WO2008015967A1

WO2008015967A1 - Composite conductive sheet, method for manufacturing the same and application of the same

Info

Publication number: WO2008015967A1
Application number: PCT/JP2007/064741
Authority: WO
Inventors: Kiyoshi Kimura; Sugiro Shimoda; Fujio Hara
Original assignee: Jsr Corporation
Priority date: 2006-07-31
Filing date: 2007-07-27
Publication date: 2008-02-07
Also published as: TW200807815A

Abstract

Provided is a composite conductive sheet, which has a rigid conductor movable in the thickness direction of an insulating sheet and is easy to handle even by itself without having the rigid conductor dropped. A method for manufacturing such composite conductive sheet, an anisotropic conductive connector, an adaptor apparatus and an electrical inspection apparatus for circuit devices, which are provided with the composite conductive sheet, are also provided. The composite conductive sheet is provided with a spacer sheet having a plurality of through holes, two cover sheets integrally laminated on the both surfaces of the spacer sheet, and the rigid conductor arranged in the through hole of the spacer sheet. On the cover sheet, through holes having a diameter smaller than that of the through holes of the spacer sheet are formed corresponding to the through holes of the spacer sheet. The rigid conductor is composed of a flange section, which is positioned in the through hole of the spacer sheet and has a diameter lager than that of the through hole of the cover sheet, and terminal sections, which are formed at the both ends of the flange section by being inserted into the through holes of the cover sheet. The rigid conductor is permitted to move in the thickness direction of the spacer sheet.

Description

Specification

Composite conductive sheet, its production method and its application

Technical field

The present invention relates to a composite conductive sheet that can be suitably used for electrical inspection of wafers on which circuit devices such as printed circuit boards and ICs and integrated circuits are formed, a method for manufacturing the same, and an application thereof. is there.

Background art

[0002] Generally, circuit boards for configuring or mounting electronic components such as package LSIs such as BGA and CSP (chip scale package), MCM, and other integrated circuit devices have wiring patterns of It is necessary to inspect its electrical characteristics to confirm that it has the expected performance.

Conventionally, as a method of performing an electrical inspection of a circuit board, an inspection electrode device in which a plurality of inspection electrodes are arranged according to the grid point positions arranged in the vertical and horizontal directions, and the inspection electrode of this inspection electrode device are inspection targets. It is known how to use it in combination with an adapter that electrically connects the electrodes to be inspected on the circuit board! The adapter used in this method is a printed wiring board called a pitch conversion board.

This adapter has a plurality of connection electrodes arranged on one side according to a pattern corresponding to the electrodes to be inspected on the circuit board to be inspected, and has the same pitch as the inspection electrodes of the inspection electrode device on the other side. Those having a plurality of terminal electrodes arranged at the positions of the lattice points are known.

Therefore, in the electrical inspection of a circuit board, generally, in order to achieve a stable electrical connection between the circuit board to be inspected and the adapter, the circuit board to be inspected and the adapter are It is expected to use an anisotropic conductive elastomer sheet as a connector.

[0003] This anisotropically conductive elastomer sheet has conductivity only in the thickness direction, or a number of pressure-conductive conductive portions that show conductivity only in the thickness direction when pressed. It has something. As such an anisotropically conductive elastomer sheet, those having various structures are conventionally known. For example, in Patent Document 1, conductive particles exhibiting magnetism are arranged in the thickness direction in an elastic polymer material. An anisotropic conductive elastomer sheet (hereinafter referred to as a “dispersion type anisotropic conductive sheet”), which is formed in such a state that the chain is formed in such a manner that the chain is formed in such a manner that the chain is dispersed in the plane direction. Patent Document 2 discloses a number of conductive path forming portions extending in the thickness direction by non-uniformly dispersing conductive particles exhibiting magnetism in an elastic polymer material, and these. An anisotropic conductive elastomer sheet (hereinafter referred to as an “unevenly anisotropic conductive sheet”) formed by insulating portions that insulate each other is disclosed. Patent Document 3 discloses a conductive path. A step between the surface of the forming portion and the insulating portion There uneven distribution type anisotropic conductive sheet is formed is disclosed! /, Ru.

And comparing the dispersion type anisotropic conductive sheet and the uneven distribution type anisotropic conductive sheet, the dispersion type anisotropic conductive sheet can be manufactured at a low cost without using a special and expensive mold. It can be used regardless of the pattern of electrodes to be connected, and is versatile, which is advantageous compared to an unevenly distributed anisotropic conductive sheet. However, the dispersed anisotropic conductive sheet is applied to each of the electrodes in a state where necessary insulation is ensured between the adjacent electrodes, even for a connection object having a small separation distance between the adjacent electrodes. However, it is disadvantageous compared to the unevenly distributed anisotropic conductive sheet in terms of the ability to achieve electrical connection, that is, low resolution.

Thus, in order to improve the resolution of the dispersed anisotropic conductive sheet, it is important to reduce the thickness of the distributed anisotropic conductive sheet.

However, the anisotropic conductive elastomer sheet having a small thickness absorbs the variation in the height level of each electrode to be connected, and can achieve electrical connection to each of the electrodes, that is, unevenness. There is a problem that absorption capacity is low. Specifically, the unevenness absorption capacity of the anisotropic conductive elastomer sheet is about 20% of the thickness of the anisotropic conductive elastomer sheet. For example, in the anisotropic conductive elastomer sheet having a thickness of 100 m, The force that can achieve a stable electrical connection even with a connection object with an electrode height level variation of about 20 m. In an anisotropic conductive elastomer sheet with a thickness of 50 m, Height level variation exceeds 10 m It is difficult to achieve a stable electrical connection for the connection object.

[0005] In order to solve such problems, a tapered movable conductor adapted to the through hole can move in the thickness direction with respect to the insulating sheet in the tapered through hole formed in the insulating sheet. A composite conductive sheet (consisting of a movable conductor made of metal and an insulating resin sheet) and two anisotropic conductive elastomer sheets disposed on one side and the other side of the composite conductive sheet, respectively. An anisotropic conductive connector has been proposed! /, (For example, see Patent Document 4).

According to the anisotropic conductive connector having such a composite conductive sheet, since the movable electrode in the composite conductive sheet is movable in the thickness direction, when the pressure is applied in the thickness direction, the composite conductive sheet Since the two anisotropically conductive elastomer sheets placed on one side and the other side of each other are compressed and deformed in conjunction with each other, the sum of the concave and convex absorbent capacity of the two is the uneven conductive capacity of the anisotropic conductive connector. Therefore, high unevenness absorbing ability can be obtained.

In addition, the thickness required to obtain the required unevenness absorption capacity is as small as each anisotropically conductive elastomer sheet, as long as it is ensured by the total thickness of two anisotropically conductive elastomer sheets. High resolution can be obtained.

[0006] However, the above anisotropic conductive connector has the following problems in practice.

In the above anisotropic conductive connector, the movable conductor of the composite conductive sheet is supported by both the insulating sheet and the anisotropic conductive elastomer sheet, and the composite conductive sheet and the anisotropic conductive elastomer When the sheet is separated, the movable conductor may fall off the insulating sheet, so it is practically difficult to handle the composite conductive sheet alone. Therefore, when a failure occurs in either the composite conductive sheet or the anisotropic conductive elastomer sheet in the anisotropic conductive connector, only the composite conductive sheet or the anisotropic conductive elastomer sheet is replaced with a new one. The entire anisotropically conductive connector must be replaced with a new one. Further, the movable conductor of the composite conductive sheet has a tapered through-hole formed on the insulating sheet. It is obtained by depositing metal in the through-holes to form a metal body by mechanically pressing the metal body and separating the metal body adhered to the inner surface of the through hole by mechanically pressing the metal body. . However, when manufacturing an anisotropically conductive connector having a large number of movable conductors, it is difficult to reliably separate all metal bodies formed on the insulating sheet from the inner surface of the insulating sheet. A malfunction occurs in the function of some movable conductors.

[0007] Patent Document 1: Japanese Patent Laid-Open No. 51-93393

Patent Document 2: Japanese Patent Laid-Open No. 53-147772

Patent Document 3: Japanese Patent Application Laid-Open No. 61-250906

Patent Document 4: Japanese Patent Laid-Open No. 2001-351702

Disclosure of the invention

[0008] The present invention has been made based on the circumstances as described above, and a first object thereof is to have a rigid conductor that can move in the thickness direction, and the rigid conductor does not fall off. Therefore, the object is to provide a composite conductive sheet that can be easily handled alone.

The second object of the present invention is to secure the necessary insulation between the adjacent electrodes even if the connection object has a variation in the height level of the electrodes where the distance between the adjacent electrodes is small. It is an object of the present invention to provide an anisotropic conductive connector that can reliably achieve an electrical connection to each of the electrodes in a state in which it is held.

A third object of the present invention is to provide a circuit device to be inspected even if the distance between the adjacent electrodes to be inspected is small and the height level of the electrodes to be inspected varies. It is an object of the present invention to provide an adapter device capable of reliably achieving electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between the inspection electrodes.

A fourth object of the present invention is to provide a circuit device that is an object to be inspected even if the distance between adjacent electrodes to be inspected is small and the height levels of the electrodes to be inspected vary. It is an object of the present invention to provide an electrical inspection device for a circuit device that can surely execute a required electrical inspection.

[0009] The composite conductive sheet of the present invention is integrally laminated on each of a spacer sheet in which a plurality of through-holes extending in the thickness direction are formed and both surfaces of the spacer sheet. Two cover sheets, and a rigid conductor disposed in each of the through holes of the spacer sheet,

Each of the cover sheets is formed with a plurality of through holes having a diameter smaller than the diameter of the through hole of the spacer sheet corresponding to the through hole of the spacer sheet.

Each of the rigid conductors is formed in a flange portion having a diameter larger than the diameter of the through hole of the force bar sheet, which is positioned in the through hole of the spacer sheet, and at both ends of the flange portion. The rigid conductor can be moved in the thickness direction with respect to the spacer sheet, and is formed of two terminal portions that pass through the through-hole of the cover sheet and project from the surface of the cover sheet. It is said that it is said.

[0010] In the composite conductive sheet of the present invention, each of the cover sheets is preferably laminated integrally with the spacer sheet via an adhesive layer.

Further, it is preferable that the movable distance of the rigid conductor in the thickness direction of the spacer sheet is 3 to 150 μm.

In the composite conductive sheet of the present invention, the spacer sheet may be made of metal.

[0011] The method for producing a composite conductive sheet of the present invention provides a spacer sheet in which a plurality of through holes are formed according to a pattern corresponding to a pattern of electrodes to be connected, and the through holes of the spacer sheet are prepared. An easily etchable metal body is formed inside,

An adhesive layer is formed on the surface of each of the spacer sheet and the metal body, and a cover sheet is integrally laminated on the back surface of the spacer sheet and the metal body via the adhesive layer. An opening that exposes the metal body is formed in the adhesive layer formed on the surface, and a cover sheet is integrally laminated on the adhesive layer, and a resin sheet is integrated on the force persheet via the adhesive layer. Laminated

Two resin sheets, an adhesive layer formed on the cover sheet, two cover sheets, and an adhesive layer formed on the back surface of the spacer sheet, each having an opening in the adhesive layer formed on the surface of the spacer sheet A through hole communicating with the two resin sheets, an adhesive layer formed on the cover sheet, two cover sheets, and a spacer sheet are formed on the back surface of the spacer sheet. An easily etchable thin metal layer is formed on the inner surface of each through hole of the formed adhesive layer and the inner surface of the opening of the adhesive layer formed on the back surface of the spacer sheet,

By applying a plating treatment to this thin metal layer, the space defined by the thin metal layer is filled with metal to form a rigid conductor,

Thereafter, the method includes a step of removing the thin metal layer and the metal body by an etching process.

[0012] An anisotropic conductive connector according to the present invention comprises the above-described composite conductive sheet and an anisotropic conductive elastomer sheet disposed on at least one surface of the composite conductive sheet. Features.

An anisotropic conductive connector according to the present invention includes the above-described composite conductive sheet and two anisotropic conductive elastomer sheets disposed on one side and the other side of the composite conductive sheet. It is characterized by comprising.

[0013] In the anisotropically conductive connector of the present invention, the anisotropically conductive elastomer sheet has a chain formed by orienting conductive particles exhibiting magnetism in the anisotropic polymer material so as to be aligned in the thickness direction. It is preferable that it is contained in a state in which the chain of the conductive particles is dispersed in a plane direction.

[0014] In such an anisotropically conductive connector, it is preferable that the thickness of the anisotropically conductive elastomer sheet is 0 to 100 μm! /.

Moreover, it is preferable that the number average particle diameter of electroconductive particle is 3-20 m.

[0015] The adapter device of the present invention includes an adapter body having a connection electrode region in which a plurality of connection electrodes are formed according to a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface;

The anisotropic conductive connector having a plurality of rigid conductors arranged according to a pattern corresponding to the connection electrode in the adapter body, disposed on the connection electrode region of the adapter body;

It is characterized by comprising.

[0016] An electrical inspection device for a circuit device according to the present invention comprises the adapter device described above. [0017] According to the composite conductive sheet of the present invention, the rigid conductor that can move in the thickness direction is provided in the through hole of the spacer sheet, and the flange portion of the rigid conductor is formed on the cover sheet. Since it has a diameter larger than the diameter of the through hole, the composite conductive sheet alone in which the rigid conductor does not fall off the spacer sheet is easy to handle.

[0018] According to the anisotropic conductive connector of the present invention, each of the rigid conductors in the composite conductive sheet is movable in the thickness direction with respect to the spacer sheet. When pressed in the thickness direction, the first anisotropic conductive elastomer sheet disposed on one side of the composite conductive sheet and the second anisotropic conductive sheet disposed on the other side of the composite conductive sheet The elastomer sheet is compressed and deformed in conjunction with each other when the rigid conductor moves in the thickness direction of the spacer sheet, so the total of the irregularity absorption capacity of both is expressed as the irregularity absorption capacity of the anisotropic conductive connector. Therefore, a high unevenness absorbing ability can be obtained.

In addition, the thickness required to obtain the required unevenness absorbing capability may be ensured by the total thickness of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet. As the electrically conductive elastomer sheet, a sheet having a small thickness can be used, so that high resolution can be obtained.

Therefore, even when the distance between the adjacent electrodes is small and the height level of the electrodes varies, the electrical connection to each of the electrodes is ensured with the necessary insulation between the adjacent electrodes. Connection can be reliably achieved.

[0019] According to the adapter device of the present invention, since the anisotropic conductive connector is provided, the circuit device to be inspected has a small separation distance between adjacent electrodes to be inspected. Even if there are variations in the height level, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected while ensuring the necessary insulation between adjacent electrodes to be inspected. it can.

[0020] According to the electrical inspection device for a circuit device of the present invention, since the adapter device is provided, the circuit device to be inspected has a small separation distance between adjacent electrodes to be inspected. Even if there are variations in the height level of the electrodes, Thus, the required electrical inspection can be performed reliably.

Brief Description of Drawings

FIG. 1 is an explanatory cross-sectional view showing a configuration in an example of a composite conductive sheet of the present invention.

FIG. 2 is a cross-sectional view for explaining a spacer sheet material.

FIG. 3 is an explanatory cross-sectional view showing a spacer sheet.

FIG. 4 is an explanatory cross-sectional view showing a state where a metal body is formed in a through hole of a spacer sheet.

FIG. 5 is an explanatory cross-sectional view showing a state in which an adhesive layer is formed on the surface of the spacer sheet and a cover sheet is physically laminated on the back surface via the adhesive layer.

FIG. 6 is an explanatory sectional view showing a state in which an opening is formed in the adhesive layer.

FIG. 7 is an explanatory cross-sectional view showing a state in which a cover sheet is disposed on an adhesive layer, and a resin sheet is laminated on the cover sheet via the adhesive layer.

FIG. 8 is an explanatory sectional view showing a state in which through holes are formed in each of a resin sheet, a cover sheet, a metal body, and an adhesive layer.

FIG. 9 is an explanatory sectional view showing a state in which a thin metal layer is formed.

FIG. 10 is an explanatory sectional view showing a state in which a rigid conductor is formed.

FIG. 11 is an explanatory cross-sectional view showing a state where a thin metal layer and a metal body are removed.

FIG. 12 is a cross-sectional view illustrating the configuration of an example of the anisotropically conductive connector of the present invention.

FIG. 13 is an explanatory cross-sectional view showing one side molding member, the other side molding member and a spacer for producing the first anisotropic conductive elastomer sheet.

FIG. 14 is an explanatory cross-sectional view showing a state in which a conductive elastomer material has been applied to the surface of the other side molding member.

FIG. 15 is an explanatory cross-sectional view showing a state in which a conductive elastomer material layer is formed between a surface-side molded member and another surface-side molded member.

FIG. 16 is an enlarged cross-sectional view illustrating the conductive elastomer material layer shown in FIG. 15. [FIG. 17] A magnetic field is applied to the conductive elastomer material layer shown in FIG. The It is sectional drawing for description which shows the state shown.

FIG. 18 is a cross-sectional view for explaining the structure of an example of an adapter device according to the present invention.

FIG. 19 is a sectional view for explanation showing the configuration of the adapter main body in the adapter device shown in FIG. 18.

FIG. 20 is an explanatory diagram showing a configuration of an example of an electrical inspection device for a circuit device according to the present invention.

Explanation of symbols

la Upper adapter device

lb Lower adapter device

2 Holder

3 Positioning pin

5 Circuit equipment

6, 7 Inspected electrode

10 Composite conductive sheet

11 Spacer sheet

11A Spacer sheet material

11H Through hole

12a, 12b, 12c adhesive layer

12H, 12h

12K aperture

13, 14 Cover sheet

13H, 14H Through hole

15 Rigid conductor

15a Flange 咅

15b terminal

16a resin sheet

16b thin metal layer H Through hole

Anisotropic conductive connector

First anisotropic conductive elastomer sheet A Material layer for conductive elastomer B Material for conductive elastomer

Second anisotropic conductive elastomer sheet adapter body

Connecting electrode

Terminal electrode

Internal wiring section

Connecting electrode area

One side molded member

Other side molding

Spacer

K opening

Pressure roll

Support roll

Pressure roll device

a Upper inspection head

b Lower side inspection head

a, 51b Inspection electrode device

a, 52b Test electrode

a, 53b Electric wire

a, 54b Prop

a, 55b Anisotropic conductive elastomer a Upper support plate

b Lower support plate

a, 57b connector P conductive particles

M metal body

H Through hole

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described in detail.

FIG. 1 is a cross-sectional view for explaining the structure of an example of the composite conductive sheet of the present invention. The composite conductive sheet 10 includes a spacer sheet 11 formed according to a pattern corresponding to a pattern of electrodes to which a plurality of through-holes 11H extending in the thickness direction are to be connected, and both surfaces of the spacer sheet 11 The cover sheets 13 and 14 are integrally laminated with the adhesive layers 12a and 12b, respectively, and the rigid conductor 15 is disposed in each of the through holes 11H of the spacer sheet 11. Each of the cover sheets 13 and 14 is formed with a plurality of through holes 13H and 14H having a diameter smaller than the diameter of the through hole 11H of the spacer sheet 11 corresponding to the through hole 11H of the spacer sheet 11. Yes.

Each of the rigid conductors 15 has a disk-like flange portion 15a having a diameter larger than the diameters of the through holes 13H and 14H of the cover sheets 13 and 14 and located in the through holes 11H of the spacer sheet 11. Two flanged terminal portions 15b projecting from the surfaces of the cover sheets 13 and 14 through the through holes 13H and 14H of the cover sheets 13 and 14, respectively, are provided on both end surfaces of the flange portion 15a. It is formed connected to the body.

The flange portion 15a of the rigid conductor 15 has a diameter smaller than the diameter of the through hole 11H of the spacer sheet 11, and its thickness is smaller than the thickness of the spacer sheet 11. As a result, the rigid conductor 15 is movable in the thickness direction with respect to the spacer sheet 11! /.

[0024] The material constituting the spacer sheet 11 is not particularly limited, and for example, a metal material or a non-metal material can be used.

Specific examples of metal materials include: (a) stainless steel, (b) invar type alloys such as invar, elinvar type alloys such as elimber, superinvar, kovar, alloy of magnetic metals such as 42 alloy or alloy steel, (c ) Gold, silver, copper, iron, nickel, cobalt or these An alloy etc. can be mentioned.

Specific examples of non-metallic materials include resin materials with high mechanical strength such as polyimide resin, polyester resin, fluororesin, polyaramid resin, polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, glass Composite resin materials such as fiber reinforced polyimide resin, composite resin materials such as epoxy resin mixed with inorganic materials such as silica, alumina, boron nitride, etc. can be used, but the coefficient of thermal expansion is small. In this respect, it is possible to use with a composite resin material such as polyimide resin, glass fiber reinforced epoxy resin, or a composite resin material such as epoxy resin mixed with boron nitride as a filler.

The thickness of the spacer sheet 11 is preferably 10 to 200 111, more preferably 15 to 100 μm.

Further, the diameter of the through hole; 11H of the spacer sheet 11 is preferably 20 to 300 111, more preferably 30 to 150 μm.

[0025] The materials constituting the adhesive layers 12a and 12b include an alkali developing adhesive, a polyimide adhesive, a polyurethane adhesive, a silicon adhesive, an epoxy resin adhesive, and an ethylene acetate butyl copolymer. Hot melt adhesives mainly composed of polyamide, polyesters, hot melt adhesives composed mainly of polyolefins such as polypropylene, etc. can be used. It is preferable to use an alkali developing adhesive in that the flange portion 15a of the conductor 15 can be easily formed.

[0026] The materials constituting the cover sheets 13, 14 include resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, polyamide resin, glass fiber reinforced epoxy resin, and glass fiber reinforced polyester resin. Further, a fiber reinforced resin material such as a glass fiber reinforced polyimide resin, a composite resin material containing an inorganic material such as alumina or boron nitride as a filler in an epoxy resin or the like can be used.

Also, when using a composite conductive sheet 10 in a high temperature environment, as a cover sheet 13, 1 4, than it is preferred instrument linear thermal expansion coefficient used the following 3 X 10- ⁵ / K good better rather than the ^{^{1 X 10- 6 ~2 X 10- 5}} / Κ, particularly preferably from ^{^{1 X 10- 6 ~6 X 10- 6}} / Κ. Further, the thickness d of the cover sheets 13 and 14 is preferably 5 to 50 111, more preferably 8 to 30 111.

Further, the diameters of the through holes 13H and 14H of the cover sheets 13 and 14 are 15 to 120 m. The force S is more preferably 20 to 80 μm.

As the material constituting the rigid conductor 15, a metal material having rigidity can be preferably used, and in particular, a thin metal layer formed on the spacer sheet 11 and the cover sheets 13, 14, etc. in the manufacturing method described later. It is preferable to use a material that is less susceptible to etching. Specific examples of such a metal material include simple metals such as nickel, cobalt, gold, and aluminum, or alloys thereof.

The difference between the diameter of the flange portion 15a of the rigid conductor 15 and the diameter of the through hole 11H of the spacer sheet 11 is preferably 1 m or more, more preferably 2 m or more. If this difference is too small, it may be difficult to move the flange portion 15a of the rigid conductor 15 in the thickness direction of the spacer sheet 11.

Further, the difference between the diameter of the flange portion 15a in the rigid conductor 15 and the diameter of the through holes 13H and 14H of the cover sheets 13 and 14 is preferably 5 m or more, more preferably 10 m or more. If this difference is too small, the rigid conductor 15 may fall off.

The diameter of the terminal portion 15b in the rigid conductor 15 is preferably 50 to 300% of the diameter of the electrode to be connected, for example, the electrode to be inspected. Further, the difference between the diameter of the terminal portion 15b in the rigid conductor 15 and the diameter of the through holes 13H and 14H of the cover sheets 13 and 14 is preferably 1 m or more, more preferably 2 m or more. If the difference is too small, this and force ^s becomes difficult to move with respect to the thickness direction of the scan Bae Sashito 11 a flange portion 15a of the rigid conductor 15.

The movable distance of the rigid conductor 15 in the thickness direction of the spacer sheet 11, that is, the difference between the thickness of the flange portion 15 a and the thickness of the spacer sheet 11 is a force S of 3 to 150 111, more preferably 5 to 100 m, more preferably 10 to 50 111. When the movable distance of the flange portion 15a is too small, it may be difficult to obtain sufficient unevenness absorbing ability in the anisotropic conductive connector described later. On the other hand, if the movable distance of the flange portion 15a is excessive, the flange portion 15a and the rigid conductor 15 And the length of the terminal part 15b becomes excessive, and the anisotropic conductive connector described later causes buckling and bending of the terminal part and flange part due to the pressure when connecting to the object to be inspected. The power to become Sfc.

[0028] The composite conductive sheet 10 can be manufactured, for example, as follows.

First, as shown in FIG. 2, a spacer sheet material 11A made of metal is prepared, and the spacer sheet material 11A is subjected to photolithography and etching treatment, thereby connecting as shown in FIG. A spacer sheet 11 in which a plurality of through holes 11H are formed in accordance with a pattern corresponding to the pattern of the electrode to be formed is formed.

As shown in FIG. 4, the spacer sheet 11 thus obtained is subjected to photolithography and a mesh treatment, so that an easily-etchable metal body is placed in the through-hole 11H of the spacer sheet 11. Form M. Next, as shown in FIG. 5, an adhesive layer 12a made of an alkali developing adhesive is formed on the surface of each of the spacer sheet 11 and the metal body M, and the spacer sheet 11 and the metal body M The cover sheet 14 is integrally laminated on the back surface via the adhesive layer 12b. Thereafter, by performing exposure processing and development processing on the adhesive layer 12a, an opening 12K that exposes the metal body M is formed in the adhesive layer 12a as shown in FIG. Then, as shown in FIG. 7, a cover sheet 13 is integrally laminated on the adhesive layer 12a, and a resin sheet 16a is integrally laminated on the cover sheet 13 via the adhesive layer 12c.

Next, as shown in FIG. 8, the adhesive layer 12a is opened on each of the resin sheet 16a, the adhesive layer 12c, the cover sheet 13, the metal body M, the adhesive layer 12b, and the cover sheet 14 by, for example, ultraviolet laser processing. P121 ^ Through holes L16H, 12h, 13H, H, 12H, 14H are formed, and then electroless plating treatment is applied, as shown in Fig. 9, resin sheet 16a, adhesive layer 12c, cover An easy-etching thin metal layer 16b is formed on the inner surface of each of the through holes 16H, 12h, 13H, H, 12H, 14H and the adhesive layer 12K of the sheet 13, the metal body M, the adhesive layer 12b, and the cover sheet 14. Form.

Then, by subjecting the thin metal layer 16b to, for example, electrolytic plating, the space defined by the thin metal layer 16b is filled with metal to form the rigid conductor 15, as shown in FIG. After forming the rigid conductor 15 in this manner, the thin metal layer 16b and the metal body M are removed by performing an etching process, so that the flange portion 15a of the rigid conductor 15 is spaced as shown in FIG. The composite conductive sheet 10 shown in FIG. 1 is obtained by making the cir- sible sheet 11 movable in the thickness direction and further removing the resin sheet 16a and the adhesive layer 12c.

[0030] According to the composite conductive sheet of the present invention, the rigid conductor 15 movable in the thickness direction is provided in the through hole 11H of the spacer sheet 11, and the flange portion 15a of the rigid conductor 15 is Since the cover sheet 13, 14 has a diameter larger than the diameter of the through holes 13H, 14H, the composite conductive sheet 10 alone in which the rigid conductor 15 does not fall off the spacer sheet 11 can be removed. Easy to handle!

The composite conductive sheet of the present invention can be used for electrical inspection of circuit devices such as printed circuit boards and ICs, and is also used as a connector for achieving electrical connection between various circuit devices. That power S.

[0031] <Anisotropic conductive connector>

FIG. 12 is a cross-sectional view illustrating the configuration of an example of the anisotropically conductive connector of the present invention. The anisotropic conductive connector 17 includes a composite conductive sheet 10 having the configuration shown in FIG. 1 and a first anisotropic conductive elastomer disposed on one surface (the upper surface in FIG. 12) of the composite conductive sheet 10. The sheet 18 and a second anisotropic conductive elastomer sheet 19 disposed on the other surface of the composite conductive sheet 10 are configured.

[0032] The first anisotropically conductive elastomer sheet 18 and the second anisotropically conductive elastomer sheet 19 in this example are both conductive particles exhibiting magnetism in an insulating elastic polymer material. P is contained in a state in which P is aligned so as to be aligned in the thickness direction and a chain is formed, and a chain of the conductive particles P is dispersed in the plane direction.

A polymer material having a cross-linked structure is preferred as the elastic polymer material forming the first anisotropic conductive elastomer sheet 18 and the second anisotropic conductive elastomer sheet 19. Durability, moldability From the viewpoint of electrical properties, it is more preferable to use silicone rubber.

[0033] First anisotropically conductive elastomer sheet 18 and second anisotropically conductive elastomer sheet As the conductive particles P contained in 19, conductive particles exhibiting magnetism are used because the particles can be easily aligned in the thickness direction by a method described later. Specific examples of such conductive particles include particles of a metal having magnetism such as iron, cobalt and nickel, particles of these alloys, particles containing these metals, or particles of these particles as core particles. The surface of the core particle is made of a metal having a good conductivity such as gold, silver, palladium, rhodium, or inorganic substance particles such as non-magnetic metal particles or glass beads, or polymer particles. In addition, the surface of the core particle may be a conductive magnetic metal such as nickel or cobalt.

Yes

Of these, it is preferable to use nickel particles as core particles and the surface of which is provided with gold or silver plating with good conductivity! /.

The means for coating the surface of the core particles with the conductive metal is not particularly limited. For example, chemical plating or electrolytic plating, sputtering, vapor deposition, or the like is used.

[0034] When the conductive particles P used are those in which the surface of the core particles is coated with a conductive metal, good conductivity can be obtained. The ratio of the coated area of the conductive metal to the surface area of the core particles) is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.

Further, the coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particles.

[0035] The number average particle diameter of the conductive particles P is preferably 3 to 20, 1 m, and more preferably 5 to 15. When this number average particle diameter is too small, it may be difficult to orient the conductive particles P in the thickness direction in the production method described later. On the other hand, when the number average particle diameter is excessive, it may be difficult to obtain an anisotropic conductive elastomer sheet with high resolution.

Further, the particle size distribution (Dw / Dn) of the conductive particles P is preferably 1 to 10; more preferably 1.01-7, still more preferably 1.05 to 5, particularly preferably 1. ; ~ 4. In addition, the shape of the conductive particles P is not particularly limited. However, the conductive particles P can be easily dispersed in the polymer material-forming material. It is preferable that they are agglomerated secondary particles.

[0036] Such conductive particles P are preferably contained in the anisotropic conductive elastomer sheet at a volume fraction of 10 40%, particularly 15 35%. If this ratio is too small, an anisotropic conductive elastomer sheet having sufficiently high conductivity in the thickness direction may not be obtained. On the other hand, if this ratio is excessive, the anisotropically conductive elastomer sheet obtained becomes fragile and the necessary elasticity as an anisotropically conductive elastomer sheet cannot be obtained immediately! / .

[0037] Further, the thickness of each of the first anisotropic conductive elastomer sheet 18 and the second anisotropic conductive elastomer sheet 19 is 20 to 100 m, preferably S, more preferably 25 7 O ^ m. If this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

[0038] The first anisotropically conductive elastomer sheet 18 can be manufactured as follows. First, as shown in FIG. 13, the sheet-like one-side molded member 30 and the other-side molded member, respectively. 31 and a frame shape having an opening 32K having a shape conforming to the planar shape of the target first anisotropic conductive elastomer sheet 18 and having a thickness corresponding to the thickness of the first anisotropic conductive elastomer sheet 18 And a spacer 32, and a conductive elastomer material in which conductive particles are contained in a liquid polymer substance-forming material that is cured to become an elastic polymer substance.

Then, as shown in FIG. 14, a spacer 32 is disposed on the molding surface (the upper surface in FIG. 14) of the other surface side molding member 31, and the spacer 32 on the molding surface of the other surface side molding member 31 is disposed. The prepared conductive elastomer material 18B is applied to the opening 32K, and then the one side molding member 30 is formed on the conductive elastomer material 18B with the molding surface (lower surface in FIG. 14) being the conductive elastomer material. Arrange it in contact with 18B.

In the above, as the one side molding member 30 and the other side molding member 31, resin sheets made of polyimide resin, polyester resin, acrylic resin, or the like can be used. Further, the thickness of the resin sheet constituting the one-surface-side molded member 30 and the other-surface-side molded member 31 Is preferably 50 to 500〃111, more preferably 75 to 300〃111. If this thickness is less than 50 m, the strength required for molded parts may not be obtained. On the other hand, when the thickness exceeds 500 m, it may be difficult to apply a magnetic field having a required strength to the conductive elastomer material layer described later.

Next, as shown in FIG. 15, a conductive elastomer material is formed by the one-surface-side molded member 30 and the other-surface-side molded member 31 using a pressure roll device 35 including a pressure roll 33 and a support roll 34. By sandwiching 18B, a conductive elastomer material layer 18A having a required thickness is formed between the one side molding member 30 and the other side molding member 31. In the conductive elastomer material layer 18A, as shown in an enlarged view in FIG. 16, the conductive particles P are contained in a uniformly dispersed state.

After that, for example, a pair of electromagnets are arranged on the back surface of the one-surface-side molded member 30 and the back surface of the other-surface-side molded member 31, and the electromagnet is operated to be parallel to the thickness direction of the conductive elastomer material layer 18A. Apply a magnetic field. As a result, in the conductive elastomer material layer 18A, the conductive particles P dispersed in the conductive elastomer material layer 18A were dispersed in the plane direction as shown in FIG. While maintaining the state, it is oriented so as to be aligned in the thickness direction, whereby a chain of a plurality of conductive particles P each extending in the thickness direction is formed in a state dispersed in the plane direction.

In this state, by curing the conductive elastomer material layer 18A, the conductive particles P are aligned in the thickness direction in the elastic polymer substance, and the conductive particles P Thus, a first anisotropic conductive elastomer sheet 18 containing the chain in a state where the chain is dispersed in the plane direction is produced.

[0040] In the above, the curing process of the conductive elastomer material layer 18A can be performed after the action of the force parallel magnetic field which can be performed with the parallel magnetic field applied is stopped.

In addition, the action of the parallel magnetic field may be temporarily stopped, and then the direction of the applied magnetic field may be reversed.

The intensity of the parallel magnetic field applied to the conductive elastomer material layer 18A preferably has an average value of 0.02 to 2.5 Tesla. [0041] The second anisotropically conductive elastomer sheet 19 can be manufactured by a method similar to that of the first anisotropically conductive elastomer sheet 18.

[0042] According to such an anisotropic conductive connector 17, each of the rigid conductors 15 in the composite conductive sheet 10 is movable in the thickness direction with respect to the spacer sheet 11! /, Therefore, when pressed in the thickness direction by the electrodes to be connected, the first anisotropic conductive elastomer sheet 18 disposed on one side of the composite conductive sheet 10 and the other side of the composite conductive sheet 10 The second anisotropically conductive elastomer sheet 19 disposed in FIG. 2 is compressed and deformed in conjunction with each other as the rigid conductor 15 moves in the thickness direction of the spacer sheet 11, so that the irregularity absorption capability of both Of the anisotropic conductive connector 17 is expressed as the uneven absorbability of the anisotropic conductive connector 17, and thus high uneven absorbability can be obtained.

In addition, the thickness necessary to obtain the required unevenness absorbing capacity may be ensured by the total thickness of the first anisotropic conductive elastomer sheet 18 and the second anisotropic conductive elastomer sheet 19. Individual anisotropically conductive elastomer sheets can be used with a small thickness V and force S, so that high resolution can be obtained.

[0043] <Adapter device>

FIG. 18 is a cross-sectional view illustrating the configuration of an example of the adapter device according to the present invention, and FIG. 19 is a cross-sectional view illustrating the adapter body in the adapter device shown in FIG. This adapter device is for inspecting a circuit device used for, for example, an open / short test of a circuit device such as a printed circuit board, and has an adapter body 20 made of a multilayer wiring board.

On the surface of the adapter body 20 (upper surface in FIGS. 18 and 19), a connection electrode region in which a plurality of connection electrodes 21 are arranged according to a specific pattern corresponding to the pattern of the electrode to be inspected of the circuit device to be inspected. 25 is formed.

A plurality of terminal electrodes 22 are arranged on the back surface of the adapter body 20 in accordance with the grid point positions of, for example, a pitch of 0.8 mm, 0.75 mm, 1.5 mm, 1.8 mm, and 2.54 mm. Each of the electrodes 22 is electrically connected to the connection electrode 21 by the internal wiring portion 23. On the surface of the adapter body 20, an anisotropic conductive connector 15 having a configuration shown in FIG. 12 is basically provided on the connection electrode region 25, and a second anisotropic conductive elastomer sheet 19 is provided on the adapter body. It is placed in contact with 20 and fixed to the adapter body 20 by an appropriate means (not shown).

In this anisotropic conductive connector 15, a plurality of rigid conductors 12 are arranged on the composite conductive sheet 10 according to the same pattern as the specific pattern related to the connection electrode 21 in the adapter single body 20. The directionally conductive connector 15 is arranged such that each of the rigid conductors 12 in the composite conductive sheet 10 is positioned directly above the connection electrode 21 of the adapter body 20! /.

[0044] According to such an adapter device, since the anisotropic conductive connector 17 having the configuration shown in Fig. 12 is provided, the circuit device to be inspected has a small distance between adjacent electrodes to be inspected. Even if there are variations in the height level of the test electrodes, electrical connection to each of the test electrodes is reliably achieved with the necessary insulation between adjacent test electrodes. can do.

FIG. 20 is an explanatory diagram showing a configuration of an example of an electrical inspection apparatus for a circuit device according to the present invention. This electrical inspection device performs, for example, an open 'short test on a circuit device 5 such as a printed circuit board having electrodes 6 and 7 to be inspected on both sides. The holder 2 for holding is provided with a positioning pin 3 for arranging the circuit device 5 at an appropriate position in the inspection execution area E. Above the inspection execution area E, an upper adapter device la and an upper inspection head 50a configured as shown in FIG. 18 are arranged in this order from the bottom, and further above the upper inspection head 50a. The upper side support plate 56a is arranged, and the upper side inspection head 50a is fixed to the upper side support plate 56a by the support 54a. On the other hand, below the inspection execution area E, a lower-side adapter device lb and a lower-side inspection head 50b configured as shown in FIG. 18 are arranged in this order from the top, and further below the lower-side inspection head 50b. Is provided with a lower support plate 56b, and the lower inspection head 50b It is fixed to the lower support plate 56b by 4b.

The upper inspection head 50a is composed of a plate-shaped inspection electrode device 51a and an anisotropically conductive elastomer sheet 55a having elasticity and fixed to the lower surface of the inspection electrode device 51a. The inspection electrode device 51a has a plurality of pin-shaped inspection electrodes 52a arranged at lattice point positions at the same pitch as the terminal electrodes 22 of the upper-side adapter device la on its lower surface, and each of these inspection electrodes 52a. Is electrically connected to a connector 57a provided on the upper support plate 56a by an electric wire 53a, and further electrically connected to a test circuit (not shown) of the tester via this connector 57a! /

The lower side inspection head 50b is composed of a plate-like inspection electrode device 51b and an anisotropically conductive elastomer sheet 55b having elasticity and fixed to the upper surface of the inspection electrode device 51b. The inspection electrode device 51b has a plurality of pin-shaped inspection electrodes 52b arranged on the upper surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the lower side adapter device lb, and each of these inspection electrodes 52b. Is electrically connected to the connector 57b provided on the lower support plate 56b by the electric wire 53b, and further electrically connected to the test circuit of the tester (not shown) via the connector 57b! /

[0046] The anisotropic conductive elastomer sheets 55a and 55b in the upper side inspection head 50a and the lower side inspection head 50b are both formed with conductive path forming portions that form conductive paths only in the thickness direction. is there. In such anisotropic conductive elastomer sheets 55a and 55b, each conductive path forming portion is formed so as to protrude in the thickness direction on at least one surface! /, But what is high! / Preferable in terms of exerting contact stability.

In such an electrical inspection device for a circuit device, the circuit device 5 to be inspected is held in the inspection execution region E by the holder 2, and in this state, the upper side support plate 56a and the lower side support As each of the plates 56b moves in a direction approaching the circuit device 5, the circuit device 5 is clamped by the upper adapter device la and the lower adapter device lb.

In this state, the electrode 6 to be inspected on the upper surface of the circuit device 5 is electrically connected to the connection electrode 21 in the upper-side adapter device la via the anisotropic conductive connector 10, and this upper-side adapter is connected. The terminal electrode 22 of the device la is an anisotropic conductive elastomer. It is electrically connected to the inspection electrode 52a of the inspection electrode device 51a through one sheet 55a. On the other hand, the electrode 7 to be inspected on the lower surface of the circuit device 5 is electrically connected to the connection electrode 21 in the lower-side adapter device lb via the anisotropic conductive connector 10, and this lower-side adapter device. The terminal electrode 22 of lb is electrically connected to the inspection electrode 52b of the inspection electrode device 51b via an anisotropic conductive elastomer sheet 55b.

[0048] In this way, each force of the electrodes 6 and 7 to be inspected on both the upper surface and the lower surface of the circuit device 5 is inspected in the inspection electrode 52a and the lower inspection head 50b of the inspection electrode device 51a in the upper inspection head 50a. By being electrically connected to each of the inspection electrodes 52b of the electrode device 51b, a state of being electrically connected to the inspection circuit of the tester is achieved, and a required electrical inspection is performed in this state.

[0049] According to the electrical inspection device for a circuit device described above, the circuit device 5 to be inspected is provided with the upper side adapter device la and the lower side adapter device lb configured as shown in FIG. Even if there is a variation in the height level of the electrodes 6 and 7 to be inspected, the distance between the electrodes 6 and 7 adjacent to each other is small, the required electrical inspection of the circuit device 5 is reliably performed. can do.

[0050] The present invention is not limited to the above-described embodiment, and various modifications can be made. For example, in the composite conductive sheet, the flange portion of the rigid conductor is limited to a disc-shaped one. Instead, it may be a rectangular plate or other shapes. In the anisotropic conductive connector, the anisotropic conductive elastomer sheet may be arranged only on one surface of the composite conductive sheet. When the anisotropic conductive connector having such a configuration is used for inspection of a wafer on which a circuit device or an integrated circuit is formed, it is preferable that the rigid conductor of the composite conductive sheet is disposed so as to contact the electrode to be inspected. .

Claims

The scope of the claims

[1] A spacer sheet in which a plurality of through-holes extending in the thickness direction are formed, two cover sheets integrally laminated on both surfaces of the spacer sheet, and the spacer sheet A rigid conductor disposed in each of the through holes of the sheet,

Each of the rigid conductors is formed in a flange portion having a diameter larger than the diameter of the through hole of the force bar sheet, which is positioned in the through hole of the spacer sheet, and at both ends of the flange portion. The rigid conductor can be moved in the thickness direction with respect to the spacer sheet, and is formed of two terminal portions that pass through the through-hole of the cover sheet and project from the surface of the cover sheet. A composite conductive sheet characterized by the above.

[2] The composite conductive sheet according to [1], wherein each of the cover sheets is integrally laminated on the spacer sheet via an adhesive layer.

[3] The composite conductive sheet according to claim 1 or 2, wherein the movable distance of the rigid conductor in the thickness direction of the spacer sheet is 3 to 150 m.

[4] The composite conductive sheet according to any one of claims 1 to 3, wherein the spacer sheet is made of metal.

[5] Prepare a spacer sheet with a plurality of through-holes formed according to the pattern corresponding to the pattern of the electrodes to be connected, and form an easily-etchable metal body in the through-holes of the spacer sheet.

Two resin sheets, an adhesive layer formed on the cover sheet, two cover sheets, and an adhesive layer formed on the back surface of the spacer sheet, respectively, on the surface of the spacer sheet A through hole communicating with the opening of the formed adhesive layer is formed, and two resin sheets, an adhesive layer formed on the cover sheet, two cover sheets, and an adhesive layer formed on the back surface of the spacer sheet An easy-etching thin metal layer is formed on the inner surface of each through-hole and the inner surface of the adhesive layer opening formed on the back surface of the spacer sheet,

Then, the manufacturing method of the composite electroconductive sheet characterized by having the process of removing a metal thin layer and a metal body by an etching process.

[6] The composite conductive sheet according to any one of claims 1 to 4 and an anisotropic conductive elastomer sheet disposed on at least one surface of the composite conductive sheet. An anisotropic conductive connector.

[7] The composite conductive sheet according to any one of claims 1 to 4, and two anisotropic conductive elastomer sheets disposed on one side and the other side of the composite conductive sheet, respectively. An anisotropic conductive connector characterized by comprising.

[8] An anisotropically conductive elastomer sheet is a conductive particle exhibiting magnetism in an elastic polymer material.

1S is characterized in that it is formed in a state where chains are formed so as to be aligned in the thickness direction and the chains of the conductive particles are dispersed in the plane direction. An anisotropic conductive connector as described in 1.

9. The anisotropic conductive connector according to claim 8, wherein the anisotropic conductive elastomer sheet has a thickness of 20 to 100 m.

10. The anisotropic conductive connector according to claim 9, wherein the number average particle diameter of the conductive particles is 3 to 20 am.

[11] An adapter body having a connection electrode region in which a plurality of connection electrodes are formed according to a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface;

11. The apparatus according to claim 6, further comprising a plurality of rigid conductors arranged on the connection electrode region of the adapter body and arranged according to a pattern corresponding to the connection electrode in the adapter body. With anisotropic conductive connector

An adapter device characterized by comprising: 12. An electrical inspection device for a circuit device comprising the adapter device according to claim 11.