JP2000221227A - Apparatus and method for inspecting conductive pattern - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting conductive patterns capable of applying a voltage with a simple structure, identifying a disconnection or a short-circuit of the pattern, and easily rapidly positioning the failure of the disconnection or the short-circuit. SOLUTION: In order to inspect a disconnection or a short-circuit of an element 1 to be inspected having multi-row conductive patterns 2, the apparatus for inspecting the patterns comprises a non-contact voltage supply means 5 formed by extending in a row direction over the patterns of the respective rows to apply a voltage to the pattern 2 of the each row movable in a columnar direction, and a voltage sensor 7 arranged at one end side of the row of the patterns 2 to measure a voltage of the patters 2 of each row movable in the row direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for inspecting a conductive pattern, and more particularly to an apparatus and a method for inspecting a conductive pattern such as a printed wiring board or a plasma display for disconnection or short circuit in a non-contact manner. is there.

[0002]

2. Description of the Related Art The conductive patterns of printed wiring boards and plasma displays have been increasing in density and tending to become finer and smaller, and defects such as disconnection due to chipping of the conductive pattern and short-circuiting due to bridging of the conductive pattern have been observed. A pattern inspection to find out is necessary. These inspections cannot be dealt with by visual inspection, and a method of inspecting continuity by contact or non-contact has been conventionally proposed. For example, in Japanese Patent Application Laid-Open No. 9-264919, a contact probe for applying a voltage to a wiring pattern to be inspected is brought into contact, a non-contact sensor is arranged in proximity to an electrode part to be inspected, and a terminal of each conductive path is arranged. There is a description that the level difference of the generated electromagnetic field is detected, and the presence or absence of disconnection is determined by a waveform processing circuit. It is also described that the non-contact sensor is a voltage sensor and the contact probe is a sensor.
Japanese Unexamined Patent Publication No. 8-105926 discloses that a probe pin for applying a voltage is brought into contact with a wiring pattern to be inspected, and the voltage is measured by a non-contact voltage detecting means for scanning the wiring pattern to disconnect or short-circuit the wiring pattern. There is a statement to detect the position.

[0003]

However, according to the first conventional example, it is impossible to detect the position of the disconnection, and to apply a voltage to the wiring pattern or use it as a sensor. It is necessary to contact a multi-pin contact probe with a wiring pattern. Therefore, if the wiring pattern changes, it is necessary to change the shape of the contact probe, and the work is troublesome.

According to the second conventional example, contact between the contact probe and the wiring pattern is required in order to apply a voltage to the wiring pattern as in the first conventional example, and a single contact probe applies the voltage. Trying to do. For this purpose, a short bar is provided on the substrate, but it takes time and labor to cut the short bar after the inspection. In addition, a single voltage sensor requires a stage to move in the X and Y directions, and it is necessary to scan all wiring patterns, which takes time.

[0005] As described above, in such an inspection apparatus and method, it takes a long time for the inspection, and the apparatus becomes large.
There is a problem that the inspection cost increases. The present invention solves such a problem of the conventional example, and uses a non-contact voltage applying unit and a voltage sensor that can move and obtain position information, thereby more quickly identifying a disconnection and a short circuit of a conductive pattern. It is another object of the present invention to provide a compact and inexpensive conductive pattern inspection apparatus and method capable of detecting its position, and being compact.

[0006]

In order to achieve the above object, a conductive pattern inspection apparatus of the present invention inspects a test object (1) having multiple rows of conductive patterns (2) for disconnection or short circuit. In the conductive pattern inspection apparatus, a non-contact voltage supply means formed to extend in the row direction across the conductive patterns of the respective rows, movable in the column direction of the multi-row conductive patterns, and applying a voltage to the conductive patterns of the respective rows. (5)
And a voltage sensor (7) disposed on one end side of the column of the conductive pattern, movable in the row direction of the multi-row conductive pattern, and measuring the voltage of the conductive pattern in each row.

A conductive pattern inspection method according to the present invention is a conductive pattern inspection method for inspecting a test object having multiple rows of conductive patterns for disconnection or short circuit. Applying a voltage to each conductive pattern at a position on the other end side of the column by a non-contact voltage supply means which is formed to extend in a direction, and is movable in the column direction of the multi-row conductive pattern; A step of moving a voltage sensor, which is disposed on one end side and movable in the row direction of the multi-row conductive pattern in the row direction of the multi-row conductive pattern, to measure the voltage of the conductive pattern in each row; Identifying a conductive pattern having a disconnection or a short circuit based on a voltage level of the voltage sensor; and stopping the voltage sensor in a row of the conductive pattern having the disconnection or a short circuit, The tactile voltage supply means to move in a column direction, and a step of detecting a disconnection or a short circuit position of the conductive pattern by detecting a change in voltage by the voltage sensor.

Further, according to the conductive pattern inspection apparatus of the present invention, there is provided a conductive pattern inspection apparatus for inspecting a test object having a plurality of rows of conductive patterns for disconnection or short circuit. A non-contact voltage supply means (5) having a plurality of formed electrodes (14), and a plurality of such electrodes arranged in the column direction of the conductive pattern; and only one of the plurality of electrodes provided Switching means (15) for switching so as to apply a voltage to the conductive patterns in the rows of the multi-row conductive patterns, the switching means being disposed at one end of the conductive patterns in the column direction, and And a voltage sensor (7) for measuring.

Further, the conductive pattern inspection method of the present invention
In a conductive pattern inspection method for inspecting a disconnection or a short circuit of a device to be inspected having a multi-row conductive pattern, the conductive pattern is formed so as to extend in a row direction over the conductive pattern of each row, and a plurality of conductive patterns are formed in a column direction of the multi-row conductive pattern. Applying a voltage to the conductive pattern of each row by one electrode on the other end side of the electrodes arranged in parallel, and moving in the row direction of the conductive pattern of the multiple rows; Moving the voltage sensor arranged on one end side of the conductive pattern in the column direction and measuring the voltage of the conductive pattern of each row in the row direction of the multi-row conductive pattern to measure the voltage of the conductive pattern of each row; Identifying a conductive pattern having a disconnection or a short circuit based on a voltage level of the voltage sensor; and stopping the voltage sensor in a row of the conductive pattern having the disconnection or a short circuit. A step of sequentially switching electrodes from the one electrode on the other end side by switching means for switching so as to supply a voltage to only one of the applied electrodes, and detecting a change in voltage by the voltage sensor to detect the conductive state. Detecting the disconnection or short-circuit position of the pattern.

[0010] The non-contact voltage supply means includes a single printed circuit board, and the plurality of electrodes are formed in a pattern on the printed circuit board.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to the drawings. 1 and 2 are views showing an embodiment of a conductive pattern inspection apparatus. The device under test 1 is, for example, a printed wiring board, a plasma display, or the like, and has a conductive pattern 2 on a substrate 3. The conductive pattern 2 extends in the column direction (X direction), and is formed in a plurality of rows in the row direction (Y direction). The conductive pattern 2 is covered with an insulator 4. The device under test 1 is supported by a support device (not shown), and a non-contact voltage supply unit 5 for applying a voltage to the conductive pattern 2 is provided on the back side of the left end of the device under test 1, and can be moved in the column direction by a moving mechanism 6. It has become. In this embodiment, the non-contact voltage supply means 5 is a printed circuit board on which an entire pattern is formed, and may be a metal rod, an electric wire or the like. A conductive pattern 2 is exposed on the right end surface side of the device under test 1 for connection to a connector for external output. In the present embodiment, a contact type voltage sensor 7 is provided on an exposed portion of the conductive pattern 2 and measures the voltage by contacting the conductive pattern 2. This voltage sensor 7 may be a contact type or a non-contact type. Voltage sensor 7
Can be moved in the row direction by the moving mechanism 8.
In addition, the arrangement of the non-contact voltage supply means 5 and the voltage sensor 7 can be on either side.

The non-contact voltage supply means 5 is connected to an AC power supply 9. The voltage measured by the voltage sensor 7 is
0, input to the arithmetic processing unit 12 via the A / D converter 11, and output from the arithmetic processing unit 12 to the control unit 13.
The control unit 13 can perform external output to a display (not shown) or the like, and control the moving mechanisms 6 and 8 and the AC power supply 9. The arithmetic processing unit 12 and the control unit 13 may be personal computers.

Next, a case where a disconnection or a short circuit of the conductive pattern 2 of the device under test 1 is detected will be described. First, a voltage is applied from the AC power supply 9 to the non-contact voltage supply means 5 located at the left end of the conductive pattern 2 of the device under test 1 in the column direction. At this time, the voltage sensor 7 located at the uppermost right end in the column direction of the conductive pattern 2 is in contact with the exposed portion of the uppermost row of the conductive pattern 2 and detects a voltage. When the voltage sensor 7 is of a non-contact type, an electromagnetic field generated at the right end of the conductive pattern 2 is detected and output to the amplifier 10. The voltage signal amplified by the amplifier 10 is input to the arithmetic processing unit 12 via the A / D converter 11. The arithmetic processing unit 12 compares the standard voltage level with the voltage level in the case of disconnection or short circuit, and outputs the signal. The signal output from the arithmetic processing unit 12 is stored in the control unit 13 in association with the position information of the non-contact voltage supply unit 5 and the voltage sensor 7. afterwards,
The voltage sensor 7 is sequentially moved in the row direction by the moving mechanism 8, and the voltage of the conductive pattern 2 in each row is measured.

FIGS. 5, 6 and 7 show the relationship between the voltage application position and the voltage when the conductive pattern 2 is disconnected or short-circuited. The horizontal axis represents the voltage application position X, and the vertical axis represents the voltage V. When the conductive pattern 2 has a break, as shown in FIG. 5, while the non-contact voltage supply means 5 moves to the break position in the column direction, the voltage level measured by the voltage sensor 7 is higher than the normal level. When the voltage drops and the non-contact voltage supply means 5 passes the disconnection position, the voltage level measured by the voltage sensor 7 becomes normal. As a result, the presence / absence of disconnection and the position can be recognized. The voltage level measured varies depending on the position of the disconnection of the conductive pattern 2. As shown in FIG. 6, when the disconnection position is closer to the voltage sensor 7 than in the case of FIG. 5, the non-contact voltage supply means 5 passes the disconnection position. Up to the voltage level of FIG. When the non-contact voltage supply means 5 passes the disconnection position, the voltage level becomes normal.

When the conductive pattern 2 has a short circuit, the voltage level is higher than that in the normal case as shown in FIG. While the non-contact voltage supply means 5 moves to the short-circuit position in the column direction, the voltage level measured by the voltage sensor 7 becomes higher than the normal voltage level. The level is even higher,
When the contactless voltage supply means 5 passes the short-circuit position, the voltage level returns to the original voltage level. The conductive patterns 2 in the short-circuited row all show the same change. As a result, the presence or absence of a short circuit and the position can be identified.

As described above, when a voltage sensor detects a voltage level different from the normal level in a certain row of the conductive pattern 2, it is considered that there is a disconnection or a short circuit (at this time, the position of the Y coordinate can be recognized). Therefore, the voltage sensor 7 is stopped at the row of the conductive pattern. In this state, the non-contact voltage supply means 5 is moved from the left end in the column direction to the column direction (X direction) near the voltage sensor 7 to detect a change in the voltage level. By recognizing the position (X coordinate) of the non-contact voltage supply means 5 when detecting the change in the voltage level, it is possible to obtain the position information of the line where the conductive pattern 2 is disconnected or short-circuited. As described above, the presence or absence of a disconnection or a short circuit is identified based on the level of the voltage level by the voltage sensor 7, the position (Y coordinate) of the row of the conductive pattern at that time is recognized, and the voltage sensor is stopped in this row while the voltage sensor is stopped. By moving the contact voltage supply means 5 and recognizing the position (X coordinate) of the non-contact voltage supply means 5 when the voltage level changes, it is possible to obtain the position information of the disconnection or short circuit of the conductive pattern 2.

Next, another embodiment will be described with reference to FIGS. The same reference numerals as those in FIGS. 1 and 2 denote the same components. A non-contact voltage supply unit 5 is provided on the back side of the device under test 1. In this embodiment, the non-contact voltage supply means 5 is a printed circuit board, and the electrodes 14 are formed in a pattern. The electrodes 14 have a predetermined pattern width and extend in the row direction, and a plurality of the electrodes 14 are formed in the column direction by making the interval between the adjacent electrodes 14 as small as possible. In order to apply a voltage to only one electrode, a switching means 15 is provided, and the embodiment is constituted by a relay.

Next, according to another embodiment, the inspection object 1
The case where the disconnection or short circuit of the conductive pattern 2 is detected will be described. First, a voltage is applied from the AC power supply 9 to the electrode 14a of the non-contact voltage supply means 5 located at the left end of the conductive pattern 2 of the device under test 1 in the column direction. At this time, the voltage sensor 7 positioned at the uppermost right end in the column direction of the conductive pattern 2
Is in contact with the exposed portion of the uppermost row of the conductive pattern 2 and detects the voltage of this row. When the voltage sensor 7 is of a non-contact type, an electromagnetic field generated at the right end of the conductive pattern 2 is detected and output to the amplifier 10. The voltage signal amplified by the amplifier 10 is supplied to the arithmetic processing unit 1 via the A / D converter 11.
2 is input. The arithmetic processing unit 12 compares the standard voltage level with the voltage level in the case of disconnection or short circuit, and outputs the signal. The signal output from the arithmetic processing unit 12 is stored in the control unit 13 in association with the position information of the electrode 14 a of the non-contact voltage supply unit 5 and the voltage sensor 7. Thereafter, the voltage sensor 7 is sequentially moved in the row direction by the moving mechanism 8, and the voltage of the conductive pattern 2 in each row is measured.

If the voltage sensor detects a voltage level different from the normal level in a certain row of the conductive pattern 2, it is considered that there is a disconnection or a short circuit (at this time, the position of the Y coordinate can be recognized). Therefore, the voltage sensor 7 is stopped at the row of the conductive pattern. In this state, the non-contact voltage supply means 5
From the leftmost electrode 14a in the column direction to the next electrode 14b and further in the column direction (X direction) closer to the voltage sensor 7.
5 (the relay in the embodiment) switches the voltage application position and detects a change in the voltage level. By recognizing the position (X coordinate) of the electrode 14 at the time of detecting the change in the voltage level, it is possible to obtain the position information of the disconnection or short circuit of the conductive pattern 2.

As described above, the presence or absence of disconnection or short circuit is identified by the level of the voltage level by the voltage sensor 7, and the row (Y coordinate) of the conductive pattern at that time is recognized.
In this row, the electrode 14 of the non-contact voltage supply means 5 is switched while the voltage sensor is stopped, and the position (X coordinate) of the electrode 14 at the time when the voltage level changes indicates the disconnection or short circuit of the conductive pattern 2. Location information can be obtained.

[0021]

According to the present invention, since a movable non-contact voltage supply means and a voltage sensor are used, a voltage can be applied with a simple structure, and disconnection or short circuit of a conductive pattern can be identified. The position of the XY coordinates of the disconnection or short-circuit location can be easily determined. Further, since the non-contact voltage supply means is switched by the electric switching means and a movable voltage sensor is used, a compact and inexpensive conductive pattern inspection apparatus having a simple structure can be provided. In addition, disconnection or short-circuit of the conductive pattern can be identified, and X-
The position of the Y coordinate can be easily determined at a higher speed.

[Brief description of the drawings]

FIG. 1 is a diagram showing one embodiment of the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a diagram showing another embodiment of the present invention.

FIG. 4 is a side view of FIG. 3;

FIG. 5 is a diagram showing a change in a voltage level in the case of a disconnection.

FIG. 6 is a diagram showing a change in a voltage level in the case of a disconnection.

FIG. 7 is a diagram showing a change in voltage level in the case of a short circuit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Inspection object 2 Conductive pattern 3 Substrate 4 Insulator 5 Non-contact voltage supply means 6 Moving mechanism 7 Voltage sensor 8 Moving mechanism 9 AC power supply 10 Amplifier 11 A / D converter 12 Operation processing unit 13 Control unit 14 Electrode 15 Switching means

Claims (5)

[Claims] 1. A conductive pattern inspection apparatus for inspecting a test object (1) having a plurality of rows of conductive patterns (2) for disconnection or short-circuit, comprising: A non-contact voltage supply means (5) movable in a column direction of the multi-row conductive pattern and applying a voltage to the conductive pattern in each row; A conductive pattern inspection apparatus, comprising: a voltage sensor (7) movable in a row direction of the pattern and measuring a voltage of the conductive pattern in each row. 2. A conductive pattern inspection method for inspecting a test object having a multi-row conductive pattern for a disconnection or a short circuit, wherein the multi-row conductive pattern is formed so as to extend in a row direction across the conductive pattern of each row, Applying a voltage to each conductive pattern at a position on the other end of the column by a non-contact voltage supply means movable in the column direction of the multi-row conductive pattern; and Moving the voltage sensor movable in the row direction of the multi-row conductive pattern in the row direction of the multi-row conductive pattern to measure the voltage of the conductive pattern in each row; and the voltage level of the voltage sensor. Identifying a conductive pattern having a disconnection or a short circuit, and stopping the voltage sensor in a row of the conductive pattern having a disconnection or a short circuit, and moving the non-contact voltage supply means in a column direction. Detecting a change in voltage with the voltage sensor to detect a disconnection or a short-circuit position of the conductive pattern. 3. A conductive pattern inspection apparatus for inspecting a test object having a plurality of rows of conductive patterns for disconnection or short circuit, comprising an electrode (14) formed extending in a row direction across the conductive patterns of each row. A non-contact voltage supply unit (5) in which a plurality of the electrodes are arranged in the column direction of the conductive pattern; and a switch for applying a voltage to only one of the plurality of electrodes. Means (15), a voltage sensor (7) which is movable in the row direction of the multi-row conductive pattern, is disposed on one end side of the conductive pattern in the column direction, and measures the voltage of the conductive pattern in each row. A conductive pattern inspection apparatus comprising: 4. A conductive pattern inspection method for inspecting a test object having a multi-row conductive pattern for disconnection or short circuit, wherein the multi-row conductive pattern is formed so as to extend in a row direction over the conductive pattern of each row. Applying a voltage to the conductive pattern of each row by one electrode on the other end side of a plurality of electrodes arranged side by side in the column direction; and being movable in a row direction of the multi-row conductive pattern. A voltage sensor disposed at one end in the column direction of the multi-row conductive pattern and measuring the voltage of the conductive pattern in each row in the row direction of the multi-row conductive pattern to move the voltage of the conductive pattern in each row. Measuring the voltage level of the voltage sensor, identifying a conductive pattern having a disconnection or a short circuit, and stopping the voltage sensor in a row of the conductive pattern having the disconnection or a short circuit. And one of the plurality of electrodes provided
A step of sequentially switching electrodes from the one electrode on the other end side by switching means for switching to supply a voltage to only the electrodes, and detecting a break or short-circuit position of the conductive pattern by detecting a voltage change by the voltage sensor. Conducting a conductive pattern inspection method. 5. The conductive pattern inspection device according to claim 3, wherein said non-contact voltage supply means comprises a single printed circuit board, and said plurality of electrodes are formed in a pattern on said printed circuit board. apparatus.