JP2008027818A - Composite conductive sheet, anisotropic conductive connector, and adapter device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a composite conductive sheet capable of surely achieving electrical connection to respective inspection object electrodes in a state where a required insulation property is ensured between inspection object electrodes adjacent to each other even when a separation distance between the inspection object electrodes adjacent to each other is small, and the height levels of the inspection object electrodes are dispersed in a circuit device being an inspection object, and capable of surely executing four-terminal inspection. <P>SOLUTION: This composite conductive sheet includes: an insulating sheet where a plurality of through-holes respectively extending in the thickness direction are arranged according to a pattern of the inspection object electrodes; center electrodes arranged movably in the thickness direction in the respective through holes of the insulating sheet to project from each of both the surfaces thereof, and formed of a rigid conductor; and peripheral electrodes arranged movably in the thickness direction in the respective through holes of the insulating sheet to project from each of both the surfaces thereof, and surrounding the circumferences of the center electrodes. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a composite conductive sheet that can be suitably used for electrical inspection of a circuit device such as a printed circuit board.

  In general, for circuit boards for configuring or mounting electronic components such as package LSIs such as BGA and CSP, MCM, and other integrated circuit devices, before assembling the electronic components or before mounting the electronic components In order to confirm that the wiring pattern of the circuit board has the desired performance, it is necessary to inspect its electrical characteristics.

  Conventionally, as a method of performing an electrical inspection of a circuit board, a test electrode device in which a plurality of test electrodes are arranged according to lattice point positions arranged vertically and horizontally, and a circuit board to be inspected on the test electrodes of this test electrode device A method of using a combination with an adapter for electrically connecting the electrodes to be inspected is known. The adapter used in this method is a printed wiring board called a pitch conversion board.

  This adapter has a plurality of connection electrodes arranged in accordance with a pattern corresponding to the inspection target electrode of the circuit board to be inspected on one surface, and a lattice point having the same pitch as the inspection electrode of the inspection electrode device on the other surface. A plurality of terminals having a plurality of terminal electrodes arranged at positions, and comprising a current supply connection electrode and a voltage measurement connection electrode arranged in accordance with a pattern corresponding to an electrode to be inspected on a circuit board to be inspected on one side And a plurality of terminal electrodes arranged on the other surface at lattice point positions having the same pitch as the inspection electrodes of the inspection electrode device. The former adapter is used, for example, for an open / short test of each circuit on a circuit board. The latter adapter is used for an electrical resistance measurement test of each circuit on the circuit board, and is for so-called four-terminal inspection.

  Therefore, in the electrical inspection of a circuit board, generally, in order to achieve a stable electrical connection between the circuit board to be inspected and the adapter, a connector is provided between the circuit board to be inspected and the adapter. As an example, an anisotropic conductive elastomer sheet is interposed.

  This anisotropically conductive elastomer sheet has conductivity only in the thickness direction, or has a number of pressurized conductive portions that show conductivity only in the thickness direction when pressed.

  As such an anisotropically conductive elastomer sheet, those having various structures are conventionally known. For example, in Patent Document 1, conductive particles exhibiting magnetism are arranged in the thickness direction in an elastic polymer substance. An anisotropic conductive elastomer sheet (hereinafter referred to as “dispersed anisotropic conductive sheet”) that is contained in a state in which a chain is formed by orientation and the chain of the conductive particles is dispersed in the plane direction. ) Is disclosed, and Patent Document 2 insulates a plurality of conductive path forming portions extending in the thickness direction from each other by dispersing non-uniformly conductive particles exhibiting magnetism in an elastic polymer material. An anisotropic conductive elastomer sheet formed with an insulating portion (hereinafter referred to as an “unevenly anisotropic conductive sheet”) is disclosed, and Patent Document 3 discloses the surface of the conductive path forming portion and the insulating portion. There is a step between Made the uneven distribution type anisotropically conductive sheet is disclosed.

These anisotropically conductive elastomer sheets are, for example, in the thickness direction with respect to a molding material layer in which conductive particles exhibiting magnetism are contained in a liquid polymer substance-forming material that is cured to become an elastic polymer substance. It is obtained by performing a curing treatment while applying a magnetic field to or after applying a magnetic field. In this anisotropic conductive elastomer sheet, the conductive particles are contained in a base material made of an elastic polymer substance in a state in which the conductive particles are aligned in a thickness direction to form a chain, and are pressed in the thickness direction. Thus, a conductive path is formed by a chain of conductive particles.

  And comparing the dispersion type anisotropic conductive sheet and the uneven distribution type anisotropic conductive sheet, the dispersion type anisotropic conductive sheet can be manufactured at low cost without using a special and expensive mold. This is advantageous compared to the unevenly distributed anisotropic conductive sheet in that it can be used regardless of the pattern of electrodes to be connected and has versatility.

  On the other hand, since the unevenly anisotropic anisotropic conductive sheet is formed with an insulating portion that insulates them from each other between adjacent conductive path forming portions, the connection object with a small separation distance between adjacent electrodes is also adjacent. Compared to the dispersive anisotropic conductive sheet in terms of performance that can achieve electrical connection to each of the electrodes in a state where necessary insulation is ensured between the electrodes to be performed, that is, high resolution. It is advantageous.

Thus, in order to improve the resolution of the dispersed anisotropic conductive sheet, it is important to reduce the thickness of the dispersed anisotropic conductive sheet.
However, the anisotropic conductive elastomer sheet having a small thickness absorbs unevenness in the height level of each electrode to be connected, and can achieve electrical connection to each of the electrodes, that is, absorbs unevenness. There is a problem that performance is low. Specifically, the unevenness-absorbing ability of the anisotropic conductive elastomer sheet is about 20% of the thickness of the anisotropic conductive elastomer sheet. For example, in the anisotropic conductive elastomer sheet having a thickness of 100 μm, the height of the electrode is high. A stable electrical connection can be achieved even for a connection object having a thickness variation of about 20 μm. However, in the anisotropic conductive elastomer sheet having a thickness of 50 μm, the variation in the height level of the electrode is 10 μm. It is difficult to achieve stable electrical connection for objects to be connected that exceed.

  In order to solve such a problem, a tapered movable conductor adapted to the through hole is provided in the tapered through hole formed in the insulating sheet so as to be movable in the thickness direction with respect to the insulating sheet. An anisotropic conductive connector comprising a composite conductive sheet and two anisotropic conductive elastomer sheets disposed on one side and the other side of the composite conductive sheet has been proposed (for example, Patent Document 4) reference.).

  According to the anisotropic conductive connector having such a composite conductive sheet, since the movable electrode in the composite conductive sheet is movable in the thickness direction, when the pressure is applied in the thickness direction, the composite conductive sheet Since the two anisotropically conductive elastomer sheets placed on one side and the other side of each other are compressed and deformed in conjunction with each other, the sum of the unevenness absorption capacity of both is expressed as the unevenness absorption capacity of the anisotropically conductive connector. Therefore, a high unevenness absorbing ability can be obtained.

  In addition, the thickness necessary to obtain the required unevenness absorbing capacity may be ensured by the total thickness of the two anisotropic conductive elastomer sheets, and each anisotropic conductive elastomer sheet has a small thickness. Since it can be used, high resolution can be obtained.

However, the anisotropic conductive connector described above has the following problems in practice.
In the above anisotropic conductive connector, the movable conductor of the composite conductive sheet is supported by both the insulating sheet and the anisotropic conductive elastomer sheet, and the composite conductive sheet and the anisotropic conductive elastomer sheet are separated. In this case, since the movable conductor may fall off the insulating sheet, it is actually very difficult to handle the composite conductive sheet alone. Therefore, when a failure occurs in either the composite conductive sheet or the anisotropic conductive elastomer sheet in the anisotropic conductive connector, only the composite conductive sheet or the anisotropic conductive elastomer sheet is replaced with a new one. The entire anisotropically conductive connector must be replaced with a new one.

  In addition, the movable conductor of the composite conductive sheet is formed by depositing a metal by plating in a tapered through hole formed in the insulating sheet to form a metal body and mechanically pressing the metal body. It is obtained by separating the metal body adhered to the inner surface of the through hole. However, when manufacturing an anisotropic conductive connector having a large number of movable conductors, it is difficult to reliably separate all the metal bodies formed on the insulating sheet from the inner surface of the insulating sheet. A malfunction occurs in the function of some movable conductors.

  On the other hand, in the four-terminal inspection, it is necessary to electrically connect a connection electrode pair including a current supply connection electrode and a voltage measurement connection electrode in the adapter to one inspection electrode of the circuit board. Although the pitch between the connection electrode pairs is extremely small, even in such a case, it is necessary to reliably form a movable conductor that can move within the through hole of the insulating sheet in the composite conductive sheet.

  Patent Document 5 describes a composite conductive sheet used for a four-terminal electrical test. This composite conductive sheet includes a core electrode 13 constituted by an end portion of the conductor 12 that penetrates the insulating sheet in the thickness direction, and a ring-shaped electrode 15 formed around the core electrode 13. These constitute a pair of electrodes for current supply and voltage measurement in the four-terminal inspection.

  In this composite conductive sheet, the conductor 12 can be movable in the thickness direction of the insulating sheet. By doing in this way, even if there is a height variation in the inspected electrode of the circuit device to be inspected, the unevenness absorbing ability of the height variation due to the movement of the conductor 12 in the thickness direction of the insulating sheet. Is improved to some extent.

On the other hand, since the ring-shaped electrode 15 is formed by forming a ring-shaped conductor on one surface of the insulating sheet, the ring-shaped electrode 15 is formed integrally with the insulating sheet, and the ring-shaped electrode 15 is fixed to the insulating sheet. Yes. With such a structure, even when the conductor 12 can be moved in the thickness direction as described above, the height variation of the inspected electrode of the circuit device to be inspected can be sufficiently absorbed. Inhibit. Therefore, it has been necessary to further improve the unevenness absorbing ability of the variation in height of the electrode to be inspected.
JP 51-93393 A Japanese Patent Laid-Open No. 53-147772 JP-A-61-250906 JP 2001-351702 A JP 2003-322665 A

  The present invention requires a circuit device to be inspected between adjacent electrodes to be inspected even if the distance between adjacent electrodes to be inspected is small and the height level of the electrodes to be inspected varies. An object of the present invention is to provide a composite conductive sheet that can reliably achieve electrical connection to each of the electrodes to be inspected in a state in which a sufficient insulation property is ensured, and can reliably perform a four-terminal inspection. It is said.

  Further, the present invention is used for a four-terminal inspection in which a required gap is reliably formed around a rigid conductor serving as an electrode in a through hole of an insulating sheet, and as a result, a movable rigid conductor is reliably formed. An object of the present invention is to provide a composite conductive sheet.

  Further, according to the present invention, even when the circuit device to be inspected has a small separation distance between the adjacent electrodes to be inspected and the height level of the electrodes to be inspected varies, To provide an anisotropic conductive connector capable of reliably achieving electrical connection to each of the electrodes to be inspected while ensuring necessary insulation, and capable of reliably performing a four-terminal inspection. It is an object.

  Further, according to the present invention, even when the circuit device to be inspected has a small separation distance between the adjacent electrodes to be inspected and the height level of the electrodes to be inspected varies, For the purpose of providing an adapter device capable of reliably achieving electrical connection to each of the electrodes to be inspected while ensuring necessary insulation, and capable of reliably performing a four-terminal inspection. Yes.

The composite conductive sheet of the present invention is a composite conductive sheet used for conducting an electrical inspection of a circuit device,
A plurality of through holes each extending in the thickness direction, an insulating sheet disposed according to a pattern corresponding to the pattern of the electrode to be inspected of the circuit device to be inspected, and
A center electrode made of a rigid conductor, arranged to be movable in the thickness direction of the insulating sheet so as to protrude from each of both surfaces of the insulating sheet in each through hole of the insulating sheet,
Peripheral electrodes surrounding the periphery of the central electrode, arranged to be movable in the thickness direction of the insulating sheet so as to protrude from both sides of the insulating sheet in the respective through holes of the insulating sheet,
It is characterized by providing.

In the preferable aspect in said invention, the said center electrode and a peripheral electrode can move mutually independently in the thickness direction of an insulating sheet.
In another preferable aspect of the present invention, the center electrode and the peripheral electrode are integrated via an insulating layer.

  According to the composite conductive sheet according to the above invention, the center electrode and the peripheral electrode constituting the current supply and voltage measurement electrodes in the four-terminal inspection are in the through hole of the insulating sheet, and the peripheral electrode is the central electrode. Each of these is arranged so as to be movable in the thickness direction of the insulating sheet so as to surround it. As described above, since each of the center electrode and the peripheral electrode is movable in the thickness direction, the variation in the height level in each of the electrodes to be inspected of the circuit device to be inspected is absorbed to electrically The performance that can achieve a stable connection, that is, the unevenness absorption ability is greatly improved, and a stable electrical connection can be achieved.

  As described above, according to the composite conductive sheet according to the above invention, the circuit device to be inspected has a small separation distance between the adjacent electrodes to be inspected, and the height level of the electrodes to be inspected varies. Even so, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected, and to perform the four-terminal inspection with certainty. be able to.

Further, according to the composite conductive sheet according to the above invention, as described later, in the state where the rigid conductor bump is inserted into the through hole of the insulating sheet, it is insulated between the center electrode and the peripheral electrode or insulated from the peripheral electrode. Since an easily etchable thin metal layer between the insulating sheet and the through hole of the insulating sheet can be manufactured by etching, a required gap is formed around the center electrode and the peripheral electrode in the through hole of the insulating sheet. As a result, the movable rigid conductor can be reliably formed.

The anisotropic conductive connector of the present invention, the composite conductive sheet,
In the insulating elastic polymer material, the conductive particles exhibiting magnetism are arranged in the thickness direction and are contained in a state of being uniformly dispersed in the surface direction, and are disposed on both sides of the composite conductive sheet. A pair of anisotropically conductive elastomer sheets;
It is characterized by providing.

  According to such an anisotropic conductive connector, since each of the center electrode and the peripheral electrode in the composite conductive sheet is movable in the thickness direction with respect to the insulating sheet, the thickness depends on the electrode to be connected. When pressed in the direction, the first anisotropic conductive elastomer sheet disposed on one surface of the composite conductive sheet and the second anisotropic conductive elastomer sheet disposed on the other surface of the composite conductive sheet are: Since the center electrode and the peripheral electrode are compressed and deformed in conjunction with each other by moving, the sum of the uneven absorbability of both is expressed as the uneven absorbency of the anisotropic conductive connector, and thus high uneven absorbency is obtained. be able to.

  In addition, the thickness necessary for obtaining the required unevenness absorbing capability may be ensured by the total thickness of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet. Since a thing with small thickness can be used as a property elastomer sheet, high resolution can be obtained.

  Therefore, even for a connection object in which the separation distance between adjacent electrodes is small and the height level of the electrodes varies, electrical connection to each of the electrodes is performed in a state where necessary insulation is ensured between the adjacent electrodes. The connection can be reliably achieved, and the four-terminal inspection can be reliably performed.

The adapter device of the present invention, the anisotropic conductive connector,
A circuit to be inspected is a plurality of connection electrode pairs consisting of current supply electrodes and voltage measurement electrodes that are electrically connected to the same electrode to be inspected of the circuit device to be inspected and spaced apart from each other An adapter body arranged according to a pattern corresponding to the pattern of the electrode to be inspected of the device;
With
In the anisotropic conductive connector, each of the center electrodes in the composite conductive sheet is located immediately above one of the current supply electrode and the voltage measurement electrode in the adapter body, and each of the peripheral electrodes is for current supply in the adapter body. It is arranged on the surface of the adapter main body on the connection electrode pair side so as to be positioned immediately above the other of the electrode and the voltage measuring electrode.

  According to such an adapter device, since the anisotropic conductive connector described above is included, the circuit device to be inspected has a small separation distance between adjacent electrodes to be inspected, and varies in the height level of the electrodes to be inspected. Even if there is, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected, and to ensure 4-terminal inspection. Can be executed.

According to the composite conductive sheet of the present invention, the circuit device to be inspected is adjacent to each other even if the separation distance between adjacent inspected electrodes is small and the height level of the inspected electrodes varies. Thus, electrical connection to each of the electrodes to be inspected can be reliably achieved in a state where necessary insulation is ensured between the electrodes to be inspected, and the four-terminal inspection can be reliably performed.

  Further, according to the composite conductive sheet of the present invention, the required gap is reliably formed around the rigid conductor serving as the electrode in the through hole of the insulating sheet, and as a result, the movable rigid conductor is reliably formed. The

  According to the anisotropic conductive connector of the present invention, the circuit device to be inspected has a small separation distance between adjacent inspected electrodes, and there is variation in the height level of the inspected electrodes. The electrical connection to each of the electrodes to be inspected can be reliably achieved in a state where necessary insulation is ensured between adjacent electrodes to be inspected, and the four-terminal inspection can be reliably performed.

  According to the adapter device of the present invention, even if the circuit device to be inspected has a small separation distance between the adjacent electrodes to be inspected and the height level of the electrodes to be inspected varies, The electrical connection to each of the electrodes to be inspected can be reliably achieved in a state where necessary insulation is ensured between the inspection electrodes, and the four-terminal inspection can be reliably performed.

Hereinafter, the present invention will be described in detail with reference to the drawings.
First Embodiment <Composite Conductive Sheet>
FIG. 1 is an explanatory cross-sectional view showing a configuration of an example of the composite conductive sheet of the present invention, and FIG. 2 (a) is an explanatory cross-sectional view showing an enlarged main part of the composite conductive sheet shown in FIG. FIG. 2 and FIG. 2B are plan views for explanation. The composite conductive sheet 10 includes an insulating sheet 11 formed according to a pattern corresponding to a pattern of electrodes to which a plurality of through holes 11H extending in the thickness direction are to be connected, and each through hole 11H of the insulating sheet 11. The insulating sheet 11 includes a center electrode 12 and a peripheral electrode 13 made of a rigid conductor disposed so as to protrude from both surfaces.

  The center electrode 12 includes a cylindrical body portion 12 a inserted through the through hole 11 </ b> H of the insulating sheet 11, and terminal portions 12 b at both ends of the body portion 12 a and exposed on the surface of the insulating sheet 11. Has been. The length L1 of the body 12a in the center electrode 12 is larger than the thickness t of the insulating sheet 11, and the diameter d1 of the body 12a is smaller than the inner diameter d2 of the peripheral electrode 13. Thus, the center electrode 12 is movable in the thickness direction of the insulating sheet 11 independently of the peripheral electrode 13.

  The peripheral electrode 13 is constituted by a cylindrical body portion 13 a inserted through the through hole 11 </ b> H of the insulating sheet 11, and terminal portions 13 b that are at both ends of the body portion 13 a and are exposed on the surface of the insulating sheet 11. Has been. The length L2 of the body portion 13a in the peripheral electrode 13 is larger than the thickness t of the insulating sheet 11, and the outer diameter d3 of the body portion 13a is smaller than the diameter d4 of the through hole 11H of the insulating sheet 11. Thus, the peripheral electrode 13 can be moved in the thickness direction of the insulating sheet 11.

  Examples of the material of the insulating sheet 11 include resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, and polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, and glass fiber reinforced polyimide resin. Examples thereof include a fiber reinforced resin material such as epoxy resin, and a composite resin material containing an inorganic material such as alumina or boron nitride as a filler in an epoxy resin or the like.

When the composite conductive sheet 10 is used in a high temperature environment, it is preferable to use the insulating sheet 11 having a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, more preferably 1 × 10 ^{−. 6 to} 2 × 10 ⁻⁵ / K, more preferably 1 × 10 ^{−6 to} 6 × 10 ⁻⁶ / K. By using such an insulating sheet 11, it is possible to suppress displacement of the center electrode 12 and the peripheral electrode 13 due to thermal expansion of the insulating sheet 11.

The thickness t of the insulating sheet 11 is preferably 10 to 200 μm, more preferably 15 to 100 μm.
The diameter d4 of the through hole 11H of the insulating sheet 11 is preferably 60 to 400 μm, more preferably 80 to 250 μm.

  As the material for the center electrode 12 and the peripheral electrode 13, a metal material having rigidity can be suitably used, and in particular, a material that is less likely to be etched than a thin metal layer formed on an insulating sheet in the manufacturing method described later. It is preferable. Specific examples of such a metal material include simple metals such as nickel, cobalt, gold, and aluminum, or alloys thereof.

  The diameter d1 of the body 12a in the center electrode 12 is preferably 20 μm or more, more preferably 30 μm or more. If the diameter d1 is too small, the strength required for the center electrode 12 may not be obtained.

  The thickness of the body portion 13a in the peripheral electrode 13 is preferably 40 μm or more, more preferably 50 μm or more. If this thickness is too small, the strength required for the peripheral electrode 13 may not be obtained.

  The difference (d4−d3) between the diameter d4 of the through hole 11H of the insulating sheet 11 and the outer diameter d3 of the body 13a in the peripheral electrode 13 is preferably 1 μm or more, more preferably 2 μm or more. When this difference is too small, it may be difficult to move the peripheral electrode 13 with respect to the thickness direction of the insulating sheet 11.

  The movable distance of the center electrode 12 and the peripheral electrode 13 in the thickness direction of the insulating sheet 11 is preferably 3 to 150 μm, more preferably 5 to 100 μm, and still more preferably 10 to 50 μm. When the movable distance between the center electrode 12 and the peripheral electrode 13 is too small, it may be difficult to obtain sufficient uneven absorption capability in the anisotropic conductive connector described later. On the other hand, when the movable distance of the center electrode 12 and the peripheral electrode 13 is excessive, the length exposed from the through hole 11H of the insulating sheet 11 of the trunk portion 12a and the trunk portion 13a is increased and used for the inspection. Sometimes, the trunk 12a and the trunk 13a may buckle or be damaged.

  An insulating layer (not shown) is formed on the outer peripheral surface of the center electrode 12 or the inner peripheral surface of the peripheral electrode 13 in order to prevent short-circuiting during electrical inspection of the circuit board. It is preferable to do. Such an insulating layer can be formed by, for example, a liquid resist (permanent resist), an insulating coat, or the like.

  The terminal portion 12b of the center electrode 12 may be locally larger in diameter than the body portion 12a and larger in diameter than the inner diameter of the terminal portion 13b. Further, the terminal portion 13b of the peripheral electrode 13 may be locally larger in diameter than the body portion 13a and larger in diameter than the diameter of the through hole 11H of the insulating sheet 11.

By doing in this way, it can prevent effectively that the center electrode 12 and the peripheral electrode 13 fall out from the through-hole 11H of the insulating sheet 11. FIG.
In the present invention, the composite conductive sheet 10 as described above is
A first metal thin layer for easy etching, and a rigid conductor layer for peripheral electrodes, so as to continuously cover at least part of the outer peripheral portion and one end of the central electrode core portion made of a rigid conductor; A composite having a plurality of rigid conductor bumps formed in this order and a second thin metal layer for separation that is easy to etch so as to protrude from at least one surface of the metal foil that is easy to etch. Manufacturing step (1);
Perforating an insulating sheet with each of the rigid conductor bumps in the composite, thereby forming a plurality of through holes in the insulating sheet and inserting the rigid conductor bumps into each through hole; and
By removing at least a part including the end portion of the rigid conductor bump, from the end portion of the rigid conductor bump, the peripheral electrode rigid conductor layer, the first separating metal thin layer, and the center electrode core portion are formed. Exposing step (3);
By removing the metal foil and the first and second separating metal thin layers by etching, the center electrode and the peripheral electrode made of a rigid conductor can move independently from each other in the thickness direction of the insulating sheet. Is manufactured via the step (4) of making the

Hereinafter, the manufacturing method of the composite electroconductive sheet 10 is demonstrated concretely.
Process (1)
First, as shown in FIG. 3, a laminate having an easily-etchable metal foil 41 and resist layers 42 and 43 integrally laminated on one surface (the lower surface in the figure) and the other surface of the metal foil 41, respectively. The body 40A is manufactured.

  The metal foil 41 and the resist layers 42 and 43 in the laminated body 40 have a total thickness larger than the length of the center electrode 12 to be formed, and a resist layer ( Hereinafter, it is also referred to as “one resist layer”.) 42 has a thickness larger than the thickness of the insulating sheet 11. In the illustrated laminate 40A, resin sheets 44 and 45 made of, for example, polyvinyl chloride are laminated on the surfaces of the resist layers 42 and 43, respectively.

In such a laminated body 40A, copper or the like can be used as an easily-etchable metal material constituting the metal foil 41.
Moreover, it is preferable that the thickness of the metal foil 41 is 3-75 micrometers, More preferably, it is 5-50 micrometers, More preferably, it is 8-25 micrometers.

The thickness of one resist layer 42 is appropriately selected according to the thickness of the insulating sheet 11, and is, for example, 10 to 200 μm, and preferably 15 to 100 μm.
The thickness of the resist layer (hereinafter also referred to as “the other resist layer”) 43 formed on the other surface of the metal foil 41 is, for example, 10 to 50 μm, and preferably 15 to 30 μm.

Moreover, the thickness of the resin sheets 44 and 45 is 10-100 micrometers, respectively.
By performing laser processing on such a laminated body 40A, as shown in FIG. 4, through holes 41H, 42H, which communicate with each of the metal foil 41, the resist layers 42, 43, and the resin sheets 44, 45, 43H, 44H, and 45H are formed according to a pattern corresponding to the pattern of the electrodes to be connected, respectively, and thus a through hole 40H that penetrates in the thickness direction is formed in the stacked body 40A.

Next, the laminate 40A is subjected to an electroless plating process, whereby as shown in FIG. 5, the inner wall surface of the through hole 40H of the laminate 40A, that is, the inner wall surface of the through hole 41H of the metal foil 41 and the resist layer 42. , 43, a thin metal layer 46a is formed so as to cover the inner wall surfaces of the through holes 42H, 43H, the surface of the resin sheets 44, 45 and the inner wall surfaces of the through holes 44H, 45H, and then the resist layers 42, 43. The resin sheets 44 and 45 are peeled off. Then, by subjecting the laminated body 40A to electrolytic plating using the metal foil 41 and the metal thin layer 46a as electrodes, metal is placed in the through holes 41H of the metal foil 41 and the through holes 42H and 43H of the resist layers 42 and 43. As a result, as shown in FIG. 6, a cylindrical center electrode core 12A is formed.

  Next, the surfaces of the resist layers 42 and 43 and both end surfaces of the center electrode core 12A are polished, and then, as shown in FIG. 7, by peeling off one resist layer 42 from one surface of the metal foil 41, The center electrode core portion 12 </ b> A whose outer peripheral portion is covered with the thin metal layer 46 a is projected from one surface of the metal foil 41.

Next, as shown in FIG. 8, the surface of the metal foil 41 is covered with a dry film resist 47a.
Next, as shown in FIG. 9, a liquid resist is continuously applied to the entire surface of the metal foil 41 and the portion where the core electrode core portion 12 </ b> A whose outer peripheral portion is covered with the thin metal layer 46 a protrudes, By curing, the insulating layer 48 is formed.

  Next, as shown in FIG. 10, the metal foil 41 is exposed by peeling the dry film resist 47a together with the insulating layer 48 thereon. At this time, the insulating layer 48 remains on the entire surface of the portion from which the outer peripheral portion is covered with the thin metal layer 46a and the center electrode core portion 12A protrudes.

  Next, as shown in FIG. 11, an electroless plating process is performed to continuously form an easily etchable first separating metal thin layer 46b on the entire surface of the metal foil 41 and the insulating layer 48.

  Next, as shown in FIG. 12, a dry film resist 47b is coated on the entire surface of the surface of the first separating metal thin layer 46b except for the portion where the central electrode core 12A protrudes.

  Next, as shown in FIG. 13, by performing electroless plating, the peripheral electrode rigid conductor layer 13A is continuously formed on the entire surface of the dry film resist 47b and the first separating metal thin layer 46b. .

  Next, as shown in FIG. 14, the dry film resist 47b is peeled off together with the peripheral electrode rigid conductor layer 13A thereon, thereby exposing the first separating metal thin layer 46b. At this time, the peripheral electrode rigid conductor layer 13A remains on the entire surface of the protruding portion of the central electrode core portion 12A whose outer peripheral portion is covered with the first separating metal thin layer 46b.

  Next, as shown in FIG. 15, by performing an electroless plating process, the second surface of the first metal thin layer for separation 46b and the peripheral electrode rigid conductor layer 13A are continuously etched over the entire surface. A thin metal layer 46c for separation is formed, and thus the thin metal layer 46a, the insulating layer 48, and the first separation material are formed so as to continuously cover the outer peripheral portion and one end portion of the center electrode core portion 12A. A plurality of rigid conductor bumps 14 in which the metal thin layer 46b, the peripheral electrode rigid conductor layer 13A, and the second separating metal thin layer 46c are formed in this order so as to protrude from one surface of the metal foil 41. The composite 40 formed in (1) is obtained.

In the above, copper etc. can be used as a metal material which comprises the metal thin layer 46a.
As a material for forming the insulating layer 48, liquid polyimide or the like can be used.

  As the easily-etchable metal material constituting the first separating metal thin layer 46b and the second separating metal thin layer 46c, copper or the like can be used, and these are formed by electroless plating, electrolytic plating, or the like. can do.

The diameter of the through hole 40H formed in the stacked body 40A is set according to the diameter of the body portion 12a of the center electrode 12 to be formed.
The thickness of the first separating metal thin layer 46b is set in consideration of the diameter of the through hole 40H formed in the laminated body 40A, the diameter of the body 12a in the center electrode 12 to be formed, the inner diameter of the peripheral electrode 13, and the like. Is done.

The thickness of the peripheral electrode rigid conductor layer 13A is set in consideration of the thickness of the peripheral electrode 13 to be formed.
The thickness of the second separation metal thin layer 46c is selected in consideration of the separation distance between the peripheral electrode 13 to be formed and the through hole 11H of the insulating sheet 11.
Step (2)
As shown in FIG. 16, the insulating sheet 11 is disposed on a buffer material 49 made of a polymer elastic substance, and an adhesive layer (not shown) is formed on the upper surface of the insulating sheet 11, as shown in FIG. Further, a second separating metal thin layer 46c formed on the front end surface of each of the rigid conductor bumps 14 is formed on the upper surface of the insulating sheet 11 on which the adhesive layer is formed. It arrange | positions so that the property sheet | seat 11 may be touched.

  In this state, for example, the insulating sheet 11 is pressed in the thickness direction by the composite 40 and thereby the insulating sheet 11 is perforated by each of the rigid conductor bumps 14, thereby insulating the insulating sheet 11 as shown in FIG. A plurality of through holes 11H are formed in the sheet 11, and the rigid conductor bumps 14 are inserted into the through holes 11H. At this time, the metal foil 41 in the composite 40 is detachably fixed to the upper surface of the insulating sheet 11 by the adhesive layer.

In this way, as shown in FIG. 19, the insulating sheet 11 is inserted into the plurality of through-holes 11 </ b> H, and the insulating sheet 11 and the composite body 40 are integrated. It is done.
Step (3)
By polishing the rigid conductor bump 14 from the end face, as shown in FIG. 20, the second separating metal thin layer 46c, the peripheral electrode rigid conductor layer 13A, and the first spacing on the end face side of the rigid conductor bump 14 are obtained. The metal thin layer 46b and the insulating layer 48 are removed to expose the end face of the center electrode core 12A.
Step (4)
After obtaining the shapes of the center electrode 12 and the peripheral electrode 13 in this manner, the resist layer 42 is removed from the metal foil 41 to expose the metal foil 41 and the thin metal layer 46a as shown in FIG.

  Then, as shown in FIG. 22, the metal foil 41, the first separating metal thin layer 46 b, and the second separating metal thin layer 46 c are removed by performing an etching process, so that the through hole of the insulating sheet 11 is removed. A gap is formed between the inner surface of 11H and the outer peripheral surface of the peripheral electrode 13, and between the inner peripheral surface of the peripheral electrode 13 and the outer peripheral surface of the insulating layer 48 integrated with the center electrode 12, thereby The central electrode 12 and the peripheral electrode 13 are movable in the thickness direction of the insulating sheet 11, and thus the composite conductive sheet 10 is obtained. Note that the thin metal layer 46a remains without being etched between the center electrode 12 and the insulating layer 48 even when an easily-etchable material such as copper is used.

  According to such a manufacturing method, in the state where the rigid conductor bump 14 is inserted into the through hole 11H of the insulating sheet 11, the first metal thin film for easy separation between the center electrode 12 and the peripheral electrode 13 is provided. Etching treatment of the layer 46b and the second metal thin layer 46c for easy etching between the peripheral electrode 13 and the through hole 11H of the insulating sheet 11 together with the metal foil 41 for easy etching in the composite 40 Therefore, the required gap is reliably formed around the center electrode 12 and the peripheral electrode 13 made of a rigid conductor in the through hole 11H of the insulating sheet 11, and as a result, the movable center electrode 12 and the peripheral The electrode 13 can be formed reliably.

In the above manufacturing process, in order to prevent the center electrode 12 and the peripheral electrode 13 from falling out, the diameter of the terminal portion 12b of the center electrode 12 is locally increased from that of the body portion 12a. A step of making the diameter larger than the inner diameter and enlarging the diameter of the terminal portion 13b of the peripheral electrode 13 more locally than the body portion 13a to make the diameter larger than the diameter of the through hole 11H of the insulating sheet 11 Can be included. An example of such a process is a process for forging at both ends of the rigid conductor bump 14.
<Anisotropic conductive connector>
FIG. 23 is a cross-sectional view for explaining the structure of an example of the anisotropic conductive connector using the composite electrode sheet of the present invention. FIG. 24 is an enlarged view of the main part of the anisotropic conductive connector shown in FIG. FIG. 23 is a sectional view for explanation (in FIG. 23, the composite conductive sheet and the anisotropic conductive elastomer sheet are separated from each other for convenience). The anisotropic conductive connector 15 includes a composite conductive sheet 10 having the configuration shown in FIG. 1 and a first anisotropic conductive elastomer sheet 16 disposed on one surface (upper surface in FIG. 23) of the composite conductive sheet 10. And the second anisotropic conductive elastomer sheet 17 disposed on the other surface of the composite conductive sheet 10.

  In the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 in this example, the conductive particles P exhibiting magnetism are in the thickness direction in the insulating elastic polymer material. The chain is formed in such a state that a chain is formed by being oriented so that the chain is formed, and the chain of the conductive particles P is dispersed in the plane direction.

  As the elastic polymer material forming the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17, a polymer material having a crosslinked structure is preferable. Various materials can be used as the curable polymer substance-forming material that can be used to obtain such an elastic polymer substance. Specific examples thereof include polybutadiene rubber, natural rubber, and polyisoprene rubber. , Conjugated diene rubbers such as styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, blocks such as styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer Examples include copolymer rubber and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. In these, it is preferable to use a silicone rubber from a viewpoint of durability, a moldability, and an electrical property.

As the silicone rubber, those obtained by crosslinking or condensing liquid silicone rubber are preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of a condensation type, an addition type, a vinyl group or a hydroxyl group. Good. Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, and the like.

  The silicone rubber preferably has a molecular weight Mw (referred to as a standard polystyrene-converted weight average molecular weight; the same shall apply hereinafter) of 10,000 to 40,000. Moreover, since favorable heat resistance is obtained in the anisotropically conductive elastomer sheet obtained, it means the molecular weight distribution index (the value of the ratio Mw / Mn between the standard polystyrene equivalent weight average molecular weight Mw and the standard polystyrene equivalent number average molecular weight Mn). The same shall apply hereinafter) is preferably 2 or less.

  As the conductive particles P contained in the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17, the particles can be easily aligned in the thickness direction by a method described later. For this reason, conductive particles exhibiting magnetism are used. Specific examples of such conductive particles include particles of metals having magnetism such as iron, cobalt, nickel or the like, particles of these alloys, particles containing these metals, or these particles as core particles. The core particles are formed by plating the surface of the core particles with a metal having good conductivity such as gold, silver, palladium, rhodium, or inorganic substance particles such as non-magnetic metal particles or glass beads, or polymer particles. The surface of the particles may be plated with a conductive magnetic metal such as nickel or cobalt.

Among these, it is preferable to use nickel particles as core particles and the surfaces thereof plated with gold having good conductivity.
Examples of means for coating the surface of the core particles with the conductive metal include chemical plating or electrolytic plating, sputtering, and vapor deposition.

  When the conductive particles P used are those in which the surface of the core particles is coated with a conductive metal, good conductivity can be obtained. Therefore, the coverage of the conductive metal on the particle surface (the surface area of the core particles) The ratio of the area covered with the conductive metal is preferably 40% or more, more preferably 45% or more, and still more preferably 47 to 95%.

  The coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particles, more preferably 2 to 30% by mass, further preferably 3 to 25% by mass, and particularly preferably 4 to 20% by mass. It is. When the conductive metal to be coated is gold, the coating amount is preferably 0.5 to 30% by mass of the core particles, more preferably 2 to 20% by mass, and further preferably 3 to 15%. % By mass.

  The number average particle diameter of the conductive particles P is preferably 3 to 20 μm, more preferably 5 to 15 μm. When this number average particle diameter is too small, it may be difficult to orient the conductive particles P in the thickness direction in the production method described later. On the other hand, when the number average particle diameter is excessive, it may be difficult to obtain an anisotropic conductive elastomer sheet with high resolution.

  The particle size distribution (Dw / Dn) of the conductive particles P is preferably 1 to 10, more preferably 1.01 to 7, still more preferably 1.05 to 5, particularly preferably 1.1 to 4. It is.

  The shape of the conductive particles P is not particularly limited, but spherical particles, star-shaped particles, or secondary particles in which these particles are aggregated in that they can be easily dispersed in the polymer material-forming material. It is preferable that

  Further, as the conductive particles P, those whose surfaces are treated with a coupling agent such as a silane coupling agent or a lubricant can be appropriately used. By treating the particle surface with a coupling agent or a lubricant, the durability of the resulting anisotropic conductive elastomer sheet is improved.

  Such conductive particles P are preferably contained in the anisotropic conductive elastomer sheet at a volume fraction of 10 to 40%, particularly 15 to 35%. When this ratio is too small, an anisotropic conductive elastomer sheet having sufficiently high conductivity in the thickness direction may not be obtained. On the other hand, if this ratio is excessive, the resulting anisotropic conductive elastomer sheet tends to be fragile, and the elasticity necessary for the anisotropic conductive elastomer sheet may not be obtained.

  The thickness of each of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 is preferably 20 to 100 μm, and more preferably 25 to 70 μm. When this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

The first anisotropic conductive elastomer sheet 16 can be manufactured as follows.
First, as shown in FIG. 25, each of the sheet-like one side molding member 30 and the other side molding member 31, and the opening 32K having a shape that matches the planar shape of the target first anisotropic conductive elastomer sheet 16. And a frame-shaped spacer 32 having a thickness corresponding to the thickness of the first anisotropic conductive elastomer sheet 16, and a liquid polymer substance-forming material that is cured to become an elastic polymer substance A conductive elastomer material containing conductive particles is prepared.

  Then, as shown in FIG. 26, a spacer 32 is arranged on the molding surface (the upper surface in FIG. 26) of the other surface side molding member 31, and in the opening 32K of the spacer 32 on the molding surface of the other surface side molding member 31. Then, the prepared conductive elastomer material 16B is applied, and then the one side molding member 30 is arranged on the conductive elastomer material 16B so that the molding surface (the lower surface in FIG. 26) is in contact with the conductive elastomer material 16B. To do.

In the above, as the one side molding member 30 and the other side molding member 31, a resin sheet made of polyimide resin, polyester resin, acrylic resin, or the like can be used.
Moreover, it is preferable that the thickness of the resin sheet which comprises the one surface side molded member 30 and the other surface side molded member 31 is 50-500 micrometers, More preferably, it is 75-300 micrometers. If this thickness is less than 50 μm, the strength required for the molded member may not be obtained. On the other hand, when the thickness exceeds 500 μm, it may be difficult to apply a magnetic field having a required strength to the conductive elastomer material layer described later.

  Next, as shown in FIG. 27, using the pressure roll device 35 including the pressure roll 33 and the support roll 34, the conductive elastomer material 16 </ b> B is clamped by the one-surface-side molded member 30 and the other-surface-side molded member 31. Thus, the conductive elastomer material layer 16 </ b> A having a required thickness is formed between the one side molding member 30 and the other side molding member 31. In the conductive elastomer material layer 16A, as shown in an enlarged view in FIG. 28, the conductive particles P are contained in a uniformly dispersed state.

  Thereafter, for example, a pair of electromagnets are arranged on the back surface of the one-surface-side molded member 30 and the back surface of the other-surface-side molded member 31, and the electromagnets are operated to generate a parallel magnetic field in the thickness direction of the conductive elastomer material layer 16A. Make it work. As a result, in the conductive elastomer material layer 16A, the conductive particles P dispersed in the conductive elastomer material layer 16A maintain the state of being dispersed in the plane direction as shown in FIG. However, a plurality of conductive particles P, which are aligned in the thickness direction, are formed so as to be dispersed in the plane direction.

  In this state, the conductive elastomer material layer 16A is cured, so that the conductive particles P are aligned in the thickness direction in the elastic polymer substance, and the conductive particles P are formed by the conductive particles P. A first anisotropic conductive elastomer sheet 16 is produced which contains chains in a state dispersed in the plane direction.

  In the above, the curing process of the conductive elastomer material layer 16A can be performed while the parallel magnetic field is applied, but can also be performed after the parallel magnetic field is stopped.

The intensity of the parallel magnetic field applied to the conductive elastomer material layer 16A is preferably 0.02 to 2.5 Tesla on average.
The curing treatment of the conductive elastomer material layer 16A is appropriately selected depending on the material to be used, but is usually performed by heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material constituting the conductive elastomer material layer 16A, the time required to move the conductive particles P, and the like.

Further, the second anisotropic conductive elastomer sheet 17 can be manufactured by the same method as the first anisotropic conductive elastomer sheet 16.
According to such an anisotropic conductive connector 15, each of the center electrode 12 and the peripheral electrode 13 in the composite conductive sheet 10 is movable in the thickness direction with respect to the insulating sheet 11. When pressed in the thickness direction by the electrode to be used, the first anisotropic conductive elastomer sheet 16 disposed on one surface of the composite conductive sheet 10 and the second disposed on the other surface of the composite conductive sheet 10. The anisotropic conductive elastomer sheet 17 is compressed and deformed in conjunction with the movement of the center electrode 12 and the peripheral electrode 13, so that the uneven absorption capacity of the anisotropic conductive connector 15 is the total of the uneven absorption capacity of the anisotropic conductive connector 15. Therefore, high unevenness absorbing ability can be obtained.

  In addition, the thickness necessary for obtaining the required unevenness absorbing capability may be ensured by the total thickness of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17. Since a thin conductive elastomer sheet can be used, high resolution can be obtained.

Therefore, even for a connection object in which the separation distance between adjacent electrodes is small and the height level of the electrodes varies, electrical connection to each of the electrodes is performed in a state where necessary insulation is ensured between the adjacent electrodes. Connection can be reliably achieved.
<Adapter device>
30 is an explanatory cross-sectional view showing a configuration in an example of an adapter device using the composite electrode sheet of the present invention, and FIG. 31 is an explanatory cross-sectional view showing an adapter main body in the adapter device shown in FIG. This adapter device is for testing a circuit device used for conducting an electrical resistance measurement test of each wiring pattern by a four-terminal inspection for a circuit device such as a printed circuit board, for example, and is an adapter body made of a multilayer wiring board 20

  On the surface of the adapter body 20 (the upper surface in FIGS. 30 and 31), connection electrodes for current supply (hereinafter referred to as “current supply”) that are electrically spaced apart from each other and are electrically connected to the same electrode to be inspected. A connection electrode region 25 in which a plurality of connection electrode pairs 21a each including a connection electrode 21b and a voltage measurement connection electrode (hereinafter also referred to as a "voltage measurement electrode") 21c are formed. Has been. These connection electrode pairs 21a are arranged according to a pattern corresponding to the pattern of the electrodes to be inspected of the circuit device to be inspected.

On the back surface of the adapter body 20, for example, the pitch is 0.8mm, 0.75mm, 1.5m
A plurality of terminal electrodes 22 are arranged according to the grid point positions of m, 1.8 mm, and 2.54 mm.

Each of the current supply electrode 21 b and the voltage measurement electrode 21 c is electrically connected to the terminal electrode 22 by the internal wiring portion 23.
On the surface of the adapter main body 20, the anisotropic conductive connector 15 basically configured as shown in FIG. 23 and the second anisotropic conductive elastomer sheet 17 are basically provided on the connection electrode region 25. And is fixed to the adapter body 20 by appropriate means (not shown).

  In this anisotropic conductive connector 15, the central electrode 12 and the peripheral electrode 13 are arranged on the composite conductive sheet 10 according to the same pattern as the specific pattern related to the connection electrodes 21b and 21c in the adapter body 20, The anisotropic conductive connector 15 is arranged such that each of the center electrodes 12 in the composite conductive sheet 10 is positioned immediately above the connection electrode 21c of the adapter body 20, and each of the peripheral electrodes 13 is positioned directly above the connection electrode 21b. Has been.

According to the adapter device described above, since the anisotropic conductive connector 15 having the configuration shown in FIG. 23 is provided, the circuit device to be inspected has a small separation distance between adjacent inspected electrodes, and the height of the inspected electrodes is high. Even if there are variations in level, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected.
<Electrical inspection equipment for circuit devices>
FIG. 32 is an explanatory diagram showing a configuration in an example of an electrical inspection device for a circuit device using a composite electrode sheet obtained by the manufacturing method of the present invention. This electrical inspection device is for performing an electrical resistance measurement test of each wiring pattern on a circuit device 5 such as a printed circuit board on which both electrodes 6 and 7 to be inspected are formed. The holder 2 for holding in the inspection execution area E is provided, and the holder 2 is provided with positioning pins 3 for arranging the circuit device 5 at an appropriate position in the inspection execution area E.

  Above the inspection execution area E, an upper-side adapter device 1a and an upper-side inspection head 50a configured as shown in FIG. 30 are arranged in this order from the bottom, and further above the upper-side inspection head 50a, A side support plate 56a is disposed, and the upper side inspection head 50a is fixed to the upper side support plate 56a by a column 54a. On the other hand, below the inspection execution area E, a lower-side adapter device 1b and a lower-side inspection head 50b configured as shown in FIG. 30 are arranged in this order from the top, and further below the lower-side inspection head 50b. The lower side support plate 56b is disposed, and the lower side inspection head 50b is fixed to the lower side support plate 56b by a support 54b.

  The upper side inspection head 50a is composed of a plate-like inspection electrode device 51a and an anisotropically conductive elastomer sheet 55a having elasticity that is fixedly disposed on the lower surface of the inspection electrode device 51a. The inspection electrode device 51a has a plurality of pin-shaped inspection electrodes 52a arranged on the lower surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the upper-side adapter device 1a. The electric wire 53a is electrically connected to a connector 57a provided on the upper support plate 56a, and is further electrically connected to a tester inspection circuit (not shown) via the connector 57a.

The lower inspection head 50b is composed of a plate-shaped inspection electrode device 51b and an anisotropically conductive elastomer sheet 55b having elasticity that is fixedly disposed on the upper surface of the inspection electrode device 51b. The inspection electrode device 51b has a plurality of pin-shaped inspection electrodes 52b arranged on the upper surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the lower adapter device 1b. Each of these inspection electrodes 52b The electric wire 53b is electrically connected to a connector 57b provided on the lower support plate 56b, and is further electrically connected to an inspection circuit (not shown) of the tester via the connector 57b.

  The anisotropic conductive elastomer sheets 55a and 55b in the upper side inspection head 50a and the lower side inspection head 50b are each formed by forming a conductive path forming portion that forms a conductive path only in the thickness direction. As such anisotropically conductive elastomer sheets 55a and 55b, those in which the respective conductive path forming portions are formed so as to protrude in the thickness direction on at least one surface are preferable in terms of exhibiting high electrical contact stability. .

  In such an electrical inspection device for a circuit device, the circuit device 5 to be inspected is held in the inspection execution region E by the holder 2, and in this state, each of the upper support plate 56a and the lower support plate 56b is By moving in the direction approaching the circuit device 5, the circuit device 5 is pinched by the upper adapter device 1a and the lower adapter device 1b.

  In this state, the electrode 6 to be inspected on the upper surface of the circuit device 5 is connected to both the current supply electrode 21b and the voltage measurement electrode 21c in the connection electrode pair 21a of the upper adapter device 1a. The terminal electrode 22 of the upper adapter device 1a is electrically connected to the inspection electrode 52a of the inspection electrode device 51a via the anisotropic conductive elastomer sheet 55a. On the other hand, the electrode 7 to be inspected on the lower surface of the circuit device 5 is connected to both the current supply electrode 21b and the voltage measurement electrode 21c in the connection electrode pair 21a of the lower adapter device 1b via the anisotropic conductive connector 15. The terminal electrode 22 of the lower side adapter device 1b is electrically connected to the inspection electrode 52b of the inspection electrode device 51b via the anisotropic conductive elastomer sheet 55b.

  In this way, the test electrodes 6 and 7 on both the upper and lower surfaces of the circuit device 5 are respectively connected to the test electrode 52a of the test electrode device 51a in the upper test head 50a and the test electrode device 51b in the lower test head 50b. By being electrically connected to each of the test electrodes 52b, a state of being electrically connected to the test circuit of the tester is achieved, and a required electrical test is performed in this state.

  Specifically, a constant value of current is supplied between the current supply electrode 21b in the upper adapter device 1a and the current supply electrode 21b in the lower adapter device 1b, and a plurality of currents in the upper adapter device 1a are provided. One of the voltage measuring electrodes 21c is designated, and the designated one voltage measuring electrode 21c and the electrode to be inspected 5 on the upper surface side electrically connected to the voltage measuring electrode 21c are supported. The voltage between the voltage measuring electrode 21c in the lower-side adapter device 1b electrically connected to the electrode 6 to be inspected on the lower surface side is measured, and the designated 1 is determined based on the obtained voltage value. The electrical resistance value of the wiring pattern formed between the upper electrode under test 5 electrically connected to the two voltage measuring electrodes 21c and the corresponding other electrode 6 under test is obtained. It is. And the electrical resistance of all the wiring patterns is measured by sequentially changing the designated voltage measuring electrode 21c.

According to the electrical inspection device for a circuit device described above, since the upper side adapter device 1a and the lower side adapter device 1b configured as shown in FIG. Even if the distance between the electrodes 6 and 7 is small and the height levels of the electrodes 6 and 7 to be inspected vary, a required electrical inspection can be reliably performed on the circuit device 5.
Second Embodiment <Composite Conductive Sheet>
FIG. 33 is an explanatory cross-sectional view showing a configuration of an example of the composite conductive sheet of the present invention, and FIG. 34 (a) is an explanatory cross-sectional view showing an enlarged main part of the composite conductive sheet shown in FIG. FIG. 34B is a plan view for explanation. The composite conductive sheet 10 includes an insulating sheet 11 formed according to a pattern corresponding to a pattern of electrodes to which a plurality of through holes 11H extending in the thickness direction are to be connected, and each through hole 11H of the insulating sheet 11. The insulating sheet 11 includes a central electrode 12 and a peripheral electrode 13 that are arranged so as to protrude from both surfaces of the insulating sheet 11 and are made of a rigid conductor integrated through an insulating layer 48.

  The center electrode 12 includes a cylindrical body portion 12 a inserted through the through hole 11 </ b> H of the insulating sheet 11, and terminal portions 12 b at both ends of the body portion 12 a and exposed on the surface of the insulating sheet 11. Has been. The length L1 of the body 12a in the center electrode 12 is set to be larger than the thickness t of the insulating sheet 11.

  The peripheral electrode 13 is constituted by a cylindrical body portion 13 a inserted through the through hole 11 </ b> H of the insulating sheet 11, and terminal portions 13 b that are at both ends of the body portion 13 a and are exposed on the surface of the insulating sheet 11. Has been. The length L2 of the body portion 13a in the peripheral electrode 13 is larger than the thickness t of the insulating sheet 11, and the outer diameter d3 of the body portion 13a is smaller than the diameter d4 of the through hole 11H of the insulating sheet 11. Thus, the peripheral electrode 13 can be moved in the thickness direction of the insulating sheet 11 together with the integrated insulating layer 47 and the center electrode 12.

  The insulating layer 48 is a cylindrical layer formed between the center electrode 12 and the peripheral electrode 13 and has a thickness of ((inner diameter d2 of the peripheral electrode 13) − (diameter d1 of the central electrode 12)). Equal to / 2.

  Examples of the material of the insulating sheet 11 include resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, and polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, and glass fiber reinforced polyimide resin. Examples thereof include a fiber reinforced resin material such as epoxy resin, and a composite resin material containing an inorganic material such as alumina or boron nitride as a filler in an epoxy resin or the like.

When the composite conductive sheet 10 is used in a high temperature environment, it is preferable to use the insulating sheet 11 having a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, more preferably 1 × 10 ^{−. 6 to} 2 × 10 ⁻⁵ / K, more preferably 1 × 10 ^{−6 to} 6 × 10 ⁻⁶ / K. By using such an insulating sheet 11, it is possible to suppress displacement of the center electrode 12 and the peripheral electrode 13 due to thermal expansion of the insulating sheet 11.

The thickness t of the insulating sheet 11 is preferably 10 to 200 μm, more preferably 15 to 100 μm.
The diameter d4 of the through hole 11H of the insulating sheet 11 is preferably 60 to 400 μm, more preferably 80 to 250 μm.

  As the material for the center electrode 12 and the peripheral electrode 13, a metal material having rigidity can be suitably used, and in particular, a material that is less likely to be etched than a thin metal layer formed on an insulating sheet in the manufacturing method described later. It is preferable. Specific examples of such a metal material include simple metals such as nickel, cobalt, gold, and aluminum, or alloys thereof.

As the material of the insulating layer 48, in order to prevent a short circuit between the center electrode 12 and the peripheral electrode 13 at the time of electrical inspection of the circuit board, a material that can prevent these conduction is used. For example, it can be formed by a liquid resist (permanent resist), an insulating coating, or the like.

The diameter d1 of the body 12a in the center electrode 12 is preferably 20 μm or more, more preferably 30 μm or more.
The thickness of the body portion 13a in the peripheral electrode 13 is preferably 40 μm or more, more preferably 50 μm or more.

The thickness of the insulating layer 48 has a size that can reliably prevent the short-circuit between the center electrode 12 and the peripheral electrode 13 according to the forming material, and is set in consideration of the manufacturing process.
The difference (d4−d3) between the diameter d4 of the through hole 11H of the insulating sheet 11 and the outer diameter d3 of the body 13a in the peripheral electrode 13 is preferably 1 μm or more, more preferably 2 μm or more. When this difference is too small, it may be difficult to move the peripheral electrode 13 with respect to the thickness direction of the insulating sheet 11.

  The movable distance of the center electrode 12 and the peripheral electrode 13 in the thickness direction of the insulating sheet 11 is preferably 3 to 150 μm, more preferably 5 to 100 μm, and still more preferably 10 to 50 μm. When the movable distance between the center electrode 12 and the peripheral electrode 13 is too small, it may be difficult to obtain sufficient uneven absorption capability in the anisotropic conductive connector described later. On the other hand, when the movable distance of the center electrode 12 and the peripheral electrode 13 is excessive, the length exposed from the through hole 11H of the insulating sheet 11 of the trunk portion 12a and the trunk portion 13a is increased and used for the inspection. Sometimes, the trunk 12a and the trunk 13a may buckle or be damaged.

  Both ends of the rigid conductor in which the center electrode 12 and the peripheral electrode 13 are integrated via the insulating layer 47 are locally enlarged in diameter so as to be larger than the diameter of the through hole 11H of the insulating sheet 11. May be. By doing in this way, it can prevent effectively that the said rigid conductor falls out from the through-hole 11H of the insulating sheet 11. FIG.

In the present invention, the composite conductive sheet 10 as described above is
An insulating layer, a peripheral conductor rigid conductor layer, and a metal thin layer for separation that is easily etched so as to continuously cover at least a part of the outer peripheral portion and one end of the core electrode core portion made of a rigid conductor. And a step (1) of producing a composite formed such that a plurality of rigid conductor bumps formed in this order protrude from at least one surface of an easily etchable metal foil,
Perforating an insulating sheet with each of the rigid conductor bumps in the composite, thereby forming a plurality of through holes in the insulating sheet and inserting the rigid conductor bumps into each through hole; and
Removing at least a part of the rigid conductor bump including the end portion thereof, thereby exposing the peripheral electrode rigid conductor layer, the insulating layer, and the central electrode core portion from the end portion of the rigid conductor bump (3); When,
A step of removing the metal foil and the separating metal thin layer by an etching process so that the central electrode and the peripheral electrode integrated through the insulating layer are movable in the thickness direction of the insulating sheet ( And 4).

Hereinafter, the manufacturing method of the composite electroconductive sheet 10 is demonstrated concretely.
Process (1)
First, the steps shown in FIGS. 3 to 10 in the first embodiment described above are performed. That is, first, as shown in FIG. 3, an easily-etchable metal foil 41 and resist layers 42 and 43 integrally laminated on one surface (the lower surface in the figure) and the other surface of the metal foil 41 are provided. The laminated body 40A having is manufactured.

  The metal foil 41 and the resist layers 42 and 43 in the laminated body 40 have a total thickness larger than the length of the center electrode 12 to be formed, and a resist layer ( Hereinafter, it is also referred to as “one resist layer”.) 42 has a thickness larger than the thickness of the insulating sheet 11. In the illustrated laminate 40A, resin sheets 44 and 45 made of, for example, polyvinyl chloride are laminated on the surfaces of the resist layers 42 and 43, respectively.

In such a laminated body 40A, copper or the like can be used as an easily-etchable metal material constituting the metal foil 41.
Moreover, it is preferable that the thickness of the metal foil 41 is 3-75 micrometers, More preferably, it is 5-50 micrometers, More preferably, it is 8-25 micrometers.

The thickness of one resist layer 42 is appropriately selected according to the thickness of the insulating sheet 11, and is, for example, 10 to 200 μm, and preferably 15 to 100 μm.
The thickness of the resist layer (hereinafter also referred to as “the other resist layer”) 43 formed on the other surface of the metal foil 41 is, for example, 10 to 50 μm, and preferably 15 to 30 μm.

Moreover, the thickness of the resin sheets 44 and 45 is 10-100 micrometers, respectively.
By performing laser processing on such a laminated body 40A, as shown in FIG. 4, through holes 41H, 42H, which communicate with each of the metal foil 41, the resist layers 42, 43, and the resin sheets 44, 45, 43H, 44H, and 45H are formed according to a pattern corresponding to the pattern of the electrodes to be connected, respectively, and thus a through hole 40H that penetrates in the thickness direction is formed in the stacked body 40A.

  Next, the laminate 40A is subjected to an electroless plating process, whereby as shown in FIG. 5, the inner wall surface of the through hole 40H of the laminate 40A, that is, the inner wall surface of the through hole 41H of the metal foil 41 and the resist layer 42. , 43, a thin metal layer 46a is formed so as to cover the inner wall surfaces of the through holes 42H, 43H, the surface of the resin sheets 44, 45 and the inner wall surfaces of the through holes 44H, 45H, and then the resist layers 42, 43. The resin sheets 44 and 45 are peeled off. Then, by subjecting the laminated body 40A to electrolytic plating using the metal thin layer 46a as an electrode, metal is deposited in the through holes 41H of the metal foil 41 and the through holes 42H and 43H of the resist layers 42 and 43. As a result, as shown in FIG. 6, a cylindrical center electrode core 12A is formed.

  Next, the surfaces of the resist layers 42 and 43 and both end surfaces of the center electrode core 12A are polished, and then, as shown in FIG. 7, by peeling off one resist layer 42 from one surface of the metal foil 41, The center electrode core portion 12 </ b> A whose outer peripheral portion is covered with the thin metal layer 46 a is projected from one surface of the metal foil 41.

Next, as shown in FIG. 8, the surface of the metal foil 41 is covered with a dry film resist 47a.
Next, as shown in FIG. 9, a liquid resist 47a is continuously applied to the entire surface of the metal foil 41 and the portion where the outer peripheral portion is covered with the thin metal layer 46a and the central electrode core 12A protrudes, Thereafter, the insulating layer 48 is formed by curing.

  Next, as shown in FIG. 10, the metal foil 41 is exposed by peeling the dry film resist 47a together with the insulating layer 48 thereon. At this time, the insulating layer 48 remains on the entire surface of the portion from which the outer peripheral portion is covered with the thin metal layer 46a and the center electrode core portion 12A protrudes.

The steps up to here are the same as those in the first embodiment described above, but in this embodiment, the surface of the metal foil 41 is then covered with a dry film resist 47b as shown in FIG.
Next, as shown in FIG. 36, the peripheral electrode rigid conductor layer 13 </ b> A is continuously formed on the entire surface of the dry film resist 47 b and the insulating layer 48 by performing an electroless plating process.

  Next, as shown in FIG. 37, the metal foil 41 is exposed by peeling the dry film resist 47b together with the peripheral electrode rigid conductor layer 13A thereon. At this time, the peripheral electrode rigid conductor layer 13 </ b> A remains on the entire surface of the protruding portion of the central electrode core 12 </ b> A whose outer peripheral portion is covered with the insulating layer 48.

  Next, as shown in FIG. 38, by performing an electroless plating process, an easily etchable separating metal thin layer 46b is continuously formed on the entire surface of the metal foil 41 and the peripheral electrode rigid conductor layer 13A. Thus, the thin metal layer 46a, the insulating layer 48, the peripheral electrode rigid conductor layer 13A, and the separating thin metal layer are formed so as to continuously cover the outer peripheral portion and one end portion of the center electrode core portion 12A. 46b and the composite body 40 in which the plurality of rigid conductor bumps 14 formed in this order are formed so as to protrude from one surface of the metal foil 41 are obtained.

In the above, copper etc. can be used as a metal material which comprises the metal thin layer 46a.
As a material for forming the insulating layer 48, liquid polyimide or the like can be used.

Copper or the like can be used as the easily-etchable metal material constituting the separating metal thin layer 46b, and these can be formed by electroless plating, electrolytic plating, or the like.
The diameter of the through hole 40H formed in the stacked body 40A is set according to the diameter of the body portion 12a of the center electrode 12 to be formed.

The thickness of the peripheral electrode rigid conductor layer 13A is set in consideration of the thickness of the peripheral electrode 13 to be formed.
The thickness of the separating metal thin layer 46b is set in consideration of the diameter of the through hole 40H formed in the stacked body 40A, the inner diameter of the peripheral electrode 13 to be formed, and the like.
Step (2)
As in the first embodiment, as shown in FIG. 16, the insulating sheet 11 is disposed on a buffer material 49 made of a polymer elastic substance, and an adhesive layer (not shown) is formed on the upper surface of the insulating sheet 11. Form. Then, as shown in FIG. 39, the separated metal thin layer 46b formed on the front end surface of each of the rigid conductor bumps 14 on the upper surface of the insulating sheet 11 on which the adhesive layer is formed. Is disposed in contact with the insulating sheet 11.

  In this state, for example, the insulating sheet 11 is pressed in the thickness direction by the composite 40 and thereby the insulating sheet 11 is perforated by each of the rigid conductor bumps 14, thereby insulating the insulating sheet 11 as shown in FIG. 40. A plurality of through holes 11H are formed in the sheet 11, and the rigid conductor bumps 14 are inserted into the through holes 11H. At this time, the metal foil 41 in the composite 40 is detachably fixed to the upper surface of the insulating sheet 11 by the adhesive layer.

In this way, as shown in FIG. 41, the insulating sheet 11 is inserted into the plurality of through-holes 11H, and the insulating sheet 11 and the composite 40 are integrated. It is done.
Step (3)
By polishing the rigid conductor bumps 14 from the end surfaces, as shown in FIG. 42, the separation metal thin layer 46b, the peripheral electrode rigid conductor layer 13A, and the insulating layer 48 on the end surface side of the rigid conductor bumps 14 are removed. Then, the end face of the center electrode core 12A is exposed.
Step (4)
After obtaining the shapes of the center electrode 12 and the peripheral electrode 13 in this manner, the resist layer 42 is removed from the metal foil 41, thereby exposing the metal foil 41 and the metal thin layer 46a as shown in FIG.

  Then, as shown in FIG. 44, the metal foil 41 and the separating metal thin layer 46b are removed by performing an etching process, so that the inner surface of the through hole 11H of the insulating sheet 11 and the outer peripheral surface of the peripheral electrode 13 are removed. Thus, the central electrode 12 and the peripheral electrode 13 integrated through the insulating layer 48 can be moved in the thickness direction of the insulating sheet 11, and thus the composite conductive sheet 10 is formed. Is obtained. Note that the thin metal layer 46a remains without being etched between the center electrode 12 and the insulating layer 48 even when an easily-etchable material such as copper is used.

  According to such a manufacturing method, for easy etching separation between the peripheral electrode 13 and the through hole 11H of the insulating sheet 11 with the rigid conductor bump 14 inserted through the through hole 11H of the insulating sheet 11. In order to remove the thin metal layer 46b together with the easily etchable metal foil 41 in the composite 40 by etching, the thin metal layer 46b was integrated with the center electrode 12 through the insulating layer 48 in the through hole 11H of the insulating sheet 11. A required gap is reliably formed around the peripheral electrode 13, and as a result, a movable rigid conductor can be reliably formed.

In the above manufacturing process, in order to prevent the center electrode 12 and the peripheral electrode 13 from falling off, the diameters at both ends of the rigid conductor in which the center electrode 12 and the peripheral electrode 13 are integrated via the insulating layer 47 are locally determined. The process of enlarging and making the said diameter larger than the diameter of the through-hole 11H of the insulating sheet 11 can be included. An example of such a process is a process for forging at both ends of the rigid conductor bump 14.
<Anisotropic conductive connector>
FIG. 45 is a cross-sectional view for explaining the structure of an example of the anisotropic conductive connector using the composite electrode sheet of the present invention. FIG. 46 is an enlarged view of the main part of the anisotropic conductive connector shown in FIG. FIG. 46 is a sectional view for explanation (in FIG. 46, the composite conductive sheet and the anisotropic conductive elastomer sheet are separated from each other for convenience). The anisotropic conductive connector 15 includes a composite conductive sheet 10 having the configuration shown in FIG. 33 and a first anisotropic conductive elastomer sheet 16 disposed on one surface (the upper surface in FIG. 45) of the composite conductive sheet 10. And the second anisotropic conductive elastomer sheet 17 disposed on the other surface of the composite conductive sheet 10.

  In the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 in this example, the conductive particles P exhibiting magnetism are in the thickness direction in the insulating elastic polymer material. The chain is formed in a state in which the chain is formed by being aligned so as to be aligned, and the chain formed by the conductive particles P is dispersed in the plane direction. By the same method as in the first embodiment described above, It is manufactured. The details are as described above, and will be omitted.

According to such an anisotropic conductive connector 15, each of the center electrode 12 and the peripheral electrode 13 in the composite conductive sheet 10 is movable in the thickness direction with respect to the insulating sheet 11. When pressed in the thickness direction by the electrode to be used, the first anisotropic conductive elastomer sheet 16 disposed on one surface of the composite conductive sheet 10 and the second disposed on the other surface of the composite conductive sheet 10. The anisotropic conductive elastomer sheet 17 is compressed and deformed in conjunction with each other as the center electrode 12 and the peripheral electrode 13 move.
The sum of the uneven absorbability of both is expressed as the uneven absorbability of the anisotropic conductive connector 15, and thus high uneven absorbability can be obtained.

  In addition, the thickness necessary for obtaining the required unevenness absorbing capability may be ensured by the total thickness of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17. Since a thin conductive elastomer sheet can be used, high resolution can be obtained.

Therefore, even for a connection object in which the separation distance between adjacent electrodes is small and the height level of the electrodes varies, electrical connection to each of the electrodes is performed in a state where necessary insulation is ensured between the adjacent electrodes. Connection can be reliably achieved.
<Adapter device>
47 is an explanatory cross-sectional view showing a configuration of an example of an adapter device using the composite electrode sheet of the present invention, and FIG. 31 is an explanatory cross-sectional view showing a configuration of an adapter main body in the adapter device shown in FIG. This adapter device is for testing a circuit device used for conducting an electrical resistance measurement test of each wiring pattern by a four-terminal inspection for a circuit device such as a printed circuit board, for example, and is an adapter body made of a multilayer wiring board 20 On the surface of the adapter body 20 (the upper surface in FIGS. 47 and 31), connection electrodes for current supply (hereinafter referred to as “current supply”) that are electrically connected to the same electrode to be inspected and are spaced apart from each other. A connection electrode region 25 in which a plurality of connection electrode pairs 21a each including a connection electrode 21b and a voltage measurement connection electrode (hereinafter also referred to as a "voltage measurement electrode") 21c are formed. Has been. These connection electrode pairs 21a are arranged according to a pattern corresponding to the pattern of the electrodes to be inspected of the circuit device to be inspected.

  A plurality of terminal electrodes 22 are arranged on the back surface of the adapter main body 20 according to lattice point positions having a pitch of 0.8 mm, 0.75 mm, 1.5 mm, 1.8 mm, 2.54 mm, for example.

Each of the current supply electrode 21 b and the voltage measurement electrode 21 c is electrically connected to the terminal electrode 22 by the internal wiring portion 23.
On the surface of the adapter main body 20, the anisotropic conductive connector 15 basically having the configuration shown in FIG. 22 and the second anisotropic conductive elastomer sheet 17 are basically provided on the connection electrode region 25. And is fixed to the adapter body 20 by appropriate means (not shown).

  In this anisotropic conductive connector 15, the central electrode 12 and the peripheral electrode 13 are arranged on the composite conductive sheet 10 according to the same pattern as the specific pattern related to the connection electrodes 21b and 21c in the adapter body 20, The anisotropic conductive connector 15 is arranged such that each of the center electrodes 12 in the composite conductive sheet 10 is positioned immediately above the connection electrode 21c of the adapter body 20, and each of the peripheral electrodes 13 is positioned directly above the connection electrode 21b. Has been.

According to the adapter device, since the anisotropic conductive connector 15 having the configuration shown in FIG. 22 is provided, the circuit device to be inspected has a small separation distance between the adjacent electrodes to be inspected, and the height of the electrodes to be inspected is high. Even if there are variations in level, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected.
<Electrical inspection equipment for circuit devices>
Using the composite electrode sheet and the adapter device of the present embodiment, an electrical inspection device for a circuit device is configured as in FIG. Since the details are as described in the first embodiment, the description thereof is omitted.

  According to such an electrical inspection device for a circuit device, since the upper side adapter device 1a and the lower side adapter device 1b configured as shown in FIG. Even if the distance between the electrodes 6 and 7 is small and the height levels of the electrodes 6 and 7 to be inspected vary, the required electrical inspection can be reliably performed on the circuit device 5. .

As mentioned above, although embodiment of this invention was described, this invention is not limited to these embodiment at all, and various deformation | transformation and a change are possible.
In the present invention, the circuit device to be inspected is not limited to a printed circuit board, but is a package IC such as BGA, LGA, CPS, TSOP, a semiconductor integrated circuit device such as SiP, MCM, a wafer on which a circuit is formed, It may be a diced wafer, a liquid crystal display element, a liquid crystal panel, or the like.

FIG. 1 is a cross-sectional view for explaining the structure of an example of the composite conductive sheet of the present invention. 2 (a) is an explanatory sectional view showing an enlarged main part of the composite conductive sheet shown in FIG. 1, and FIG. 2 (b) is an enlarged main part of the composite conductive sheet shown in FIG. FIG. FIG. 3 is a cross-sectional view illustrating the structure of a laminate for producing a composite conductive sheet. FIG. 4 is an explanatory cross-sectional view showing a state in which through holes are formed in the laminate shown in FIG. FIG. 5 is an explanatory cross-sectional view showing a state in which a thin metal layer is formed on the surface of the laminate and the inner wall surface of the through hole. FIG. 6 is an explanatory cross-sectional view showing a state in which the core portion for the center electrode is formed in the through hole of the laminated body. FIG. 7 is an explanatory cross-sectional view showing a state in which the resist layer is removed from one side of the laminate. FIG. 8 is a cross-sectional view for explaining a state in which a dry film resist is formed on one side of the laminate. FIG. 9 is an explanatory cross-sectional view showing a state in which an insulating layer is formed on one side of the laminate. FIG. 10 is an explanatory cross-sectional view showing a state after the dry film resist is peeled off. FIG. 11 is an explanatory cross-sectional view showing a state in which the first separating metal thin layer is formed on one surface of the laminate. FIG. 12 is an explanatory cross-sectional view showing a state in which a dry film resist is formed on one side of a laminate. FIG. 13 is an explanatory cross-sectional view showing a state in which the peripheral electrode rigid conductor layer is formed on one surface of the multilayer body. FIG. 14 is a cross-sectional view illustrating the state after the dry film resist is peeled off. FIG. 15 is an explanatory cross-sectional view showing the structure of a composite for producing a composite conductive sheet obtained by forming a second separating metal thin layer on one side of a laminate. FIG. 16 is an explanatory cross-sectional view illustrating a state in which the insulating sheet is disposed on the cushioning material. FIG. 17 is an explanatory cross-sectional view showing a state in which the composite is disposed on the insulating sheet. FIG. 18 is an explanatory cross-sectional view showing a state where through holes are formed in the insulating sheet. FIG. 19 is an explanatory cross-sectional view showing a state in which the rigid conductor bumps are inserted into the plurality of through holes of the insulating sheet and the insulating sheet and the composite are integrated. FIG. 20 is an explanatory cross-sectional view showing a state after polishing the end portion of the rigid conductor bump. FIG. 21 is an explanatory cross-sectional view showing a state where the metal foil and the thin metal layer are exposed by removing the resist layer from the composite. FIG. 22 is an explanatory cross-sectional view showing a composite conductive sheet obtained by removing the first and second separating metal thin layers from the composite by etching. FIG. 23 is a cross-sectional view illustrating the structure of an example of an anisotropic conductive connector using a composite conductive sheet obtained by the manufacturing method of the present invention. 24 is an explanatory cross-sectional view showing an enlarged main part of the anisotropic conductive connector shown in FIG. FIG. 25 is an explanatory cross-sectional view showing a one-surface side molded member, another surface-side molded member, and a spacer for producing the first anisotropic conductive elastomer sheet. FIG. 26 is an explanatory cross-sectional view showing a state in which a conductive elastomer material is applied to the surface of the other surface side molded member. FIG. 27 is an explanatory sectional view showing a state in which a conductive elastomer material layer is formed between the one-surface-side molded member and the other-surface-side molded member. 28 is an explanatory cross-sectional view showing the conductive elastomer material layer shown in FIG. 27 in an enlarged manner. FIG. 29 is an explanatory cross-sectional view showing a state in which a magnetic field is applied in the thickness direction to the conductive elastomer material layer shown in FIG. FIG. 30 is a cross-sectional view illustrating the configuration of an example of an adapter device using the composite conductive sheet of the present invention. FIG. 31 is a cross-sectional view illustrating the configuration of the adapter main body in the adapter device shown in FIG. FIG. 32 is an explanatory diagram showing a configuration of an example of an electrical inspection device for a circuit device using the composite conductive sheet of the present invention. FIG. 33 is a cross-sectional view illustrating the structure of an example of the composite conductive sheet of the present invention. 34 (a) is an explanatory sectional view showing an enlarged main part of the composite conductive sheet shown in FIG. 33. FIG. 34 (b) is an enlarged main part of the composite conductive sheet shown in FIG. FIG. FIG. 35 is an explanatory cross-sectional view showing a state in which a dry film resist is formed on one side of a laminate. FIG. 36 is an explanatory cross-sectional view showing a state in which the peripheral electrode rigid conductor layer is formed on one surface of the multilayer body. FIG. 37 is an explanatory cross-sectional view showing a state after the dry film resist is peeled off. FIG. 38 is a cross-sectional view illustrating the structure of a composite for producing a composite conductive sheet obtained by forming a separating metal thin layer on one side of a laminate. FIG. 39 is an explanatory cross-sectional view illustrating a state in which the composite is disposed on the insulating sheet. FIG. 40 is an explanatory cross-sectional view showing a state where through holes are formed in the insulating sheet. FIG. 41 is a cross-sectional view for explaining a state in which the rigid conductor bumps are inserted into the plurality of through holes of the insulating sheet and the insulating sheet and the composite are integrated. FIG. 42 is an explanatory cross-sectional view showing a state after polishing the end portion of the rigid conductor bump. FIG. 43 is an explanatory cross-sectional view showing a state in which the metal foil and the metal thin layer are exposed by removing the resist layer from the composite. FIG. 44 is an explanatory cross-sectional view showing a composite conductive sheet obtained by removing the metal thinning layer from the composite by etching. FIG. 45 is an explanatory cross-sectional view showing a configuration of an example of an anisotropic conductive connector using the composite conductive sheet of the present invention. FIG. 46 is an explanatory cross-sectional view showing an enlarged main part of the anisotropic conductive connector shown in FIG. FIG. 47 is an explanatory cross-sectional view showing a configuration in an example of an adapter device using the composite conductive sheet of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1a Upper side adapter apparatus 1b Lower side adapter apparatus 2 Holder 3 Positioning pin 5 Circuit apparatus 6,7 Tested electrode 10 Composite conductive sheet 11 Insulating sheet 11H Through-hole 12 Center electrode 12a Trunk part 12b Terminal part 12A Center electrode core Part 13 Peripheral electrode 13a Body part 13b Terminal part 13A Peripheral electrode rigid conductor layer 14 Rigid conductor bump 15 Anisotropic conductive connector 16 First anisotropic conductive elastomer sheet 16A Conductive elastomer material layer 16B Conductive elastomer material 17 Second anisotropic conductive elastomer sheet 20 Adapter body 21, 21 b, 21 c Connecting electrode 21 a Connecting electrode pair 22 Terminal electrode 23 Internal wiring portion 25 Connecting electrode region 30 One side molding member 31 Another side molding member 32 Spacer 32K Opening 33 Pressure roll 34 Support roll 3 5 Pressure Roll Device 40 Composite 40A Laminate 41 Metal Foil 41H Through Holes 42, 43 Resist Layers 42H, 43H Through Holes 44, 45 Resin Sheets 44H, 45H Through Hole 46a Metal Thin Layer 46b Separating Metal Thin Layer (first Thin metal layer for separation)
46c 2nd metal thin layer 47a for dry | spacing Dry film resist 47b Dry film resist 48 Insulating layer 49 Buffer material 50a Upper side inspection head 50b Lower side inspection head 51a, 51b Inspection electrode apparatus 52a, 52b Inspection electrode 53a, 53b Electric wire 54a, 54b Column 55a, 55b Anisotropic conductive elastomer sheet 56a Upper support plate 56b Lower support plate 57a, 57b Connector

Claims (5)

A composite conductive sheet used for electrical inspection of a circuit device,
A plurality of through holes each extending in the thickness direction, an insulating sheet disposed according to a pattern corresponding to the pattern of the electrode to be inspected of the circuit device to be inspected, and
A center electrode made of a rigid conductor, arranged to be movable in the thickness direction of the insulating sheet so as to protrude from each of both surfaces of the insulating sheet in each through hole of the insulating sheet,
Peripheral electrodes surrounding the periphery of the central electrode, arranged to be movable in the thickness direction of the insulating sheet so as to protrude from both sides of the insulating sheet in each through hole of the insulating sheet,
A composite conductive sheet comprising:   The composite conductive sheet according to claim 1, wherein the central electrode and the peripheral electrode are movable independently of each other in the thickness direction of the insulating sheet.   The composite conductive sheet according to claim 1, wherein the center electrode and the peripheral electrode are integrated via an insulating layer. The composite conductive sheet according to any one of claims 1 to 3,
In the insulating elastic polymer material, the conductive particles exhibiting magnetism are arranged in the thickness direction and are contained in a state of being uniformly dispersed in the surface direction, and are disposed on both sides of the composite conductive sheet. A pair of anisotropically conductive elastomer sheets;
An anisotropic conductive connector comprising: An anisotropic conductive connector according to claim 4,
A circuit to be inspected is a plurality of connection electrode pairs consisting of current supply electrodes and voltage measurement electrodes that are electrically connected to the same electrode to be inspected of the circuit device to be inspected and spaced apart from each other An adapter body arranged according to a pattern corresponding to the pattern of the electrode to be inspected of the device;
With
In the anisotropic conductive connector, each of the center electrodes in the composite conductive sheet is located immediately above one of the current supply electrode and the voltage measurement electrode in the adapter body, and each of the peripheral electrodes is for current supply in the adapter body. An adapter device, wherein the adapter device is disposed on the surface of the adapter body on the side of the connection electrode pair so as to be positioned immediately above the other of the electrode and the voltage measuring electrode.

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