JP2001013522A5 - - Google Patents
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- Publication number
- JP2001013522A5 JP2001013522A5 JP1999186650A JP18665099A JP2001013522A5 JP 2001013522 A5 JP2001013522 A5 JP 2001013522A5 JP 1999186650 A JP1999186650 A JP 1999186650A JP 18665099 A JP18665099 A JP 18665099A JP 2001013522 A5 JP2001013522 A5 JP 2001013522A5
- Authority
- JP
- Japan
- Prior art keywords
- interlayer insulating
- insulating film
- electro
- optical device
- data line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011229 interlayer Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 claims 19
- 239000004020 conductor Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 229910052745 lead Inorganic materials 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18665099A JP4221827B2 (ja) | 1999-06-30 | 1999-06-30 | 電気光学装置、電気光学装置の製造方法及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18665099A JP4221827B2 (ja) | 1999-06-30 | 1999-06-30 | 電気光学装置、電気光学装置の製造方法及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001013522A JP2001013522A (ja) | 2001-01-19 |
| JP2001013522A5 true JP2001013522A5 (enExample) | 2004-09-30 |
| JP4221827B2 JP4221827B2 (ja) | 2009-02-12 |
Family
ID=16192298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18665099A Expired - Fee Related JP4221827B2 (ja) | 1999-06-30 | 1999-06-30 | 電気光学装置、電気光学装置の製造方法及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4221827B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3791338B2 (ja) * | 2001-02-08 | 2006-06-28 | セイコーエプソン株式会社 | 電気光学装置及びその製造方法並びに投射型表示装置 |
| JP3909583B2 (ja) | 2001-08-27 | 2007-04-25 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
| KR100699995B1 (ko) | 2004-09-02 | 2007-03-26 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자 및 그 제조 방법 |
| WO2012102158A1 (ja) * | 2011-01-27 | 2012-08-02 | シャープ株式会社 | 液晶表示パネル用基板及び液晶表示装置 |
| JP5919636B2 (ja) * | 2011-04-01 | 2016-05-18 | セイコーエプソン株式会社 | 電気光学装置、電子機器、電気光学装置の製造方法 |
| JP5797504B2 (ja) * | 2011-09-16 | 2015-10-21 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP6186127B2 (ja) * | 2013-01-25 | 2017-08-23 | 株式会社ジャパンディスプレイ | 表示装置 |
| TWI559064B (zh) | 2012-10-19 | 2016-11-21 | Japan Display Inc | Display device |
| JP5860517B2 (ja) * | 2014-09-22 | 2016-02-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| KR102512715B1 (ko) * | 2015-09-15 | 2023-03-23 | 삼성디스플레이 주식회사 | 플렉서블 표시장치 및 이의 제조 방법 |
-
1999
- 1999-06-30 JP JP18665099A patent/JP4221827B2/ja not_active Expired - Fee Related
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