JP2000147198A5 - - Google Patents

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Publication number
JP2000147198A5
JP2000147198A5 JP1999206837A JP20683799A JP2000147198A5 JP 2000147198 A5 JP2000147198 A5 JP 2000147198A5 JP 1999206837 A JP1999206837 A JP 1999206837A JP 20683799 A JP20683799 A JP 20683799A JP 2000147198 A5 JP2000147198 A5 JP 2000147198A5
Authority
JP
Japan
Prior art keywords
substance
layer
multilayer film
substance layer
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999206837A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000147198A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11206837A priority Critical patent/JP2000147198A/ja
Priority claimed from JP11206837A external-priority patent/JP2000147198A/ja
Priority to US09/391,376 priority patent/US6295164B1/en
Publication of JP2000147198A publication Critical patent/JP2000147198A/ja
Priority to US09/867,191 priority patent/US6441963B2/en
Publication of JP2000147198A5 publication Critical patent/JP2000147198A5/ja
Pending legal-status Critical Current

Links

JP11206837A 1998-09-08 1999-07-21 多層膜反射鏡及びその製造方法 Pending JP2000147198A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11206837A JP2000147198A (ja) 1998-09-08 1999-07-21 多層膜反射鏡及びその製造方法
US09/391,376 US6295164B1 (en) 1998-09-08 1999-09-08 Multi-layered mirror
US09/867,191 US6441963B2 (en) 1998-09-08 2001-05-30 Multi-layered mirror

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-253484 1998-09-08
JP25348498 1998-09-08
JP11206837A JP2000147198A (ja) 1998-09-08 1999-07-21 多層膜反射鏡及びその製造方法

Publications (2)

Publication Number Publication Date
JP2000147198A JP2000147198A (ja) 2000-05-26
JP2000147198A5 true JP2000147198A5 (enExample) 2006-06-15

Family

ID=26515911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11206837A Pending JP2000147198A (ja) 1998-09-08 1999-07-21 多層膜反射鏡及びその製造方法

Country Status (1)

Country Link
JP (1) JP2000147198A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7843632B2 (en) * 2006-08-16 2010-11-30 Cymer, Inc. EUV optics
US7130098B2 (en) * 2002-01-24 2006-10-31 Rosemount Aerospace Inc. Silicon wafer based macroscopic mirror for wide angle scanning applications
US20080266654A1 (en) * 2007-04-26 2008-10-30 Asml Netherlands B.V. Extreme ultraviolet microscope
JP5538840B2 (ja) * 2009-11-30 2014-07-02 キヤノン株式会社 Ｘ線モノクロメータ、その製造方法及びｘ線分光装置
US8526104B2 (en) * 2010-04-30 2013-09-03 Corning Incorporated Plasma ion assisted deposition of Mo/Si multilayer EUV coatings
JP7703214B2 (ja) * 2021-08-23 2025-07-07 東海光学株式会社 青色レーザー光用ミラーの製造方法

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