JP2001124532A5 - - Google Patents

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Publication number
JP2001124532A5
JP2001124532A5 JP1999302529A JP30252999A JP2001124532A5 JP 2001124532 A5 JP2001124532 A5 JP 2001124532A5 JP 1999302529 A JP1999302529 A JP 1999302529A JP 30252999 A JP30252999 A JP 30252999A JP 2001124532 A5 JP2001124532 A5 JP 2001124532A5
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JP
Japan
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sample
light
interference
projected
interference fringe
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JP1999302529A
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English (en)
Japanese (ja)
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JP2001124532A (ja
JP4255586B2 (ja
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Priority to JP30252999A priority Critical patent/JP4255586B2/ja
Priority claimed from JP30252999A external-priority patent/JP4255586B2/ja
Publication of JP2001124532A publication Critical patent/JP2001124532A/ja
Publication of JP2001124532A5 publication Critical patent/JP2001124532A5/ja
Application granted granted Critical
Publication of JP4255586B2 publication Critical patent/JP4255586B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP30252999A 1999-10-25 1999-10-25 試料検査装置 Expired - Fee Related JP4255586B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30252999A JP4255586B2 (ja) 1999-10-25 1999-10-25 試料検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30252999A JP4255586B2 (ja) 1999-10-25 1999-10-25 試料検査装置

Publications (3)

Publication Number Publication Date
JP2001124532A JP2001124532A (ja) 2001-05-11
JP2001124532A5 true JP2001124532A5 (enExample) 2006-11-30
JP4255586B2 JP4255586B2 (ja) 2009-04-15

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ID=17910072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30252999A Expired - Fee Related JP4255586B2 (ja) 1999-10-25 1999-10-25 試料検査装置

Country Status (1)

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JP (1) JP4255586B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005049317A (ja) 2003-07-31 2005-02-24 Nidek Co Ltd 干渉計
JP4907201B2 (ja) * 2006-03-20 2012-03-28 株式会社神戸製鋼所 形状測定装置
KR102683487B1 (ko) * 2017-12-27 2024-07-10 주고꾸 도료 가부시키가이샤 측정장치 및 측정방법
JP2023103549A (ja) 2022-01-14 2023-07-27 株式会社ディスコ 厚み計測装置
KR102827160B1 (ko) * 2022-11-10 2025-06-30 한양대학교 산학협력단 Euv 블랭크 마스크 검사 장치 및 방법

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