JP2001100981A - Processor and revising method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently perform a version-up of software by efficiently compressing or deleting unnecessary files. SOLUTION: When the version-up of software of a processor is performed, the memory capacity needed for installation is compared with the remaining memory capacity of an external storage device to judge whether or not the version-up the software can be performed; if it is judged that it can not be performed, directories and files which possibly become unnecessary are displayed and compressed or deleted, and then whether or not necessary memory capacity has been secured is automatically calculated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a processing apparatus such as a semiconductor manufacturing apparatus or a personal computer.
The present invention relates to a method for upgrading a processing apparatus in which data and the like are frequently created and stored, and software must be frequently upgraded for adding functions.

[0002]

2. Description of the Related Art Conventionally, in a manufacturing apparatus such as a semiconductor manufacturing apparatus or an information processing apparatus such as a personal computer, if the memory capacity of an external storage device on the processing apparatus side becomes insufficient during the upgrade processing, the upgrade processing is performed. When the process is completed, the user is notified that the memory capacity is insufficient, and each user has sufficiently increased the memory capacity of the external storage device of the apparatus, and then performed the version upgrade process again.

In a process of upgrading a semiconductor manufacturing apparatus or the like, during backup of a database,
When the version upgrade was completed due to insufficient memory capacity of the external storage device, it took much time to repair the database.

[0004]

In the conventional software upgrade to the processing device, if the memory capacity of the external storage device of the processing device becomes insufficient during the upgrade, the upgrade is terminated and the memory capacity becomes insufficient. Notifying that there is no such file, the user deletes unnecessary files, directories, and the like in the external storage device on the processing device side, and performs a version upgrade process again after securing a sufficient memory capacity, which is inefficient.

[0005] In a manufacturing apparatus operated by a plurality of users, unnecessary files and the like can be found only at a person in charge.
Files cannot be erased blindly, and each person in charge takes a lot of time to check for unnecessary files.

The present invention solves the above-mentioned problems of the prior art,
An object of the present invention is to provide a processing device that can efficiently compress / delete unnecessary files and efficiently upgrade software.

[0007]

In order to achieve the above object, the processing apparatus according to the present invention, when upgrading the software of the processing apparatus, performs processing necessary for installation from the capacity of the upgrade media in advance. Means for calculating the memory capacity of the external storage device of the device, means for comparing the memory capacity required for the installation with the remaining memory capacity of the external storage device, and determining whether or not version upgrade is possible; A file (module) group installed in a predetermined directory on the device side is compared with a file (module) group existing in a predetermined directory of a new version upgrade medium, and a directory or a directory not in the predetermined directory of the version upgrade medium is compared. Register the file in the specified mismatched data display file And means for displaying a directory or file registered in the mismatched data display file to select an unnecessary directory or file in the external storage device, and a mismatched data display file when it is determined that the version cannot be upgraded. Means for displaying the directories and files registered in, compressing or deleting the selected directories or files,
After compressing or erasing a directory or file,
Means for automatically calculating whether the memory capacity required for installation in the external storage device has been secured from the upgrade media.

The apparatus further comprises means for displaying a directory structure on the processing device side, and an unnecessary file name or directory name selected in advance from the displayed directory or files in the directory to display a predetermined unnecessary data. If it is determined that the version cannot be upgraded, the directory and file registered in the unnecessary data display file are displayed.
Means for compressing or deleting the selected directory or file. As a result, even if the memory capacity required for installation on the external storage device cannot be secured after compressing or deleting the directory and file registered in the mismatched data display file, the file is registered in the unnecessary data display file. By deleting unnecessary directories and files from the directories and files to be updated, the version can be efficiently upgraded.

[0009] Further, if it is possible to install as a result of calculating whether the memory capacity required for the installation has been secured in the external storage device, means for automatically starting the installation is provided. Can be done

If, after compressing or deleting the directories and files registered in the mismatched data display file or the unnecessary data display file, the memory capacity required for installation in the external storage device cannot be secured, By further providing a means for displaying unnecessary directories or files in the storage device, the upgrade operator can further select and compress / delete unnecessary files.

[0011] The version upgrade method of the present invention is a method of upgrading the processing apparatus of the present invention, in which the memory capacity of an external storage device of the processing apparatus required for installation is calculated in advance from the capacity of the media for upgrading.
By comparing the memory capacity required for this installation with the remaining memory capacity of the external storage device, it is determined whether or not the version can be upgraded. A directory or file that does not match is compared with a file group existing in a predetermined directory of the uploading medium, and the directory or file that does not match is registered as a predetermined mismatched data display file, and mismatched data is displayed to select an unnecessary directory or file in the external storage device. Displays the directory or file registered in the file for display and if it is determined that the version cannot be upgraded, displays the directory and file registered in the file for mismatched data display and compresses or deletes the selected directory or file. , Direct Or after compressing or delete files from the upgrade media, and calculates whether it was possible to secure a memory capacity required to install the external storage device automatically.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a semiconductor manufacturing apparatus having a window system and operated by operating a switch section of an operation panel section will be described. FIG. 1 shows an embodiment of the present invention. FIG. 1 is a perspective view showing the appearance of a semiconductor manufacturing apparatus according to one embodiment of the present invention. As shown in FIG. 1, the semiconductor manufacturing apparatus is disposed inside a temperature control chamber 101 for controlling an environmental temperature of the apparatus main body.
EWS body 10 having CPU for controlling apparatus body
6. EW for displaying predetermined information in the device
S display device 102, monitor TV10 for displaying image information obtained via imaging means in the device body
5. Operation panel 1 for performing predetermined input to the device
03, a console unit including an EWS keyboard 104 and the like. In the figure, 107 is an ON-OFF switch,
Reference numeral 108 denotes an emergency stop switch, 109 denotes various switches, a mouse, etc., 110 denotes a LAN communication cable, 111 denotes an exhaust duct for generating heat from a console function, and 112 denotes an exhaust device for a chamber. The semiconductor manufacturing apparatus main body is installed inside the chamber 101. Display 10 for EWS
Reference numeral 2 denotes a thin flat type such as EL, plasma, liquid crystal, etc., which is housed in the entire surface of the chamber 101 and connected to the EWS main body 106 by a LAN cable 110. Operation panel 103, keyboard 104, monitor TV 105
Are installed on the entire surface of the chamber 101 so that console operations similar to those of the related art can be performed from the entire surface of the chamber 101.

FIG. 2 is a diagram showing the internal structure of the apparatus shown in FIG. FIG. 1 shows a stepper as a semiconductor manufacturing apparatus. In the drawing, reference numeral 202 denotes a reticle, and 203, a wafer. When a light beam emitted from a light source device 204 illuminates the reticle 202 through an illumination optical system 205, a pattern on the reticle 202 is exposed by a projection lens 206 to a photosensitive area on the wafer 203. Can be transferred to a layer. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. Wafer 203
Is exposed while being vacuum-sucked by the wafer chuck 291. The wafer chuck 291 is mounted on the wafer stage 20.
9 allows movement in each axis direction. Above the reticle 202, a reticle optical system 281 for detecting the amount of displacement of the reticle is arranged. Above the wafer stage 209, an off-axis microscope 282 is arranged adjacent to the projection lens 206. Off-axis microscope 282
The main function is to detect the relative position between the internal reference mark and the alignment mark on the wafer 203.

A reticle library 220 and a wafer carrier elevator 230, which are peripheral devices, are disposed adjacent to the stepper main body. Necessary reticles and wafers are stored in a reticle transport device 221 and a wafer transport device 23.
1 transports to the stepper body.

The chamber 101 is mainly provided with an air conditioner room 210 for controlling the temperature of air, a filter box 213 for filtering out minute foreign matters and forming a uniform flow of clean air, and a booth 214 for shutting off the environment of the apparatus from the outside. It is configured. In the chamber 101, air whose temperature has been adjusted by the cooler 215 and the reheater 216 in the air conditioner room 210 is supplied into the booth 214 via the air filter g by the blower 217. The air supplied to the booth 214 is returned to the air conditioner room 21 from the return port ra.
0 and circulates in the chamber 101. Normally, the chamber 101 is not strictly a complete circulation system, and the inside of the booth 214 is always maintained at a positive pressure.
The air outside the booth 214 is introduced from an outside air inlet oa provided in the air conditioner room 210 via a blower. In this way, the chamber 101 can keep the environment temperature where the apparatus is placed at a constant level and keep the air clean.

The light source device 204 is provided with an intake port sa and an exhaust port ea in preparation for cooling of the ultra-high pressure mercury lamp and generation of toxic gas when a laser abnormality occurs, and a part of the air in the booth 214 passes through the light source device 204. The air is forcibly exhausted to factory equipment via a dedicated exhaust fan provided in the air conditioner room 210. Further, a chemical adsorption filter cf for removing chemical substances in the air is provided so as to be connected to the outside air introduction port oa and the return port ra of the air conditioner room 210, respectively.

FIG. 3 is a block diagram showing an electric circuit configuration of the apparatus shown in FIG. In the figure, reference numeral 321 denotes a main unit C built in the EWS main unit 106, which controls the entire apparatus.
It is a PU and comprises a central processing unit such as a microcomputer or a minicomputer. 322 is a wafer stage driving device, 323 is an alignment detection system such as the off-axis microscope 282 or the like, 324 is a reticle stage driving device, 325 is an illumination system such as the light source device 204 or the like, 326
Is a shutter driving device, 327 is a focus detection system, 32
Reference numeral 8 denotes a Z drive device, which is controlled by the main body CPU 321. 329 is the reticle transport device 2
21, a transfer system such as a wafer transfer device 231. 330
Is a console unit having the display 102, the keyboard 104, a graphic board (not shown), etc., for giving various commands and parameters relating to the operation of the exposure apparatus to the main body CPU 321. That is, it is for exchanging information with the operator.

331 is, for example, a hard disk,
A database is built therein, and records various parameters and their management data, groups of operators, and the like.

FIG. 4 is a block diagram for explaining the principle of the present invention, and includes a processing device 401, an input device 402 such as a keyboard, a database 403 storing various parameters and their management data, and a CRT. Display device 404, external storage device 405, media device 4 such as MO (magneto-optical disk) / FD (floppy disk)
06.

The processing device 401 includes a semiconductor device operating system 407, a media capacity calculation unit 408 for calculating the capacity of the installation media, an external storage device memory calculation unit 409 for calculating the remaining memory of the external storage device,
A version upgrade determining unit 410 for determining whether or not a version upgrade is possible; a directory / file configuration comparing unit 41 for comparing directories and their file configurations
1. A directory / file registration unit 412 for registering different directories and files based on a comparison of the directory and its file structure, a directory / file compression / deletion unit 413 for compressing and deleting selected directories and files, version upgrade It has a version upgrade process execution unit 414 that performs the process.

Hereinafter, each part constituting the processing device 401 of FIG. 4 will be described. The operating system 407 for a semiconductor device includes the components (408 to 4) of the present invention.
The processing of 14) is controlled.

The media capacity calculation unit 408 uses the MO / FD
And the like, and calculate the capacity of the media set in the media device 406, and report the result to the operating system 40.
Notify 7.

The external storage device memory calculation unit 409 calculates the current free space of the external storage device 405 of the processing device 401, and outputs the result to the operating system 407.
Notify to

The version upgrade judging section 410 manages the media capacity calculated by the media capacity calculating section 408 and the external capacity of the processing device 401 calculated by the external storage device memory calculating section 409, which are managed by the operating system 407. Based on the information on the current free space in the storage device 405, the operating system 40 determines whether or not the media set in the MO / FD media device 406 can be upgraded to the processing device 401.
Notify 7

Directory / file structure comparison unit 411
Compares the external storage device 405 of the processing device 401 with the media directory of the MO / FD device 406 in which the media for installation is set and the file configuration thereof.
When a file or the like is searched, the information is notified to a directory / file registration unit 412 described later.

The directory / file registration unit 412
The information retrieved by the directory / file configuration comparison unit 411 is received and registered in a registration file shown in FIG.

Directory / file compression / deletion unit 41
3 reads the file registered by the directory / file registration unit 412, and displays the information on the display device 404.
To display. Then, a desired directory or file is selected from the displayed directories and files, and either compression or deletion is selected, and the directory and file registered by the directory / file registration unit 412 are compressed or deleted.

The directory / file compression / deletion unit 413 compresses or deletes a directory or a file, thereby saving the external storage device 40 of the processing device 401.
5 more memory. Therefore, the version upgrade determining unit 410 determines again whether the version upgrade is possible, and the version upgrade process execution unit 414 executes the version upgrade process if possible.

FIG. 5 shows the processing of the directory / file structure comparison unit 411, which displays the results of comparison between the external storage device 405 of the processing device 401 and the directories and files of the media set in the MO / FD device 406. It is a figure showing a state.

In the figure, reference numeral 501 denotes a directory display area, and 502 denotes a file display area. When a directory displayed in the directory display area 501 is selected, files in the directory selected in the directory display area 501 are displayed in the file display area 502. A compression button 503 selects a file in the file display area 502 and operates the button 503 to compress the selected file. A delete button 504 selects a file in the file display area and operates this button to delete the selected file. By operating this button 505, the user selects all the files displayed in the file display area 502. FIG. 5 shows a state when this button is pressed. By operating this button, a registration file (directory) button 506 reads the registration file of FIG. 8 registered in the directory / file registration unit 412 and stores the registered directory in the directory display area 501.
By selecting one of the displayed directories, the files in the selected directory can be displayed in the file display area 502. In FIG. 5, the user presses a registration file (directory) button 506 and presses a 2
This shows the state when the directory on the line is selected. 507
By operating this button, the registered file of FIG. 8 registered in the directory / file registration unit 412 is read, and the registered file is displayed in the file display area 5.
02 can be displayed.

The directory structure display button 508 is
By operating this button, the processing device 401
Is displayed in the directory display area 501 in the external storage device 405. The upgrade start button 509 is used to increase / decrease the capacity of the external storage device 405 by compressing / deleting the mismatch information of the description.
Then, it is automatically calculated whether the memory capacity that can be installed was secured, and as a result of the calculation, if the installation is possible, this button can be pressed, and the version upgrade is started by pressing the button. If the version upgrade determination unit 410 determines that the version upgrade cannot be performed due to insufficient memory capacity, the version upgrade START button 509 cannot be pressed. By operating the end button 510, the directory / file display window of FIG. 5 can be ended. The scroll bar 511 displays information on the displayed directory or file in the display area 501 or 5.
If it does not fit in 02, a scroll bar for scrolling the area is shown. The registration button 512 is operated by operating the directory structure display button 508 to thereby display the directory display area 501 and the file display area 502.
4, directories and files in the external storage device 405 of the information processing apparatus 401 shown in FIG. 4 are respectively displayed. By selecting a directory or file in the directory and pressing a registration button 512, the selected directory or file is displayed. Is registered in a registration file shown in FIG.

FIG. 6 is a flowchart showing version upgrade processing control according to the present invention. First, the processing device 4
The installation media is set in the MO / FD device 406 connected to the device 01, and the upgrade process is started (step S101). At that time, the processing device 4
The installation media capacity is calculated by the media capacity calculation unit 408 (step S102). Next, the remaining memory of the external storage device 405 of the processing device 401 is calculated by the external storage device memory calculation unit 409 of the processing device 401 (step S103), and the media capacity calculation unit 408 and the external storage device calculation The data calculated by the unit 409 is checked by the version upgrade determination unit 410 of the processing device 401 (step S104). If the remaining memory of the external storage device 405 has a memory capacity that can be upgraded, the version upgrade process of the processing device 401 is performed. The execution unit 414 executes the version upgrade process (step S110), and ends the process. External storage device 405
If the remaining memory is a memory capacity that cannot be upgraded, the directory / file configuration comparison unit 411 of the processing device 401 installs the external storage device 405 of the processing device 401 and the installation set in the MO / FD device 406. The directory of the media and its file configuration are compared (step S105), different directories and files are registered in the registration file of FIG. 8 (step S106), and the screen of FIG. 5 is displayed (step S107). On the screen, the selected directory or file is compressed or deleted with the compress button or the delete button, respectively (step S108), and it is automatically calculated whether the installable memory capacity has been secured, and the calculated result is obtained. It is determined in step S109 whether or not installation is possible. If it is determined that installation is possible, a version upgrade process is executed (step S11).
0) End the process. If it is determined in step S109 that the file cannot be installed, a process of displaying the screen of FIG. 5 for selecting a file to be compressed / deleted (step S10)
7) Repeat the subsequent steps. If the memory capacity that can be upgraded cannot be secured even if different directories and files are compressed / deleted, the directory configuration display button 508 is operated on the screen of FIG.
The directory structure (including files) in the external storage device 405 of the processing device 401 is displayed, and a directory or file that is not required is further selected from directories and files not registered in the registration file, and the compression / deletion is performed. (Step S108). Processing of the judgment (Step S10
If the end button 510 in FIG. 5 is pressed during 9), the process ends without executing the version upgrade process (step S110).

FIG. 7 is a diagram showing the directory structure of the external storage device of the processing apparatus and the directory structure of the installation medium. 701 is the directory structure of the external storage device of the processing apparatus, and 702 is the installation medium. Shows the directory structure inside.

As shown in FIG. 7, the directory structure in the installation medium is fixed, and similarly, the directory structure at the time of installation on the processing device side is fixed (for example, “/ console / i4 / c” in the structure 701).
ur ”). Therefore, in the case of FIG. 7, the directory structure 701 and the following directory “/ console / i4 / cur” and the installation media side directory structure 702
Will be compared with the directory structure under “/mo3.5”. In this way, the comparison is performed for the directory names having the same name, and the directory to be compared is predetermined.

FIG. 8 is a diagram showing registration of different directories and files in the comparison processing of the directory structure of the external storage device of the processing device and the directory structure in the installation medium. "D:" shown at the beginning of the line means that the directory itself shown on that line does not exist on the installation medium (created by the user independently), and the process of step S107 in FIG. Is displayed in the directory display area 501.

"F:" means that the file itself indicated in the line does not exist on the installation medium (created independently by the user), and the processing in step S107 in FIG. 5 is displayed in the file display area 502.

[0037]

As described above, according to the present invention, when the external storage device of the processing device becomes insufficient in memory capacity when the software is upgraded, the processing device is set in the processing device and the installation media device. Media directory structure (file / module)
Is checked, and if different directories and files (modules) exist on the processing device side, they are listed and the file (module) selected from them is selected.
By compressing / erasing the data and the like, the memory capacity of the external storage device on the processing device side can be increased, and the process can be performed smoothly without interrupting the version upgrade process.

According to the present invention, unnecessary directories and file names are registered in advance in files,
In addition, by selecting an unnecessary directory or file name from the directory structure display window and pressing a registration button, the selected file or the like can be registered in the above file. By performing compression / deletion, the memory capacity of the external storage device on the processing device side is increased, and the process can be performed smoothly without interrupting the version upgrade process.

Note that, even in the case of a processing apparatus having no window system, the processing that can be performed is the same except for the processing of selecting from a window.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a semiconductor manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a diagram showing the internal structure of the device of FIG.

FIG. 3 is a block diagram showing an electric circuit configuration of the device shown in FIG.

FIG. 4 is a block diagram for explaining the principle of the present invention.

FIG. 5 is a diagram illustrating a display state of a comparison result of a directory and a file according to an embodiment of the present invention.

FIG. 6 is a flowchart illustrating version upgrade processing control according to the present invention.

FIG. 7 is a diagram showing a directory configuration of an external storage device of the processing device and a directory configuration in an installation medium.

FIG. 8 is a diagram showing registration of different directories and files in a process of comparing a directory configuration of an external storage device of the processing device and a directory configuration in an installation medium.

[Explanation of symbols]

101: Temperature control chamber, 102: EWS display device, 103: Operation panel, 104: EWS keyboard, 105: Monitor TV, 106: EW step S body, 107: ON-OFF switch, 108: Emergency stop switch, 109 : Various switches, mouse, etc. 110:
LAN communication cable, 111: exhaust duct for generating heat from console function, 112: exhaust device for chamber, 20
2: reticle, 203: wafer, 204: light source device, 2
05: illumination optical system, 206: projection lens, 207: reticle stage, 291: wafer chuck, 209: wafer stage, 281: reticle optical system, 282: off-axis microscope, 220: reticle library, 230:
Wafer carrier elevator, 221: reticle transfer device, 231: wafer transfer device, 210: air conditioner room, 21
3: filter box, 214: booth, 215: cooler, 216: reheat heater, 217: blower, g: air filter, ra: return port, oa: outside air inlet, 20
4: light source device, sa: intake port, ea: exhaust port, cf: chemical adsorption filter, 321: main body CPU, 322: wafer stage driving device, 323: alignment detection system, 32
4: reticle stage driving device, 325: illumination system, 32
6: shutter drive device, 327: focus detection system, 3
28: Z drive device, 329: transport system, 330: console unit, 331: hard disk, 332: external memory, 401: processing device, 402: input device, 403:
Database, 404: display device, 405: external storage device, 406: media device, 407: operating system, 408: media capacity calculation unit, 409: external storage device memory calculation unit, 410: version upgrade judgment unit, 411: directory / File configuration comparison unit, 41
2: directory / file registration unit, 413: directory / file compression / deletion unit, 414: version upgrade processing execution unit, 501: directory display area, 50
2: File display area, 503: Compression button, 504:
Delete button, 505: Select all button, 506: Registered file (directory) button, 507: Registered file (file) button, 508: Directory structure display button, 509: Upgrade start button, 5
10: end button, 511: scroll bar, 512:
Register button.

Claims (6)

[Claims] 1. A means for calculating the memory capacity of an external storage device of the processing device required for installation from the capacity of the version-up media in advance when upgrading the software of the processing device; Means for comparing the memory capacity with the remaining memory capacity of the external storage device to determine whether or not version upgrade is possible; a file group installed in a predetermined directory on the processing device side; By comparing with a group of files existing in a predetermined directory of the media,
Means for registering a directory or file that is not in a predetermined directory of the version-up media in a predetermined mismatched data display file; and registering in the mismatched data display file in order to select an unnecessary directory or file in the external storage device. Means for displaying directories or files to be updated, and means for displaying directories and files registered in the mismatched data display file when it is determined that the version cannot be upgraded, and for compressing or deleting the selected directories or files. Automatically compressing or erasing the directory or file and then calculating from the version-up media whether the memory capacity required for installation in the external storage device has been secured. Processing apparatus that. 2. A means for displaying a directory structure on the processing device side, and an unnecessary file name or directory name is previously selected from the displayed directory or files in the directory and registered in a predetermined unnecessary data display file. And a means for displaying directories and files registered in the unnecessary data display file when it is determined that the version cannot be upgraded, and for compressing or deleting the selected directory or file. The processing device according to claim 1, wherein: 3. The process according to claim 1, further comprising means for starting the installation when the installation becomes possible as a result of calculating whether the memory capacity required for the installation has been secured in the external storage device. apparatus. 4. When the memory capacity required for installation in the external storage device cannot be secured after compressing or deleting directories and files registered in the mismatched data display file, the unnecessary data display is performed. 3. The processing apparatus according to claim 2, wherein directories and files registered in the file for use are displayed. 5. When the memory capacity required for installation in the external storage device cannot be secured after compressing or deleting directories and files registered in the mismatched data display file or the unnecessary data display file. 5. The processing apparatus according to claim 1, further comprising means for displaying a directory or a file in said external storage device. 6. When the software of the processing device is upgraded, the memory capacity of the external storage device of the processing device required for installation is calculated in advance from the capacity of the upgrade media, and the memory capacity required for the installation is calculated. And the remaining memory capacity of the external storage device to determine whether the version can be upgraded. A file group installed in a predetermined directory on the processing device side and a predetermined directory of a new version-up media are determined. A directory or file that does not match by comparing with a group of files existing in the external storage device, and registers in the mismatched data display file to select an unnecessary directory or file in the external storage device. Display directories or files that are If it is determined that the version cannot be upgraded, the directory and the file registered in the mismatched data display file are displayed, and the selected directory or file is compressed or deleted.After the directory or file is compressed or deleted, A version upgrade method, which automatically calculates, from a version upgrade medium, whether a memory capacity required for installation in the external storage device has been secured.