JP2001091847A5 - - Google Patents
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- JP2001091847A5 JP2001091847A5 JP1999272221A JP27222199A JP2001091847A5 JP 2001091847 A5 JP2001091847 A5 JP 2001091847A5 JP 1999272221 A JP1999272221 A JP 1999272221A JP 27222199 A JP27222199 A JP 27222199A JP 2001091847 A5 JP2001091847 A5 JP 2001091847A5
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- laser light
- light
- objective lens
- scanning
- annular
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- 230000003287 optical Effects 0.000 claims description 11
- 230000004907 flux Effects 0.000 claims description 9
- 210000001747 Pupil Anatomy 0.000 claims description 5
Description
【００１６】
【課題を解決するための手段】
請求項１記載の発明は、レーザ光源と、前記レーザ光源からのレーザ光を試料に対して集束させる対物レンズと、前記対物レンズの瞳と共役な位置に配置され、前記対物レンズを介したレーザ光を前記試料表面に沿って相対的に走査させる光走査機構と、前記対物レンズの集光位置と共役な位置に配置された微小開口部と、前記微小開口部を通過する光の強度を検出する光検出器とを備えた共焦点レーザ走査型光学顕微鏡であって、前記レーザ光源からのレーザ光を受光し、輪帯状光束を生成する輪帯状光束生成手段と、この輪帯状光束生成手段により生成した輪帯状光束を前記光走査機構の走査面に投影する投影光学系とを設けたことを特徴とするものである。
[0016]
[Means for Solving the Problems]
The invention according to claim 1 is a laser light source, an objective lens for focusing laser light from the laser light source on a sample, and a laser which is disposed at a position conjugate to the pupil of the objective lens. A light scanning mechanism for relatively scanning light along the surface of the sample, a minute aperture arranged at a position conjugate to the focusing position of the objective lens, and the intensity of light passing through the minute aperture A confocal laser scanning optical microscope having a photo detector for detecting laser light from the laser light source and generating an annular light flux; and the annular light flux generating means And a projection optical system for projecting the generated annular light beam onto a scanning surface of the light scanning mechanism.
請求項２記載の発明は、レーザ光源と、前記レーザ光源からのレーザ光を試料に対して集束させる対物レンズと、前記対物レンズの瞳と共役な位置に配置され、前記対物レンズを介したレーザ光を前記試料表面に沿って相対的に走査させる光走査機構と、前記対物レンズの集光位置と共役な位置に配置された微小開口部と、前記微小開口部を通過する光の強度を検出する光検出器とを備えた共焦点レーザ走査型光学顕微鏡であって、前記レーザ光源からのレーザ光を受光し、輪帯状光束を生成する輪帯マスクと、この輪帯マスクにより生成した輪帯状光束を前記光走査機構の走査面に投影する投影光学系とを設けたことを特徴とするものである。
The invention according to claim 2 is a laser light source, an objective lens for focusing laser light from the laser light source on a sample, and a laser which is disposed at a position conjugate to the pupil of the objective lens. A light scanning mechanism for relatively scanning light along the surface of the sample, a minute aperture arranged at a position conjugate to the focusing position of the objective lens, and the intensity of light passing through the minute aperture A confocal laser scanning optical microscope having a photodetector for detecting a laser beam from the laser light source and generating a ring-shaped luminous flux; and a ring-shaped mask generated by the ring-shaped mask And a projection optical system for projecting the light beam onto the scanning surface of the light scanning mechanism.
Claims (3)
前記レーザ光源からのレーザ光を試料に対して集束させる対物レンズと、
前記対物レンズの瞳と共役な位置に配置され、前記対物レンズを介したレーザ光を前記試料表面に沿って相対的に走査させる光走査機構と、
前記対物レンズの集光位置と共役な位置に配置された微小開口部と、
前記微小開口部を通過する光の強度を検出する光検出器と、
を備えた共焦点レーザ走査型光学顕微鏡であって、
前記レーザ光源からのレーザ光を受光し、輪帯状光束を生成する輪帯状光束生成手段と、
この輪帯状光束生成手段により生成した輪帯状光束を前記光走査機構の走査面に投影する投影光学系と、を設けたことを特徴とする共焦点レーザ走査型光学顕微鏡。Laser light source,
An objective lens for focusing laser light from the laser light source on a sample;
A light scanning mechanism disposed at a position conjugate to the pupil of the objective lens and relatively scanning laser light passing through the objective lens along the surface of the sample;
A minute aperture disposed at a position conjugate to the focusing position of the objective lens;
A light detector for detecting the intensity of light passing through the minute opening;
A confocal laser scanning optical microscope comprising
An annular light beam generating unit that receives laser light from the laser light source and generates an annular light beam;
And a projection optical system for projecting the annular luminous flux generated by the annular luminous flux generating means onto the scanning surface of the light scanning mechanism.
前記レーザ光源からのレーザ光を試料に対して集束させる対物レンズと、
前記対物レンズの瞳と共役な位置に配置され、前記対物レンズを介したレーザ光を前記試料表面に沿って相対的に走査させる光走査機構と、
前記対物レンズの集光位置と共役な位置に配置された微小開口部と、
前記微小開口部を通過する光の強度を検出する光検出器と、を備えた共焦点レーザ走査型光学顕微鏡であって、
前記レーザ光源からのレーザ光を受光し、輪帯状光束を生成する輪帯マスクと、
この輪帯マスクにより生成した輪帯状光束を前記光走査機構の走査面に投影する投影光学系と、を設けたことを特徴とする共焦点レーザ走査型光学顕微鏡。Laser light source,
An objective lens for focusing laser light from the laser light source on a sample;
A light scanning mechanism disposed at a position conjugate to the pupil of the objective lens and relatively scanning laser light passing through the objective lens along the surface of the sample;
A minute aperture disposed at a position conjugate to the focusing position of the objective lens;
A confocal laser scanning optical microscope, comprising: a photodetector for detecting the intensity of light passing through the minute aperture;
An annular mask that receives laser light from the laser light source and generates an annular light flux;
A confocal laser scanning optical microscope, comprising: a projection optical system for projecting an annular light flux generated by the annular mask onto a scanning surface of the light scanning mechanism.
前記レーザ光源からのレーザ光を試料に対して集束させる対物レンズと、
前記集束光を前記試料表面に沿って相対的に走査させる前記対物レンズの瞳と共役な位置に走査面を配置した光走査機構と、
前記対物レンズの集光位置と共役な位置に配置された微小開口部と、
前記微小開口部を通過する光の強度を検出する光検出器と、を備えた共焦点レーザ走査型光学顕微鏡であって、
前記レーザ光源からのレーザ光を受光し、輪帯状光束を生成する一対のアキシコンプリズムと、
この一対のアキシコンプリズムにより生成した輪帯状光束を前記光走査機構の走査面に投影する投影光学系と、を設けたことを特徴とする共焦点レーザ走査型光学顕微鏡。Laser light source,
An objective lens for focusing laser light from the laser light source on a sample;
A light scanning mechanism in which a scanning plane is disposed at a position conjugate with the pupil of the objective lens that relatively scans the focused light along the sample surface;
A minute aperture disposed at a position conjugate to the focusing position of the objective lens;
A confocal laser scanning optical microscope, comprising: a photodetector for detecting the intensity of light passing through the minute aperture;
A pair of axicon prisms that receive laser light from the laser light source and generate an annular light flux;
And a projection optical system for projecting the annular light flux generated by the pair of axicon prisms onto the scanning surface of the light scanning mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27222199A JP2001091847A (en) | 1999-09-27 | 1999-09-27 | Confocal laser scanning type optical microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27222199A JP2001091847A (en) | 1999-09-27 | 1999-09-27 | Confocal laser scanning type optical microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001091847A JP2001091847A (en) | 2001-04-06 |
| JP2001091847A5 true JP2001091847A5 (en) | 2005-06-02 |
Family
ID=17510812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27222199A Pending JP2001091847A (en) | 1999-09-27 | 1999-09-27 | Confocal laser scanning type optical microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001091847A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5248825B2 (en) * | 2007-09-06 | 2013-07-31 | 株式会社ディスコ | Device for detecting the height position of the workpiece held on the chuck table |
| JP2012007897A (en) * | 2010-06-22 | 2012-01-12 | Pulstec Industrial Co Ltd | Three-dimensional shape measuring apparatus |
| JP2015064462A (en) | 2013-09-25 | 2015-04-09 | キヤノン株式会社 | Confocal microscope |
-
1999
- 1999-09-27 JP JP27222199A patent/JP2001091847A/en active Pending
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