JP2001091847A5 - - Google Patents

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Publication number
JP2001091847A5
JP2001091847A5 JP1999272221A JP27222199A JP2001091847A5 JP 2001091847 A5 JP2001091847 A5 JP 2001091847A5 JP 1999272221 A JP1999272221 A JP 1999272221A JP 27222199 A JP27222199 A JP 27222199A JP 2001091847 A5 JP2001091847 A5 JP 2001091847A5
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JP
Japan
Prior art keywords
laser light
light
objective lens
scanning
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999272221A
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English (en)
Japanese (ja)
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JP2001091847A (ja
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Publication date
Application filed filed Critical
Priority to JP27222199A priority Critical patent/JP2001091847A/ja
Priority claimed from JP27222199A external-priority patent/JP2001091847A/ja
Publication of JP2001091847A publication Critical patent/JP2001091847A/ja
Publication of JP2001091847A5 publication Critical patent/JP2001091847A5/ja
Pending legal-status Critical Current

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JP27222199A 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡 Pending JP2001091847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27222199A JP2001091847A (ja) 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27222199A JP2001091847A (ja) 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡

Publications (2)

Publication Number Publication Date
JP2001091847A JP2001091847A (ja) 2001-04-06
JP2001091847A5 true JP2001091847A5 (enrdf_load_html_response) 2005-06-02

Family

ID=17510812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27222199A Pending JP2001091847A (ja) 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡

Country Status (1)

Country Link
JP (1) JP2001091847A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5248825B2 (ja) * 2007-09-06 2013-07-31 株式会社ディスコ チャックテーブルに保持された被加工物の高さ位置検出装置
JP2012007897A (ja) * 2010-06-22 2012-01-12 Pulstec Industrial Co Ltd ３次元形状測定装置
JP2015064462A (ja) 2013-09-25 2015-04-09 キヤノン株式会社 共焦点顕微鏡

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