JPH01242972A - Inspecting device for short circuit and disconnection of pattern - Google Patents

Abstract

PURPOSE:To inspect diverse patterns by one device by providing a short-circuit bar for short-circuiting one opening end sides of a conductive pattern to be measured mutually and a measurement terminal unit consisting of three terminals at the other opening end sides. CONSTITUTION:When short-circuit inspection is performed, an actuator 8 removes the short bar 9 from the conductive pattern 2 to be measured to open all terminals. Then the measurement terminal (A-C) unit 6 fitted to a movable fitting bar 5 is brought into contact with the pattern 2 and swept by a driving motor 3. The continuity between terminals A and B adjoining to each other in the sweeping direction is inspected and when, for example, terminals A and B reach patterns P5 and P6, a short-circuit part P5' is detected and its position coordinates are stored in a CPU 7. Then when disconnection inspection is performed, the bar 9 is swept in contact with all the opening ends of the unit 6 on the opposite side. The moment at which terminals A and C which adjoin to each other at right angles to the sweeping direction are on a pattern P4 is recognized with the closure signal between the terminals A and C and the current continuity between the terminals A and B is inspected to judge nonconduction from a disconnection part P4'.

Description

[Detailed Description of the Invention] (Industrial Application Field) This invention relates to the inspection of many parallel fine conductive patterns in circuit wiring of electronic equipment. This relates to inspection equipment.

[Summary of the invention]

This invention is applicable to various patterns with the same circuit by replacing pattern connection terminals in pattern short-circuit and disconnection inspection devices for LCD panel glass and LSI outer lead extraction patterns, while providing high reliability. In detail, when inspecting multiple rows of parallel conductive patterns for short circuits and disconnections, a short bar that shorts one open end, and a three-terminal short bar on the other open end A measurement terminal unit is provided, and a disconnection is detected when the short bar is in a shorted state, and a short circuit is detected when it is in an open state, and these are performed by controlling the sequential drive of the measurement terminal unit.

[Conventional technology]

Conventionally, for example, when inspecting a substrate with a plurality of parallel conductive patterns 2 as shown in FIG. 3, a method (A) for inspecting short circuits in the patterns as schematically shown in FIG. 4 is used.

B) two measurement terminals, and for disconnection inspection, use the two measurement terminals mentioned above.
One of the books (A) is also used for three books (A).

A total of four measuring terminals (C and D) are placed on the movable mounting bar 5, and the movable mounting bar 5 is swept over the target conductive pattern by the drive motor 3 and drive shaft 4, and the test is carried out using a stylus. It is being

[Problem to be solved by the invention]

However, with conventional pattern inspection equipment, in response to the recent progress in miniaturization, problems occur when the pattern width is narrow or the pattern becomes long. It becomes difficult to locate point D at the tip of the mounting bar, and it becomes difficult to align the position mechanically.Furthermore, vibrations on the movable mounting bar have an adverse effect.
In extreme cases, measurements may not be possible.

Furthermore, unlike the conductive pattern where the object to be measured is straight as shown in Figure 3, in the case of the conductive pattern 2 which is not straight as shown in Figure 1, the measurement terminals for disconnection inspection must be measured sequentially at points A and D. Since the moving distances for the two parts are different, measurement is impossible due to the structure in which they are arranged on the same movable mounting bar 5.

SUMMARY OF THE INVENTION In order to solve these conventional drawbacks, it is an object of the present invention to provide a pattern measuring device that can handle various lengths and widths of patterns to be measured, as well as conductive patterns that are not straight.

[Means to solve the problem]

In order to solve the above-mentioned problems, the present invention provides a short bar for shorting one open end of the pattern to be measured, and a mechanism for releasing the short bar. It is designed to perform short circuit and disconnection tests.

C effect] When the pattern inspection device configured as described above is used, the short bar is removed from the object to be measured in the short circuit inspection to open one end of the conductive pattern, and two adjacent lines in the sweep direction are measured. This can be determined by testing the terminal for continuity.

In the disconnection test, all open ends are short-circuited by contacting the short bar with the object to be measured, while in the measurement terminal unit, the two measurement terminals (A and C) that are adjacent to each other at right angles to the sweep direction are short-circuited. The measurement timing is obtained by sensing the closed state. The determination can be made by testing the continuity of two measurement terminals (A and B) adjacent to each other in the sweep direction at this timing.

〔Example〕

In the following, embodiments of the invention will be described with reference to inspection of conductive patterns on glass of a liquid crystal display (LCD) panel.

FIG. 1 shows a conductive pattern 2 on the glass surface of an LCD panel, which is an object to be measured. Second. This is the third measuring terminal, and the stylus point is shown in the figure, and each moves sequentially in the direction of the arrow.

Here, among the plurality of conductive patterns 2 generated on the glass 1, the pattern P4 has a disconnection defect P4', and the pattern P5 has a disconnection defect P4'.
It is assumed that there is a short-circuit defect P5' in the pattern of points .about.P6.

Next, FIG. 2 shows a block diagram of the present invention. A, B, and C shown in the diagram are the same as the stylus A, B, and C in FIG. 1, and a measurement terminal unit consisting of these three measurement terminals. The movable mounting bar 5 to which the movable mounting bar 6 is attached is moved on the drive shaft 4 in the left and right directions in the drawing by the drive motor 3. The electrical signal from the measurement terminal unit 6 is sent to a control circuit 7 that includes a CPU, and is judged by a built-in measurement circuit.

Furthermore, since the CPU also controls the current position of the drive motor 3 (for example, a pulse motor), it is possible to recognize the position coordinates where the defect has occurred based on information from the measurement circuit.

Next, to explain the operation, first, in order to perform a short circuit test, the short bar 9 is separated from the pattern to be measured 2 by the actuator 8 which opens and closes the short bar 9, and all of the short bars 9 are made open ends.

Then, the measurement terminal unit 6 attached to the movable attachment bar 5 is brought into contact with the conductive pattern 2 to be measured, and is swept rightward by the drive motor 3.

Therefore, two measurement terminals A adjacent to each other in the sweep direction,
For example, the 25 patterns shown in the diagram are A
When eight points in the P6 pattern are reached, the CPU detects the short circuit P5' and stores its position coordinates.

Next, in the disconnection test, the actuator 8 causes the short bar 9 to come into contact with all of one open end of the measurement terminal unit 6 on the opposite side. The movable mounting bar 5, which was swept to the right end in the short circuit test described above, is now reversely swept to the left by the drive motor 3.

Two measurement terminals A adjacent to each other at right angles to the sweep direction.

The position and timing to be measured are obtained by the close signal of C, and the two measurement terminals A are adjacent to each other in the sweep direction.

The presence or absence of a defect is determined by the continuity test by B.

That is, the moment when the measurement terminals A and C are on the pattern to be measured P4' is recognized by the closed signal between A and C, and the continuity test between the measurement terminals A and B at that timing detects the disconnection part P4'.
This means that the absence of continuity can be determined.

This invention eliminates drawbacks such as difficulty in alignment caused by measurement point D in Figure 3, instability in inspection, and in particular inability to measure due to the shape of the pattern to be measured, and also reduces the number of measurement terminals. be able to.

In addition, there is a measurement terminal unit consisting of three measurement terminals.

By attaching a plurality of torsos and shorters 9, it is possible to simultaneously measure a plurality of glasses to be measured, and it is also possible to easily handle substrates with patterns of different pitches.

Furthermore, by printing out the position coordinate information stored in the cPU built into the control circuit 7 and by attaching a marker and a motor for moving the marker position to the movable mounting bar, it is possible to directly locate the defective part of the pattern to be measured 2. Marking can be easily achieved.

〔Effect of the invention〕

As explained above, this invention provides a short bar at one end of the conductor pattern to be measured, and by opening and closing it, short circuits and disconnections in the pattern can be inspected by influencing the shape of the pattern to be measured. It is also effective in improving measurement reliability and ease of operation.

[Brief explanation of the drawing]

FIG. 1 is a pattern example 1 of an object to be measured that is compatible with the present invention, and FIG. 2 is a block diagram of a pattern measuring device according to the present invention.
FIG. 3 is a second example of a pattern of a general object to be measured, and FIG. 4 is a block diagram of an example of a conventional pattern measuring device. 1... Object to be measured 2... Conductive pattern to be measured 3... Drive motor 4... Drive shaft 5... Movable mounting bar 6... Measurement terminal unit 7... Control circuit 8... ...Actuator 9...Short bar or above Applicant: Seiko Electronics Industries, Ltd.

Claims (1)

[Claims] In an apparatus for inspecting short circuits and disconnections in a plurality of parallel rows of conductive patterns, a short bar short-circuits one open end of the conductive pattern, and a first bar that contacts an adjacent pattern is provided near the other open end. A second measurement terminal and a third measurement terminal that contacts the same pattern as any of the terminals are provided, and the first, second, and third terminals are integrated as a measurement terminal unit as an extension of the conductive pattern. the shorting bar selects between shorting and opening the one open end, detects a break in the conductive pattern in the short state, and detects a short circuit in the conductive pattern in the open state. Inspection device for short circuits and disconnections in patterns.