JP2000187823A - Suspension member for magnetic disk device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a suspension member for a magnetic disk device, capable of improving the adhesion of a stainless steel thin plate with a conductive thin film and an insulating layer, and reducing manufacturing costs by shortening a manufacturing time. SOLUTION: The surface of a stainless steel thin plate 11 used as the base material of a suspension member for a magnetic disk device is formed so as to be rough in a mat shape, a wiring member made of an insulating film 13, a wiring layer 14, terminal electrodes 15a and 15b and an insulating layer 16 is formed, the outer shape of the stainless steel thin plate is machined, the terminal electrodes 15a and 15b are plated with AU, and thus the suspension member for the magnetic disk device is provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head suspension used in a magnetic disk drive or the like, and more particularly, to a magnetic head suspension formed integrally with a wiring member for connecting a magnetic head element to a read / write amplifier board. The present invention relates to a suspension member for a magnetic disk drive.

[0002]

2. Description of the Related Art A SUS thin plate is generally used as a base material of a conventional suspension member for a magnetic disk drive, and the SUS thin plate has a smooth surface. Furthermore, when forming a wiring layer on a SUS thin plate, first, an insulating layer is formed on the SUS thin plate, and a conductive thin film is formed on the SUS thin plate and the insulating layer as a base electrode for electrolytic plating by electroless plating. There is a method of forming a wiring layer by an additive method. In the case of this method, there is a problem that the Cu plating film is peeled off during the electroless plating because the adhesion of the conductive thin film, for example, the Cu plating film is weak. As a method for solving the problem, there is a method in which a Cu thin film is provided on a SUS thin plate and an insulating layer by a sputtering method to be used as a base electrode for electrolytic plating.

In the method of manufacturing a suspension member for a magnetic disk drive as described above, since a sputtering method is used as a method of forming a conductive thin film, a long manufacturing time including evacuation is required, resulting in high manufacturing costs. There is a problem. Further, since the surface of the SUS thin plate is smooth, there is a problem that the adhesion to an insulating layer formed on the SUS thin plate is weak.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object the following:
An object of the present invention is to provide a suspension member for a magnetic disk drive, which improves the adhesion between a SUS thin plate, a conductive thin film, and an insulating layer, and reduces the manufacturing time and the manufacturing cost.

[0005]

According to the present invention, there is provided a suspension member for a magnetic disk drive integrally formed with a wiring member for connecting a magnetic head element and a read / write amplifier board. Wherein the wiring member is formed by roughening a surface of a SUS thin plate used as a base material of the suspension member for the magnetic disk device into a mat shape to form the wiring member. is there.

[0006]

FIG. 1 is a plan view of a suspension member for a magnetic disk drive according to the present invention, and FIGS. 2 (a) to 2 (e).
FIGS. 3A to 3C are schematic plan views showing the steps of manufacturing a suspension member for a magnetic disk drive according to the present invention in the order of steps.
2E is a schematic cross-sectional view of the schematic plan view of FIGS. 2A to 2E taken along line AA.

The surface of a SUS thin plate 11 used as a base material of a suspension member for a magnetic disk drive according to the present invention is a surface 12 roughened into a mat shape (FIG. 3).
(See (a)). SU thus roughened in a mat shape
When the insulating layer 13 for forming the wiring layer 14 is formed on the S thin plate 11, the matte-roughened surface 12 of the SUS thin plate 11 and the resin forming the insulating layer 13 are physically entangled with each other. 13 is firmly fixed to the SUS thin plate 11,
On the US thin plate 11, a wiring member including the insulating layer 13, the wiring layer 14, the terminal electrodes 15a and 15b, and the insulating layer 16 having excellent adhesiveness can be formed.

A method of manufacturing a suspension member for a magnetic disk drive according to the present invention will be described below with reference to the drawings.
First, the SUS thin plate 11 is immersed in, for example, a ferric chloride solution, and the surface of the SUS thin plate 11 is lightly etched to form a mat-shaped roughened surface 12 (FIGS. 2A and 3A). )reference). Here, as a method of roughening the surface into a mat shape, there are a mechanical polishing method, a sand blasting method and the like in addition to the etching method described above, and the method is appropriately selected according to the surface state to be roughened.

Next, SU whose surface is roughened in a mat shape is provided.
An insulating layer 13 for forming a wiring layer and a terminal electrode is formed in a predetermined shape on the S thin plate 11 (FIGS. 2B and 3).
(B)).

Next, the SUS thin plate 1 is formed by electroless plating.
1 and a conductive thin film formed on the insulating layer 13 and then a wiring layer 14 and terminal electrodes 15a and 15a by a semi-additive method.
b is formed (see FIGS. 2C and 3C).

Next, the insulating layer 13 and the terminal electrodes 15a, 1
The insulating layer 16 in a predetermined pattern is formed on the wiring layer 14 except for the wiring layer 5b.
Is formed (see FIGS. 2D and 3D).

Next, the outer shape of the SUS thin plate 11 is processed into a predetermined shape, and the insulating layer 13 and the wiring layer 1 are formed on the SUS thin plate 11a.
4. A suspension member for a magnetic disk drive according to the present invention on which a wiring member including the terminal electrodes 15a and 15b and the insulating layer 16 is formed (see FIGS. 1, 2 (e) and 3 (e)). .

In the suspension member for a magnetic disk drive of the present invention, a conductive thin film as an underlayer for electrolytic plating is formed by electroless plating in order to form an insulating layer and a wiring layer by roughening the surface of a SUS thin plate. Even if it is formed, a predetermined adhesiveness is obtained, and it is not necessary to form a conductive thin film using sputtering or the like. Therefore, the manufacturing time can be reduced, the manufacturing cost can be reduced, and the adhesion between the SUS thin plate and the conductive thin film and the insulating layer can be improved.

[0014]

The present invention will be described in detail with reference to the following examples.
The SUS thin plate 11 having a thickness of 20 μm was immersed in a ferric chloride solution heated to 30 ° C. for 1 minute, and the surface of the SUS thin plate 11 was etched to form a mat-shaped roughened surface 12.

Next, a photosensitive insulating resin (epoxy type) is applied on the SUS thin plate 11 by roll coating,
A photosensitive layer was formed by drying at 0 ° C. and 100 ° C. for 30 minutes, a predetermined pattern was exposed and developed, and heat-cured at 175 ° C. for 60 minutes to form an insulating layer 13 having a film thickness of 10 to 30 μm.

Next, a conductive thin film having a thickness of 0.3 μm was formed on the SUS thin plate 11 and the insulating layer 13 by electroless copper plating.

Next, both sides of the SUS thin plate 11 on which the insulating layer 13 and the conductive thin film are formed are alkali-soluble 20 μm
A thick dry film resist was laminated, exposed to a predetermined pattern, and developed to form a resist pattern for forming a wiring layer by electrolytic plating.

Next, using the SUS thin plate 11 as a cathode electrode and a resist pattern as a mask with a current density of 3 A / dm ² as a mask, the conductive thin film is plated with copper sulfate to a film thickness of 5 to 10 μm.
m, a copper plating layer having a thickness of 1 to 3 μm at a current density of 3 A / dm ^{2 using} the SUS thin plate 11 as a cathode electrode.
An about m m Ni plating layer was formed, and two conductor layers composed of a copper layer and a nickel layer were formed.

Next, the resist pattern is peeled off, the conductive thin film under the resist pattern and the surface of the nickel layer are flash-etched with sulfuric acid to insulate the wiring patterns, and the wiring layer 14 and the terminal electrodes 15a, 15b are separated. Was formed.

Next, the wiring layer 14 and the terminal electrodes 15a, 1
A photosensitive insulating resin (epoxy) is applied by roll coating on the SUS thin plate 11 on which 5b is formed, and the coating is performed at 70 ° C./3.
A photosensitive layer is formed by drying at 0 and 100 ° C. for 30 minutes, a predetermined pattern is exposed, developed, and heat-cured at 175 ° C. for 60 minutes to form an insulating layer 1 excluding the terminal electrodes 15a and 15b.
On 3, an insulating layer 16 having a thickness of 5 to 20 μm was formed.

Next, an alkali-soluble dry film resist having a thickness of 20 μm is laminated on both surfaces of the SUS thin plate 11, a predetermined pattern is exposed and developed to form a resist pattern for externally processing the SUS thin plate 11. Then, an SUS thin plate 11a having an outer shape processed by etching with a ferric chloride solution was formed.

Next, the resist pattern is stripped with a dedicated stripper, and the terminal electrodes 15a, 15a,
SUS with Au plating on 5b and external processing
Insulating layer 13, wiring layer 14, terminal electrode 15 on thin plate 11a
A suspension member for a magnetic disk drive according to the present invention, on which a wiring member composed of a, 15b and the insulating layer 16 was formed, was obtained.

[0023]

As described above, in the suspension member for a magnetic disk drive of the present invention, the surface of the SUS thin plate is roughened to form the insulating layer and the wiring layer. Even if formed by an electrolytic plating method, a predetermined adhesiveness can be obtained, and it is not necessary to form a conductive thin film using sputtering or the like. Therefore, the manufacturing time can be reduced, the manufacturing cost can be reduced, and the adhesion between the SUS thin plate used as the base material of the suspension member for the magnetic disk device and the insulating layer and the wiring layer can be improved. it can.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing one embodiment of a suspension member for a magnetic disk drive of the present invention.

FIGS. 2A to 2E are schematic plan views showing a manufacturing process of one embodiment of a suspension member for a magnetic disk drive according to the present invention in the order of steps.

FIGS. 3A to 3E are schematic cross-sectional views of the schematic plan views of FIGS. 2A to 2E taken along line AA.

[Explanation of symbols]

 11: SUS thin plate 11a: SUS thin plate whose outer shape is processed 12: Surface roughened into a mat shape 13: Insulating layer 14: Wiring layer 15a, 15b: Terminal electrode 16: Insulating layer

Claims (1)

[Claims] A magnetic disk device suspension member integrally formed with a wiring member for connecting a magnetic head element and a read / write amplifier substrate, wherein the magnetic disk device suspension member has a base material. A suspension member for a magnetic disk drive, wherein the wiring member is formed by roughening the surface of a SUS thin plate used into a mat shape.