JP2000312989A - Clamping method of thin sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for clamping a thin sheet work to a base plate even though the work is curved. SOLUTION: When a thin sheet 10 is clamped by vacuum adsorption, plural vacuum paths 12 are installed on a base plate 11, and sensors 15 of vacuum or flow rate are installed to the vacuum paths 12, so as to clamp the portion with good degree of adhesion. In this case, adsorption force is varied by positioning and clamping, so as to take another vacuum path by positioning and clamping. Also, a work floating prevention means is installed to a reference part. Then, the vacuum paths 12 of the base plate 11 are grooved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for clamping a thin plate (a metal plate having a thickness of 2 mm or less, for example, a steel plate) to a base plate.

[0002]

2. Description of the Related Art Conventionally, a thin plate is clamped by a mechanical method as shown in FIGS. 27 and 28, the work 2 loaded on the base plate 1
Moves the clamp 3 on the work by sliding the clamp 3 along the clamp slide 4, and operates the clamp cylinder 5 to clamp the work. Vacuum suction is used for machining non-thin-plated works (workpieces in which the flatness of the suction surface is not deformed) (for example, Japanese Utility Model Application Laid-Open No. 2-1581).

[0003]

However, the conventional thin plate clamping jig has the following problems.・ Clamp slide space is required.・ Clamp slide time is required, and the cycle time becomes longer.・ Complicated jigs, high cost, low maintenance,
There are problems such as the fact that there are many moving parts and this is likely to cause a failure.・ The versatility of the jig is low, making it difficult to handle any work. In vacuum suction, when the work is a thin plate, the work is cut out of the coil material, so that the coil is often wound. In addition, when the work is carried into the base plate by a robot or the like, the work may be deformed such as warping, and the work may not be able to be clamped to the base plate due to insufficient suction at a position where the work floats from the base plate. There is. SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum-type clamping method that can clamp a work without using a conventional clamping jig. Another object of the present invention is to provide a method for clamping a thin plate that can be attracted to a base plate.

[0004]

The present invention to achieve the above object is as follows. (1) A method of clamping a thin plate by vacuum suction, in which a plurality of vacuum paths are formed in a base plate on which a work is placed, and the work is vacuum-adsorbed first from a vacuum path that becomes a high vacuum due to high adhesion. A method of clamping a thin plate to be clamped to a base plate. (2) The method for clamping a thin plate according to (1), wherein a sensor for measuring a degree of vacuum or a flow rate is provided in each vacuum path, and the workpiece is clamped by vacuum suction first from the vacuum path to be a high vacuum. (3) The suction unit can be moved up and down, before the work is loaded, the upper end of the suction unit is lifted from the upper surface of the base plate, and when the work is loaded, the top of the suction unit is automatically lowered by vacuum pressure to clamp the work by vacuum suction. The method for clamping a thin plate as described above. (4) The method of clamping a thin plate according to (1), wherein the thin plate is clamped by vacuum suction, and the work is tilted in accordance with the warpage of the work when the work is loaded. (5) A method of clamping a thin plate by vacuum suction, in which the work is pressed against the base plate by a robot suction cup, a roller, or a pendulum type presser when the work is loaded, and the work is held on the base plate by vacuum suction. Clamping method for a thin plate to be clamped. (6) A method of clamping a thin plate on a base plate on which a thin work is placed by vacuum suction or a magnet and then clamping by vacuum suction, wherein the magnitude of the suction force is changed between the positioning and the clamp. Method. (7) The method of changing the attraction force between the positioning and the clamp is as follows: the positioning is performed while the magnet is in close contact with the magnet, and the clamping is performed by vacuum suction. A part of the work is pushed up and leaked at the time of positioning to reduce the degree of vacuum, and the device is pushed up at the time of clamping and retracted to raise the degree of vacuum so that the work is in close contact with the base plate. The vacuum path is weak at the time of positioning (6) The method for clamping a thin plate according to any one of (6), wherein the thin plate is communicated with a vacuum pump having a degree of vacuum, and the vacuum path is communicated with a vacuum pump having a high degree of vacuum during clamping. (8) This is a method of clamping a thin plate by vacuum suction. When a work is placed on the base plate by abutting the work end from the side, the slope provided on the reference and the swing type provided on the reference A method of clamping a thin plate, in which a work is held by a holding device of a rotary type, a shifting cylinder, a sliding type, a swing type, or a rotating type provided separately from a reference portion. (9) The method for clamping a thin plate according to (1), wherein a vacuum path of the base plate is formed in a groove shape, and a vacuum is applied to the vacuum path to clamp the workpiece by vacuum suction.

In the method (1) for clamping a thin plate, even if the work is warped, the work can be vacuum-adsorbed first and then clamped to the base plate from a vacuum path with good work adhesion and high vacuum. At the same time, the part of the work that has been lifted up to that time approaches the base plate, and the vacuum path at that part becomes high vacuum, so that the entire area of the work can be clamped to the base plate while automatically correcting the warpage of the work. In the method for clamping a thin plate in the above (2), since a sensor for measuring the degree of vacuum or the flow rate is provided in each vacuum path, it is possible to detect a vacuum path to be a high vacuum,
The method (1) can be automatically executed. In the method of clamping a thin plate described in (3) above, vacuum suction starts first from the suction portion that comes into contact with the work, and the suction portion goes down. Then, vacuum suction starts at the suction portion that comes into contact, and the suction portion goes down. To clamp the workpiece. In the method of clamping a thin plate in the above (4), the work is inclined at the time of the work being put in accordance with the warp of the work, so that the put work can be easily attracted to the base plate. In the method of clamping a thin plate in the above (5), the work is pressed against the base plate by the presser at the time of loading the work, so that the work can be attracted to the base plate and clamped without lifting the work. The above (6)
According to the thin plate clamping method, the magnitude of the attraction force is changed between the positioning and the clamping, so that the workpiece can be shifted along the upper surface of the base plate at the time of positioning, and the workpiece can be strongly clamped to the base plate at the time of clamping. In the method (7) for clamping a thin plate, the methods (7) to (7) are cited as methods for changing the attraction force between positioning and clamping. According to the thin plate clamping method of (8), when the work is placed on the base plate by abutting the work end from the lateral direction, the work is pressed by any one of the above (8). In addition, lifting of the end of the work can be prevented, and suction and clamping of the work can be reliably performed. In the thin plate clamping method of the above (9), the vacuum path of the base plate is formed in a groove shape, and the suction area ratio can be increased as compared with the hole shape.
Work can be clamped with strong force.

[0006]

FIG. 1 shows an apparatus for carrying out a method for clamping a thin plate according to a first embodiment of the present invention, and FIG. 2 shows an apparatus for carrying out a method for clamping a thin plate according to a second embodiment of the present invention. FIG. 3 shows an apparatus for performing the method for clamping a thin plate according to the third embodiment of the present invention, FIG. 4 shows an apparatus for performing the method for clamping a thin sheet according to the fourth embodiment of the present invention, and FIG. FIG. 6 shows an apparatus for carrying out the method for clamping a thin plate according to the fifth embodiment of the present invention, FIG. 6 shows an apparatus for carrying out the method for clamping a thin plate according to the sixth embodiment of the present invention, and FIG. FIG. 8 shows an apparatus for performing the method for clamping a thin plate according to the eighth embodiment of the present invention, and FIG. 9 shows an apparatus for performing the method for clamping a thin sheet according to the ninth embodiment of the present invention. FIG. 10 shows a thin plate clamping method according to a tenth embodiment of the present invention. FIG. 11 shows an apparatus for carrying out the method for clamping a thin plate according to the eleventh embodiment of the present invention, and FIG. 12 shows an apparatus for carrying out the method for clamping a thin plate according to the twelfth embodiment of the present invention. 13 is a first embodiment of the present invention.
3 shows an apparatus for performing the method of clamping a thin plate according to the third embodiment,
14 shows an apparatus for carrying out the method for clamping a thin plate according to the fourteenth embodiment of the present invention, FIG. 15 shows an apparatus for carrying out the method for clamping a thin plate according to the fifteenth embodiment of the present invention, and FIG. FIG. 17 shows an apparatus for carrying out the thin plate clamping method of the sixteenth embodiment, FIG. 17 shows an apparatus for carrying out the thin plate clamping method of the seventeenth embodiment of the present invention, and FIG.
8 shows an apparatus for performing the method for clamping a thin plate according to the eighth embodiment,
FIG. 19 shows an apparatus for performing the thin plate clamping method according to the nineteenth embodiment of the present invention, and FIG. 20 shows an apparatus for performing the thin plate clamping method according to the twentieth embodiment of the present invention. FIG. 23 shows an apparatus for carrying out the method for clamping a thin plate according to the twenty-first embodiment of the present invention, and FIGS. 24, 25 and 26 show devices for carrying out the method for clamping a thin plate according to the twenty-second embodiment of the present invention. Parts that are common or similar throughout all embodiments of the present invention are given the same reference numerals throughout all embodiments of the present invention.

First, common or similar parts in all embodiments of the present invention will be described with reference to FIGS. 1 and 6, for example.
explain. In the present invention, the work 10 has a thickness of 0.6 to 0.6.
It is made of a 2.0 mm thin plate, and is made of a metal plate, for example, a steel plate. The work 10 is placed on the base plate 11 and is clamped by being vacuum-sucked to the base plate 11. A plurality of vacuum paths 12 including holes, grooves, and the like are formed in the base plate 11, and are connected to a vacuum pump (not shown). The work 10 is sucked and held by, for example, a vacuum cup 13 attached to the tip of the robot, and is carried into the base plate 11.
The vacuum is released, and the wafer is placed on the base plate 11. A plurality of workpieces are placed on the base plate 11 at different positions, the workpieces are positioned with their ends abutting each other, and in this state, the workpieces are vacuum-adsorbed and clamped to the base plate 11 to process the abutting portion (for example,
Welding). After the processing, the vacuum suction is released, and the processed work is removed from the base plate 11. Work 1
A problem in loading and clamping the “0” onto the base plate 11 is that the work 10 is a material cut out from a coil, and thus may be warped. In addition, the work 10 is warped when being sucked and held by the vacuum cup 13 of the robot due to the thin plate. As a result, when the work 10 is carried onto the base plate 11, a part of the work 10 is lifted from the base plate 11, and the vacuum of the part is reduced, so that the base plate 11 cannot be vacuum-adsorbed. According to the present invention, in each of the following embodiments, even if the workpiece 10 is carried onto the base plate 11 with a warp,
Are proposed to be able to clamp the base plate 11 on the base plate 11.

Next, parts unique to each embodiment of the present invention will be described. In the first embodiment of the present invention, as shown in FIG. 1, of the plurality of vacuum paths 12, the vacuum path 12, which has a high degree of adhesion to the work 10 and has a high vacuum, is first vacuum-adsorbed to the work 10. Clamp to base plate 11. In FIG. 1, a valve 14 (eg, solenoid valves A, B,
C, D) Vacuum path 12 having good adhesion to work 10
Are opened in the order of A → D → B → C, and the vacuum passage 12 is connected to a vacuum pump. When the tendency of the warpage of the workpieces 10 is the same, the valve opening order is determined for the first workpiece 10 and then the valves are opened in that order so that any workpiece 10 can be clamped. Become like Therefore, this method is applied to the work 10
This is suitable for the case where the tendency of warpage is the same. First of the present invention
Regarding the operation of the embodiment, even if the work 10 is warped, the work 10 can be vacuum-adsorbed first and then clamped to the base plate 11 from the vacuum path 12 where a high vacuum with good work adhesion can be obtained. The work part which has been lifted up to the base plate 11 comes close to the base plate 11 and the vacuum path 12 at that part becomes high vacuum.
The entire work area can be clamped to the base plate 11 while automatically correcting the zero warpage.

In the second embodiment of the present invention, as shown in FIG. 2, a sensor 15 for measuring the degree of vacuum or the flow rate is provided in each vacuum passage 12, and the vacuum passage 12 to be a high vacuum is detected first. The workpiece 10 is clamped by vacuum suction first from the vacuum path 12 where high vacuum is established. The output of the sensor 15 is input to a computer 16 via an A / D converter, and the computer 16 calculates which vacuum path 12 has been brought to a high vacuum first, and the valve 14 of the vacuum path 12 in which the high vacuum has been reached. Is opened according to the output signal of the computer 16 and connected to a vacuum pump. This method can be applied to the case where the tendency of the workpiece 10 to warp is unknown because the computer 16 can calculate which vacuum path 12 has been brought to a high vacuum first. Regarding the operation of the second embodiment of the present invention, since a sensor 15 for measuring the degree of vacuum or the flow rate is provided in each vacuum path, the vacuum path 12 to be a high vacuum can be automatically detected, and the first embodiment of the present invention can be used. The method of the embodiment can be performed automatically.

In the third and fourth embodiments of the present invention, as shown in FIGS. 3 and 4, at least the upper end of the suction unit 17 can be moved up and down. When the work 10 is loaded, the upper end of the suction unit 17 is automatically lowered by vacuum pressure, and the work 10 is clamped by vacuum suction.
Then, the vacuum path 12 is first opened from the valve 14 of the vacuum path, and the vacuum path 12 is connected to a vacuum pump. In the third embodiment of the present invention, the suction portion 17 is urged upward by a spring 18 or an elastic body. In the fourth embodiment of the present invention, the suction portion 17 is made of an elastic material (for example,
(Rubber), and the upper end of the suction portion 17 is lifted from the upper surface of the base plate 11 without being pressed. Regarding the operation of the third embodiment and the fourth embodiment of the present invention, the vacuum suction starts from the suction part 17 which comes into contact with the work 10 first, the suction part 17 descends, and the vacuum suction starts at the suction part 17 which comes into contact next. The suction unit 17 is lowered, suction proceeds in order, and the work 10 is suctioned to the base plate 11 and clamped.

In the fifth embodiment of the present invention, as shown in FIG. 5, when the work 10 is loaded, the work 10 is inclined in accordance with the warpage of the work 10. Θ in FIG. 5 is the inclination angle of the work 10. Work 1 with robot vacuum cup 13
The work 10 can be inclined by changing the vertical position of the left and right vacuum cups 13 when supporting 0. Regarding the operation of the fifth embodiment of the present invention, when the workpiece 10 is loaded, the workpiece 10 is inclined in accordance with the warpage of the workpiece 10, so that one end of the loaded workpiece 10 can be in close contact with the base plate 11, Can be easily adsorbed to the base plate 11.

In the sixth, seventh, eighth, ninth, and tenth embodiments of the present invention, as shown in FIGS. 6, 7, 8, 9, and 10, FIG. , When the work 10 is loaded,
Robot suction cup 13, or rollers 19, 20
Alternatively, work 1 can be performed using any of the pressers of the pendulum type presser 21.
0 is pressed against the base plate 11, and the work 10 is clamped to the base plate 11 by vacuum suction.
The operation of the sixth embodiment, the seventh embodiment, the eighth embodiment, the ninth embodiment, and the tenth embodiment of the present invention is as follows. The work 10 can be sucked to the base plate 11 and clamped without lifting the work 10 from above.

More specifically, in a sixth embodiment of the present invention, as shown in FIG. 6, the work 10 is pressed onto the base plate 11 from above by a feeding device (for example, a robot equipped with a suction cup 13) at the time of work input. . In this case, the suction cup 13 serves as a presser.

In a seventh embodiment of the present invention, as shown in FIG. 7, the work 10 is tilted when the work is thrown in, pressed while being pressed against the upper surface of the base plate 11, brought into close contact with the bend of the work 10, and then put in a throwing device (for example, , A robot with a suction cup 13 attached thereto)
To the base plate 11. In this case, the suction cup 13 serves as a presser.

In an eighth embodiment of the present invention, as shown in FIG. 8, when the work 10 is loaded on the base plate 11, the rollers 19 supported at both ends are run on the work 10,
The work 10 is pressed against the base plate 11 by the weight and elasticity of the roller 19. In this case, the roller 19 serves as a presser.

In the ninth embodiment of the present invention, as shown in FIG. 9, when the work 10 is loaded on the base plate 11, the roller 20 having one end supported is run to the required position on the work 10, and Only the roller 20 is pressed against the base plate 11 by the weight and elasticity of the roller 20. In this case, the roller 20 serves as a presser.

In the tenth embodiment of the present invention, as shown in FIG. 10, when the work 10 is put on the base plate 11, the pendulum type presser 21 is sequentially dropped on the work 10 to press the work 10 against the base plate 11. . In this case, the pendulum type presser 21 serves as a presser.

In the eleventh, twelfth, thirteenth, fourteenth, and fifteenth embodiments of the present invention, FIG.
As shown in FIGS. 1, 12, 13, 14, and 15, a work 10 made of a thin plate is positioned on a base plate 11 on which the work is placed by vacuum suction or magnet 22 suction, and then clamped by vacuum suction. Then, the magnitude of the suction force is changed between the positioning and the clamp. Make the clamping force greater than the positioning force. The operations of the eleventh, twelfth, thirteenth, fourteenth, and fifteenth embodiments of the present invention are described below.
Since the magnitude of the suction force was changed between the positioning and the clamp,
At the time of positioning, the work 10 can be shifted along the upper surface of the base plate 11, and at the time of clamping, the work 10 can be strongly clamped to the base plate 11.

More specifically, in the eleventh embodiment of the present invention, as shown in FIG. 11, a vacuum path 12 is formed in the base plate 11, a magnet 22 is fixed, and the work 10 is fixed to the base plate 11. At the time of positioning, the suction is performed by the magnet 22 without performing the vacuum suction by the vacuum path 12, and the valve 23 is opened to perform the vacuum suction by the vacuum path 12 at the time of clamping. By making the attraction force of the magnet 22 smaller than the vacuum attraction force by the vacuum path 12, the work 10 can be moved on the base plate 11 when the work 10 is positioned on the base plate 11, so that the end portions of the two works can be moved. Can be easily butted and positioned.

In the twelfth embodiment of the present invention, as shown in FIG. 12, a relief valve 24 is provided in a passage connecting the vacuum path 12 and a vacuum pump. When positioning the work 10, the relief valve 24 is opened to relieve the vacuum pressure in the vacuum path 12 to the atmosphere and reduce the vacuum pressure, and the work 10 is moved on the base plate 11 when positioning the work 10 on the base plate 11. Be able to do it. Further, at the time of clamping, the relief valve 24 is closed to increase the vacuum pressure of the vacuum path 12 and the workpiece 10 is strongly suctioned and clamped.

In a thirteenth embodiment of the present invention, as shown in FIG. 13, a push-up device 2 for pushing up a part of a work 10 to a base plate 11 and floating the work 10 from the base plate 11.
5 is provided. When positioning the work 10, the work 10 is pushed up by the push-up device 25 and floated from the base plate 11 to leak the vacuum in the vacuum path 12, and the work 10 is moved on the base plate 11 when the work 10 is positioned on the base plate 11. To be able to Further, at the time of clamping, the work-up 10 is brought into close contact with the base plate 11 by lowering the push-up device 25, the vacuum pressure in the vacuum path 12 is increased, and the work 10 is strongly suctioned and clamped.

In the fourteenth embodiment of the present invention, as shown in FIG.
Are separated, and vacuum is drawn by vacuum pumps having different capacities. In this case, the vacuum pump 26 for clamping can be set to a higher vacuum than the vacuum pump 27 for positioning the work. Then, when positioning the work 10, the work 10 is evacuated by a vacuum pump for positioning the work so that the work 10 can be moved on the base plate 11 when the work 10 is positioned on the base plate 11. Further, at the time of clamping, the work 10 is strongly evacuated and clamped by evacuation with a vacuum pump for clamping to increase the vacuum pressure in the vacuum path 12.

In the fifteenth embodiment of the present invention, as shown in FIG.
And the adsorption area is changed for each system. In this case, the suction area of the concave portion 28 of the vacuum path for clamping is made larger than the suction area of the concave portion 29 of the vacuum path for work positioning. When positioning the work 10, the positioning side valve 31 is opened, the clamp side valve 30 is closed, and a vacuum is drawn in the vacuum path for work positioning to reduce the suction area of the vacuum path, and the work 10 is positioned on the base plate 11. In this case, the work 10 can be moved on the base plate 11 when performing the operation. Further, at the time of clamping, the clamp side valve 30 is opened, the positioning side valve 31 is closed, and the vacuum is drawn in the vacuum path for clamping, the suction area of the vacuum path 12 is increased, and the workpiece 10 is strongly suctioned and clamped.

In the sixteenth, seventeenth, eighteenth, nineteenth, and twentieth embodiments of the present invention, FIG.
6, FIG. 17, FIG. 18, FIG. 19, and FIG. 20, when the workpiece 10 is placed on the base plate 11 by abutting the end of the workpiece against the reference 32, 34, 37, 38 from the lateral direction, 32, 34, slopes 33, 35, 36 provided on the reference portions 37, 38, swing-type or rotary-type holding devices 39, 40, a shift cylinder 41 provided separately from the reference portion, or a slide-type or swing-type Alternatively, the work 10 is held by any one of the rotary type holding devices. Although not shown, the base plate 11 is provided with a vacuum path 12.
Vacuum path 12 communicates with a vacuum pump. First of the present invention
The operation of the sixth embodiment, the seventeenth embodiment, the eighteenth embodiment, the nineteenth embodiment, and the twentieth embodiment is described below. When the work 10 is placed on the base plate 11, the work 10 is pressed by any of the above-mentioned.
The lifting of the end of the work 10 can be prevented, and the suction and clamping of the work 10 to the base plate 11 can be ensured.

More specifically, in the sixteenth embodiment of the present invention, as shown in FIG.
A slope 33 extending upward and toward the base plate is provided on one side surface of a portion protruding upward from the base plate 11. Then, when positioning the work 10 against the reference 32, a downward component force is applied to the end of the work 10 so that the work end does not float.

In the seventeenth embodiment of the present invention, as shown in FIG. 17, a slope 35 extending upward and to the base plate side is provided on both sides of a portion of the reference (positioning reference) 34 projecting upward from the base plate 11. 36 are provided. Then, when the work 10 is positioned against the reference 34, a downward component force is applied to the end of the work 10,
Make sure that the work edge does not rise.

In the eighteenth embodiment of the present invention, as shown in FIG. 18, a fixed reference (positioning reference) 37 is provided with a swing-type holding device 39 which can be turned up and down. When the work 10 is positioned against the reference 37, the end of the work 10 is pressed by the pressing device 39 so that the end of the work does not rise.

In the nineteenth embodiment of the present invention, as shown in FIG. 19, a fixed reference (positioning reference) 38 is provided with a rotary type holding device 40 which can be rotated in the horizontal direction. Then, when positioning the work 10 against the reference 38, the end of the work 10 is pressed by the pressing device 40 so that the work end does not rise.

In the twentieth embodiment of the present invention, as shown in FIG. 20, a shift cylinder 41 which can be moved in a horizontal direction separately from a fixed reference is provided.
The roller 42 for holding the pressure is connected. Then, when the work 10 is placed on the base plate 11, the shift cylinder 41 is moved and the work 10 is pressed by the rollers 42 so that the work 10 does not float off the base plate 11.

In the twenty-first embodiment of the present invention, FIGS.
As shown in FIG. 3, the vacuum path 12 of the base plate 11 is formed in a groove shape extending long in the groove longitudinal direction, and a vacuum is applied to the vacuum path 12 to clamp the work 10 to the base plate 11 by vacuum suction. The groove-shaped vacuum path 12 extends in parallel to the butting line of the two works. There are a plurality of groove-shaped vacuum paths 12, and the plurality of vacuum paths 12 extend in parallel with each other. FIG. 21 may be applied to any embodiment of the present invention. Twenty-first of the present invention
The operation of the embodiment will be described. When trying to obtain the required suction force in a vacuum path with a round or square suction area, if the diameter or the length of the side is small, it will be far from the butt line of the two workpieces (for example, it will be the welding line). The pressing force is hardly increased. Conversely, if the diameter or the length of the side is increased, the work is bent without support at the center of the suction area. However, as in the twenty-first embodiment of the present invention, the work 1
0 can be prevented, the suction area ratio can be further increased, and the clamping of the work 10 to the base plate 11 becomes strong.

In the twenty-second embodiment of the present invention, FIGS.
As shown in FIG. 6, the vacuum path 12 of the base plate 11 is formed in a groove shape extending long in the groove longitudinal direction, and a vacuum is applied to the vacuum path 12 to clamp the work 10 to the base plate 11 by vacuum suction. The groove-shaped vacuum path 12 extends in parallel to the butting line of the two works. There are a plurality of groove-shaped vacuum paths 12, and the plurality of vacuum paths 12 extend in parallel with each other. The groove depth may be equal to or larger than the size of the dust (such as burrs of a steel plate) 43. In addition, one hole 44 is provided for each groove, and each groove communicates with the common vacuum path 45. Regarding the operation of the twenty-second embodiment of the present invention, each groove can be communicated with the common vacuum path 45 only by providing one hole 44 per groove, so that the vacuum path 12 is circular or square. Thus, it is not necessary to provide holes in all the circular or square suction portions, and the number of holes and piping are simplified.

[0032]

According to the method for clamping a thin plate according to the first aspect of the present invention, the workpiece is clamped by vacuum suction of the workpiece first from a vacuum path where a high vacuum is applied. The entire work area can be clamped to the base plate while automatically correcting the warpage. According to the method for clamping a thin plate according to the second aspect, since a sensor for measuring the degree of vacuum or the flow rate is provided in each vacuum path, it is possible to detect a vacuum path to be a high vacuum, and the method of the first aspect is automatically executed. it can. According to the thin plate clamping method of the third aspect, since the suction portion can be moved up and down, vacuum suction starts first from the suction portion in contact with the work, and the suction portion descends. At the beginning, the suction section is lowered, and suction is progressed in order to clamp the work. According to the method for clamping a thin plate according to the fourth aspect, the work is inclined at the time of the work being put in accordance with the warpage of the work, so that the put work can be easily attracted to the base plate. According to the thin plate clamping method of the fifth aspect, the work is pressed against the base plate by the presser when the work is loaded, so that the work can be lifted and sucked to the base plate and clamped. According to the thin plate clamping method of the present invention, since the magnitude of the attraction force is changed between the positioning and the clamping, the work can be shifted along the upper surface of the base plate at the time of positioning, and the work is strongly clamped to the base plate at the time of clamping. be able to. Claim 7
According to the method of clamping a thin plate described in any one of the above, any one of the methods of (1) to (7) can be adopted. According to the thin plate clamping method of the present invention, when the work is placed on the base plate by abutting the work end from the lateral direction, the work end can be prevented from floating, and the suction and clamping of the work can be reliably performed. become. According to the thin plate clamping method of the ninth aspect, since the vacuum path of the base plate is formed in a groove shape, the workpiece can be clamped with a strong force.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of an apparatus for performing a method for clamping a thin plate according to a first embodiment of the present invention.

FIG. 2 is a schematic sectional view and a system diagram of an apparatus for performing a method of clamping a thin plate according to a second embodiment of the present invention.

FIG. 3 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a third embodiment of the present invention.

FIG. 4 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a fourth embodiment of the present invention.

FIG. 5 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a fifth embodiment of the present invention.

FIG. 6 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a sixth embodiment of the present invention.

FIG. 7 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a seventh embodiment of the present invention.

FIG. 8 is a schematic perspective view of an apparatus for performing a thin plate clamping method according to an eighth embodiment of the present invention.

FIG. 9 is a schematic perspective view of an apparatus for performing a thin plate clamping method according to a ninth embodiment of the present invention.

FIG. 10 is a schematic perspective view of an apparatus for performing a thin plate clamping method according to a tenth embodiment of the present invention.

FIG. 11 is a schematic sectional view of an apparatus for performing a thin plate clamping method according to an eleventh embodiment of the present invention.

FIG. 12 is a schematic sectional view of an apparatus for performing a thin plate clamping method according to a twelfth embodiment of the present invention.

FIG. 13 is a schematic sectional view of an apparatus for performing a thin plate clamping method according to a thirteenth embodiment of the present invention.

FIG. 14 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a fourteenth embodiment of the present invention.

FIG. 15 is a schematic sectional view of an apparatus for performing a thin plate clamping method according to a fifteenth embodiment of the present invention.

FIG. 16 is a schematic sectional view of an apparatus for performing a method of clamping a thin plate according to a sixteenth embodiment of the present invention.

FIG. 17 is a schematic sectional view of an apparatus for performing a thin plate clamping method according to a seventeenth embodiment of the present invention.

FIG. 18 is a schematic perspective view of an apparatus for performing a thin plate clamping method according to an eighteenth embodiment of the present invention.

FIG. 19 is a schematic perspective view of an apparatus for performing a thin plate clamping method according to a nineteenth embodiment of the present invention.

FIG. 20 is a schematic sectional view of an apparatus for performing the method for clamping a thin plate according to the twentieth embodiment of the present invention.

FIG. 21 is a plan view of an apparatus for performing a thin plate clamping method according to a twenty-first embodiment of the present invention.

FIG. 22 is a partial plan view of an apparatus for performing the method of clamping a thin plate according to the twenty-first embodiment of the present invention.

FIG. 23 is a partial sectional view of an apparatus for performing the method of clamping a thin plate according to the twenty-first embodiment of the present invention.

FIG. 24 is a sectional view showing a relationship between dust and a groove depth in an apparatus for performing the thin plate clamping method according to the twenty-second embodiment of the present invention.

FIG. 25 is a partial plan view of an apparatus for performing the method for clamping a thin plate according to the twenty-second embodiment of the present invention.

FIG. 26 is a partial sectional view of an apparatus for performing a thin plate clamping method according to a twenty-second embodiment of the present invention.

FIG. 27 is a side view of a conventional clamping device before clamping.

FIG. 28 is a side view after clamping of the conventional clamping device.

[Explanation of symbols]

 10 Thin plate (work) 11 Base plate 12 Vacuum path

Claims (9)

[Claims] 1. A method for clamping a thin plate by vacuum suction, wherein a plurality of vacuum paths are formed in a base plate on which a work is placed, and a vacuum path which becomes a high vacuum due to a high degree of adhesion is first applied by vacuum suction. A method of clamping a thin plate that clamps a work to a base plate. 2. The thin plate clamping method according to claim 1, wherein a sensor for measuring a degree of vacuum or a flow rate is provided in each of the vacuum paths, and the workpiece is clamped by vacuum suction first from the vacuum path to be a high vacuum. 3. The suction part can be moved up and down, the upper end of the suction part is raised from the upper surface of the base plate before the work is loaded, and the upper end of the suction part is automatically lowered by the vacuum pressure when the work is loaded to clamp the work by vacuum suction. Item 4. The method for clamping a thin plate according to Item 1. 4. The method of clamping a thin plate according to claim 1, wherein the thin plate is clamped by vacuum suction, and the work is slanted in accordance with the warpage of the work when the work is loaded. 5. A method for clamping a thin plate by vacuum suction, wherein the work is pressed against a base plate by a suction tool of a robot, a roller, or a presser of a pendulum type press when the work is loaded, and the work is suctioned by vacuum suction. A method of clamping a thin plate to be clamped to a base plate. 6. A method of clamping a thin plate to a base plate on which a thin plate work is placed by vacuum suction or a magnet, and then clamping the thin plate by vacuum suction. Changed method of clamping thin plates. 7. A method of changing the attraction force between the positioning and the clamp is as follows: the positioning is performed while the magnet is in close contact with the magnet, and the clamping is performed by vacuum suction. Part of the work is pushed up by a push-up device during positioning, and the degree of vacuum is reduced by leaking.Then, the work-up device is retracted during clamping to raise the degree of vacuum so that the work is in close contact with the base plate. 7. The method for clamping a thin plate according to claim 6, wherein the vacuum path is communicated with a vacuum pump having a high degree of vacuum during clamping, and the suction area is changed between positioning and clamping. 8. A method of clamping a thin plate by vacuum suction, wherein when a work is placed on a base plate by abutting the work end from a lateral direction, a slope provided on a reference, and a neck provided on the reference portion. A method of clamping a thin plate, in which a work is held by a swing type or rotary type holding device, a shift cylinder or a slide type or a swing type or rotary type holding device provided separately from a reference portion. 9. A method of clamping a thin plate by vacuum suction, wherein the vacuum path of the base plate is formed in a groove shape, and a vacuum is applied to the vacuum path to clamp the workpiece by vacuum suction. Method.