JP2000150454A - 基板回転乾燥装置 - Google Patents
基板回転乾燥装置Info
- Publication number
- JP2000150454A JP2000150454A JP10316520A JP31652098A JP2000150454A JP 2000150454 A JP2000150454 A JP 2000150454A JP 10316520 A JP10316520 A JP 10316520A JP 31652098 A JP31652098 A JP 31652098A JP 2000150454 A JP2000150454 A JP 2000150454A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- substrate holder
- rotating
- water droplets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 105
- 238000001035 drying Methods 0.000 title claims abstract description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 33
- 238000000034 method Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10316520A JP2000150454A (ja) | 1998-11-06 | 1998-11-06 | 基板回転乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10316520A JP2000150454A (ja) | 1998-11-06 | 1998-11-06 | 基板回転乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000150454A true JP2000150454A (ja) | 2000-05-30 |
| JP2000150454A5 JP2000150454A5 (enExample) | 2004-11-11 |
Family
ID=18078035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10316520A Pending JP2000150454A (ja) | 1998-11-06 | 1998-11-06 | 基板回転乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000150454A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102997639A (zh) * | 2011-09-08 | 2013-03-27 | 昊诚光电（太仓）有限公司 | 太阳能电池片甩干机的热氮气循环利用结构 |
-
1998
- 1998-11-06 JP JP10316520A patent/JP2000150454A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102997639A (zh) * | 2011-09-08 | 2013-03-27 | 昊诚光电（太仓）有限公司 | 太阳能电池片甩干机的热氮气循环利用结构 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060213 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060307 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060627 |