JP2001094115A5 - - Google Patents
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- JP2001094115A5 JP2001094115A5 JP2000130958A JP2000130958A JP2001094115A5 JP 2001094115 A5 JP2001094115 A5 JP 2001094115A5 JP 2000130958 A JP2000130958 A JP 2000130958A JP 2000130958 A JP2000130958 A JP 2000130958A JP 2001094115 A5 JP2001094115 A5 JP 2001094115A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000130958A JP4115654B2 (ja) | 1999-04-30 | 2000-04-28 | 半導体装置の作製方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12492499 | 1999-04-30 | ||
| JP11-124924 | 1999-04-30 | ||
| JP20696199 | 1999-07-22 | ||
| JP11-206961 | 1999-07-22 | ||
| JP2000130958A JP4115654B2 (ja) | 1999-04-30 | 2000-04-28 | 半導体装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004233913A Division JP4244208B2 (ja) | 1999-04-30 | 2004-08-10 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001094115A JP2001094115A (ja) | 2001-04-06 |
| JP2001094115A5 true JP2001094115A5 (de) | 2007-06-14 |
| JP4115654B2 JP4115654B2 (ja) | 2008-07-09 |
Family
ID=27315003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000130958A Expired - Fee Related JP4115654B2 (ja) | 1999-04-30 | 2000-04-28 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4115654B2 (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6534826B2 (en) | 1999-04-30 | 2003-03-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP4002410B2 (ja) | 2001-06-22 | 2007-10-31 | 日本電気株式会社 | アクティブマトリックス型液晶表示装置の製造方法 |
| JP2003045874A (ja) | 2001-07-27 | 2003-02-14 | Semiconductor Energy Lab Co Ltd | 金属配線およびその作製方法、並びに金属配線基板およびその作製方法 |
| JP5352046B2 (ja) * | 2005-06-22 | 2013-11-27 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| KR101267499B1 (ko) * | 2005-08-18 | 2013-05-31 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판의 제조 방법 및 그에 의해 제조된박막 트랜지스터 |
| JP5236903B2 (ja) * | 2006-06-29 | 2013-07-17 | 株式会社半導体エネルギー研究所 | 表示装置及び表示装置の作製方法 |
| US7781768B2 (en) | 2006-06-29 | 2010-08-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device, method for manufacturing the same, and electronic device having the same |
| KR101642620B1 (ko) * | 2009-07-10 | 2016-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
| KR20230066115A (ko) | 2009-09-04 | 2023-05-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 및 발광 장치를 제작하기 위한 방법 |
| JP2012142571A (ja) * | 2011-12-26 | 2012-07-26 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JP5799132B2 (ja) * | 2014-05-02 | 2015-10-21 | 株式会社半導体エネルギー研究所 | 表示装置、表示モジュール、及び電子機器 |
| JP6087970B2 (ja) * | 2015-03-26 | 2017-03-01 | 株式会社半導体エネルギー研究所 | 表示装置、表示モジュール及び電子機器 |
| KR102351121B1 (ko) * | 2015-04-24 | 2022-01-17 | 삼성디스플레이 주식회사 | 플렉서블 기판 및 그의 제조방법, 플렉서블 기판을 구비한 플렉서블 표시장치 |
| JP2016054306A (ja) * | 2015-11-13 | 2016-04-14 | 株式会社半導体エネルギー研究所 | 表示装置、表示モジュール及び電子機器 |
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2000
- 2000-04-28 JP JP2000130958A patent/JP4115654B2/ja not_active Expired - Fee Related