JP2001030154A5 - - Google Patents
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- Publication number
- JP2001030154A5 JP2001030154A5 JP2000208867A JP2000208867A JP2001030154A5 JP 2001030154 A5 JP2001030154 A5 JP 2001030154A5 JP 2000208867 A JP2000208867 A JP 2000208867A JP 2000208867 A JP2000208867 A JP 2000208867A JP 2001030154 A5 JP2001030154 A5 JP 2001030154A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- rod
- face
- sheet
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 5
- 239000013013 elastic material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4439697 | 1997-02-27 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4436997A Division JPH10235542A (ja) | 1997-02-27 | 1997-02-27 | 端面研磨方法及び装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001030154A JP2001030154A (ja) | 2001-02-06 |
| JP2001030154A5 true JP2001030154A5 (enExample) | 2005-02-03 |
| JP4049974B2 JP4049974B2 (ja) | 2008-02-20 |
Family
ID=18705371
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29459297A Withdrawn JPH10303423A (ja) | 1997-02-27 | 1997-10-27 | 半導体装置の製造方法および半導体装置 |
| JP2000208867A Expired - Fee Related JP4049974B2 (ja) | 1997-02-27 | 2000-07-10 | 端面研磨装置及び端面研磨方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29459297A Withdrawn JPH10303423A (ja) | 1997-02-27 | 1997-10-27 | 半導体装置の製造方法および半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JPH10303423A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4761599B2 (ja) * | 1999-12-03 | 2011-08-31 | 株式会社東芝 | 半導体装置 |
| JP5414298B2 (ja) * | 2009-02-13 | 2014-02-12 | 信越化学工業株式会社 | 太陽電池の製造方法 |
| JP2010232530A (ja) * | 2009-03-27 | 2010-10-14 | Sharp Corp | 光電変換素子の製造方法および光電変換素子 |
| CN108687589B (zh) * | 2018-03-28 | 2019-12-17 | 宁波高新区新柯保汽车科技有限公司 | 轴承端面打磨装置 |
| CN110394700A (zh) * | 2019-08-02 | 2019-11-01 | 天津丹阳车圈有限公司 | 一种翻转式车圈双面打磨装置 |
| CN111702594B (zh) * | 2020-06-30 | 2021-10-26 | 萧县众科电磁检测有限公司 | 一种用于防盗网栏加工的缺陷修复设备及其工作方法 |
-
1997
- 1997-10-27 JP JP29459297A patent/JPH10303423A/ja not_active Withdrawn
-
2000
- 2000-07-10 JP JP2000208867A patent/JP4049974B2/ja not_active Expired - Fee Related
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