JP2000150454A5 - - Google Patents

Download PDF

Info

Publication number
JP2000150454A5
JP2000150454A5 JP1998316520A JP31652098A JP2000150454A5 JP 2000150454 A5 JP2000150454 A5 JP 2000150454A5 JP 1998316520 A JP1998316520 A JP 1998316520A JP 31652098 A JP31652098 A JP 31652098A JP 2000150454 A5 JP2000150454 A5 JP 2000150454A5
Authority
JP
Japan
Prior art keywords
chamber
substrate
substrate holder
rotating
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998316520A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000150454A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10316520A priority Critical patent/JP2000150454A/ja
Priority claimed from JP10316520A external-priority patent/JP2000150454A/ja
Publication of JP2000150454A publication Critical patent/JP2000150454A/ja
Publication of JP2000150454A5 publication Critical patent/JP2000150454A5/ja
Pending legal-status Critical Current

Links

JP10316520A 1998-11-06 1998-11-06 基板回転乾燥装置 Pending JP2000150454A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10316520A JP2000150454A (ja) 1998-11-06 1998-11-06 基板回転乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10316520A JP2000150454A (ja) 1998-11-06 1998-11-06 基板回転乾燥装置

Publications (2)

Publication Number Publication Date
JP2000150454A JP2000150454A (ja) 2000-05-30
JP2000150454A5 true JP2000150454A5 (enExample) 2004-11-11

Family

ID=18078035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10316520A Pending JP2000150454A (ja) 1998-11-06 1998-11-06 基板回転乾燥装置

Country Status (1)

Country Link
JP (1) JP2000150454A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102997639A (zh) * 2011-09-08 2013-03-27 昊诚光电（太仓）有限公司 太阳能电池片甩干机的热氮气循环利用结构

Similar Documents

Publication Publication Date Title
JP2004531879A5 (enExample)
TWI264042B (en) Dry-air supplying apparatus and processing apparatus
JPH11126373A5 (enExample)
EP0368435A3 (en) Dehumidified air generator employing adsorbent
GB1436133A (en) Drying method and apparatus
JP2000150454A5 (enExample)
JPH06201539A (ja) 遠心エバポレーター
CN206469589U (zh) 一种干燥均匀的射频真空干燥机
WO2001089710A3 (en) Apparatus and method for coating the exterior surface of a pipe
JPS5879503A (ja) 遠心型減圧濃縮装置
JPH07127631A (ja) 吸気幅可変型サクションローラ
JPS6456098A (en) Drum type dryer
JPS55159828A (en) Drying apparatus for oxygen
JP2002237482A (ja) 真空スピンドライヤー方法及び装置
JPS60154624A (ja) ウエ−ハ乾燥装置
JP2006255565A5 (enExample)
JPH06232038A (ja) 回転塗布装置
JPS54134602A (en) Record cleaner
JPH08285100A (ja) 圧縮空気給排用回転バルブ
JPH0417035Y2 (enExample)
JPS52101408A (en) Motor controller
JPH051664A (ja) 真空排気装置
SU1455050A1 (ru) Способ работы молекул рного насоса
JPS60198199A (ja) ロ−ルアイロナ−の速度プリセット装置
JPH10294290A5 (enExample)