JP2000216307A - Amplifying device - Google Patents
Amplifying deviceInfo
- Publication number
- JP2000216307A JP2000216307A JP11012537A JP1253799A JP2000216307A JP 2000216307 A JP2000216307 A JP 2000216307A JP 11012537 A JP11012537 A JP 11012537A JP 1253799 A JP1253799 A JP 1253799A JP 2000216307 A JP2000216307 A JP 2000216307A
- Authority
- JP
- Japan
- Prior art keywords
- conductor layer
- layer
- multilayer substrate
- semiconductor chip
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49111—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、高周波信号の増幅
に好適な増幅装置に関し、特に、放熱性が高い増幅装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an amplifying device suitable for amplifying a high frequency signal, and more particularly to an amplifying device having high heat dissipation.
【0002】[0002]
【従来の技術】近時、携帯電話等には高周波信号が使用
され、その送信用増幅装置として多層基板上に形成され
た電界効果トランジスタ(以下、FETという。)を備
えた高周波増幅装置が使用されている。図3は従来の高
周波増幅装置を示す模式的断面図である。2. Description of the Related Art Recently, a high frequency signal is used in a portable telephone or the like, and a high frequency amplifier provided with a field effect transistor (hereinafter, referred to as an FET) formed on a multilayer substrate is used as an amplifier for transmission. Have been. FIG. 3 is a schematic sectional view showing a conventional high-frequency amplifier.
【0003】従来の高周波増幅装置に使用される多層基
板21には、厚さが約5〜10μmの第4導体層23d
及びこの第4導体層23d上に形成された第3誘電体層
24cが設けられている。更に、第3誘電体層24c上
には、厚さが約5〜10μmの第3導体層23c、第2
誘電体層24b、厚さが約5〜10μmの第2導体層2
3b、第1誘電体層24a及び厚さが約5〜10μmの
第1導体層23aが順次積層されている。なお、各誘電
体層24a〜24cはガラスセラミックス等のセラミッ
クス製である。A multilayer substrate 21 used in a conventional high-frequency amplifier has a fourth conductor layer 23d having a thickness of about 5 to 10 μm.
And a third dielectric layer 24c formed on the fourth conductor layer 23d. Further, on the third dielectric layer 24c, a third conductor layer 23c having a thickness of about 5 to 10 μm,
Dielectric layer 24b, second conductor layer 2 having a thickness of about 5 to 10 μm
3b, a first dielectric layer 24a and a first conductor layer 23a having a thickness of about 5 to 10 μm are sequentially laminated. Each of the dielectric layers 24a to 24c is made of ceramics such as glass ceramics.
【0004】そして、第1導体層23a上には、半導体
チップ31が、銅合金等の金属板からなるマウント部2
8を介して、載置されている。なお、半導体チップ31
が第1導体層23a上に直接載置される場合もある。[0004] On the first conductor layer 23a, a semiconductor chip 31 is mounted on a mount 2 made of a metal plate such as a copper alloy.
8 is placed. The semiconductor chip 31
May be directly mounted on the first conductor layer 23a.
【0005】また、多層基板21には、半導体チップ3
1の直下に形成され第1導体層23aから第4導体層2
3dまで達するサーマルビア25が形成されている。サ
ーマルビア25は、ビアホールの側面に金属メッキ層2
5bが形成され、その内部に樹脂材25aが充填された
ものである。Further, the semiconductor chip 3 is provided on the multilayer substrate 21.
1 to the fourth conductor layer 2 from the first conductor layer 23a to the fourth conductor layer 2
A thermal via 25 reaching up to 3d is formed. The thermal via 25 has a metal plating layer 2 on the side surface of the via hole.
5b are formed, and the inside thereof is filled with a resin material 25a.
【0006】更に、多層基板21の端面には、接地・放
熱用端面電極26が形成されている。また、多層基板2
1の他の端面には、入出力端子用端面電極及び電源端子
用端面電極(図示せず)が形成されている。Further, an end surface electrode 26 for grounding and heat radiation is formed on the end surface of the multilayer substrate 21. In addition, the multilayer substrate 2
On the other end face, an end face electrode for an input / output terminal and an end face electrode (not shown) for a power supply terminal are formed.
【0007】更にまた、多層基板21は、金属カバー2
7に覆われており、電磁的にシールドされている。Further, the multi-layer substrate 21 has a metal cover 2
7 and are electromagnetically shielded.
【0008】更に、多層基板21上には、チップコンデ
ンサ、チップ抵抗、チップインダクタ及びマイクロスト
リップライン等の素子29を備え半導体チップ31に接
続された整合バイアス回路が設けられている。Further, on the multilayer substrate 21, a matching bias circuit provided with elements 29 such as a chip capacitor, a chip resistor, a chip inductor and a microstrip line and connected to a semiconductor chip 31 is provided.
【0009】なお、半導体チップは、第1及び第2の誘
電体層24a及び24bにキャビティを形成しそこに載
置されることもある。In some cases, the semiconductor chip may be formed with cavities in the first and second dielectric layers 24a and 24b and mounted thereon.
【0010】このように構成された高周波増幅装置を携
帯電話等のセット基板に搭載する際には、接地・放熱用
端面電極26等の各端面電極をセット基板にはんだ付け
する。更に、半導体チップ31から発生する熱を放熱さ
せるために、多層基板21の半導体チップ31が搭載さ
れた部分の反対側部分をも直接セット基板にはんだ付け
する。When the high-frequency amplifying device thus configured is mounted on a set substrate of a mobile phone or the like, each end surface electrode such as a grounding / radiating end surface electrode 26 is soldered to the set substrate. Further, in order to dissipate the heat generated from the semiconductor chip 31, the part of the multilayer substrate 21 opposite to the part on which the semiconductor chip 31 is mounted is also directly soldered to the set substrate.
【0011】そして、外部から高周波信号が入力される
と、この信号は入力段整合バイアス回路を介して半導体
チップ31の入力段FET部に入力される。そして、入
力段FET部により増幅されて出力される。その後、こ
の出力信号は、段間整合バイアス回路を介して出力段F
ET部に入力される。そして、出力段FET部により増
幅されて出力される。更に、この出力信号は、出力段整
合バイアス回路を介して外部に出力される。When a high frequency signal is input from the outside, the signal is input to the input stage FET section of the semiconductor chip 31 via the input stage matching bias circuit. Then, the signal is amplified and output by the input stage FET unit. Thereafter, this output signal is output to the output stage F via an interstage matching bias circuit.
Input to the ET section. Then, it is amplified and output by the output stage FET unit. Further, this output signal is output to the outside via the output stage matching bias circuit.
【0012】このとき、入力段FET部及び出力段FE
T部から熱が発生するが、この熱はサーマルビア25を
介して第2、3及び4導体層23b〜23dに伝達され
る。更に、半導体チップ31が搭載された部分の反対側
部分に直接はんだ付けされた携帯電話等のセット基板及
び接地・放熱用端面電極26等に伝達され、そこから外
気へと放出される。At this time, the input stage FET section and the output stage FE
Heat is generated from the T portion, and this heat is transmitted to the second, third, and fourth conductor layers 23b to 23d via the thermal via 25. Further, the light is transmitted to a set substrate such as a mobile phone directly soldered to a portion opposite to the portion on which the semiconductor chip 31 is mounted, the grounding / radiating end face electrode 26, and the like, and is discharged therefrom to the outside air.
【0013】[0013]
【発明が解決しようとする課題】しかしながら、従来の
高周波増幅装置は、携帯電話等のセット基板に搭載され
る際には、前述のような直接のはんだ付けを行わない
と、入力段FET部及び出力段FET部の放熱が不十分
となって、高周波増幅装置が熱暴走してしまう。更に、
入力段FET部及び出力段FET部のソースにおけるイ
ンダクタンスが高くなるため、良好な高周波特性が得ら
れない。また、直接はんだ付けされると、セット基板の
その部分にパターン設計を行うことができなくなるとい
う問題点も生じる。However, when the conventional high frequency amplifying device is mounted on a set board of a mobile phone or the like, unless the above-mentioned direct soldering is performed, the input stage FET unit and the Insufficient heat radiation of the output stage FET unit causes the high frequency amplifier to run out of heat. Furthermore,
Since the inductances at the sources of the input-stage FET unit and the output-stage FET unit increase, good high-frequency characteristics cannot be obtained. In addition, when soldering is performed directly, there is a problem that pattern design cannot be performed on that portion of the set substrate.
【0014】本発明はかかる問題点に鑑みてなされたも
のであって、熱暴走を防止することができ、良好な高周
波特性を得ることができる増幅装置を提供することを目
的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide an amplifier capable of preventing thermal runaway and obtaining good high-frequency characteristics.
【0015】[0015]
【課題を解決するための手段】本発明に係る増幅装置
は、多層基板と、この多層基板上に設けられ増幅回路を
備えた半導体チップと、を有する高周波増幅装置におい
て、前記多層基板は、厚さが70μm以上の導体層と、
この導体層上に形成された樹脂層と、前記半導体チップ
の直下で表面から前記導体層まで達するサーマルビア
と、端面に形成され前記導体層に接続された接地・放熱
用端面電極と、を有することを特徴とする。An amplifying device according to the present invention is a high-frequency amplifying device having a multilayer substrate and a semiconductor chip provided on the multilayer substrate and having an amplifier circuit. A conductor layer having a thickness of 70 μm or more;
A resin layer formed on the conductor layer, a thermal via extending from the surface directly below the semiconductor chip to the conductor layer, and a grounding / radiating end face electrode formed on the end face and connected to the conductor layer. It is characterized by the following.
【0016】本発明においては、サーマルビアは厚さが
70μm以上の導体層を介して端面電極に接続されてい
るので、増幅回路から発生した熱は高い効率で放熱され
る。従って、熱暴走が抑制される。更に、増幅回路の高
周波特性が向上する。また、セット基板に搭載する際に
は、裏面側を直接はんだ付けする必要がないため、セッ
ト基板の増幅装置に接合する領域におけるパターン設計
が可能となる。In the present invention, since the thermal via is connected to the end face electrode through a conductor layer having a thickness of 70 μm or more, heat generated from the amplifier circuit is radiated with high efficiency. Therefore, thermal runaway is suppressed. Further, the high frequency characteristics of the amplifier circuit are improved. Further, when mounting on a set substrate, it is not necessary to directly solder the back surface side, so that a pattern can be designed in a region of the set substrate to be joined to the amplification device.
【0017】前記サーマルビアは、樹脂材又は導電材
と、この樹脂材又は導電材の表面に形成され前記導体層
に接続された金属メッキ層とを有することができる。The thermal via may include a resin material or a conductive material, and a metal plating layer formed on the surface of the resin material or the conductive material and connected to the conductor layer.
【0018】また、前記樹脂層上に形成され厚さが70
μm以上の第2の導体層を有することができる。第2の
導体層により、より一層高い放熱性及び高周波特性が得
られる。Further, a thickness of 70 formed on the resin layer.
It can have a second conductor layer of at least μm. With the second conductor layer, higher heat dissipation and higher frequency characteristics can be obtained.
【0019】更に、前記導体層の下に形成されたレジス
ト層を有することができる。Further, the semiconductor device may have a resist layer formed below the conductor layer.
【0020】更にまた、前記増幅回路は、電界効果トラ
ンジスタを有することができる。Further, the amplifier circuit may include a field effect transistor.
【0021】[0021]
【発明の実施の形態】以下、本発明の実施例に係る高周
波増幅装置について、添付の図面を参照して具体的に説
明する。図1は本発明の実施例に係る高周波増幅装置を
示す模式的平面図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a high-frequency amplifier according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. FIG. 1 is a schematic plan view showing a high-frequency amplifier according to an embodiment of the present invention.
【0022】本実施例においては、多層基板1上に入力
段FET部11a及び出力段FET部11bが設けられ
た増幅回路を備えた半導体チップ11が設けられてい
る。入力段FET部11aには、入力段FET及びこれ
に接続されたゲート等の回路が設けられており、出力段
FET部11bには、出力段FET及びこれに接続され
た他のゲート等の回路が設けられている。In this embodiment, a semiconductor chip 11 having an amplifier circuit provided with an input-stage FET section 11a and an output-stage FET section 11b is provided on a multilayer substrate 1. The input stage FET unit 11a is provided with a circuit such as an input stage FET and a gate connected thereto, and the output stage FET unit 11b is provided with a circuit such as an output stage FET and another gate connected thereto. Is provided.
【0023】また、多層基板1上には、入力段FET部
11aの入力端と入力端子13との間に接続された入力
段整合バイアス回路12aが設けられている。更に、入
力段FET部11aの出力端と出力段FET部11bの
入力端との間に接続された段間整合バイアス回路12b
が設けられている。更にまた、出力段FET部11bの
出力端と出力端子14との間には出力段整合バイアス回
路12cが設けられている。なお、整合バイアス回路1
2a〜12cは、チップコンデンサ、チップ抵抗、チッ
プインダクタ及びマイクロストリップライン等から構成
されており、入力段FET部11a及び出力段FET部
11bに直流の電圧又は電流を供給すると共に、それら
のインピーダンスを整合させるための回路である。On the multilayer substrate 1, an input stage matching bias circuit 12a connected between the input terminal of the input stage FET section 11a and the input terminal 13 is provided. Further, an interstage matching bias circuit 12b connected between the output terminal of the input stage FET unit 11a and the input terminal of the output stage FET unit 11b.
Is provided. Further, an output stage matching bias circuit 12c is provided between the output terminal of the output stage FET section 11b and the output terminal 14. The matching bias circuit 1
Reference numerals 2a to 12c each include a chip capacitor, a chip resistor, a chip inductor, a microstrip line, and the like, and supply a DC voltage or current to the input-stage FET unit 11a and the output-stage FET unit 11b, and reduce their impedance. This is a circuit for matching.
【0024】更に、多層基板1の端面には、わん曲した
複数の切り込みが形成されており、そこに端面電極15
が設けられている。これらの電極のうち、1つが入力端
子13、1つが出力端子14、3つが電源端子16とな
っている。なお、多層基板1は、図示しない金属カバー
により覆われている。Further, a plurality of curved cuts are formed in the end face of the multilayer substrate 1 and the end face electrode 15 is formed therein.
Is provided. One of these electrodes is an input terminal 13, one is an output terminal 14, and three are power supply terminals 16. The multilayer substrate 1 is covered with a metal cover (not shown).
【0025】次に、多層基板1の構造について説明す
る。図2は本発明の実施例に係る高周波増幅装置を示す
模式的断面図である。Next, the structure of the multilayer substrate 1 will be described. FIG. 2 is a schematic sectional view showing a high-frequency amplifier according to an embodiment of the present invention.
【0026】多層基板1には、レジスト層2及びこのレ
ジスト層2上に形成された厚さが約70〜100μmの
第4導体層3dが設けられている。更に、第4導体層3
d上には第3誘電体層4c、厚さが約70μmの第3導
体層3c、第2誘電体層4b、厚さが約18μmの第2
導体層3b、第1誘電体層4a及び厚さが約18〜48
μmの第1導体層3aが順次積層されている。このよう
に、第3及び4導体層3c及び3dの厚さは、第1及び
2導体層3a及び3bの厚さより厚いものとなってい
る。なお、各誘電体層4a〜4cは樹脂製である。The multilayer substrate 1 is provided with a resist layer 2 and a fourth conductor layer 3d formed on the resist layer 2 and having a thickness of about 70 to 100 μm. Further, the fourth conductor layer 3
d, a third dielectric layer 4c, a third conductor layer 3c having a thickness of about 70 μm, a second dielectric layer 4b, and a second dielectric layer 4c having a thickness of about 18 μm.
The conductor layer 3b, the first dielectric layer 4a, and the thickness of about 18 to 48
μm first conductor layers 3a are sequentially laminated. Thus, the thicknesses of the third and fourth conductor layers 3c and 3d are larger than the thicknesses of the first and second conductor layers 3a and 3b. Each of the dielectric layers 4a to 4c is made of resin.
【0027】そして、第1導体層3a上には、半導体チ
ップ11が、銅合金等の金属板からなるマウント部8を
介して、載置されている。同様に、整合バイアス回路を
構成する素子9が第1導体層3a上に載置されている。
なお、半導体チップ11は第1導体層3a上に直接載置
されていてもよい。The semiconductor chip 11 is mounted on the first conductor layer 3a via a mount 8 made of a metal plate such as a copper alloy. Similarly, an element 9 constituting a matching bias circuit is mounted on the first conductor layer 3a.
Note that the semiconductor chip 11 may be directly mounted on the first conductor layer 3a.
【0028】また、多層基板1には、半導体チップ11
の直下に形成され第1導体層3aから第4導体層3dま
で達するサーマルビア5が形成されている。サーマルビ
ア5は、ビアホールの側面に金属メッキ層5bが形成さ
れ、その内部に樹脂材5aが充填されたものである。The multilayer substrate 1 has a semiconductor chip 11
Are formed immediately below the first conductor layer 3a and extend from the first conductor layer 3a to the fourth conductor layer 3d. The thermal via 5 is formed by forming a metal plating layer 5b on the side surface of a via hole and filling the inside thereof with a resin material 5a.
【0029】更に、多層基板1の端面には、サーマルビ
ア5の金属メッキ層5bに第2〜4導体層3b〜3dを
介して接続された接地・放熱用端面電極6が形成されて
いる。また、多層基板1の他の端面には、入出力端子用
端面電極及び電源端子用端面電極が形成されているが、
これらはサーマルビア5に接続されていない。これらの
端面電極は、図1における端面電極15に対応するもの
である。Further, on the end face of the multilayer substrate 1, a grounding / radiating end face electrode 6 connected to the metal plating layer 5b of the thermal via 5 via the second to fourth conductor layers 3b to 3d is formed. On the other end face of the multilayer substrate 1, an input / output terminal end face electrode and a power supply terminal end face electrode are formed.
These are not connected to the thermal via 5. These end electrodes correspond to the end electrodes 15 in FIG.
【0030】更にまた、多層基板1は、金属カバー7に
覆われており、電磁的にシールドされている。Further, the multilayer substrate 1 is covered with a metal cover 7 and is electromagnetically shielded.
【0031】このように構成された高周波増幅装置を携
帯電話等のセット基板に搭載する際には、接地・放熱用
端面電極6等の各端面電極をセット基板にはんだ付けす
る。但し、このとき、半導体チップ11から発生する熱
を放熱させるために、多層基板1の半導体チップ11が
搭載された部分の反対側部分である第4導体層3d側部
分を直接セット基板にはんだ付けする必要はない。When the high-frequency amplifying device thus configured is mounted on a set board of a mobile phone or the like, each end face electrode such as the grounding / radiating end face electrode 6 is soldered to the set board. However, at this time, in order to dissipate the heat generated from the semiconductor chip 11, the portion of the multilayer substrate 1 on the fourth conductor layer 3d side opposite to the portion on which the semiconductor chip 11 is mounted is directly soldered to the set substrate. do not have to.
【0032】次に、本実施例に係る高周波増幅装置の動
作について説明する。Next, the operation of the high-frequency amplifier according to the present embodiment will be described.
【0033】外部から入力端子13に入力された高周波
信号は、入力段整合バイアス回路12aを介して入力段
FET部11aに入力される。そして、入力段FET部
11aにより増幅されて出力される。その後、この出力
信号は、段間整合バイアス回路12bを介して出力段F
ET部11bに入力される。そして、出力段FET部1
1bにより増幅されて出力される。更に、この出力信号
は、出力段整合バイアス回路12cを介して出力端子1
4から外部に出力される。このように、外部から本実施
例に係る高周波増幅回路に入力された信号は、2段階に
増幅されて出力される。A high-frequency signal externally input to the input terminal 13 is input to the input-stage FET section 11a via the input-stage matching bias circuit 12a. Then, the signal is amplified and output by the input stage FET unit 11a. Thereafter, this output signal is output to the output stage F via the interstage matching bias circuit 12b.
It is input to the ET section 11b. Then, the output stage FET unit 1
The signal is amplified and output by 1b. Further, this output signal is output to the output terminal 1 via the output stage matching bias circuit 12c.
4 to the outside. As described above, a signal externally input to the high-frequency amplifier circuit according to the present embodiment is amplified and output in two stages.
【0034】このとき、入力段FET部11a及び出力
段FET11部bから熱が発生するが、この熱はサーマ
ルビア5を介して第2、3及び4導体層3b〜3dに伝
達される。更に、接地・放熱用端面電極6に伝達され
る。この接地・放熱用端面電極6は携帯電話等のセット
基板にはんだ付けされているので、そこから外気へと放
出される。At this time, heat is generated from the input-stage FET section 11a and the output-stage FET section 11b, and this heat is transmitted to the second, third and fourth conductor layers 3b to 3d via the thermal via 5. Further, it is transmitted to the grounding / radiating end face electrode 6. Since the grounding / radiating end electrode 6 is soldered to a set substrate of a mobile phone or the like, it is discharged from there to the outside air.
【0035】このように、本実施例によれば、誘電体層
4a〜4cを樹脂製としているので、各導体層3a〜3
dを従来のものよりも厚く形成することができる。特
に、第3及び4導体層3c及び3dの厚さを70μm以
上と厚くすることができるため、半導体チップ11に対
する多層基板1の熱抵抗を小さくすることができる。こ
のため、多層基板1の半導体チップ11が搭載された部
分の反対側部分を携帯電話等のセット基板に直接はんだ
付けしなくても、接地・放熱用端面電極6をセット基板
にはんだ付けすれば、入力段FET部11a及び出力段
FET部11bから発生した熱の放出が可能である。As described above, according to the present embodiment, since the dielectric layers 4a to 4c are made of resin, each of the conductor layers 3a to 3c is formed.
d can be formed thicker than conventional ones. In particular, since the thickness of the third and fourth conductor layers 3c and 3d can be increased to 70 μm or more, the thermal resistance of the multilayer substrate 1 with respect to the semiconductor chip 11 can be reduced. Therefore, instead of directly soldering the portion of the multilayer substrate 1 opposite to the portion on which the semiconductor chip 11 is mounted to a set substrate such as a mobile phone, the grounding / radiating end electrode 6 can be soldered to the set substrate. In addition, heat generated from the input stage FET unit 11a and the output stage FET unit 11b can be released.
【0036】また、各導体層3a〜3dが従来のものよ
りも厚く形成されているため、入力段FET部11a及
び出力段FET部11bに対するソースのインダクタン
スが低減される。従って、良好な高周波特性が得られ
る。Further, since each of the conductor layers 3a to 3d is formed thicker than the conventional one, the inductance of the source with respect to the input stage FET unit 11a and the output stage FET unit 11b is reduced. Therefore, good high-frequency characteristics can be obtained.
【0037】更に、多層基板1の半導体チップ11が搭
載される部分の反対側部分を携帯電話等のセット基板に
直接はんだ付けする必要がないため、多層基板1の裏面
には絶縁性のレジスト層2が形成されているので、携帯
電話等のセット基板のレジスト層2に接合する部分にパ
ターン設計を行うことができる。このため、セット基板
のパターン設計に冗長性が得られる。Further, since it is not necessary to directly solder the portion of the multilayer substrate 1 opposite to the portion on which the semiconductor chip 11 is mounted to a set substrate such as a mobile phone, an insulating resist layer is formed on the back surface of the multilayer substrate 1. Since the substrate 2 is formed, a pattern can be designed at a portion to be joined to the resist layer 2 of a set substrate such as a mobile phone. For this reason, redundancy is obtained in the pattern design of the set board.
【0038】なお、上述の実施例におけるサーマルビア
5には、樹脂材5aが充填されているが、金属材が充填
されていても、同様の効果が得られる。Although the resin material 5a is filled in the thermal via 5 in the above-described embodiment, the same effect can be obtained if the thermal via 5 is filled with a metal material.
【0039】また、 多層基板1は導体層は4層構造と
されているが、5層又はそれ以上の層から多層基板が形
成されていてもよい。この場合にも、同様の効果が得ら
れる。Although the multilayer substrate 1 has a four-layered conductor layer structure, the multilayer substrate may be formed of five or more layers. In this case, the same effect can be obtained.
【0040】更に、これらの構造が組み合わされた構造
が採用されても、同様の効果が得られる。Further, even if a structure in which these structures are combined is adopted, the same effect can be obtained.
【0041】[0041]
【発明の効果】以上詳述したように、本発明によれば、
多層基板に厚さが70μm以上の導体層を設け、この導
体層を介してサーマルビアを端面電極に接続させている
ので、増幅回路から発生した熱を高い効率で外部に放出
することができる。従って、熱暴走を抑制することがで
きる。更に、増幅回路の高周波特性を向上させることが
できる。また、セット基板に搭載する際には、裏面側を
直接はんだ付けする必要がないので、セット基板の増幅
装置に接合する領域におけるパターン設計を行うことが
できる。As described in detail above, according to the present invention,
Since a conductor layer having a thickness of 70 μm or more is provided on the multilayer substrate and the thermal via is connected to the end face electrode via the conductor layer, heat generated from the amplifier circuit can be released to the outside with high efficiency. Therefore, thermal runaway can be suppressed. Further, the high frequency characteristics of the amplifier circuit can be improved. Further, when mounting on the set substrate, it is not necessary to directly solder the rear surface side, so that it is possible to design a pattern in a region where the set substrate is joined to the amplifier.
【図1】本発明の実施例に係る高周波増幅装置を示す模
式的平面図である。FIG. 1 is a schematic plan view showing a high-frequency amplifier according to an embodiment of the present invention.
【図2】本発明の実施例に係る高周波増幅装置を示す模
式的断面図である。FIG. 2 is a schematic sectional view showing a high-frequency amplifier according to an embodiment of the present invention.
【図3】従来の高周波増幅装置を示す模式的断面図であ
る。FIG. 3 is a schematic sectional view showing a conventional high frequency amplifying device.
1、21;多層基板 2;レジスト層 3a、3b、3c、3d、23a、23b、23c、2
3d;導体層 4a、4b、4c、24a、24b、24c;誘電体層 5、25;サーマルビア 5a、25a;樹脂材 5b、25b;金属メッキ層 6、26;接地・放熱用端面電極 7、27;金属カバー 8、28;マウント部 11、31;半導体チップ 11a;入力段FET部 11b;出力段FET部 12a、12b、12c;整合バイアス回路 13;入力端子 14;出力端子 15;端面電極 16;電源端子1, 21; multilayer substrate 2; resist layers 3a, 3b, 3c, 3d, 23a, 23b, 23c, 2
3d; conductor layers 4a, 4b, 4c, 24a, 24b, 24c; dielectric layers 5, 25; thermal vias 5a, 25a; resin materials 5b, 25b; metal plating layers 6, 26; 27; metal cover 8, 28; mount portion 11, 31; semiconductor chip 11a; input stage FET portion 11b; output stage FET portion 12a, 12b, 12c; matching bias circuit 13; input terminal 14; output terminal 15; Power supply terminal
Claims (6)
増幅回路を備えた半導体チップと、を有する高周波増幅
装置において、前記多層基板は、厚さが70μm以上の
導体層と、この導体層上に形成された樹脂層と、前記半
導体チップの直下で表面から前記導体層まで達するサー
マルビアと、端面に形成され前記導体層に接続された接
地・放熱用端面電極と、を有することを特徴とする増幅
装置。1. A high-frequency amplifier comprising a multilayer substrate and a semiconductor chip provided on the multilayer substrate and having an amplifier circuit, wherein the multilayer substrate has a conductor layer having a thickness of 70 μm or more; It has a resin layer formed thereon, a thermal via extending from the surface to the conductor layer immediately below the semiconductor chip, and a grounding / radiating end face electrode formed on the end face and connected to the conductor layer. Amplifying device.
脂材の表面に形成され前記導体層に接続された金属メッ
キ層とを有することを特徴とする請求項1に記載の増幅
装置。2. The amplifying device according to claim 1, wherein the thermal via has a resin material and a metal plating layer formed on a surface of the resin material and connected to the conductor layer.
電材の表面に形成され前記導体層に接続された金属メッ
キ層とを有することを特徴とする請求項1に記載の増幅
装置。3. The amplifying device according to claim 1, wherein the thermal via has a conductive material and a metal plating layer formed on a surface of the conductive material and connected to the conductive layer.
以上の第2の導体層を有することを特徴とする請求項1
乃至3のいずれか1項に記載の増幅装置。4. A thickness of 70 μm formed on the resin layer
2. The method according to claim 1, further comprising the second conductor layer.
The amplification device according to any one of claims 3 to 3.
を有することを特徴とする請求項1乃至4のいずれか1
項に記載の増幅装置。5. The semiconductor device according to claim 1, further comprising a resist layer formed below the conductor layer.
Item 14. The amplification device according to Item 1.
を有することを特徴とする請求項1乃至5のいずれか1
項に記載の増幅装置。6. The amplifier according to claim 1, wherein the amplifier circuit has a field-effect transistor.
Item 14. The amplification device according to Item 1.
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JP01253799A JP3216626B2 (en) | 1999-01-20 | 1999-01-20 | Amplifier |
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JP01253799A JP3216626B2 (en) | 1999-01-20 | 1999-01-20 | Amplifier |
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US6794747B2 (en) | 2002-08-28 | 2004-09-21 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device |
US6964528B2 (en) | 2000-08-17 | 2005-11-15 | Matsushita Electric Industrial Co., Ltd. | Optical mount substrate, optical module, optical transmitter-receiver, optical transmitter-receiver system, and manufacturing method of optical mount substrate |
JP2006525653A (en) * | 2003-05-15 | 2006-11-09 | スカイワークス ソリューションズ,インコーポレイテッド | Semiconductor die package with enhanced thermal conductivity |
EP1781072A3 (en) * | 2005-10-26 | 2007-05-16 | Pentair Water Pool and Spa, Inc. | Led pool and spa light |
JP2012009609A (en) * | 2010-06-24 | 2012-01-12 | Jtekt Corp | Multi-layer circuit board |
JP2012079873A (en) * | 2010-09-30 | 2012-04-19 | Honda Motor Co Ltd | Control circuit for electric vehicles |
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JP2012079873A (en) * | 2010-09-30 | 2012-04-19 | Honda Motor Co Ltd | Control circuit for electric vehicles |
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