JPH10125587A - Device-manufacturing equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify the version-up and -down of a software when altering the versions of the software by providing a means for the increase or decrease of the parameter IDs and their attribute information a means for the delection of the parameters from a parameter file and a means for the substitution of the data of default values, etc. SOLUTION: In respective storages 401, 402 for versions A, B, both respective parameter files 403, 404 including a number of processing information such as exposures, etc., and respective parameter-file constituting files 405, 406 are stored respectively. When the file C403 for the version A is altered to the file D404 for the version B, a console CPU reads a parameter from the file C403. If the read parameter is absent in the parameter-file constituting file E405, it is deleted from the file C403. On the other hand, when parameters included only in the parameter-file constituting file E405 are present, their parameter IDs and default values are stored additionally in a parameter file C'407. By these processings, in the case of the version alteration, the parameter file C'407 present outside the storage 402 for the version B is read in the storage 402 for the version B to be used as the parameter file D404.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a device such as a semiconductor element or a liquid crystal element, and a device manufacturing method using the apparatus. The present invention relates to a method of setting the parameters in an apparatus performed by software (program). Further, the present invention is particularly suitably applied to a semiconductor manufacturing apparatus, particularly a semiconductor exposure apparatus for printing a circuit pattern on a wafer.

[0002]

2. Description of the Related Art In a device manufacturing (exposure) process, the number of control parameters has reached 1000 or more, such as parameters relating to layout information, parameters relating to alignment, and parameters relating to exposure. These parameters are stored as parameter files in a storage device on a computer that controls and stores the device manufacturing apparatus.

The types of these parameters differ depending on the old and new programs and the types of devices, but it is necessary to exchange the parameter files between old and new programs and between different devices.

Heretofore, when such parameter files are exchanged, several types of methods that are applied only between specific versions have been used. However, as the types of versions increase, the types of methods increase, and it becomes difficult to obtain compatibility between all versions.

In addition, when the device manufacturing apparatus is used in a mix-and-match manner, especially when there is a difference in the shot size (the size of exposure at one time) to be handled in alignment and exposure due to a difference in the angle of view in the previous process. When using it for such purposes, a parameter file was created exclusively for it, or a parameter file was created by simply combining existing parameter files. However, creating a new parameter file for such a purpose is difficult and wasteful. In addition, if the method is simply created by combining parameter files, unnecessary parameters are also displayed and become operation targets, resulting in poor operability.

Usually, in a device manufacturing apparatus, parameter files are classified into several types according to the type of control to be used, and are stored as classification parameter files. These classification parameter files are selected and collected. The program is used as a control parameter file (Job file) for controlling the apparatus. This classification parameter file was necessary for the type of device to be made and its process several times or more.

However, there are many classification parameter files containing almost the same parameter contents, and there is a lot of waste in the use of a storage device, and it is also difficult to set parameters from the beginning and directly create individual parameter files. In addition, the type of the device manufactured by the device manufacturing apparatus and the number of steps are large, and the capacity of the storage device for storing the classification parameter file is always considered.

The control parameter file can be divided into a direct parameter file (Job direct file) and an indirect parameter file (Job indirect file). The direct parameter file is a collection of files necessary for controlling the apparatus from the classification parameter file or the like, like the above-mentioned control parameter file, and usually has a file ID of the necessary parameter file. I do. In the past, this direct parameter file was required over several times the number of steps of the type of device to be made. However, there are many direct parameter files containing almost the same parameter contents, and there is a lot of waste in the use of the storage device, and it is also difficult to set parameters from the beginning and create individual direct parameter files. In addition, the type of the device manufactured by the device manufacturing apparatus and the capacity of the storage device for storing the direct parameter file with many steps are always concerned.

[0009]

SUMMARY OF THE INVENTION The object of the present invention is to
It is an object of the present invention to maintain compatibility of parameter files between devices having different versions of software for controlling the devices, and to provide a device manufacturing apparatus that can easily upgrade software. Another object of the present invention is to provide a device manufacturing apparatus capable of improving not only effective use of storage devices but also improved work efficiency by efficiently using existing parameter data.

[0010]

According to the present invention, there is provided a device manufacturing apparatus which operates by software in accordance with a parameter file in which a set of preset control parameters is collected.
The parameter file holds a parameter ID and data of the parameter, and the apparatus has at least one parameter file configuration file holding the parameter ID and attribute information of the parameter. When the software version is changed, the parameter file configuration is changed. Means for increasing / decreasing parameter IDs and attribute information held in the file; means for removing parameters not present in the parameter file configuration file from the parameter file; parameter IDs for parameters not present in the parameter file; Means for substituting the default value data in the parameter file into the parameter file.

When transferring this parameter file to another device controlled by software of a different version, means for transferring a parameter file configuration file of the same version as the parameter file or its information to another device; The parameter ID of the parameter used in this different version of software,
When the parameter IDs held in the parameter file configuration file are the same, attribute information of the parameters is compared, and when the attribute information is different, means for correcting parameter data of the parameter file based on the difference in the attribute information is provided. You.

When the software version is changed, if the attribute information of the same parameter ID held by the old and new parameter file configuration files used in the old and new software is different from each other and the attribute information is different, the parameter file of the old version is used. May be provided with means for correcting the data of the parameter (1) according to the difference in the attribute information.

[0013] This makes it possible to maintain the compatibility of the parameter file between devices having different versions of software for controlling the devices, and to improve the version of the software.
Down can be easier.

The apparatus of the present invention has a parameter file having a set of control parameters necessary for a series of controls for a specific application, and controls the apparatus by combining a plurality of the parameter files. Means for using as a combination parameter file, and means for incorporating a parameter file for use in a predetermined application into the combination parameter file,
The parameter file configuration file contains, as one of the attribute information, information indicating the purpose of the parameter file used in the parameter file, and the parameter data of the parameter file used for the purpose indicated by the parameter information. Has a means to handle only.

The parameter file incorporated in the combination parameter file is generally used for two purposes, namely, alignment for alignment and exposure.

Thus, the operation of creating the combination parameter file can be simplified and the operability can be improved.

In the apparatus of the present invention, when a plurality of parameter files are present for each classification as a classification parameter file in which parameters are classified into a plurality of parameters, a parameter file ID for specifying a certain parameter file is selected for each classification. And a control parameter file for collecting and collecting a set of parameters necessary for controlling the apparatus. Of this classification parameter file,
For any parameter that is quoted by the control parameter file, the data of the parameter is duplicated and the parameter file for the control directly reports to the editor that creates and changes the parameter file for the control. Has the parameter data directly under the control parameter file.

In this case, in an editor for creating, displaying, and changing a control parameter file, for a parameter to which the control parameter file directly has data, the data is displayed, and only the classification parameter file holds data. For those parameters, the data is displayed. Also, in this editor,
The display format of the parameter may be changed between a parameter whose control parameter file has data directly and a parameter whose data is stored only in the classification parameter file, or a desired parameter among a set of control parameters. May be displayed and edited.

As a result, the effective use of the storage device by the classification parameter file of the device manufacturing apparatus and the creation of the control parameter file can be simplified.

Further, according to the device manufacturing apparatus of the present invention, a direct parameter file having a set of parameters necessary for controlling the apparatus and one or more file ID numbers for specifying the direct parameter file are provided. If the software performs an operation of the apparatus in accordance with the parameters held by the direct parameter file or the indirect parameter file, the indirect parameter file has the direct parameter indicated by the file ID number. For any parameter file data that the file has, a means to directly double the parameter data, and an editor to create and modify the indirect parameter file. Data of indirect param Over datafile is to have to report to.

Here, the direct parameter file is
Usually, it is a control parameter file for selecting and collecting parameter file ID numbers for identifying a certain parameter file and citing a set of parameters.

Further, creation of an indirect parameter file,
In the editor that displays and modifies, the parameter that the indirect parameter file directly has data may display the data, and the parameter that only the direct parameter file has data may display the data, The display format of the parameter may be changed depending on the parameter in which the indirect parameter file directly has data and the parameter in which only the direct parameter file has data. Further, the editor may be configured to display and edit only a desired control parameter from the set of control parameters.

This makes it possible to effectively use the storage device by using the parameter file of the device manufacturing apparatus and to simplify the creation of the parameter file.

The device manufacturing method according to the present invention is a method for manufacturing a device by using the device manufacturing apparatus having the above-described configurations. The function of the device manufacturing method has the same function as the function of each component of the device manufacturing apparatus of the present invention.

[0025]

EXAMPLE 1 FIG. 1 is a perspective view showing an appearance of a semiconductor exposure apparatus according to an embodiment of the present invention. As shown in FIG. 1, the semiconductor exposure apparatus includes a temperature control chamber 101 for controlling an environmental temperature of the apparatus main body, and a C control chamber 101 disposed therein for controlling the apparatus main body.
EWS body 106 having PU, and EWS display device 10 for displaying predetermined information in the device
2. A monitor TV 105 for displaying image information obtained via an imaging means in the apparatus main body, an operation panel 103 for performing predetermined input to the apparatus, and an EWS keyboard 1.
And a console unit including a console 04 and the like. In the figure, 107
Is an ON-OFF switch, 108 is an emergency stop switch,
Reference numeral 109 denotes various switches, a mouse, etc., 110 a LAN communication cable, 111 an exhaust duct for generating heat from the console function, and 112 an exhaust device for the chamber. The semiconductor exposure apparatus main body is installed inside the chamber 101.

The EWS display 102 is of a thin flat type such as EL, plasma, liquid crystal, etc., is housed in the front of the chamber 101, and is connected to the EWS main body 106 by a LAN cable 110. Operation panel 10
3. A keyboard 104, a monitor TV 105, and the like are also installed on the front surface of the chamber 101 so that a console operation similar to the conventional console operation can be performed from the front surface of the chamber 101.

FIG. 2 is a diagram showing the internal structure of the apparatus shown in FIG. FIG. 1 shows a stepper as a semiconductor exposure apparatus. In the drawing, reference numeral 202 denotes a reticle, and 203, a wafer. When a light beam emitted from a light source device 204 illuminates the reticle 202 through an illumination optical system 205, a pattern on the reticle 202 is projected by a projection lens 206 onto the wafer 203. Can be transferred to a layer. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. Wafer 203
Is exposed while being vacuum-sucked by the wafer chuck 291. The wafer chuck 291 is mounted on the wafer stage 20.
9 allows movement in each axis direction. Above the reticle 202, a reticle optical system 281 for detecting the amount of displacement of the reticle is arranged. Above the wafer stage 209, an off-axis microscope 282 is arranged adjacent to the projection lens 206. Off-axis microscope 282
The main function is to detect the relative position between the internal reference mark and the alignment mark on the wafer 203.
In addition, adjacent to these stepper bodies, peripheral devices such as reticle library 220 and wafer carrier elevator 2
The reticle or wafer 30 is transported to the stepper body by the reticle transport device 221 and the wafer transport device 231.

The chamber 101 is mainly composed of an air conditioner room 210 for controlling the temperature of air, a filter box 213 for filtering fine foreign matters to form a uniform flow of clean air, and a booth 214 for shutting off the environment of the apparatus from the outside. Have been. In the chamber 101, air whose temperature has been adjusted by the cooler 215 and the reheater 216 in the air conditioner room 210 is supplied into the booth 214 via the air filter g by the blower 217. The air supplied to the booth 214 is returned to the air conditioner room 210 from the return port ra.
And circulates in the chamber 101. Normally, this chamber 101 is not strictly a complete circulation system, and about 10% of the circulating air amount outside the booth 214 is supplied to the outside air provided in the air conditioner room 210 in order to always maintain a positive pressure inside the booth 214. It is introduced from the mouth oa via a blower. In this way, the chamber 101 enables the environment temperature where the apparatus is placed to be kept constant and the air to be kept clean. In addition, the light source device 204 has an intake port sa and an exhaust port e in preparation for cooling of the ultra-high pressure mercury lamp and generation of toxic gas when the laser is abnormal.
a is provided, and a part of the air in the booth 214 is forcibly exhausted to the factory equipment via the light source device 204 and the exclusive exhaust fan provided in the air conditioner room 210. Further, a chemical adsorption filter cf for removing chemical substances in the air is provided so as to be connected to the outside air introduction port oa and the return port ra of the air conditioner room 210, respectively.

FIG. 3 is a block diagram showing an electric circuit configuration of the apparatus shown in FIG. In the figure, reference numeral 321 denotes a main unit C built in the EWS main unit 106, which controls the entire apparatus.
It is a PU and comprises a central processing unit such as a microcomputer or a minicomputer. 322 is a wafer stage driving device, and 323 is the off-axis microscope 28.
2 is an alignment detection system, 324 is a reticle stage driving device, 325 is an illumination system such as the light source device 204, 3
26 is a shutter driving device, 327 is a focus detection system,
Reference numeral 328 denotes a Z drive, which is a main body CPU 32
1 is controlled. 329 is the reticle transport device 2
21, a transfer system such as a wafer transfer device 231. 330
Is a console unit having the display 102, the keyboard 104, etc., for giving various commands and parameters relating to the operation of the exposure apparatus to the main body CPU 321. That is, it is for exchanging information with the operator. Reference numeral 331 denotes a console CPU, and 332 denotes an external memory for storing various job parameters and the like. The job parameters include a mask to be used, an opening of a masking blade, an exposure amount, layout data, and the like.

FIG. 4 is a diagram schematically showing a parameter file and a parameter file configuration file stored in the external memory 332 on the console unit shown in FIG. Layout information is stored in the storage device 401 of the version A device and the storage device 402 of the version B device.
Parameter files 403 and 404 containing information on processes such as alignment and exposure, information on reticles, etc.
However, there are many in accordance with the type and process of the device to be made. In addition, one or more parameter file configuration files 405 and 406 indicating what parameters are formed in this version are included.

The storage device 40 of the version A device shown in FIG.
The process from bringing the first parameter file C403 to the storage device 402 of the version B apparatus until it becomes the parameter file D404 will be described with reference to the flowchart of FIG. FIG. 5 is a flowchart for reading parameters from a parameter file as an example of handling a parameter file. The steps described in the flowcharts in all the embodiments below are all performed by the console C in FIG.
Processed by the PU 331.

In step S101, the console CPU 33
1 reads one parameter from the parameter file C403 of the storage device 401 of the version A device. In the parameter file, the parameter ID and the current data are paired by the number of parameters in the version of the parameter file. In step S102, step S1 is stored in the parameter file configuration file E405.
It is checked whether there is a parameter read at step 01.
If there is, go to step S104; otherwise, go to step S1.
Go to 03. In step S103, this parameter is stored in this version of the parameter file configuration file E40.
5, the parameter is discarded and deleted from the parameter file C403.

In this example, since the parameter having the parameter ID IDb in the parameter file C403 is not in the parameter file configuration file E405, this parameter is discarded. Then, the parameter ID of IDb and its data are deleted from the parameter file C403 as shown in the parameter file C'407.

In step S104, it is checked whether this parameter is the last parameter in the parameter file C403. If it is not the last parameter, step S10
Return to 1 and read the next parameter.

If it is the last parameter, step S1
Go to 05. In step S105, the parameter file C
It is checked whether there is a parameter that is not in the parameter 403 and is in the parameter file configuration file E405. If not, the reading process ends. If there is, step S
Proceed to 106. In step S106, the parameter ID of the parameter only in the parameter file configuration file E405 and its default value are added.

In this example, the parameter that does not exist in the parameter file C403 is a parameter whose parameter ID in the parameter file configuration file E405 is IDd, whose attribute information is e2, and whose default value is D2 in parentheses. The parameter ID and the default value are added to the parameter file C'407. Then, the parameter ID is I in the parameter file C403.
The parameter of Dd is added as shown in the parameter file C'407. This ends the process.

Next, the parameter file C'407 is stored in a medium outside the storage device 401 of the device of version A.
For example, it is assumed that it exists in a floppy disk, MO, communication, and the like. When the parameter file C ′ 407 is read into the storage device 402 of the version B device, FIG.
Are performed in the steps shown in the flowchart of FIG. Parameter ID in parameter file C'407
However, since the parameter of IDa does not exist in the parameter file configuration file F406, it is discarded.

The parameter whose parameter ID is IDd is effective because it is present in the parameter file configuration file F406. A parameter having a parameter ID of IDc, which is not in the parameter file C'407 but is in the parameter file configuration file F406, is stored in the parameter file D40.
4 is added.

By these processes, the parameter file C ′ 407 outside the storage device 402 of the version B device is read, and the parameter file D 40
It becomes 4.

By comparing the information on the parameters in the parameter file with the information on the parameters in the parameter file configuration file as in the present embodiment, the compatibility of the parameter files can be maintained between devices having different versions of software for controlling the devices. Also, when upgrading or downgrading a device having a certain version of a parameter file or a parameter file configuration file, simply increasing or decreasing the parameter IDs and attribute information constituting the parameter file configuration file can easily upgrade or downgrade the device. Can be down. The parameter file may be upgraded or downgraded at the same time, or may be upgraded or downgraded one by one when handling the parameter file.

In this embodiment, the attribute information of the same parameter in the parameter file configuration file is the same even if the version is different. However, in some cases, the attribute information such as the unit of data may be different. In that case,
When a parameter is transferred to a device controlled by a different version of software, the parameter file configuration file of the parameter file version or the information is also transferred to the target device, and the attribute information of the same parameter ID is transferred to the target device. If the attribute information differs, there is a method of correcting the parameter data in the parameter file according to the difference in the attribute information.

Also, when the version is changed, if the attribute information of the same parameter ID in the new and old parameter file configuration files is compared and the attribute information is different, the parameter data of the parameter file may be modified according to the difference in the attribute information. Conceivable.

Embodiment 2 In this embodiment, the structure and electric circuit configuration of a semiconductor exposure apparatus used are the same as those in Embodiment 1, and are shown in FIGS.

FIG. 6 is a diagram schematically showing a combination parameter file stored in the external memory 332 on the console unit shown in FIG. 3 and a parameter file configuration file. By the console CPU 331 of FIG.
Processing relating to these parameters is performed.

The combination parameter file 503 includes a parameter file A 501 and a parameter file B 502
And the parameter file IDs for alignment and exposure, which point to a parameter file for alignment and a parameter file for exposure. These parameter files contain layout information, process information such as alignment and exposure, and reticle information. The parameter file A501 has layout information of the previous process and alignment information corresponding to the layout information. The parameter file B502 has layout information to be exposed in the current process.

The parameter file configuration file 505 includes a parameter ID of a parameter included in the parameter file, a data format of the parameter, a limit,
Information such as a default value and information indicating whether the parameter is used in a parameter file used for which purpose are included in the attribute information.

FIG. 7 is a flowchart for reading parameters from a combination parameter file as an example of handling a combination parameter file. The process from the combination parameter file 503 of FIG. 6 to the read parameter 504 using the parameter attribute information of the parameter file configuration file 505 in FIG.
This will be described with reference to the flowchart of FIG.

In step S201, the console CPU 3
31 reads the combination parameter file 503 from the external memory 332 and obtains an alignment parameter file ID indicating the parameter file A 501 and an exposure parameter file ID indicating the parameter file B 502. Next, step S20
In step 2, the parameter ID of the parameter in the parameter file from the parameter file configuration file 505
Then, a pair of attribute information of the parameter is read.

The attribute information includes information indicating that this parameter is a parameter used in an alignment parameter file and information indicating that this parameter is a parameter used in an exposure parameter file. . In the parameter file configuration file 505, information A in parentheses at the attribute information contained therein:
It is shown for alignment and for E: exposure.

In step S203, it is checked whether the parameter information read in step S202 is a parameter used in the parameter file A501 used for alignment. If the parameter is used, the process proceeds to step S204. If the parameter is not used, the process proceeds to step S20.
Go to 5. In step S204, parameter data corresponding to the parameter ID read in step S202 is read from the parameter file A used for alignment, and the process proceeds to step S205. Step S2
In step 05, it is checked whether the parameter information read in step S202 is a parameter used in the parameter file B502 used for exposure. If the parameter is used, the process proceeds to step S206. If the parameter is not used, the process proceeds to step S207. In step S206,
The parameter data corresponding to the parameter ID read in step S202 is read from the parameter file B used for exposure, and the flow advances to step S207. In step S207, it is checked whether the parameter information read in step S202 is the last parameter information in the parameter file configuration file 505. If it is the last parameter information, the process ends. If not, the process returns to step S202 to read the next parameter information.

According to the above processing sequence, in the example of FIG. 6, the parameter with the parameter ID of IDa is read from the parameter file A501, the parameter with the IDb is read from the parameter file B502, and the parameter IDc is read.
Are read from both the parameter files A501 and B502. The read result is like the read parameter 504.

The flowchart of FIG. 7 shows the steps for reading parameters from the combination parameter file. The sequence for writing parameters to the combination parameter file includes the steps of reading from the parameter file (S204, S206) in the parameter file. This is changed to a writing step, and can be performed in the same way as reading.

By using the combination parameter file when the shot size exposed in the previous process is different from the shot size exposed in the current process due to the difference in the angle of view, etc. The operation of creating a parameter file can be simplified, and parameters that are not to be processed in each parameter file are not displayed in the editor, so that operability can be improved.

In this embodiment, a plurality of parameter files can be handled at the same time. However, the parameter files of the combination parameter file may be switched and handled in parameter file units. Similarly, in this case, the parameters that can be displayed and edited in each parameter file are only the attribute functions of the parameters in the parameter file configuration file, which are the processing targets of the parameter file.

Embodiment 3 In this embodiment, the structure and electric circuit configuration of a semiconductor exposure apparatus used are the same as those in Embodiment 1, and are shown in FIGS. FIG. 8 is a diagram showing a structure of a control parameter file stored in the external memory 332 on the console unit of FIG. 3, and FIG. 9 shows a part of the control parameters displayed on the display 102 by an editor. Screen. FIG. 10 is a flowchart for reading the control parameters from the parameter file stored in the external memory 332 and displaying them on the display 102. FIG. 11 is a flowchart for changing the control parameters by the editor.

The present embodiment will be described with reference to these figures. A file having the classified control parameters is called a classification parameter file, and a control parameter file in which parameter files are selected and collected for each classification and the parameters are aligned is called a Job file.

The layout file group 601 in FIG. 8 is a collection of layout files of classification files for convenience. The process file group 602 is a collection of process files that collect information on processes such as alignment and exposure. A reticle file group 603 indicates a group of reticle files in which information on the reticle is collected. These file groups are not actually a lump but are scattered on the external memory 332.

Job file A 604, job file B 606, and job file C 608 are job files, and have a layout file ID and a process file I.
D, reticle file ID, and parameter file ID.

The layout file ID indicates one of a plurality of layout files in the layout file group 601, and the process file ID indicates the process file group 60.
2 indicates one of the plurality of process files, the reticle file ID indicates one of the plurality of reticle files in the reticle file group 603, and the parameter files 605, 607, and 609 indicated by the parameter file ID held by the Job file. Reference numerals 610 and 610 denote parameter files directly belonging to the Job file, and include changed information of parameters in the layout file, the process file, and the reticle file.

Information on attributes such as the type of each parameter, the range of data, and the unit is stored in the external memory 3.
32, is saved as a parameter attribute file not shown, and is referred to by the console CPU 331 every time there is a process relating to a parameter.

Hereinafter, the job file A 604 will be described as an example.
Reading parameters from the ob file will be described with reference to the flowchart of FIG.

In step S301, the console CPU 3
31 reads the job file A 604 from the external memory 332 and obtains a layout file ID, a process file ID, a reticle file ID, and a parameter file ID.

In step S302, a layout file indicated by the obtained layout file ID is found from the layout file group 601 and layout parameters are read. Similarly, the process file indicated by the process file ID is found from the process file group 602,
Read process parameters and reticle file ID
Is found from the reticle file group 603, and the reticle file is read. Step S
At step 303, the parameter file 605 directly under the job file A 604 is read.

The parameter file 605 contains Job
A layout file cited by file A604,
A parameter ID and a parameter data of a parameter having a different content from the parameter of the process file or the reticle file are stored.

In step S304, the read data is displayed on the display screen of the editor. In this case, the parameters in the file 605 directly belonging to the job file A 604 use the data, and the parameters not in the file 605 correspond to the job file A 604.
The parameter data in the layout file, process file, and reticle file cited by 604 is used.

FIG. 9 shows an example of a process parameter display screen. Numerals 701, 702 and 703 indicate the contents of the parameters, and 704, 706 and 707
Is the part displaying the value.

Next, taking the Job file A 604 as an example,
The change of the parameters of the ob file will be described with reference to the flowchart of FIG. In step S401, it is checked whether a parameter change request has been made on the editor operation screen. If there is, the process proceeds to step S402; otherwise, the process returns to step S401. In step S402, it is determined whether the parameter is a parameter directly belonging to the Job file A604, which is a Job file. If the parameter is a parameter directly, the process proceeds to step S403;
Proceed to 404. In step S403, the parameter requested to be changed in the parameter file 605 in the direct file is changed. In step S404, parameters that do not exist in the immediate file are changed. This parameter is a parameter that exists only in the layout file, the process file, and the reticle file cited by the job file A604, and cannot be changed directly from the job file A604. If the parameter is requested to be changed, Job
In the parameter file 605 directly under the file A604,
The parameter ID of the changed parameter and the data of the parameter are added. After steps S403 and S404, the process proceeds to step S405. In step S405,
Display the parameters on the editor display screen. In this case, the parameters in the parameter file 605 directly belonging to the Job file A 604 use the data, and the parameters that do not exist use the data of the parameters of the layout file, the process file, and the reticle file.

According to the present embodiment, Jo
The parameters directly belonging to the b-file and the parameters diverted from each classification parameter file group can be operated in the same manner in operation, and the parameters of the classification parameter files cited by a plurality of files are not erroneously changed in the Job file. As a result, when creating a similar Job file, the existing classification parameter file can be easily diverted, eliminating the need to newly create a classification file and reducing the use of a storage device for storing the parameter file.

In this embodiment, there is only one type of parameter file that is directly related to the Job file, but a plurality of files may be used for each type of parameter. In this embodiment, J
Although the classification files of the layout file, the process file, and the reticle file are diverted one by one to the ob file, a plurality of classification files may be diverted like the job file C608. There may be a plurality of files directly under the Job file.

In this embodiment, the file directly belonging to the Job file is present from the beginning. However, the file may be created only when parameters different from those of the Job file are created. Even if the values of the parameters are not different, the direct parameters may be created by the changing operation.
The display and editing of the parameters by the editor may be performed for all the parameters, or only the parameters arbitrarily selected may be displayed and edited. Further, a function of deleting a parameter directly belonging to the Job file is naturally required.

Embodiment 4 In this embodiment, the structure and electric circuit configuration of a semiconductor exposure apparatus used are the same as those in Embodiment 1, and are shown in FIGS. FIG. 12 is a diagram showing the structure of the parameter file stored in the external memory 332 on the console unit of FIG. FIG. 13 is a flowchart for reading the control parameters from the parameter file stored in the external memory 332 and displaying them on the display 102, and FIG. 14 is a flowchart for changing the control parameters using an editor. The present embodiment will be described with reference to these drawings.

In this embodiment, a file having a set of control parameters is called a Job direct file,
bJob the file with the file ID of the direct file
Called an indirect file. This Job direct file is used by itself to control the device.
b. It may be used by being quoted by an indirect file.

The Job file A 801 shown in FIG.
It is a direct file and is composed of a layout file ID, a process file ID, and a reticle file ID. The layout file ID of the job file A 801 indicates a layout file 804 in which information on layout is collected, the process file ID indicates a process file 803 in which information on processes such as alignment and exposure are collected, and the reticle file ID collects information on reticle. The reticle file 802 is shown.

Job file B 805 and job file C 809 are Job indirect files, and include a job file ID, a layout file ID, and a process file ID.
And a reticle file ID. Jo
b file B805 and J of job file C809
The ob file ID indicates the Job file A 801 of the Job direct file having a set of control parameters, and the layout file ID is information related to the layout and includes a layout file 808 containing information changed from the parameters of the Job file A 801. 81
2, the process file ID indicates process files 807 and 811 containing information on processes such as alignment and exposure, which are changed from the parameters of the job file A801, and the reticle file I
D is reticle information, and indicates reticle files 806 and 810 containing information changed from the parameters of Job file A 801.

Layout files 804, 808 and 812, process files 803, 807 and 81
1, and reticle files 802, 806 and 81
0 contains a parameter ID of a parameter and data of the parameter.

Information on attributes such as the type of each parameter, the range of data, and the unit is stored in the external memory 3.
32, is saved as a parameter attribute file not shown, and is referred to by the console CPU 331 every time there is a process relating to a parameter.

The following is an example of the job file B805,
FIG. 13 shows the reading of parameters from the ob indirect file.
This will be described using the flowchart of FIG.

At step S501, the console CPU 3
31 reads the Job file B 805 from the external memory 332 and obtains the Job file ID, layout file ID, process file ID, and reticle file ID of the cited Job direct file. In step S502, the job file A801 of the direct job file indicated by the obtained job file ID is read, and the layout file ID, the process file ID, and the reticle file ID are obtained. Then, the layout file 804 indicated by the layout file ID is read, and the data of the layout parameter is read.
Similarly, the process file 803 and the reticle file 802 are read.

In step S503, step S501
The layout file 808 directly belonging to the Job file B 805 indicated by the layout file ID obtained in step S1 is read. Similarly, the process file 807 and the reticle file 806 are read. These direct files are Jo
Layout file 8 in b-file A801
04, a parameter held by the process file 803 or the reticle file 802, a parameter ID of a parameter having different contents, and data of the parameter. In step S504, the read data is displayed on the display screen of the editor. In this case, the parameters in the file directly under Job file B805 use the data, and
The parameter data of the file A801 is used. This ends the processing.

In the present embodiment, the layout of the display screen of the process parameters is the same as that of the third embodiment, and is shown in FIG.

In FIG. 9, reference numeral 705 denotes a unit of the value 704. Among these parameters, only the parameter 701 directly reports to the Job indirect file.
The display format is different from that of the ob file. Here it is bold.

The following is an example of the job file B805,
The change of the parameters of the ob indirect file will be described with reference to the flowchart of FIG.

In step S601, it is checked whether a parameter change request has been made on the editor operation screen. If there is, go to step S602; otherwise, go to step S601.
Return to In step S602, the job file B whose parameters are in the layout file 808, the process file 807, or the reticle file 806 of the job file B 805 that is a job indirect file
In step 805, it is checked whether the parameter is a direct parameter. If the parameter is a direct parameter, the process advances to step S603; otherwise, the process advances to step S604. In step S603, J
The layout file 80 that reports directly to the ob file B805
8. Process file 807 or reticle file 8
06, the parameter requested to be changed is changed. In step S604, parameters that do not exist in the immediate file are changed. This parameter is Job
Job of the Job direct file cited by the indirect file
b is a parameter that exists only in the layout file 804, the process file 803, or the reticle file 802 of the file A801.
These files cannot be changed directly from the ob file B805. If the parameter has been requested to be changed, the parameter ID of the changed parameter and the parameter ID of the changed parameter are stored in any one of the layout file 808, the process file 807, and the reticle file 806 of the direct file corresponding to the file to which the parameter belongs. Add parameter data. Step S603,
After step S604, the process proceeds to step S605. Step S6
In step 05, the parameters are displayed on the display screen of the editor. In this case, the parameters in the file directly belonging to the job file B 805 use the data, and the parameters that do not exist use the data of the parameters in the job file A 801. This ends the processing.

According to the present embodiment, Jo
b The parameters of the direct file and the parameters of the Job indirect file can be operated in the same manner in operation, and the parameters of the Job direct file cited by a plurality are not erroneously changed in the Job indirect file. Thus, when creating a similar Job file, an existing Job file can be easily diverted, so that there is no need to newly create a Job file and the use of a storage device for storing the Job file can be reduced.

In this embodiment, the layout file, the process file and the reticle file are separate files in the Job direct file, but a single file may be used. Also, the files that are directly related to the Job indirect file have the same number of files of the same type as the Job direct file, but differ from each other as in Job file D901 of the Job direct file and Job file E905 of the Job indirect file in FIG. Is also good. Further, in this embodiment, a file directly belonging to the Job indirect file exists from the beginning, but it may be created only when parameters different from those of the Job direct file are created. Even if the values of the parameters are not different, the direct parameters may be created by the changing operation.

In addition, display of parameters by an editor,
Editing can be done for all parameters in a set,
Only the parameters arbitrarily selected may be displayed and edited. Note that a function of deleting a parameter directly belonging to the Job indirect file is naturally required.

Hereinafter, the format of the file shown in FIG. 15 will be described. In FIG. 15, the job file G911 of the job indirect file is the job file D901 and the job file D901.
This is an example in which two Job direct files of the ob file F907 are cited.

The job file G 911 has the ID of the parameter file directly associated with each job file ID. This parameter file I
D indicates parameter files 912 and 913, respectively. This parameter file is a file having any two of the parameters in the layout file, process file or reticle file of the Job direct file. The layout files 808 and 812 and the process file 8 in FIG.
07 and 811 and the reticle files 806 and 810.

The changed parameters of the job file D 901 are stored in the parameter file 913. In addition, the changed parameters of the job file F907 are stored in the parameter file 912.

The structure of the parameter file shown in FIG. 15 is functionally the same as that of the parameter file shown in FIG.

[0091]

As described above, according to the present invention,
It is possible to maintain compatibility of parameter files between devices having different versions of software for controlling the devices, and to easily upgrade and downgrade the software.

Further, by inserting the attribute information of the parameter indicating the type of the parameter file handling the parameter into the parameter file configuration file, the operation of creating the combination parameter file can be simplified and the operability can be improved.

Further, according to the present invention, the parameter file can be easily reused, and the effective use of the storage device by the parameter file of the device manufacturing apparatus and the creation of the parameter file can be simplified.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an appearance of a semiconductor exposure apparatus according to one embodiment of the present invention.

FIG. 2 is a diagram showing the internal structure of the device of FIG.

FIG. 3 is a block diagram showing an electric circuit configuration of the device shown in FIG.

FIG. 4 is a diagram illustrating a parameter file used to operate the apparatus of FIG. 1 and a structure of a parameter file configuration file according to an embodiment of the present invention;

FIG. 5 is a flowchart of reading parameters shown in FIG. 4;

FIG. 6 is a diagram illustrating a parameter file used to operate the apparatus of FIG. 1 and a structure of a parameter file configuration file according to another embodiment of the present invention;

FIG. 7 is a flowchart of reading parameters shown in FIG. 6;

FIG. 8 is a diagram showing a structure of a control parameter file used to operate the apparatus of FIG. 1, according to an embodiment of the present invention.

FIG. 9 is a conceptual diagram of a screen on which the parameters of FIG. 8 are displayed.

FIG. 10 is a flowchart of reading parameters shown in FIG. 8;

FIG. 11 is a flowchart of a parameter change in FIG. 8;

FIG. 12 is a diagram illustrating a structure of a control parameter file used to operate the apparatus of FIG. 1 according to another embodiment of the present invention.

FIG. 13 is a flowchart of the parameter reading of FIG.

FIG. 14 is a flowchart of the parameter change of FIG.

FIG. 15 is a diagram showing another example of the structure of a control parameter file used to operate the apparatus of FIG. 1;

[Explanation of symbols]

101: temperature control chamber, 102: display device for EWS, 103: operation panel, 104 keyboard for EWS, 105: monitor TV, 106: EWS body, 10
7: ON-OFF switch, 108: emergency stop switch, 109: various switches, mouse, etc. 110: LAN
Communication cable, 111: exhaust duct, 112: exhaust device, 202: reticle, 203: wafer, 204: light source device, 205: illumination optical system, 206: projection lens, 20
7: reticle stage, 209: wafer stage, 28
1: reticle microscope, 282: off-axis microscope, 2
10: air conditioner room, 213: filter box, 214:
Booth, 217: blower, g: air filter, cf: chemical adsorption filter, oa: outside air introduction port, ra: return port, 321: main body CPU, 330: console, 33
1: console CPU, 332: external memory, 401,
402: storage device of the device, 403, 404, 407: parameter file, 405, 406: parameter file configuration file, 501, 502: parameter file, 503: combination parameter file, 504:
The read parameter file, 505: Parameter file configuration file, 604, 606, 608: Job
File, 601: layout file group, 602: process file group, 603: reticle file group, 60
5, 607, 609, 610: Parameter file, 7
01, 702, 703: display of parameter contents, 70
4, 706, 707: Parameter value display, 705: Parameter unit display, 801, 901, 907: Job
Direct file, 802, 902, 908: reticle file, 803, 903, 909: process file, 8
04, 904, 910: layout file, 805,
905, 911: Job indirect file, 806, 81
0: Reticle file directly under Job indirect file, 80
7, 811: a process file directly under the Job indirect file, 808, 812: a layout file directly under the Job indirect file, 906, 912, 913: a parameter file directly under the Job indirect file.

Claims (30)

[Claims] 1. A device manufacturing apparatus which operates by software according to a parameter file in which a set of preset control parameters is collected.
The parameter file holds a parameter ID and data of the parameter.
And at least one parameter file configuration file holding attribute information of the parameter, and when changing the software version, a parameter ID held by the parameter file configuration file
Means for increasing / decreasing attribute information thereof, means for removing parameters not present in the parameter file configuration file from the parameter file, parameters for parameters not present in the parameter file which are included in the parameter file configuration file, Means for substituting default value data into the parameter file. 2. When the parameter file is transferred to another device controlled by a different version of software, the parameter file configuration file of the same version as the parameter file or the information thereof is transferred to the other device. Means, when the parameter ID of the parameter used in the different version of software is the same as the parameter ID held by the parameter file configuration file,
2. The device manufacturing apparatus according to claim 1, further comprising: means for comparing the attribute information of the parameters and, when the attribute information is different, correcting the parameter data of the parameter file based on the difference in the attribute information. 3. When changing the version of the software, comparing the attribute information of the same parameter ID held by the old and new parameter file configuration files used in the new and old software, respectively, if the attribute information is different, the parameter of the old version is changed. 2. The device manufacturing apparatus according to claim 1, further comprising: means for correcting parameter data of the file based on a difference in attribute information. 4. The apparatus has a parameter file having a set of control parameters required for a series of controls for a specific application, and controls the apparatus by combining a plurality of the parameter files. Means for use as a combination parameter file, and means for incorporating a parameter file for use in a predetermined application into the combination parameter file; and in the parameter file configuration file, A device manufacturing apparatus having information indicating whether it is a parameter used in a file as one of attribute information, and having means for handling only parameter data of a parameter file used for an application indicated by the parameter information. 5. The use of the parameter file incorporated in the combination parameter file is two types of alignment and exposure for alignment.
The device manufacturing apparatus according to claim 1. 6. The apparatus according to claim 1, wherein the parameter file includes a plurality of parameter files, each of which is classified into a plurality of classification parameter files, and a parameter file ID for identifying a certain parameter file is selected for each classification. A device manufacturing apparatus characterized by having a control parameter file collected and cited as a set of parameters necessary for controlling the apparatus. 7. A means in which any parameter cited by the control parameter file in the classification parameter file has data of the parameter doubly assigned to the control parameter file. 7. The device according to claim 6, further comprising means for creating and changing an editor, wherein for a parameter changed from the classification parameter file, data of the parameter is directly associated with the control parameter file. Manufacturing equipment. 8. Creating the control parameter file,
In an editor for displaying and changing, the parameter for the control parameter file directly has data, the data is displayed, and for the parameter that only the classification parameter file has the data, the data is displayed. The device manufacturing apparatus according to claim 7, further comprising: 9. Creating the control parameter file;
9. An editor for displaying and changing, comprising means for changing a display format of a parameter between a parameter directly having data in the control parameter file and a parameter having data only in the classification parameter file. The device manufacturing apparatus according to claim 1. 10. The device according to claim 8, wherein an editor for creating, displaying, and changing the parameters of the control parameter file includes means for displaying and editing only desired parameters from a set of control parameters. Manufacturing equipment. 11. A direct parameter file having a set of parameters necessary for controlling the apparatus, and an indirect parameter file having one or more file ID numbers for specifying the direct parameter file. A device manufacturing apparatus, wherein the software performs the operation of the apparatus in accordance with parameters of the direct parameter file or the indirect parameter file, wherein the indirect parameter file is the file ID number indicated by the file ID number. For the data of any parameter file that the direct parameter file has, the means that has the data of the parameter doubly directly, and the editor that creates and modifies the indirect parameter file is changed from the direct parameter file For parameters Device manufacturing apparatus characterized by the data of parameters is the indirect parameter file and a means for to have the immediate. 12. The direct parameter file is a control parameter file for selecting and collecting parameter file ID numbers for specifying a parameter file, holding the collected parameter file numbers, and citing a set of parameters.
2. The device manufacturing apparatus according to 1. 13. An editor for creating, displaying, and changing the indirect parameter file, for a parameter to which the indirect parameter file directly has data, displays the data, and only the direct parameter file has data. 12. A method according to claim 11, further comprising means for displaying the data of the parameter.
The device manufacturing apparatus according to claim 1. 14. The editor according to claim 11, wherein said editor has means for changing a parameter display format between a parameter whose indirect parameter file directly has data and a parameter whose only direct parameter file has data. apparatus. 15. The apparatus according to claim 11, wherein said editor includes means for displaying and editing only a desired control parameter among a set of control parameters. 16. According to a parameter file in which a set of preset control parameters is collected,
In a device manufacturing method for operating a device manufacturing apparatus by software, the parameter file has a parameter ID and data of the parameter, and the apparatus has a parameter file configuration file having a parameter ID and attribute information of the parameter. When changing the version of the software, the parameter ID held by the parameter file configuration file
Increasing or decreasing the attribute information of the parameter file, removing the parameter that does not exist in the parameter file from the parameter file, and extracting the parameter ID and the parameter ID that do not exist in the parameter file from the parameter file configuration file. A method of substituting default value data into the parameter file, wherein the apparatus is operated by the changed software. 17. When the parameter file is transferred to another device controlled by a different version of software, the parameter file configuration file of the same version as the parameter file or its information is transferred to the other device. When the parameter ID of the parameter used in the different version of the software and the parameter ID held by the parameter file configuration file are the same,
17. The device manufacturing method according to claim 16, further comprising the step of comparing the attribute information of the parameter and, if the attribute information is different, correcting the parameter data of the parameter file according to the difference in the attribute information. 18. When changing the software version, if the attribute information of the same parameter ID held by the new and old parameter file configuration files used by the new and old software is different from each other and the attribute information is different, the parameter of the old version is changed. 17. The device manufacturing method according to claim 16, further comprising the step of correcting parameter data of the file based on a difference in attribute information. 19. The apparatus has a parameter file having a set of control parameters required for a series of controls for a specific application, and controls the apparatus by combining a plurality of the parameter files. A step of using the combination parameter file and a step of incorporating a parameter file to be used for a predetermined use into the combination parameter file, wherein the parameter file configuration file contains A device manufacturing method, comprising a step of retaining information indicating whether a parameter is used in a file as one of attribute information and handling only a parameter of a parameter file used for an application indicated by the parameter information. 20. The device manufacturing method according to claim 19, wherein the use of the parameter file incorporated in the combination parameter file is two types of alignment and exposure for alignment. 21. In the apparatus, a plurality of parameter files are present for each classification as classification parameter files in which parameters are classified into a plurality, and a parameter file ID for specifying a certain parameter file is selected for each of the classifications. A device manufacturing method, wherein the software operates the apparatus in accordance with a control parameter file collected and cited from a set of parameters necessary for controlling the apparatus. 22. The classification parameter file,
A step in which the control parameter file directly belongs to the parameter data for any parameter cited by the control parameter file, and an editor for creating and changing the control parameter file, wherein the classification parameter file 22. The device manufacturing method according to claim 21, further comprising the step of causing the control parameter file to have the data of the parameter directly associated with the parameter changed from. 23. An editor for creating, displaying, and changing the control parameter file, for a parameter to which the control parameter file directly has data, displays the data, and only the classification parameter file has data. 23. A step of displaying the data of the parameter being set.
The device manufacturing method according to the above. 24. An editor for creating, displaying, and changing the control parameter file, wherein a parameter whose control parameter file has data directly and a parameter whose only the classification parameter file has data are included. 24. The device manufacturing method according to claim 23, further comprising the step of changing the display format of the parameter. 25. An editor for creating, displaying, and changing parameters of the control parameter file, comprising a step of displaying and editing only desired control parameters from a set of control parameters.
The device manufacturing method according to the above. 26. A direct parameter file having a set of parameters necessary for controlling the apparatus, and an indirect parameter file having one or a plurality of file ID numbers for specifying the direct parameter file. A device manufacturing method in which the software performs the operation of the apparatus in accordance with the parameters of the direct parameter file or the indirect parameter file, wherein the indirect parameter file is specified by the file ID number. For the data of any parameter file that the direct parameter file has, the process of having the parameter data directly belong to the doubly, and the editor that creates and changes the indirect parameter file, changed from the direct parameter file For parameters Device manufacturing method characterized by the data of parameters is the indirect parameter file and a step of to have the immediate. 27. The direct parameter file is a control parameter file for selecting and collecting parameter file ID numbers for specifying a parameter file, holding the collected parameter file numbers, and citing a set of parameters.
7. The device manufacturing method according to 6. 28. An editor for creating, displaying, and changing the indirect parameter file, wherein the parameter is displayed for a parameter to which the indirect parameter file directly has data, and only the direct parameter file has data. 27. The method according to claim 26, further comprising the step of displaying the data of the parameters.
The device manufacturing method according to the above. 29. The editor has means for changing a display format of a parameter between a parameter in which the indirect parameter file has data directly and a parameter in which only the direct parameter file has data. Item 27. The device manufacturing method according to Item 26. 30. The device manufacturing method according to claim 26, wherein the editor has a step of displaying and editing only a desired control parameter among a set of control parameters.