JP2000223994A - 圧電振動子 - Google Patents
圧電振動子Info
- Publication number
- JP2000223994A JP2000223994A JP11023083A JP2308399A JP2000223994A JP 2000223994 A JP2000223994 A JP 2000223994A JP 11023083 A JP11023083 A JP 11023083A JP 2308399 A JP2308399 A JP 2308399A JP 2000223994 A JP2000223994 A JP 2000223994A
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode film
- excitation electrode
- container
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000059 patterning Methods 0.000 claims abstract description 3
- 230000005284 excitation Effects 0.000 claims description 35
- 235000014676 Phragmites communis Nutrition 0.000 claims description 15
- 230000001681 protective effect Effects 0.000 abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 11
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 9
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 30
- 239000011651 chromium Substances 0.000 description 13
- 229910000679 solder Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 239000012790 adhesive layer Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11023083A JP2000223994A (ja) | 1999-01-29 | 1999-01-29 | 圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11023083A JP2000223994A (ja) | 1999-01-29 | 1999-01-29 | 圧電振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000223994A true JP2000223994A (ja) | 2000-08-11 |
| JP2000223994A5 JP2000223994A5 (enrdf_load_html_response) | 2006-03-16 |
Family
ID=12100534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11023083A Pending JP2000223994A (ja) | 1999-01-29 | 1999-01-29 | 圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000223994A (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266889A (ja) * | 2006-03-28 | 2007-10-11 | Nec Tokin Corp | 圧電振動子および圧電振動ジャイロ |
| JP2010135973A (ja) * | 2008-12-03 | 2010-06-17 | Nippon Dempa Kogyo Co Ltd | 圧電デバイスの製造方法 |
-
1999
- 1999-01-29 JP JP11023083A patent/JP2000223994A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266889A (ja) * | 2006-03-28 | 2007-10-11 | Nec Tokin Corp | 圧電振動子および圧電振動ジャイロ |
| JP2010135973A (ja) * | 2008-12-03 | 2010-06-17 | Nippon Dempa Kogyo Co Ltd | 圧電デバイスの製造方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6768247B2 (en) | Vibrating reed, vibrator, oscillator and electronic device | |
| JP3989663B2 (ja) | 圧電振動子と圧電振動子の製造方法 | |
| JP4292825B2 (ja) | 水晶振動片の製造方法 | |
| JP4106540B2 (ja) | 水晶デバイス、水晶振動片、水晶振動片の製造方法、水晶デバイスを利用した携帯電話装置ならびに水晶デバイスを利用した電子機器 | |
| JP2000223997A (ja) | 圧電振動子の電極構造 | |
| US4253036A (en) | Subminiature tuning fork quartz crystal vibrator with nicrome and palladium electrode layers | |
| CN114208027B (zh) | 压电振动板、压电振动器件以及压电振动器件的制造方法 | |
| JP4241022B2 (ja) | 水晶振動片とその製造方法及び水晶振動片を利用した水晶デバイス、ならびに水晶デバイスを利用した携帯電話装置および水晶デバイスを利用した電子機器 | |
| JP2004364019A (ja) | 圧電振動片、圧電振動子、圧電発振器、ジャイロスコープセンサ、電子機器、及び製造方法 | |
| JP2000223994A (ja) | 圧電振動子 | |
| JP2008109676A (ja) | 水晶デバイスと音叉型水晶振動片ならびに音叉型水晶振動片の製造方法 | |
| JP2000223993A (ja) | 圧電振動子 | |
| JP3925796B2 (ja) | 水晶振動片とその製造方法及び水晶振動片を利用した水晶デバイス、ならびに水晶デバイスを利用した携帯電話装置および水晶デバイスを利用した電子機器 | |
| JP2001144581A (ja) | 圧電振動子およびその製造方法 | |
| JP5465041B2 (ja) | 音叉型屈曲水晶振動素子 | |
| JP3731540B2 (ja) | 圧電振動片の製造方法 | |
| US4232109A (en) | Method for manufacturing subminiature quartz crystal vibrator | |
| JP2002064356A (ja) | 圧電振動子 | |
| JPS59119911A (ja) | 圧電振動子 | |
| JP4327286B2 (ja) | 水晶振動子の製造方法 | |
| JP2004112843A (ja) | 圧電デバイスとその圧電振動片の製造方法及び圧電デバイスを利用した携帯電話装置及び圧電デバイスを利用した電子機器 | |
| JPH10242795A (ja) | 圧電素子とその製造方法 | |
| JP4019990B2 (ja) | 圧電振動片と圧電デバイスの製造方法 | |
| JP2006157504A (ja) | 圧電デバイスとガラスリッドの製造方法 | |
| JPH09116047A (ja) | セラミックパッケージの構造 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20040302 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060126 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060126 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081120 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081202 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090123 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090616 |