JP2000332154A - Multiple connected semiconductor device - Google Patents
Multiple connected semiconductor deviceInfo
- Publication number
- JP2000332154A JP2000332154A JP11145215A JP14521599A JP2000332154A JP 2000332154 A JP2000332154 A JP 2000332154A JP 11145215 A JP11145215 A JP 11145215A JP 14521599 A JP14521599 A JP 14521599A JP 2000332154 A JP2000332154 A JP 2000332154A
- Authority
- JP
- Japan
- Prior art keywords
- frame
- substrate
- semiconductor device
- type semiconductor
- connection type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Die Bonding (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、帯状の金属フレ−
ムに長尺方向に並べて配置された枠状部材の枠内に半導
体チップを搭載する多連結型半導体装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a band-shaped metal frame.
The present invention relates to a multi-connection type semiconductor device in which a semiconductor chip is mounted in a frame of a frame-like member arranged in a longitudinal direction in a system.
【0002】[0002]
【従来の技術】通常、キャビティダウンタイプのボ−ル
グリットアレイパッケ−ジの半導体装置は、パッケ−ジ
の低廉化及び組立工程の短縮などの観点から、個々のフ
レ−ムに半導体チップを搭載するのではなく、長尺な金
属フレ−ムに多数の半導体チップを並べて搭載し組み立
てる多連結型半導体装置が必要になってきた。2. Description of the Related Art Normally, a semiconductor device of a cavity-down type ball grid array package has a semiconductor chip mounted on each frame from the viewpoint of reducing the cost of the package and shortening the assembly process. Instead, a multi-connection type semiconductor device in which a large number of semiconductor chips are arranged side by side on a long metal frame and assembled is required.
【0003】図5(a)及び(b)は従来の多連結型半
導体装置の組立方法を説明するための側面図及び平面図
である。この多連結型半導体装置の組立は、図5に示す
ように、まず、銅などの長尺な金属製のフレ−ム6にあ
るタ−ゲットマ−ク(図示せず)を目合わせにし、接着
材であるエポキシ樹脂を介してプラスチック製の枠状の
基板5を並べて配置し接着する。次に、半導体チップ7
をタ−ゲットマ−クを基準にし基板5の枠内に位置決め
し、銀ペ−スト樹脂により半導体チップ7をフレ−ムを
固着する。FIGS. 5A and 5B are a side view and a plan view for explaining a method of assembling a conventional multi-connection type semiconductor device. In order to assemble the multi-connection type semiconductor device, as shown in FIG. 5, first, a target mark (not shown) on a long metal frame 6 such as copper is aligned and bonded. Plastic frame-shaped substrates 5 are arranged side by side via an epoxy resin as a material and bonded. Next, the semiconductor chip 7
Are positioned in the frame of the substrate 5 with reference to the target mark, and the frame is fixed to the semiconductor chip 7 with silver paste resin.
【0004】また、逆に、半導体チップ7をフレ−ム6
に搭載してから基板5を配置する方法が採られていた。
いずれにしても金属製のフレ−ム6に印字されたマ−ク
を基準にし、基板5及び半導体チップ7をフレ−ム6に
接着固定していた。On the contrary, the semiconductor chip 7 is connected to the frame 6
A method has been adopted in which the substrate 5 is placed after the substrate 5 is mounted.
In any case, the substrate 5 and the semiconductor chip 7 were bonded and fixed to the frame 6 based on the mark printed on the metal frame 6.
【0005】そして、組立られた多連結型半導体装置
は、フレ−ム6を切断し個々の半導体装置に分離し、個
々に分離された半導体装置の半導体チップの電極パッド
と基板の電極パッドとワイヤで結線し、樹脂封止して半
導体装置の組立を完了していた。[0005] The assembled multi-connection type semiconductor device is divided into individual semiconductor devices by cutting the frame 6, and the electrode pads of the semiconductor chip, the electrode pads of the substrate and the wires of the separated semiconductor device are individually separated. And sealed with resin to complete the assembly of the semiconductor device.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上述し
た組立方法によると、図5(b)に示すように、基板5
の中心と半導体チップ7の中心とずれることが多々あ
る。半導体チップ7の搭載は、ダイマウンタで精度良く
位置決めし搭載できるものの、フレ−ム6に接着された
基板5は、接着材の硬化が不十分な内に僅かな外力によ
り基板5が動かされ位置ずれすることがある。However, according to the above-described assembling method, as shown in FIG.
Of the semiconductor chip 7 and the center of the semiconductor chip 7 in many cases. Although the mounting of the semiconductor chip 7 can be accurately positioned and mounted by a die mounter, the substrate 5 bonded to the frame 6 is displaced by a slight external force while the adhesive is hardened. May be.
【0007】このように位置ずれを起こした半導体装置
は、その後の工程であるワイヤボンディング工程あるい
はボ−ルボンディング工程にて不良品を発生させること
になる。例えば、ワイヤボンディング工程では、半導体
チップ7の電極パッドと基板5の電極パッドの相対位置
にずれが生じているため、電極パッド間の距離の短いと
ころはワイヤが弛み、電極パッド間の距離の長いところ
はワイヤが届かず結線できないという問題を起こす。[0007] A semiconductor device having such a position shift generates a defective product in a subsequent step such as a wire bonding step or a ball bonding step. For example, in the wire bonding step, since the relative positions of the electrode pads of the semiconductor chip 7 and the electrode pads of the substrate 5 are shifted, the wire is loosened where the distance between the electrode pads is short, and the distance between the electrode pads is long. However, there is a problem that the wires cannot reach and cannot be connected.
【0008】従って、本発明の目的は、金属製のフレ−
ムに精密に枠状の基板が位置決めされる多連結型半導体
装置を提供することにある。Accordingly, an object of the present invention is to provide a metal frame.
An object of the present invention is to provide a multi-connection type semiconductor device in which a frame-shaped substrate is precisely positioned on a system.
【0009】[0009]
【課題を解決するための手段】本発明の特徴は、帯状の
金属製のフレ−ムに長尺方向に並べて接着される複数の
樹脂製の枠部材と、前記枠部材内に挿入され前記フレ−
ムに固着される半導体チップとを有する多連結型半導体
装置において、前記フレ−ム上に形成されるとともに前
記枠部材の内枠部と接する複数の突起部を有する多連結
型半導体装置である。 また、前記枠状部材の内枠部と
接する前記突起部の面が上から下に下るように傾斜して
いるかあるいは前記突起部の断面形状が円錐状であるこ
とが望ましい。さらに、好ましくは、前記突起部の断面
形状が半球状であることである。一方、前記枠部材の内
枠の角部と接する四つの前記突起部を有するか、また
は、前記枠部材の相対する内枠の辺部のそれぞれと接す
る四つの前記突起部を有することが望ましい。SUMMARY OF THE INVENTION The present invention is characterized in that a plurality of resin frame members are arranged and adhered to a strip-shaped metal frame in a longitudinal direction, and the frame member is inserted into the frame member. −
A multi-connection semiconductor device having a semiconductor chip fixed to a frame, the multi-connection semiconductor device having a plurality of projections formed on the frame and in contact with an inner frame of the frame member. In addition, it is preferable that a surface of the protrusion that contacts the inner frame portion of the frame-shaped member is inclined so as to descend from top to bottom, or that a cross-sectional shape of the protrusion is conical. More preferably, the cross-sectional shape of the projection is hemispherical. On the other hand, it is desirable to have four of the protrusions in contact with the corners of the inner frame of the frame member, or to have four of the protrusions in contact with each of the sides of the inner frame facing the frame member.
【0010】本発明の他の特徴は、帯状の金属製のフレ
−ムに長尺方向に並べて接着される複数の樹脂製の枠部
材と、前記枠部材内に挿入され前記フレ−ムに固着され
る半導体チップとを有する多連結型半導体装置におい
て、前記枠部材を前記フレ−ムに位置決めする少なくと
も二つの突起部が前記フレ−ムに形成されるとともに前
記枠部材の下面に前記突起部がはめ込まれる窪みが形成
されている多連結型半導体装置である。また、前記突起
部の断面形状が半球状であることが望ましい。Another feature of the present invention is that a plurality of resin frame members are arranged and adhered in a longitudinal direction to a strip-shaped metal frame, and inserted into the frame member and fixed to the frame. A semiconductor chip having at least two projections for positioning the frame member on the frame, the projections being formed on the lower surface of the frame member. This is a multi-connection type semiconductor device in which a recess to be fitted is formed. Further, it is desirable that the cross-sectional shape of the projection is hemispherical.
【0011】[0011]
【発明の実施の形態】次に、本発明について図面を参照
して説明する。Next, the present invention will be described with reference to the drawings.
【0012】図1(a)及び(b)は本発明の一実施の
形態における多連結型半導体装置を説明するための側面
図及び平面図である。この多連結型半導体装置は、図1
に示すように、金属製のフレ−ム6に枠状の基板5の内
枠の四つ角部と接触し基板5を位置決めする突起部1を
設けている。また、基板5の内枠の角部と接触する突起
部1の面は、後述するが、上から下のフレ−ム6の上面
に下るように斜面であることが望ましい。FIGS. 1A and 1B are a side view and a plan view for explaining a multi-connection type semiconductor device according to an embodiment of the present invention. This multi-connection type semiconductor device is shown in FIG.
As shown in (1), a metal frame 6 is provided with a protrusion 1 for positioning the substrate 5 by contacting the four corners of the inner frame of the frame-shaped substrate 5. As will be described later, it is desirable that the surface of the protrusion 1 that comes into contact with the corner of the inner frame of the substrate 5 be sloped so as to descend from the top to the top of the frame 6.
【0013】図2は図1の突起部とその近傍を拡大して
示す断面図である。図1の突起部1は、図2に示すよう
に、銅板であるフレ−ム5をプレス成形により成形され
る。そして、この突起部1の形状は、角部2に接する面
のみが傾斜していれば、どのような断面形状でよいが、
プレス成形し易いように突起部1の断面形状は円錐状あ
るいは半球状にすることである。また、このように突起
部1の断面形状に成形することにより枠状の基板5の内
枠の角部2と接する突起部1の面が傾斜しているので、
4つの突起部1の傾斜面が基板5の内枠の案内面とな
り、基板5が入り易くなるという利点がある。FIG. 2 is an enlarged sectional view showing the protrusion and its vicinity in FIG. As shown in FIG. 2, the protrusion 1 in FIG. 1 is formed by press-forming a frame 5 which is a copper plate. The shape of the projection 1 may be any cross-sectional shape as long as only the surface in contact with the corner 2 is inclined.
The cross-sectional shape of the projection 1 is conical or hemispherical so as to facilitate press molding. Also, since the surface of the projection 1 that is in contact with the corner 2 of the inner frame of the frame-shaped substrate 5 is inclined by forming the projection 1 into the cross-sectional shape as described above,
The inclined surfaces of the four protrusions 1 serve as guide surfaces for the inner frame of the substrate 5, and there is an advantage that the substrate 5 can easily enter.
【0014】なお、試みに、例えば、0.2mmの銅板
のフレ−ム6に円ボス成形(半球状断面形状)したとこ
ろ、突起部1の底部の直径は、1乃至2mm程度で高さ
が0.5mm以下にし成形したところ、フレ−ム6に反り
や亀裂を起こすことなく成形することができた。また、
突起部1の高さ0.5mm以下であるので、基板5が入
り易く基板5の位置決めも円滑に行うことができた。In an attempt, for example, when a circular boss was formed (hemispherical cross-sectional shape) on a frame 6 of a copper plate of 0.2 mm, the diameter of the bottom of the projection 1 was about 1 to 2 mm and the height was about 1 to 2 mm. When molded to a size of 0.5 mm or less, the frame 6 could be molded without warping or cracking. Also,
Since the height of the projections 1 was 0.5 mm or less, the substrate 5 could easily enter and the positioning of the substrate 5 could be performed smoothly.
【0015】このようにフレ−ム6に4つの突起部1を
設けることによって、予めフレ−ム6の正確な位置に固
着された半導体チップ7の中心と基板5の中心と一致さ
せ基板5を接着できるし、逆に、図1に示すように、突
起部1に案内されフレ−ム6に正確な位置に基板5を位
置決め接着し、精密に間欠送りされるフレ−ム6の基板
5の枠内に半導体チップ7を搭載しても良い。By providing the four projections 1 on the frame 6 as described above, the center of the semiconductor chip 7 previously fixed at an accurate position of the frame 6 and the center of the substrate 5 are made to coincide with each other. On the contrary, as shown in FIG. 1, the substrate 5 is guided and guided by the projections 1 and positioned and adhered to the frame 6 at an accurate position. The semiconductor chip 7 may be mounted in the frame.
【0016】図3は図1の多連型半導体装置の変形例を
示す平面図である。この多連型半導体装置は、4つの突
起部1aの根本部分が基板5の内枠の対向するそれぞれ
の辺3の壁面に接触するように設けている。また、突起
部1aは、各々の辺3の中央の位置に配置することが望
ましい。FIG. 3 is a plan view showing a modification of the multiple semiconductor device of FIG. This multiple semiconductor device is provided such that the root portions of the four protrusions 1a are in contact with the wall surfaces of the sides 3 of the inner frame of the substrate 5 facing each other. In addition, it is desirable that the protrusions 1 a be arranged at the center of each side 3.
【0017】この突起部1aの形状は、図1の突起部1
と同じように、円錐形状あるいは半球状にすることが望
ましい。また、この突起部1aは、基板5及び半導体チ
ップ7が比較的に小さい場合に適している。なお、この
突起部1aを辺3と平行に辺3と同じ長さに成形し、対
向する辺3に2個所設ければ済むと考えられるが、フレ
−ム6に長い突起部を成形することは、変形量の増大に
よるフレ−ムに反りや歪みが発生する恐れがあるので、
得策な方法ではない。The shape of the projection 1a is the same as that of the projection 1 in FIG.
As in the case of the above, it is desirable to make the shape of a cone or a hemisphere. The protrusion 1a is suitable when the substrate 5 and the semiconductor chip 7 are relatively small. It is considered that the protrusion 1a should be formed in the same length as the side 3 in parallel with the side 3 and two places should be provided on the opposite side 3, but it is necessary to form a long protrusion on the frame 6. May cause warping or distortion in the frame due to the increase in deformation.
Not a good idea.
【0018】図4(a)及び(b)は本発明の他の実施
の形態における多連結型半導体装置を説明するための平
面図及びAA断面拡大矢視図である。この多連結型半導
体装置は、図4に示すように、フレ−ム6に2つの突起
部1bを形成し、基板5の枠部の底面に突起部1bが入
る穴4を設けている。FIGS. 4A and 4B are a plan view and an AA cross-sectional enlarged view for explaining a multi-connection type semiconductor device according to another embodiment of the present invention. In this multi-connection type semiconductor device, as shown in FIG. 4, two projections 1b are formed on a frame 6 and a hole 4 is provided on the bottom surface of a frame of a substrate 5 to receive the projections 1b.
【0019】この突起部1bは図面では、2個であるが
3個4個でも良い。ただし、個数が増える程、突起部1
bと穴4のクリアランスを大きくしないと、穴4に突起
部1bが入らなくなる。そこで、本実施例では、突起部
1bを最少の2個所とし穴4とのクリアランスを適宜に
決め、位置決め精度をより良くするために、2つの突起
部1bの間の距離をできるだけ大きくし、例えば、基板
5の互いに対向する枠部に穴4を形成し、この穴4に入
る突起部1bをフレ−ム6上に形成した。The number of the protrusions 1b is two in the drawing, but may be three or four. However, as the number increases, the protrusion 1
If the clearance between b and the hole 4 is not increased, the protrusion 1b cannot enter the hole 4. Therefore, in the present embodiment, the distance between the two protrusions 1b is made as large as possible in order to improve the positioning accuracy by appropriately determining the clearance between the two protrusions 1b and the hole 4 with the minimum of two protrusions. A hole 4 was formed in the frame portions of the substrate 5 facing each other, and a projection 1b entering the hole 4 was formed on the frame 6.
【0020】また、この突起部1bは、前述したよう
に、円錐状あるいは半球状が良いが、成形し易い半球状
に成形した。この半球状の突起部1bの底部の直径を、
例えば、1乃至2mmとし、穴4を1.5乃至2.5m
mにしクリアランスを0.5mmとり、高さも0.5m
m以下にすることにより、基板5の突起部1bが極めて
円滑に穴4に入り込み基板5を位置決めすることができ
た。As described above, the protrusion 1b is preferably formed in a conical shape or a hemispherical shape, but is formed into a hemispherical shape which can be easily formed. The diameter of the bottom of this hemispherical projection 1b is
For example, 1 to 2 mm, and the hole 4 is 1.5 to 2.5 m
m, clearance 0.5mm, height 0.5m
By setting m or less, the protruding portion 1b of the substrate 5 could enter the hole 4 very smoothly to position the substrate 5.
【0021】以上説明した突起部は、小型の成形プレス
あるいは穴成形プレスで対応できるので、これら成形プ
レスはフレ−ム搬送ライン及び基板搬送ラインに組み込
むことができ連続自動化し易いという利点がある。Since the projections described above can be handled by a small molding press or a hole molding press, these molding presses have the advantage that they can be incorporated into a frame transport line and a substrate transport line and can be easily automated.
【0022】[0022]
【発明の効果】以上説明したように本発明は、搭載すべ
き金属フレ−ムに基板の枠内部と接する突起部あるいは
枠部の穴に入り込む突起部を設け、それぞれの突起部に
案内されて基板がフレ−ムに搭載されるので、フレ−ム
の搭載すべき位置に基板が精密に位置決めされ、後工程
であるワイヤボンディング工程やボ−ルボンディング工
程の製造歩留まりを向上させるという効果がある。As described above, according to the present invention, the metal frame to be mounted is provided with a projection which comes into contact with the inside of the frame of the substrate or a projection which enters a hole of the frame, and is guided by each projection. Since the substrate is mounted on the frame, the substrate is precisely positioned at the position where the frame is to be mounted, which has the effect of improving the manufacturing yield of the subsequent wire bonding and ball bonding processes. .
【図1】本発明の一実施の形態における多連結型半導体
装置を説明するための側面図及び平面図である。1A and 1B are a side view and a plan view illustrating a multi-connection semiconductor device according to an embodiment of the present invention.
【図2】図1の突起部とその近傍を拡大して示す断面図
である。FIG. 2 is an enlarged cross-sectional view showing a protrusion and its vicinity in FIG. 1;
【図3】図1の多連型半導体装置の変形例を示す平面図
である。FIG. 3 is a plan view showing a modification of the multiple semiconductor device of FIG. 1;
【図4】本発明の他の実施の形態における多連結型半導
体装置を説明するための平面図及びAA断面拡大矢視図
である。4A and 4B are a plan view and an AA cross-sectional enlarged view for explaining a multi-connection type semiconductor device according to another embodiment of the present invention.
【図5】従来の多連結型半導体装置の組立方法を説明す
るための側面図及び平面図である。5A and 5B are a side view and a plan view for explaining a conventional method of assembling a multi-connection semiconductor device.
【符号の説明】 1,1a,1b 突起部 2 角部 3 辺 4 穴 5 基板 6 フレ−ム 7 半導体チップ[Description of Signs] 1, 1a, 1b Projection 2 Corner 3 Side 4 Hole 5 Substrate 6 Frame 7 Semiconductor chip
Claims (8)
べて接着される複数の樹脂製の枠部材と、前記枠部材内
に挿入され前記フレ−ムに固着される半導体チップとを
有する多連結型半導体装置において、前記フレ−ム上に
形成されるとともに前記枠部材の内枠部と接する複数の
突起部を有することを特徴とする多連結型半導体装置。1. A plurality of resin frame members which are adhered side by side in a longitudinal direction to a strip-shaped metal frame, and a semiconductor chip which is inserted into the frame member and fixed to the frame. A multi-connection type semiconductor device, comprising: a plurality of projections formed on the frame and in contact with an inner frame of the frame member.
部の面が上から下に下るように傾斜していることを特徴
とする請求項1記載の多連結型半導体装置。2. The multi-connection type semiconductor device according to claim 1, wherein a surface of said projection in contact with an inner frame of said frame-like member is inclined from down to down.
とを特徴とする請求項2記載の多連型半導体装置。3. The multiple semiconductor device according to claim 2, wherein the cross-sectional shape of the protrusion is conical.
とを特徴とする請求項1記載の多連型半導体装置。4. The multiple semiconductor device according to claim 1, wherein a cross-sectional shape of said projection is hemispherical.
前記突起部を有することを特徴とする請求項1、請求項
2、請求項3及び請求項4のいずれか記載の多連結型半
導体装置。5. The multi-connection according to claim 1, wherein the plurality of projections have four projections that are in contact with corners of an inner frame of the frame member. Type semiconductor device.
ぞれと接する四つの前記突起部を有することを特徴とす
る請求項1、請求項2、請求項3及び請求項4のいずれ
か記載の多連結型半導体装置。6. The frame member according to claim 1, wherein said frame member has four said projecting portions which are in contact with respective sides of the inner frame facing each other. The multi-connection type semiconductor device according to the above.
べて接着される複数の樹脂製の枠部材と、前記枠部材内
に挿入され前記フレ−ムに固着される半導体チップとを
有する多連結型半導体装置において、前記枠部材を前記
フレ−ムに位置決めする少なくとも二つの突起部が前記
フレ−ムに形成されるとともに前記枠部材の下面に前記
突起部がはめ込まれる窪みが形成されていることを特徴
とする多連結型半導体装置。7. A plurality of resin frame members which are adhered side by side in a longitudinal direction to a strip-shaped metal frame, and a semiconductor chip which is inserted into the frame member and fixed to the frame. In the multi-connection type semiconductor device, at least two projections for positioning the frame member on the frame are formed on the frame, and a recess is formed on a lower surface of the frame member so that the projection is fitted. And a multi-connection type semiconductor device.
状であることを特徴とする請求項7記載の 多連結型半
導体装置。8. The multi-connection type semiconductor device according to claim 7, wherein a cross-sectional shape of the protrusion according to claim 7 is hemispherical.
Priority Applications (1)
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JP14521599A JP3285008B2 (en) | 1999-05-25 | 1999-05-25 | Multi-connection type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14521599A JP3285008B2 (en) | 1999-05-25 | 1999-05-25 | Multi-connection type semiconductor device |
Publications (2)
Publication Number | Publication Date |
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JP2000332154A true JP2000332154A (en) | 2000-11-30 |
JP3285008B2 JP3285008B2 (en) | 2002-05-27 |
Family
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JP14521599A Expired - Fee Related JP3285008B2 (en) | 1999-05-25 | 1999-05-25 | Multi-connection type semiconductor device |
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JP (1) | JP3285008B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002237104A (en) * | 2001-02-09 | 2002-08-23 | Teac Corp | Disk production system |
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1999
- 1999-05-25 JP JP14521599A patent/JP3285008B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002237104A (en) * | 2001-02-09 | 2002-08-23 | Teac Corp | Disk production system |
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Publication number | Publication date |
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JP3285008B2 (en) | 2002-05-27 |
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