JP2000340798A5 - - Google Patents

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Publication number
JP2000340798A5
JP2000340798A5 JP2000072631A JP2000072631A JP2000340798A5 JP 2000340798 A5 JP2000340798 A5 JP 2000340798A5 JP 2000072631 A JP2000072631 A JP 2000072631A JP 2000072631 A JP2000072631 A JP 2000072631A JP 2000340798 A5 JP2000340798 A5 JP 2000340798A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000072631A
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Japanese (ja)
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JP4578609B2 (ja
JP2000340798A (ja
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Application filed filed Critical
Priority to JP2000072631A priority Critical patent/JP4578609B2/ja
Priority claimed from JP2000072631A external-priority patent/JP4578609B2/ja
Publication of JP2000340798A publication Critical patent/JP2000340798A/ja
Publication of JP2000340798A5 publication Critical patent/JP2000340798A5/ja
Application granted granted Critical
Publication of JP4578609B2 publication Critical patent/JP4578609B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000072631A 1999-03-19 2000-03-15 電気光学装置 Expired - Fee Related JP4578609B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000072631A JP4578609B2 (ja) 1999-03-19 2000-03-15 電気光学装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP7696799 1999-03-19
JP11-76967 1999-03-19
JP2000072631A JP4578609B2 (ja) 1999-03-19 2000-03-15 電気光学装置

Publications (3)

Publication Number Publication Date
JP2000340798A JP2000340798A (ja) 2000-12-08
JP2000340798A5 true JP2000340798A5 (de) 2007-05-10
JP4578609B2 JP4578609B2 (ja) 2010-11-10

Family

ID=26418070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000072631A Expired - Fee Related JP4578609B2 (ja) 1999-03-19 2000-03-15 電気光学装置

Country Status (1)

Country Link
JP (1) JP4578609B2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7701134B2 (en) 1999-06-04 2010-04-20 Semiconductor Energy Laboratory Co., Ltd. Active matrix display device with improved operating performance
US8154015B2 (en) 2001-11-09 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device including thin film transistor
US8890172B2 (en) 1999-06-04 2014-11-18 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512504B1 (en) 1999-04-27 2003-01-28 Semiconductor Energy Laborayory Co., Ltd. Electronic device and electronic apparatus
TW527735B (en) 1999-06-04 2003-04-11 Semiconductor Energy Lab Electro-optical device
TW512543B (en) 1999-06-28 2002-12-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
JP2001092413A (ja) 1999-09-24 2001-04-06 Semiconductor Energy Lab Co Ltd El表示装置および電子装置
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
TW480722B (en) 1999-10-12 2002-03-21 Semiconductor Energy Lab Manufacturing method of electro-optical device
TW471011B (en) 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
TW586141B (en) * 2001-01-19 2004-05-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing the same
JP3986051B2 (ja) 2002-04-30 2007-10-03 株式会社半導体エネルギー研究所 発光装置、電子機器
US7002302B2 (en) 2002-10-07 2006-02-21 Samsung Sdi Co., Ltd. Flat panel display
JP2004145011A (ja) 2002-10-24 2004-05-20 Seiko Epson Corp 配線基板、回路基板、電気光学装置及びその製造方法、電子機器
KR101267499B1 (ko) * 2005-08-18 2013-05-31 삼성디스플레이 주식회사 박막 트랜지스터 기판의 제조 방법 및 그에 의해 제조된박막 트랜지스터
JP5005953B2 (ja) * 2006-05-18 2012-08-22 株式会社ジャパンディスプレイセントラル 薄膜トランジスタ
JP5589359B2 (ja) * 2009-01-05 2014-09-17 セイコーエプソン株式会社 電気光学装置及び電子機器
JP5256144B2 (ja) * 2009-08-03 2013-08-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
KR20190063230A (ko) * 2017-11-29 2019-06-07 엘지디스플레이 주식회사 박막트랜지스터 어레이 기판 및 그를 포함하는 유기발광표시장치
CN113661577A (zh) * 2019-04-09 2021-11-16 夏普株式会社 显示装置以及制造方法
CN116013962B (zh) * 2023-03-24 2023-07-18 合肥晶合集成电路股份有限公司 半导体器件的制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06260499A (ja) * 1993-03-02 1994-09-16 Casio Comput Co Ltd 薄膜トランジスタおよびその製造方法
JP3326013B2 (ja) * 1994-07-14 2002-09-17 株式会社半導体エネルギー研究所 半導体装置の作製方法
JPH09191111A (ja) * 1995-11-07 1997-07-22 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JP3499381B2 (ja) * 1996-09-21 2004-02-23 株式会社半導体エネルギー研究所 アクティブマトリクス型表示装置およびその作製方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7701134B2 (en) 1999-06-04 2010-04-20 Semiconductor Energy Laboratory Co., Ltd. Active matrix display device with improved operating performance
US7741775B2 (en) 1999-06-04 2010-06-22 Semiconductor Energy Laboratories Co., Ltd. Electro-optical device and electronic device
US8890172B2 (en) 1999-06-04 2014-11-18 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
US9123854B2 (en) 1999-06-04 2015-09-01 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
US9368680B2 (en) 1999-06-04 2016-06-14 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and electronic device
US8154015B2 (en) 2001-11-09 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device including thin film transistor

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