinylsilicone raw rubber and the like can be mentioned.

Among them, liquid group-containing silicone rubber (vinyl group-containing polydimethylsiloxane)
Is usually obtained by subjecting dimethyldichlorosilane or dimethyldialkoxysilane to hydrolysis and condensation reaction in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane, for example, followed by fractionation by repeated dissolution-precipitation. Also,
The liquid silicone rubber containing vinyl groups at both ends is anionically polymerized with a cyclic siloxane such as octamethylcyclotetrasiloxane in the presence of a catalyst, and uses, for example, dimethyldivinylsiloxane as a polymerization terminator and other reaction conditions (for example, , The amount of the cyclic siloxane and the amount of the polymerization terminator). Here, as a catalyst for anionic polymerization, alkali such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a silanolate solution thereof can be used. The reaction temperature is, for example, 80 to 130 ° C. Such a vinyl group-containing polydimethylsiloxane preferably has a molecular weight Mw (weight average molecular weight in terms of standard polystyrene; the same applies hereinafter) of 10,000 to 40,000. In addition, from the viewpoint of heat resistance of the obtained conductive path element, the molecular weight distribution index (the value of the ratio Mw / Mn between the standard polystyrene-equivalent weight average molecular weight Mw and the standard polystyrene-equivalent number average molecular weight Mn; the same applies hereinafter) is 2. 0.0 or less is preferable.

On the other hand, a liquid silicone rubber containing hydroxyl groups (hydroxyl group-containing polydimethylsiloxane) is usually prepared by hydrolyzing dimethyldichlorosilane or dimethyldialkoxysilane in the presence of dimethylhydrochlorosilane or dimethylhydroalkoxysilane. And condensation reaction, for example,
It is obtained by performing fractionation by repeating precipitation.
Further, cyclic siloxane is anionically polymerized in the presence of a catalyst, and dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane is used as a polymerization terminator, and other reaction conditions (for example, the amount of the cyclic siloxane and the polymerization termination) are used. Amount of agent)
Can also be obtained by appropriately selecting Here, as a catalyst for anionic polymerization, alkali such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a silanolate solution thereof can be used. The reaction temperature is, for example, 80 to 130 ° C. Such hydroxyl group-containing polydimethylsiloxane is,
It is preferable that the molecular weight Mw is 10,000 to 40,000. Further, from the viewpoint of heat resistance of the obtained conductive path element, those having a molecular weight distribution index of 2.0 or less are preferable. In the present invention, either one of the above-mentioned vinyl group-containing polydimethylsiloxane and hydroxyl group-containing polydimethylsiloxane can be used, or both can be used in combination.

In the present invention, an appropriate curing catalyst can be used to cure the polymer-forming material. As such a curing catalyst, an organic peroxide, a fatty acid azo compound, a hydrosilylation catalyst, or the like can be used. Specific examples of the organic peroxide used as the curing catalyst include benzoyl peroxide, bisdicyclobenzoyl peroxide, dicumyl peroxide, and ditertiary butyl peroxide. Specific examples of the fatty acid azo compound used as a curing catalyst include azobisisobutyronitrile. Specific examples of the catalyst which can be used as a catalyst for the hydrosilylation reaction include chloroplatinic acid and salts thereof, a siloxane complex containing a platinum-unsaturated group, a complex of vinylsiloxane and platinum, and platinum and 1,3-divinyltetramethyldisiloxane. And a complex of triorganophosphine or phosphite with platinum, acetylacetate platinum chelate, and a complex of cyclic diene and platinum. The amount of the curing catalyst used is appropriately selected in consideration of the type of the polymer substance-forming material, the type of the curing catalyst, and other curing treatment conditions. 15 parts by weight.

Further, the base material of the sheet may contain, if necessary, an inorganic filler such as ordinary silica powder, colloidal silica, airgel silica, and alumina. By including such an inorganic filler,
The thixotropy of the molding material for obtaining the sheet body is ensured, the viscosity thereof is increased, and the dispersion stability of the conductive particles is improved, and a sheet body having high strength is obtained. The use amount of such an inorganic filler is not particularly limited, but using a large amount is not preferable because the orientation of the conductive particles cannot be sufficiently achieved by the magnetic field.

As the conductive particles contained in the base material of the sheet, conductive particles exhibiting magnetism are used from the viewpoint that they can be easily aligned in the thickness direction of the sheet by applying a magnetic field. Preferably, it is used. Specific examples of such conductive particles include nickel, iron,
Particles of metals such as cobalt or particles of these alloys or particles containing these metals, or particles containing these metals, or these particles as core particles, gold on the surface of the core particles,
Silver, palladium, plated with a metal having good conductivity such as rhodium, or inorganic particles or polymer particles such as non-magnetic metal particles or glass beads as core particles, the surface of the core particles, nickel, Examples thereof include those obtained by plating a conductive magnetic material such as cobalt, and those obtained by coating core particles with both a conductive magnetic material and a metal having good conductivity. Among them, it is preferable to use nickel particles as core particles, the surfaces of which are plated with a metal having good conductivity such as gold. Means for coating the surface of the core particles with a conductive metal is not particularly limited, but may be, for example, chemical plating or electrolytic plating.

When the conductive particles are formed by coating the surface of a core particle with a conductive metal, from the viewpoint of obtaining good conductivity, the coverage of the conductive metal on the particle surface (core particle) Is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%. Further, the coating amount of the conductive metal is 0.5 to
It is preferably 50% by weight, more preferably 1 to
The content is 30% by weight, more preferably 3 to 25% by weight, particularly preferably 4 to 20% by weight. When the conductive metal to be coated is gold, the coating amount is from 2.5 to 2.5
It is preferably 30% by weight, more preferably 3 to
It is 20% by weight, more preferably 3.5 to 15% by weight, particularly preferably 4 to 10% by weight. When the conductive metal to be coated is silver, the coating amount is preferably 3 to 50% by weight of the core particles, more preferably 4 to 40% by weight, and further preferably 5 to 30% by weight. weight%,
Particularly preferably, it is 6 to 20% by weight.

The particle diameter of the conductive particles is 1 to 100.
0 μm, more preferably 2 to 50 μm.
0 μm, more preferably 5 to 300 μm, particularly preferably 10 to 200 μm. Further, the particle size distribution (Dw / Dn) of the conductive particles is preferably 1 to 10, more preferably 1.01 to 7, further preferably 1.05 to 5, and particularly preferably 1.1 to 1. 4. By using conductive particles that satisfy such conditions,
The obtained sheet body is easily deformed under pressure, and sufficient electric contact is obtained between the conductive particles.
In addition, the shape of the conductive particles is not particularly limited. However, since the conductive particles can be easily dispersed in the polymer substance-forming material, the conductive particles have a spherical shape, a star shape, or a secondary shape in which these are aggregated. It is preferably a lump formed by particles.

The water content of the conductive particles is preferably at most 5%, more preferably at most 3%, further preferably at most 2%, particularly preferably at most 1%.
By using the conductive particles satisfying such conditions, it is possible to prevent or suppress the generation of bubbles during the curing treatment of the polymer substance forming material.

As the conductive particles, those whose surfaces have been treated with a coupling agent such as a silane coupling agent can be appropriately used. By treating the surface of the conductive particles with the coupling agent, the adhesion between the conductive particles and the elastic polymer material is increased, and as a result, the obtained sheet body has high durability in repeated use. It will be. The amount of the coupling agent used is appropriately selected within a range that does not affect the conductivity of the conductive particles. However, the coverage of the coupling agent on the surface of the conductive particles (the ratio of the coupling agent to the surface area of the conductive core particles). (The ratio of the coating area) is preferably 5% or more, more preferably 7 to 100%, more preferably 10 to 100%, particularly preferably 20 to 100%. .

In the present invention, various forms can be used as the sheet body. Specifically, the sheet body contains conductive particles throughout the substrate made of an elastic polymer material (non-uniform distribution). A plurality of conductive parts densely filled with conductive particles and extending in the thickness direction are arranged in a state where they are insulated from each other by an insulating part having no or almost no conductive particles (distributed type) And the like, in which the conductive portion is formed so as to protrude from one surface or both surfaces of the insulating portion.

Such a sheet body can be manufactured, for example, as follows. First, a sheet molding material is prepared by dispersing conductive particles exhibiting magnetism in a polymer substance forming material, and the sheet molding material is used as a sheet molding die (hereinafter, referred to as “die”). Inject into. Next, by applying a parallel magnetic field to the sheet molding material in the mold in the thickness direction, the conductive particles dispersed in the sheet molding material are oriented so as to be aligned in the thickness direction. Then, in this state, by performing a curing treatment of the sheet body molding material, a sheet body is obtained in which the conductive particles are contained in the base material made of the elastic polymer material in a state of being aligned in the thickness direction. Can be

In the above description, the curing treatment of the sheet molding material can be performed while the parallel magnetic field is applied, but can also be performed after the operation of the parallel magnetic field is stopped. The strength of the parallel magnetic field applied to the sheet molding material is preferably 200 to 10000 gauss on average. As a means for applying a parallel magnetic field, an electromagnet or a permanent magnet can be used. The permanent magnet is preferably made of alnico (Fe-Al-Ni-Co-based alloy), ferrite, or the like from the viewpoint that a parallel magnetic field strength within the above range can be obtained. The curing treatment of the sheet molding material is appropriately selected depending on the material used, but is usually performed by a heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer substance forming material constituting the sheet molding material, the time required for the movement of the conductive particles, and the like.

In the case where the target sheet member is a sheet member in which a plurality of conductive portions extending in the thickness direction are arranged in a state in which they are insulated from each other by an insulating portion, the sheet member is formed on the sheet member forming material in the surface direction. A parallel magnetic field having an intensity distribution is applied. FIG. 1 is an explanatory cross-sectional view showing a configuration of an example of a mold for applying a parallel magnetic field having an intensity distribution to a sheet molding material. This mold is configured such that an upper mold 50 and a lower mold 55 that is paired with the upper mold 50 are arranged to face each other with a frame-shaped spacer 54 interposed therebetween.
In the upper die 50, a ferromagnetic portion 52 is formed on the lower surface of the ferromagnetic substrate 51 in accordance with a pattern opposite to the arrangement pattern of the conductive portions of the target sheet member. Is formed with a non-magnetic portion 53. On the other hand, in the lower mold 55, a ferromagnetic portion 57 is formed on the upper surface of the ferromagnetic substrate 56 according to the same pattern as the arrangement pattern of the conductive portions of the target sheet body.
Other than the ferromagnetic portion 57, the non-magnetic portion 58
Are formed. The ferromagnetic substrates 51 and 56 and the ferromagnetic portion 52 in each of the upper mold 50 and the lower mold 55,
As a material constituting 57, iron, nickel, cobalt, an alloy thereof, or the like can be used. Also,
Non-magnetic part 5 in each of upper mold 50 and lower mold 55
As a material constituting 3,58, a nonmagnetic metal such as copper, a heat-resistant resin such as polyimide, or the like can be used.

In such a mold, the upper surface of the ferromagnetic substrate 51 in the upper mold 50 and the lower surface of the ferromagnetic substrate 56 in the lower mold 55 are filled with the sheet molding material injected into the mold. By disposing an electromagnet or a permanent magnet, a parallel magnetic field acts in a direction from the ferromagnetic portion 52 of the upper die 50 to the corresponding lower ferromagnetic portion 57. As a result, in the sheet molding material, the conductive particles dispersed in the sheet molding material include the ferromagnetic portion 52 of the upper mold 50 and the corresponding ferromagnetic portion 57 of the lower mold 55. And are aligned so as to line up in the thickness direction. In this state, by curing the sheet molding material, the conductive material disposed between the ferromagnetic portion 52 of the upper die 50 and the corresponding ferromagnetic portion 57 of the lower die 55 is formed. As a result, a sheet body including a conductive portion densely filled with particles and an insulating portion containing no or almost no conductive particles is obtained.

<< Electrostatic Elimination Layer >> As the material constituting the static elimination layer, a material having conductivity itself (hereinafter, also referred to as a "self-conductive substance") and a material exhibiting electrical conductivity by absorbing moisture (hereinafter, referred to as "self-conductive substance") , Also referred to as “moisture-absorbing conductive material”)
Etc. can be used. As a self-conductive substance,
In general, substances that exhibit conductivity due to metal bonding, those that cause charge transfer by the movement of surplus electrons, those that cause charge transfer by the movement of vacancies, and those that generate ions and carry the charges And a substance having a π bond along the main chain and exhibiting conductivity by the interaction thereof, and a substance which causes charge transfer by the interaction of a group in a side chain. Specifically, platinum, gold,
Metal particles containing silver, copper, nickel, cobalt, iron, aluminum, manganese, zinc, tin, lead, indium, molybdenum, niobium, tantalum, chromium, etc .; copper dioxide,
Conductive metal oxides such as zinc oxide and tin oxide; whiskers such as potassium titanate; semiconductive materials such as germanium, silicon, indium phosphorus and zinc sulfide; carbon-based materials such as carbon black and graphite; Substances that generate cations such as ammonium salts and amine compounds; aliphatic sulfonates, higher alcohol sulfates, higher alcohol ethylene oxide addition sulfates, higher alcohol phosphates, higher alcohol ethylene oxide addition phosphates Substances that produce both cations and anions, such as betaine; polyacetylene-based polymers;
Acrylic polymer, polyphenylene polymer, heterocyclic polymer, ladder polymer, network polymer,
A conductive high molecular substance such as an ionic polymer can be used. In the above, substances that generate ions may be collectively referred to as surfactants. Further, in a polymer such as a polyacetylene-based polymer, an acrylic-based polymer, a polyphenylene-based polymer, a ladder polymer, and a network polymer, the conductivity can be controlled by doping a metal ion or the like. In general, the moisture-absorbing conductive substance is preferably a substance having a large hygroscopic property, and more preferably a substance having a highly polar group such as a hydroxyl group or an ester group. Specifically, silicon compounds such as chloropolysiloxane, alkoxysilane, alkoxypolysilane, and alkoxypolysiloxane; polymer substances such as conductive urethane, polyvinyl alcohol or a copolymer thereof; higher alcohol ethylene oxide; polyethylene glycol fatty acid ester; Alcohol-based surfactants such as polyhydric alcohol fatty acid esters, polysaccharides, and the like can be used.

As such a conductive substance, as long as it can form a layer by itself, a charge eliminating layer can be constituted by itself, but a substance which is difficult to form a layer by itself is used. In this case, or when adjusting the conductivity of the charge eliminating layer to be formed, the charge eliminating layer can be formed using an appropriate binder. As such a binder,
Thermoplastic resin materials, curable resin materials, paper, adhesives, resin materials that have fluidity by dissolving them in a solvent, and the like can be used. As curable resin materials, radiation, heat,
Those that can be cured by ions, acids, and the like can be used.

The neutralization layer has a surface resistivity of 1 × 10 ¹²
Ω / □ or less, preferably 1 × 10 ⁵ to
It is preferably 1 × 10 ¹⁰ Ω / □. When the surface specific resistance exceeds 1 × 10 ¹² Ω / □, it may be difficult to sufficiently or prevent or suppress the charging of the sheet surface. On the other hand, if the surface specific resistance is too low, for example, when the charge eliminating layer is formed over the entire surface of the sheet body, required insulation in the plane direction may not be obtained.

The static elimination layer has its electric conductivity (solid volume).
1 × 10)^-7Ω^-1m ^-1That is all
Preferably, especially 1 × 10^-7~ 1 × 10^FourΩ^-1m^-1In
Preferably. Electric conductivity is 1 × 10^-7Ω^-1m^-1Not yet
If it is full, the surface of the sheet is charged sufficiently or
It may be difficult to prevent or suppress. one
On the other hand, if the electric conductivity is excessive, for example,
When formed over the entire surface of the sheet body,
In some cases, required insulation in the plane direction cannot be obtained.

The method of forming the charge eliminating layer on the sheet body can be appropriately selected according to the material constituting the charge eliminating layer. Specifically, the following methods (1) to (4) are used. Can be used. (1) A fluid composition for forming a static elimination layer containing a conductive substance (self-conducting substance and / or moisture-absorbing conductive substance) is prepared, and the composition for forming a static elimination layer is applied to a sheet. To form a coating film and then fix the coating film. (2) A method of producing a film for a charge eliminating layer to be a charge eliminating layer and bonding the film for a charge eliminating layer to a sheet body. (3) A method in which a sheet is subjected to a metal plating process such as electrolytic plating, electroless plating, sputtering, or vapor deposition. (4) A method in which a layer to be a charge eliminating layer is formed on a molding surface of a mold, and a sheet body is manufactured in the mold.

In the above method (1), an appropriate solvent can be used to impart fluidity to the composition for forming a charge eliminating layer or to adjust fluidity of the composition for forming a charge removing layer. .

As a method of applying the composition for forming a charge eliminating layer to the surface of the sheet body, a spray method, a brush method, a dipping method, a method of coating as an LB film, a roll coating method, and a blade (squeegee) are applied. Methods and the like can be used.

The fixing treatment of the coating film composed of the composition for forming a charge eliminating layer is selected according to the type of components constituting the composition for forming a charge eliminating layer. Specifically, as the composition for forming a static elimination layer, a composition in which a conductive substance capable of forming a layer is contained in a solvent, or a composition in which a conductive substance and a binder are contained in a solvent When used, the coating of the composition for forming a static elimination layer is fixed by drying treatment to form a static elimination layer. When a composition containing a conductive material and a curable material serving as a binder is used as the composition for forming the charge removing layer, the coating film of the composition for forming the charge removing layer may be cured. Or by being fixed by being cured after being subjected to a drying treatment, a charge eliminating layer is formed. As the composition for forming a static elimination layer as described above, those commercially available as “antistatic agent” or “conductive paint” can be used.

In the above method (1), when a charge eliminating layer is formed in a partial area on the surface of the sheet, a resist or tape is formed on the area where the charge eliminating layer is not formed on the surface of the sheet. After forming a mask by using the method, a method for removing the mask after forming the charge eliminating layer using the composition for forming a charge eliminating layer can be adopted.

In the method (2), as a means for bonding the charge eliminating layer film to the sheet, a means by thermocompression bonding or a means using an appropriate adhesive can be adopted. In addition, as the film for the charge removing layer, those which are generally commercially available as “antistatic film (sheet)”,
Metal foil can be used. In the above method (3), in the case where a charge eliminating layer is formed in a part of the surface of the sheet, a mask is formed with a resist or a tape in a region where the charge eliminating layer is not formed on the surface of the sheet. Then, after forming a charge removing layer by plating, a method of removing the mask, a metal layer is formed on the surface of the sheet body by plating, and the metal layer is subjected to photolithography and etching. A method of removing a part thereof can be used. In the method (4), the methods (1) to (3) can be applied as a method for forming a layer to be a charge removing layer on the molding surface of the mold.

<< Structure of Anisotropic Conductive Sheet >> The specific structure of the anisotropic conductive sheet of the present invention is not particularly limited as long as it has the above-mentioned sheet and the charge eliminating layer. , Various structures can be adopted. Hereinafter, specific structural examples of the anisotropic conductive sheet of the present invention will be described.

[Structure Example 1] FIG. 2 is a cross-sectional view for explaining the anisotropic conductive sheet according to Structure Example 1. The anisotropic conductive sheet 10 includes a sheet member 20 and a charge eliminating layer 30 provided on one surface (the upper surface in FIG. 1) of the sheet member 20 so as to cover a region other than its periphery. The sheet member 20 in this example includes a plurality of conductive portions 21 extending in the thickness direction, and an insulating portion 22 that insulates the conductive portions 21 from each other. Each of the conductive portions 21 is densely filled with conductive particles oriented in the thickness direction of the sheet member 20 and these conductive portions 21 are arranged along the surface direction of the sheet member 20. The electrodes to be connected, for example, are arranged according to the pattern corresponding to the pattern of the electrode to be inspected of the circuit device to be inspected.
In the sheet body 20 having such a configuration, the conductive particles are preferably 10 to 60% by volume in the conductive portion 21.
More preferably, the content is preferably 20 to 50%. If this ratio is less than 10%, the conductive portion 21 having a sufficiently small electric resistance may not be obtained. On the other hand, when this ratio exceeds 60%, the obtained conductive portion 21 tends to be fragile, and the elasticity required for the conductive portion may not be obtained in some cases.

In such an anisotropic conductive sheet 10, since the adjacent conductive portions 21 are connected by the charge eliminating layer 30, the surface resistivity of the charge eliminating layer 30 is 1
It is preferably from × 10 ⁵ to 1 × 10 ¹¹ Ω / □, and more preferably from 1 × 10 ⁷ to 1 × 10 ⁹ Ω / □.
When the surface resistivity is less than 1 × 10 ⁵ Ω / □,
In some cases, required insulation between adjacent conductive portions cannot be obtained. On the other hand, when the surface specific resistance exceeds 1 × 10 ¹¹ Ω / □, it may be difficult to sufficiently or prevent or suppress the charging of the sheet surface. For the same reason, the electric conductivity of the charge eliminating layer 30 is, for example, 1 × 10 ⁻³ or less when the thickness of the charge eliminating layer 30 is 0.1 mm.
It is preferably 1 × 10 ⁻⁵ Ω ⁻¹ m ⁻¹ .

[Structure Example 2] FIG. 3 is a cross-sectional view for explaining an anisotropic conductive sheet according to Structure Example 2. The anisotropic conductive sheet 10 includes a plurality of conductive portions 21 densely filled with conductive particles, each of which extends in the thickness direction.
And a high-density conductive region 21A, 2 in which conductive portions 21 are arranged at a high pitch with a small pitch.
1B and 21C are formed. On one surface of the sheet member 20, there is provided a charge removing layer 30 having an opening 31 formed therein. The opening 31 of the charge removing layer 30 allows the high-density conductive region 21 </ b> A, 21 </ b> B,
21C is exposed.

In such an anisotropic conductive sheet 10, the periphery of the conductive portion 21 on one surface of the sheet body 20 is
The distance d from the opening edge of the charge removing layer 30 is preferably 10 mm or less, more preferably 5 mm or less, and particularly preferably 0.5 to 3 mm. This separation distance d is 1
If it exceeds 0 mm, the area between the peripheral edge of the conductive portion 21 on one surface of the sheet member 20 and the opening edge of the charge removing layer 30 is likely to be charged. On the other hand, if the separation distance is too small, required insulation in the plane direction may not be obtained depending on the material and thickness of the charge removing layer 30. For the same reason, the adjacent conductive portions 21 in the high-density conductive portion regions 21A, 21B, and 21C of the sheet body 20 are formed.
The separation distance D between them is 3 mm or less, especially 0.1 to
It is preferably 1 mm.

The thickness of the charge removing layer 30 is preferably 100 μm or less, more preferably 50 μm or less. When the thickness exceeds 100 μm, for example, the electrical connection between the electrode to be inspected of the circuit device to be inspected and the conductive portion 21 of the sheet body 20 is reliably achieved by the charge removing layer 30 serving as an obstacle. Can be difficult.

[Structure Example 3] FIG. 4 is a cross-sectional view for explaining an anisotropic conductive sheet according to Structure Example 3. The anisotropic conductive sheet 10 includes a plurality of conductive portions 21 densely filled with conductive particles, each of which extends in the thickness direction.
A sheet body 20 including an insulating part 22 for mutually insulating each other. On one surface of the sheet body 20, there is provided a charge eliminating layer 30 in which an opening 31 is formed in accordance with a pattern corresponding to the pattern of the conductive part 21. The conductive portions 21 of the sheet body 20 are exposed by the respective openings 31 of the charge removing layer 30.

In such an anisotropic conductive sheet 10, like the anisotropic conductive sheet according to Structural Example 2 described above,
The distance d between the peripheral edge of the conductive portion 21 on one surface of the sheet member 20 and the opening edge of the charge eliminating layer 30 is 5 mm or less, and particularly, 0.
It is preferably from 5 to 2 mm. When the charge removing layer 30 is provided between the adjacent conductive portions 21, the sheet 20
Is a separation distance D between the adjacent conductive portions 21.
It is preferably at least 2 mm, more preferably 3 mm
mm or more, particularly preferably 5 mm or more. If the distance D is less than 2 mm, the distance between the adjacent conductive portions 2
In some cases, it may be difficult to form the charge removing layer 30 in the region between the two.

[Structure Example 4] FIG. 5 is a cross-sectional view for explaining an anisotropic conductive sheet according to Structure Example 4. The anisotropic conductive sheet 10 includes a plurality of conductive portions 21 densely filled with conductive particles, each of which extends in the thickness direction.
And a high-density conductive region 21A, 2 in which conductive portions 21 are arranged at a high pitch with a small pitch.
1B and 21C are formed. Then, on one surface of the sheet member 20, high-density conductive portion regions 21A, 21B, 2
The recess 23 is formed in a region other than 1C, and the charge removing layer 30 is provided in the recess 23.

[Structural Example 5] FIG. 6 is a sectional view for explaining an anisotropic conductive sheet according to Structural Example 5, and FIG. 7 is a plan view of the anisotropic conductive sheet. This anisotropic conductive sheet 10
Has a sheet body 20 including a plurality of conductive portions 21 densely filled with conductive particles, each extending in the thickness direction, and an insulating portion 22 that insulates the conductive portions 21 from each other;
In the sheet body 20, the high-density conductive part regions 21A, 21B, in which the conductive parts 21 are arranged at a high pitch and a small pitch, are provided.
21C are formed. The high-density conductive region 21
In B, as shown in FIG. 7, the conductive portions 21 are arranged in a rectangular frame shape. On one surface of the sheet body 20, there is provided a high conductive static elimination layer 35 in which an opening 36 is formed on the high-density conductive portion regions 21A, 21B, 21C, and the conductive portion 21 is formed in a rectangular frame shape. On the arranged high-density conductive portion region 21B, a low-conductivity neutralization layer 37 is provided so as to close the opening 36 of the high-conductivity neutralization layer 35.

In the above anisotropic conductive sheet 10,
The conductive static elimination layer 35 has a thickness of, for example, 0.1 mm.
When the surface resistivity is 1 × 10⁸Ω / □ or less,
Electric conductivity is 1 × 10^-FourΩ^-1m^-1Preferably more than
In particular, the surface resistivity is 1 × 10^Five~ 1 × 10⁷Ω
/ □, electric conductivity is 1 × 10^-1~ 1 × 10^-3Ω^-1m ^-1
It is preferred that Further, the low-conductive static elimination layer 37 is
For example, when the thickness is 0.1 mm,
Resistance is 1 × 10⁸~ 1 × 10¹²Ω / □, electrical conductivity
1 × 10^-Four~ 1 × 10^-8Ω^-1m^-1Preferably more than
In particular, the surface resistivity is 2.5 × 10⁹~ 2.5 ×
10¹¹Ω / □, electric conductivity 1 × 10^-Five~ 1 × 10^-7
Ω^-1m^-1It is preferred that

According to such an anisotropic conductive sheet 10, the high-density conductive area 21 on one surface of the sheet body 20.
In regions other than A, 21B, and 21C, a highly conductive neutralization layer 3 is provided.
5, the charging can be prevented or suppressed with high efficiency. Moreover, in a region surrounded by the high-density conductive portion region 21B in which the conductive portion 21 is arranged in a frame shape (hereinafter, referred to as an "independent region"), the highly conductive static elimination formed on the independent region The layer 35 is formed of the low-conductivity neutralization layer 37 formed on the high-density conductive region 21B.
Is connected to the highly conductive charge eliminating layer 35 formed in the region other than the independent region, so that charging can be reliably prevented or suppressed.

[Structural Example 6] FIG. 8 is a sectional view for explaining an anisotropic conductive sheet according to Structural Example 6. The anisotropic conductive sheet 10 includes a plurality of conductive portions 21 densely filled with conductive particles, each of which extends in the thickness direction.
And a high-density conductive region 21A, 2 in which conductive portions 21 are arranged at a high pitch with a small pitch.
1B and 21C are formed. Further, in this example, each of the conductive portions 21 of the sheet body 10 is formed so as to protrude from both surfaces of the insulating portion 22. On one surface of the sheet member 20, there is provided a charge eliminating layer 30 in which an opening 31 is formed. The opening 31 of the charge eliminating layer 30 allows the high-density conductive area 21 </ b> A,
21B and 21C are exposed. In such an anisotropic conductive sheet 10, the protruding height of the conductive portion 21 of the sheet body 20 is preferably larger than the thickness of the charge removing layer 30, and particularly preferably 2 to 10 times the thickness of the charge removing layer 30. Is preferred.

[Structural Example 7] FIG. 9 is a cross-sectional view for explaining the anisotropic conductive sheet according to the structural example 7. In the anisotropic conductive sheet 10, the sheet base 20 is configured to contain conductive particles in a state of being aligned in the thickness direction over the entire substrate made of the elastic polymer material. Is pressed in the thickness direction at an arbitrary point in the above, a conductive path is formed by the conductive particles at the pressed point. In the sheet body 20 having such a configuration, it is preferable that the conductive particles be contained in the base material at a volume fraction of 3 to 50%, preferably 5 to 30%. If this ratio is less than 3%, it may be difficult to form a conductive path having a sufficiently small electric resistance value. On the other hand, this ratio is 50%
In the case where the ratio exceeds the above range, the obtained sheet body 20 may be fragile or may exhibit conductivity also in the surface direction and may not exhibit the required anisotropic conductivity. Then, on one surface of the sheet body 20, a charge eliminating layer 30 is provided so as to cover the entire surface of the one surface.

In such an anisotropic conductive sheet 10,
Means that the surface resistivity of the charge eliminating layer 30 is 1 × 10⁶~ 1 × 10
¹¹Ω / □, more preferably 1 ×
10 ⁸~ 1 × 10^TenΩ / □. 1 × surface resistivity
10⁶If less than Ω / □, required in the plane direction
May not be obtained. On the other hand, the surface resistivity
Is 1 × 10¹¹If it exceeds Ω / □, the sheet surface
It is difficult to sufficiently or prevent or suppress electrification.
Sometimes. For the same reason, the charge removal layer 30
The electric conductivity is, for example, the thickness of the static elimination layer 30 is 0.1 mm.
Sometimes 1 × 10^-Four~ 1 × 10^-6Ω^-1m^-1Being
Is preferred.

<< Method of Using Anisotropic Conductive Sheet >> The anisotropic conductive sheet of the present invention can be suitably used for electrical inspection of a circuit device. Hereinafter, a case where an electrical inspection of a circuit device is performed using the anisotropic conductive sheet 10 according to the above-described structural example 2 will be described. In the electrical inspection of a circuit device, as shown in FIG. 10, an electrode 2 to be inspected of a circuit device to be inspected (hereinafter also referred to as a “circuit device to be inspected”) 1.
Having a connection electrode 41 arranged on the surface in accordance with a pattern opposite to the pattern, and electrically connected to the connection electrode 41 via a wiring portion 43, for example, a pitch of 2.54 mm, 1.8.
A connector plate 40 having terminal electrodes 42 arranged on the back surface according to a grid point arrangement of 0 mm or 1.27 mm is prepared. Then, on the surface of the connector plate 40, the anisotropic conductive sheet 10 is arranged so that the conductive portion 21 of the sheet body 20 is positioned on the connection electrode 41,
On the anisotropic conductive sheet 10, the circuit device 1 to be inspected is
The electrode to be inspected 2 is arranged so as to be located on the conductive portion 21 of the sheet body 20 in the anisotropic conductive sheet 10. Here, the anisotropic conductive sheet 10 is arranged so that the charge removing layer 30 is on the circuit device 2 side, and the charge removing layer 30 is grounded by an appropriate means.

Then, for example, by moving the connector plate 40 in a direction approaching the circuit device 1 to be inspected, the anisotropic conductive sheet 10 is pressed by the circuit device 1 to be inspected and the connector plate 40, Due to this pressing force, a conductive path extending in the thickness direction is formed in the conductive portion 21 of the sheet body 20 of the anisotropic conductive sheet 10, and as a result, the connection between the electrode 2 to be inspected of the circuit device 1 to be inspected and the connector plate 40 Electrical connection with the electrode 41 is achieved,
In this state, required electrical inspection is performed. Then, after the electrical test of the circuit device under test 1 is completed, the circuit device under test 1 is replaced with another circuit device under test, and the same operation as described above is repeated on the circuit device under test 1. Performs an electrical test.

According to the anisotropic conductive sheet 10 of the present invention,
Since the static elimination layer 30 is provided on one surface of the sheet member 20, grounding the static elimination layer 30 can prevent or suppress static electricity from being generated and charged on one surface of the anisotropic conductive sheet. Therefore, when the anisotropic conductive sheet of the present invention is used for electrical inspection of a circuit device such as a printed circuit board or a semiconductor integrated circuit, the inspection operation should be interrupted and the anisotropic conductive sheet should be discharged. Is unnecessary, and the electrical inspection of the circuit device can be performed with high time efficiency.

The anisotropic conductive sheet of the present invention is not limited to the above embodiment, but can be modified in various ways. For example, in the above-described structural examples 1 to 7, the charge removing layer 30 may be provided on both surfaces of the sheet body 20. Further, the sheet body 20 may be provided with a plurality of charge eliminating layers 30 laminated. Further, as shown in FIG. 11, the anisotropic conductive sheet 10 may be provided integrally on the surface of a connector plate 40 used for electrical inspection of a circuit device, for example.

[0064]

〔Base material〕

Addition type silicone rubber [Conductive particles] Nickel particles having an average particle diameter of 40 μm are plated with gold.

Example 1 A composition for forming a static elimination layer was applied to one surface of a sheet by a brush coating method and dried to form a static elimination layer having a thickness of 10 μm. Was manufactured. In the above, an antistatic agent containing a nonionic surfactant was used as the composition for forming the charge eliminating layer. In addition, the surface resistivity of the formed static eliminating layer was measured, and the electrical resistance between adjacent conductive portions in the sheet was measured. The measurement results are shown in Table 1 below.

Example 2 As a composition for forming a charge eliminating layer,
Except that an antistatic agent containing a siloxane-based compound was used, a charge removing layer having a thickness of 10 μm was formed on one surface of the sheet body in the same manner as in Example 1; A conductive sheet was manufactured. Table 1 below shows the surface specific resistance of the formed charge eliminating layer and the electric resistance between adjacent conductive portions in the sheet member.

Example 3 As a composition for forming a charge eliminating layer,
Except that an antistatic agent containing an acrylic conductive polymer was used, a static elimination layer having a thickness of 10 μm was formed on one surface of the sheet body in the same manner as in Example 1; An anisotropic conductive sheet was manufactured. Table 1 below shows the surface specific resistance of the formed charge eliminating layer and the electric resistance between adjacent conductive portions in the sheet member.

Example 4 As a composition for forming a charge eliminating layer,
Except that an antistatic agent containing a conductive metal oxide was used, a charge eliminating layer having a thickness of 10 μm was formed on one surface of the sheet body in the same manner as in Example 1; An anisotropic conductive sheet was manufactured. Table 1 below shows the surface specific resistance of the formed charge eliminating layer and the electric resistance between adjacent conductive portions in the sheet member.

Example 5 As a composition for forming a charge eliminating layer,
Except that an antistatic agent containing an amine compound was used, a charge removing layer having a thickness of 10 μm was formed on one surface of the sheet body in the same manner as in Example 1; A conductive sheet was manufactured. Table 1 below shows the surface specific resistance of the formed static elimination layer and the electric resistance between adjacent conductive portions in the sheet member.

Test Example 1 Each of the anisotropic conductive sheets according to Examples 1 to 5 was placed on a glass fiber reinforced epoxy substrate (dimensions: 14 cm × 14 cm × 1 mm) with the charge removing layer facing upward. An aluminum plate that was fixed and grounded with the anisotropic conductive sheet facing up (dimensions: 30 cm × 30 c
mx 2 mm). Then, under conditions of a temperature of 28 ° C. and a relative humidity of about 50%, a copper-clad glass fiber reinforced epoxy substrate (10 cm
× 10 cm × 0.5 mm), the anisotropic conductive sheet was pressed under a load of 130 kgf for 2 seconds, and this operation was performed 200 times in total. Then, the surface potential of the anisotropic conductive sheet was measured after 50 seconds and 300 seconds after the above test was completed. Also,
As a comparative example, a test similar to the above was performed on a sheet body on which the charge eliminating layer was not formed. Table 1 shows the test results
Shown in

[0071]

[Table 1]

As is clear from the results in Table 1, Example 1
According to the anisotropic conductive sheets according to Nos. To 5, the values of the surface potentials after 50 seconds and 300 seconds have passed since the end of the test are all small, and it is ensured that static electricity is generated and charged on the surface. It was confirmed that it was suppressed. On the other hand, in the comparative example, 50
The value of the surface potential was large both after a lapse of seconds and after a lapse of 300 seconds, and static electricity was generated on the surface and the surface was charged.

Example 6 A charge eliminating layer having a thickness of 70 μm comprising polyethylene resin and containing carbon black was adhered to the surface of the sheet body by pressure bonding to form a charge eliminating layer. An anisotropic conductive sheet according to Structural Example 2 was manufactured. Table 2 below shows the surface specific resistance of the formed neutralization layer and the electric resistance between adjacent conductive portions in the sheet member.

Example 7 A charge removing layer was formed in the same manner as in Example 6 except that a film for a charge removing layer having a thickness of 100 μm containing organic conductive fibers in a base material made of paper was used. Then, the anisotropic conductive sheet according to Structural Example 2 was manufactured. Table 2 below shows the surface specific resistance of the formed neutralization layer and the electric resistance between adjacent conductive portions in the sheet member.

Test Example 2 Each of the anisotropic conductive sheets according to Examples 6 to 7 was placed on a glass fiber reinforced epoxy substrate (size: 14 cm × 14 cm × 1 mm) with the charge removing layer facing upward. An aluminum plate that was fixed and grounded with the anisotropic conductive sheet facing up (dimensions: 30 cm × 30 c
mx 2 mm). Next, under conditions of a temperature of 27 ° C. and a relative humidity of about 27%, a copper-clad glass fiber reinforced epoxy substrate (10 cm
× 10 cm × 0.5 mm), the anisotropic conductive sheet was pressed under a load of 130 kgf for 2 seconds, and this operation was performed 50 times in total. Then, the surface potential of the anisotropic conductive sheet immediately after the end of the above test was measured. Further, as a comparative example, a test similar to the above was performed on a sheet body on which the charge eliminating layer was not formed. Table 2 shows the test results.

[0076]

[Table 2]

As is clear from the results in Table 2, Example 6
According to the anisotropic conductive sheets according to Nos. To 7, the value of the surface potential immediately after the end of the test was small, and it was confirmed that static electricity generated on the surface was suppressed from being charged. On the other hand, in the comparative example, the value of the surface potential immediately after the end of the test was large, and the surface was charged by generating static electricity.

[0078]

According to the anisotropic conductive sheet of the present invention, since the static elimination layer is provided on one surface of the sheet member, by grounding the static elimination layer, static electricity is generated on one surface of the anisotropic conductive sheet. The resulting charging can be prevented or suppressed. Therefore, when the anisotropic conductive sheet of the present invention is used for electrical inspection of a circuit device such as a printed circuit board or a semiconductor integrated circuit, the inspection operation should be interrupted and the anisotropic conductive sheet should be discharged. Is unnecessary, and the electrical inspection of the circuit device can be performed with high time efficiency.

According to the method for producing an anisotropic conductive sheet of the present invention, it is possible to easily produce an anisotropic conductive sheet capable of preventing or suppressing the generation of static electricity on one side and the electrification.

[Brief description of the drawings]

FIG. 1 is an explanatory cross-sectional view showing a configuration of an example of a mold used for manufacturing a sheet body of an anisotropic conductive sheet of the present invention.

FIG. 2 is an explanatory cross-sectional view showing an anisotropic conductive sheet according to Structural Example 1.

FIG. 3 is an explanatory sectional view showing an anisotropic conductive sheet according to Structural Example 2.

FIG. 4 is an explanatory sectional view showing an anisotropic conductive sheet according to a structural example 3;

FIG. 5 is an explanatory sectional view showing an anisotropic conductive sheet according to Structural Example 4.

FIG. 6 is an explanatory sectional view showing an anisotropic conductive sheet according to Structural Example 5.

FIG. 7 is a plan view showing an anisotropic conductive sheet according to Structural Example 5.

FIG. 8 is an explanatory sectional view showing an anisotropic conductive sheet according to Structural Example 6.

FIG. 9 is an explanatory sectional view showing an anisotropic conductive sheet according to Structural Example 7;

FIG. 10 is an explanatory diagram showing a state in which the anisotropic conductive sheet according to Structural Example 1 is interposed between a circuit device to be inspected and a connector plate.

FIG. 11 is an explanatory sectional view showing an example of an anisotropic conductive sheet provided integrally on the surface of a connector plate.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 circuit device 2 electrode to be inspected 10 anisotropic conductive sheet 20 sheet body 21 conductive portion 21 A, 21 B, 21 C high-density conductive portion region 22 insulating portion 23 recess 30 static elimination layer 31 opening 35 high conductivity static elimination layer 36 opening 37 low Conductive neutralization layer 40 Connector plate 41 Connecting electrode 42 Terminal electrode 43 Wiring part 50 Upper die 51 Ferromagnetic substrate 52 Ferromagnetic part 53 Non-magnetic part 54 Spacer 55 Lower die 56 Ferromagnetic substrate 57 Ferromagnetic part 58 Non-magnetic part

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (Reference) G01R 31/26 G01R 31/26 J

Claims (19)

[Claims] 1. An anisotropically conductive sheet comprising: an anisotropically conductive sheet having conductivity in a thickness direction; and a charge removing layer integrally provided on at least one surface of the sheet. Sheet. 2. An anisotropic conductive sheet body in which a plurality of conductive parts extending in a thickness direction are arranged in a state of being mutually insulated by an insulating part, and provided on at least one surface of the insulating part in the sheet body. An anisotropic conductive sheet comprising a charge eliminating layer. 3. The anisotropically conductive sheet according to claim 2, wherein the charge removing layer is provided on an insulating portion of the sheet member. 4. The anisotropic conductive material according to claim 2, wherein a concave portion is formed on at least one surface of the insulating portion of the sheet member, and a static elimination layer is provided in the concave portion. Sheet. 5. The anisotropic conductive sheet according to claim 1, wherein the sheet body has conductive particles contained in a state oriented so as to be aligned in a thickness direction thereof. . 6. The anisotropic conductive sheet according to claim 1, wherein the charge eliminating layer contains a conductive organic substance. 7. The anisotropic conductive sheet according to claim 1, wherein the charge removing layer contains an amine-based organic conductive substance. 8. The anisotropically conductive sheet according to claim 1, wherein the charge removing layer contains a metal. 9. The anisotropically conductive sheet according to claim 1, wherein the charge eliminating layer contains carbon black. 10. The anisotropically conductive sheet according to claim 1, wherein the charge removing layer is made of a metal layer. 11. The anisotropically conductive sheet according to claim 1, wherein the static elimination layer contains a conductive substance in a binder made of an organic substance. 12. The anisotropically conductive sheet according to claim 1, wherein the static elimination layer contains a conductive organic substance in a thermoplastic resin. 13. The anisotropic conductive sheet according to claim 1, wherein the charge removing layer is made of a conductive polymer. 14. The method for producing an anisotropically conductive sheet according to claim 1, wherein the composition for forming a fluid neutralization layer containing a conductive substance is applied to a sheet body. A method for producing an anisotropic conductive sheet, comprising a step of forming a film and then performing a fixing treatment on the coating film to form a charge eliminating layer. 15. The method for producing an anisotropic conductive sheet according to claim 1, wherein the method comprises forming a flowable charge eliminating layer containing a conductive substance and a binder or a curable material serving as a binder. Applying a composition to a sheet to form a coating film, and then subjecting the coating film to a drying treatment and / or a curing treatment to form a charge eliminating layer. A method for producing a conductive sheet. 16. The method for producing an anisotropically conductive sheet according to claim 1, wherein a step of forming a charge eliminating layer by bonding a film for a charge eliminating layer to be a charge eliminating layer to a sheet body. A method for producing an anisotropic conductive sheet, comprising: 17. The method for producing an anisotropic conductive sheet according to claim 1, comprising a step of forming a charge eliminating layer made of a metal layer by plating the sheet body with a metal. A method for producing an anisotropic conductive sheet. 18. A method for producing an anisotropic conductive sheet according to claim 1, wherein a layer to be a charge removing layer is formed on a molding surface of a mold for molding a sheet body. Into a mold, a sheet forming material containing conductive particles in a polymer forming material which is cured to become an elastic polymer substance is injected to form a forming material layer, and the forming material layer is subjected to a curing treatment. A method for producing an anisotropic conductive sheet, comprising: 19. The method according to claim 18, wherein the molding material layer is cured while applying a magnetic field to the molding material layer formed in the mold or after applying the magnetic field.
3. The method for producing an anisotropic conductive sheet according to item 1.